用不同的Mo靶溅射功率制备Mo/Si多层膜

 用磁控溅射法制备了周期厚度和周期数均相同的Mo/Si多层膜，用原子力显微镜和小角X射线衍射分别研究了Mo靶溅射功率不相同时，Mo/Si多层膜表面形貌和晶相的变化。随后在国家同步辐射实验室测量了Mo/Si多层膜的软X射线反射率。研究发现，随着Mo靶溅射功率的增大，Mo/Si多层膜的表面粗糙度增加，Mo的特征X射线衍射峰也增强，Mo/Si多层膜的软X射线峰值反射率先增大后减小。     

一种软X射线多层膜界面粗糙度的计算方法

提出一个利用多层膜小角X射线衍射谱衍射峰积分强度计算多层膜界面粗糙度的公式。用磁控溅射技术制备Mo／Si多层膜，用波长为0．154nm的硬X射线测量样品在小掠入射角区的衍射曲线，分别用本文公式和反射率曲线拟合方法计算了样品的界面粗糙度。实验结果表明：由本文公式获得的界面粗糙度近似于拟合方法获得的界面粗糙度，它们略等于多层膜界面实际粗糙度。     

制备长波段X射线多层膜的新方法

叙述用离子束溅射镀膜机OXFORD进行X射线长波段多层膜实验及制备X射线多层膜光学元件方面的工作。简述离子束油射镀膜机的工作原理,X射线多层膜的制备过程,主要工艺参数,以及用X射线小角衍射仪对制备样品周期结构的检测和用软X射线反射率计测反射率的部分结果。     

Mo/Si软X射线多层膜的界面粗糙度研究

 用磁控溅射法分别制备了以Mo膜层和Si膜层为顶层的Mo/Si多层膜系列, 利用小角X射线衍射确定了各多层膜的周期厚度。以不同周期数的Mo/Si多层膜的新鲜表面近似等同于同一多层膜的内界面，通过原子力显微镜研究了多层膜界面粗糙度随膜层数的变化规律。并在国家同步辐射实验室测量了各多层膜的软X射线反射率。研究表明：随着膜层数的增加，Mo膜层和Si膜层的界面粗糙度先减小后增加然后再减小，多层膜的峰值反射率先增加后减小。     

8.0 nm反射式偏振膜的设计和制备

讨论了软X射线反射式偏振膜的设计原理和方法,利用设计软件模拟设计了8.0 nm处的Mo/B4C偏振膜.对影响多层膜性能的参量进行了详细的误差分析.利用磁控溅射镀膜机进行了偏振膜的制备研究,X射线小角衍射测量了多层膜的周期厚度,测量数据的拟合结果与设计值吻合很好.     

4.48 nm正入射软X射线激光用Cr/C多层膜高反射镜的研制

针对4.48nm类镍钽软X射线激光及其应用实验,设计制备了工作于这一波长的近正入射多层膜高反射镜。选择Cr/C为制备4.48nm高反射多层膜的材料对,通过优化设计,确定了多层膜的周期、周期数以及两种材料的厚度比。模拟了多层膜非理想界面对高反射多层膜性能的影响。采用直流磁控溅射方法在超光滑硅基片上实现了200周期Cr/C多层膜高反射镜的制备。利用X射线衍射仪测量了多层膜结构,在德国BessyⅡ同步辐射上测量了在工作波长处多层膜反射率,测量的峰值反射率达7.5%。对衍射仪测量的掠入射反射曲线和同步辐射测量的反射率曲线分别进行拟合,得到的粗糙度和厚度比的结果相近。测试结果表明,所制备的Cr/C多层膜样品结构良好,在指定工作波长处有较高的反射峰,达到了设计要求。     

软X射线多层膜与衰减膜研究

 本文采用随机数的方法，发展了一种普适的多层膜设计方法，这种方法除可设计一般的周期多层膜，更重要的是它可以根据选定的评价因子，设计不同要求的非周期多层膜。用磁控溅射方法完成软X射线多层膜制备，X射线衍射、卢瑟福背散射、俄歇电子谱和反射率的相对测试用来表征多层膜结构和特性，所得结果说明多层膜的结构完整，周期参数正确。用离子束溅射方法成功地制备了有一定反射率和透过率的软X射线半反半透分束镜；分析了Ag和Zr衰减膜中的杂质含量与分布及其对衰减膜特性的影响，并对衰减系数进行了修正，为实验提供优质的衰减膜。     

