| 软X射线多层膜光栅的衍射特性 |
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| 引用本文： | 崔宏滨,刘文汉.软X射线多层膜光栅的衍射特性[J].光学学报,2001,21(8):004-1007. |
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| 作者姓名： | 崔宏滨 刘文汉 |
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| 作者单位： | 中国科学技术大学结构分析开放实验室物理系, |
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| 基金项目： | 国家自然科学基金 (195 740 44 )资助课题，中日科技合作项目j982 1 |
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| 摘 要： | 用X射线运动学理论对软X射线多层膜光栅的衍射特性进行了研究。发现其衍射规律与多层膜的布拉格衍射和普通光栅衍射有本质的区别，可将衍射能量集中于某一衍射级上，同时它又保持了多层膜的高反射率和光栅的高分辨本领等优良特性。
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| 关 键 词： | 多层膜 多层膜光栅 软X射线 衍射特性 |
Diffraction Properties of Multilayer-Gratings in Soft X-Ray Region |
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| Cui Hongbin,Liu Wenhan.Diffraction Properties of Multilayer-Gratings in Soft X-Ray Region[J].Acta Optica Sinica,2001,21(8):004-1007. |
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| Authors: | Cui Hongbin Liu Wenhan |
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| Abstract: | The main diffraction properties of a soft X ray optical component--multilayer gratings are deduced and discussed in detail on the basis of X ray kinematics. Results show that main energy of diffraction light can be concentrated in one order and resolving power and reflection of multilayer grating are higher. There is essential difference between the dispersive properties of multilayer gratings and multilayers. |
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| Keywords: | multilayer multilayer-grating soft X-ray |
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