极紫外与软X射线用非晶碳膜全反射镜的研究

用高真空磁控溅射设备分别在工作气压为0.40Pa和0.67Pa下制备了非晶碳膜全反射镜样品,利用X射线掠入射反射测量了膜层厚度、粗糙度和膜层密度,用原子力显微镜测量了样品的表面粗糙度,用同步辐射测量了不同工作气压下制备的非晶碳膜全反射镜的反射率,并对测量结果进行了分析讨论.测试结果表明:在0.40Pa工作气压下制备的非晶碳膜反射镜的性能优于在0.67Pa工作气压下制备的反射镜的性能,在掠入射角小于4.5°时,非晶碳膜全反射镜在5nm以上波段有比较平坦的高反射率,在波长小于5nm波段,反射率急剧下降.     

软X射线多层膜光栅的衍射特性

用X射线运动学理论对软X射线多层膜光栅的衍射特性进行了研究。发现其衍射规律与多层膜的布拉格衍射和普通光栅衍射有本质的区别,可将衍射能量集中于某一衍射级上,同时它又保持了多层膜的高反射率和光栅的高分辨本领等优良特性。     

入射光单色性与界面粗糙度对多层膜反射性能的不同影响

多层膜界面粗糙度、入射光单色性对软X射线多层膜实际反射率均有影响。利用数学卷积积分,理论上推导出一个在入射光不同单色性下精确计算多层膜反射率的公式。利用给出的理论计算公式,简要分析了入射光不同单色性、不同界面粗糙度对Mo/Si多层膜反射率的影响。理论分析发现这两种因素对Mo/Si多层膜反射率影响完全不同:入射光低的单色性不但极大降低Mo/Si多层膜峰值反射率,而且使反射曲线的半峰全宽增加;而界面粗糙度是降低Mo/Si多层膜反射曲线上各点对应值,基本不改变Mo/Si反射曲线的半峰全宽,不改变反射曲线的形状。说明这两个因素在软X射线的长波段对多层膜反射性能的影响不同。     

金属单层膜的小角X射线衍射强度的研究

本文对金属单层膜进行研究,在多种样品中没有发现X射线衍射峰.我们在基底上预先淀积一层重金属膜,然后再淀积所需样品,发现样品有较好的衍射峰产生.我们对此进行了探讨并提出了一个可能的理论定量解释.     

PtMn/Co多层薄膜结构及磁光克尔效应的研究

用磁控溅射法制备了不同Mn含量的PtMn/Co多层膜,通过大,小角X射线衍射谱对该多层膜进行结构分析,研究了该多层膜的层状结构同磁光克尔效应的关系,通过测定该多层膜在不同杂质浓度下的克尔谱,椭偏率谱及克尔回线,发现克尔角随Mn含量增加的变化规律,并分析了它的产生机制。     

石棉红花岗石与芝麻白花岗石的光谱的研究

本文用电感耦合等离子体原子发射光谱法，Ｘ射线荧光光谱法、红外光谱以及Ｘ射线衍射谱测定了石棉红花岗石和芝麻白花岗石的成分和光谱、根据石棉红岗石和芝麻白花岗石的Ｘ射线衍射谱，用计算机检索它们的组成，对计算机检索的结果进行对比得出，石棉红花岗石的红色是由于它含有Ｆｅ的红色矿物而产生的。     

XDS: a flexible beamline for X‐ray diffraction and spectroscopy at the Brazilian synchrotron

The majority of the beamlines at the Brazilian Synchrotron Light Source Laboratory (LNLS) use radiation produced in the storage‐ring bending magnets and are therefore currently limited in the flux that can be used in the harder part of the X‐ray spectrum (above ～10 keV). A 4 T superconducting multipolar wiggler (SCW) was recently installed at LNLS in order to improve the photon flux above 10 keV and fulfill the demands set by the materials science community. A new multi‐purpose beamline was then installed at the LNLS using the SCW as a photon source. The XDS is a flexible beamline operating in the energy range between 5 and 30 keV, designed to perform experiments using absorption, diffraction and scattering techniques. Most of the work performed at the XDS beamline concentrates on X‐ray absorption spectroscopy at energies above 18 keV and high‐resolution diffraction experiments. More recently, new setups and photon‐hungry experiments such as total X‐ray scattering, X‐ray diffraction under high pressures, resonant X‐ray emission spectroscopy, among others, have started to become routine at XDS. Here, the XDS beamline characteristics, performance and a few new experimental possibilities are described.     

HL—1M装置器壁硅化对电子速率分布的影响

在欧姆加热和低混杂波电流驱动条件下,利用磺化汞半导体探测器和碘化钠和探测器测出了ＨＬ－１Ｍ装置的Ｘ射线能谱,研究了器壁硅化前后电子速率分布和电子温度变化的特点,给出了Ｘ射线辐射强度与ＬＨＣＤ能量沉积的关系。     

Evaluation of enamel crystallites in subsurface lesion by microbeam X‐ray diffraction

Early caries lesion is a demineralization process that takes place in the top 0.1 mm layer of tooth enamel. In this study, X‐ray microbeam diffraction was used to evaluate the hydroxyapatite crystallites in the subsurface lesion of a bovine enamel section and the results are compared with those obtained by transversal microradiography, a method commonly used for evaluation of tooth mineral. Synchrotron radiation from SPring‐8 was used to obtain a microbeam with a diameter of 6 µm. Wide‐angle X‐ray diffraction reports the amount of hydroxyapatite crystals, and small‐angle X‐ray scattering reports that of voids in crystallites. All three methods showed a marked decrease in the enamel density in the subsurface region after demineralization. As these diffraction methods provide structural information in the nanometre range, they are useful for investigating the mechanism of the mineral loss in early caries lesion at a nanometre level.     

The small‐angle and wide‐angle X‐ray scattering set‐up at beamline BL9 of DELTA

The multi‐purpose experimental endstation of beamline BL9 at the Dortmund Electron Accelerator (DELTA) is dedicated to diffraction experiments in grazing‐incidence geometry, reflectivity and powder diffraction measurements. Moreover, fluorescence analysis and inelastic X‐ray scattering experiments can be performed. Recently, a new set‐up for small‐angle and wide‐angle X‐ray scattering utilizing detection by means of an image‐plate scanner was installed and is described in detail here. First small‐angle X‐ray scattering experiments on aqueous solutions of lysozyme with different cosolvents and of staphylococcal nuclease are discussed. The application of the set‐up for texture analysis is emphasized and a study of the crystallographic texture of natural bio‐nanocomposites, using lobster and crab cuticles as model materials, is presented.     

X‐ray focusing by the system of refractive lens(es) placed inside asymmetric channel‐cut crystals

An X‐ray one‐dimensionally focusing system, a refracting–diffracting lens (RDL), composed of Bragg double‐asymmetric‐reflecting two‐crystal plane parallel plates and a double‐concave cylindrical parabolic lens placed in the gap between the plates is described. It is shown that the focal length of the RDL is equal to the focal distance of the separate lens multiplied by the square of the asymmetry factor. One can obtain RDLs with different focal lengths for certain applications. Using the point‐source function of dynamic diffraction, as well as the Green function in a vacuum with parabolic approximation, an expression for the double‐diffracted beam amplitude for an arbitrary incident wave is presented. Focusing of the plane incident wave and imaging of a point source are studied. The cases of non‐absorptive and absorptive lenses are discussed. The intensity distribution in the focusing plane and on the focusing line, and its dependence on wavelength, deviation from the Bragg angle and magnification is studied. Geometrical optical considerations are also given. RDLs can be applied to focus radiation from both laboratory and synchrotron X‐ray sources, for X‐ray imaging of objects, and for obtaining high‐intensity beams. RDLs can also be applied in X‐ray astronomy.     

低强度X射线影像仪的新发展

扼要介绍国内外Ｌｉｘｉｓｃｏｐｅ的概况。提出在国产系统中在Ｘ射线源前加置Ｘ射线准直器,Ｘ射线影像增强采用纤维光学输出窗和小孔径大面积微反,可以必普像质、扩大视场。