磁控溅射制备的W,WSi2,Si单层膜和W/Si,WSi2/Si多层膜应力

采用直流磁控溅射技术制备了厚度约100 nm的W,WSi2,Si单层膜和周期约为20 nm,Si膜层厚度与周期的比值为0.5的W/Si,WSi2/Si周期多层膜.利用台阶仪对镀膜前后基底表面的面形进行了测试,计算并比较了不同膜系的应力值.结果表明:W单层膜表现出较大的压应力,而W/Si周期膜则表现为张应力.WSi2单层...     

多层膜劳厄透镜对8keV X射线的聚焦性能模拟研究

基于多层膜技术的劳厄(Laue)透镜能实现硬X射线纳米级聚焦,在X射线微纳分析领域具有重要的应用前景.基于衍射动力学理论,分析了X射线在多层膜劳厄透镜中的传播,计算了不同结构的多层膜劳厄透镜对8 keVX射线的聚焦性能.结果表明,最外层厚度为5 nm的倾斜多层膜劳厄透镜可获得5.7 nm的聚焦光斑和26%的平均衍射效率...     

Multilayers with high-reflectivity at 19.5 nm and low-reflectivity at 30.4 nm

The multilayer （ML） mirror with high-reflectivity （HR） at a specific emission line of 19.5 nm （Fe line） and low-reflectivity （LR） at 30.4 nm （He line） is needed to be designed and fabricated for observing the image of sun. Based on a variety of optimizations utilized different structures, the design is performed and the final results demonstrate that the reflectivity at 30.4 nm does not achieve minimum value when the reflectivity at 19.5 nm reaches the maximum value. The tradeoff should be done between the HR at 19.5 nm and LR at 30.4 nm. One optimized mirror is fabricated by direct current magnetron sputtering and characterized by grazing-incident X-ray diffraction （XRD） and synchrotron radiation （SR）. The experimental results demonstrate that the ML achieves the reflectivity of 33.3% at 19.5 nm and of 9.6× 10-4 at 30.4 nm at the incident angle of 13°.     

Novel stability and stabilization criteria for Takagiben Sugeno fuzzy time-delay systems

We study the problems of stability and stabilization for Takagi-Sugeno (T-S) fuzzy time-delay systems. First, by constructing a less-redundant Lyapunov-Krasovskii function and introducing a useful inequality, an innovative stability criterion is obtained, which gives a significant improvement on the performance. Compared with the exiting references, our result can use fewer unknown variables and get better results. Furthermore, based on the derived stability criteria, a new stabilization condition is developed, in which the controller gain and the maximum allowable delay bound can be obtained simultaneously. The conditions are all derived in the form of linear matrix inequality, which are easy to verify. Finally, numerical examples are given to show the effectiveness of the proposed methods.     

Novel stability and stabilization criteria for Takagi-Sugeno fuzzy time-delay systems

We study the problems of stability and stabilization for Takagi-Sugeno(T-S) fuzzy time-delay systems.First,by constructing a less-redundant Lyapunov-Krasovskii function and introducing a useful inequality,an innovative stability criterion is obtained,which gives a significant improvement on the performance.Compared with the exiting references,our result can use fewer unknown variables and get better results.Furthermore,based on the derived stability criteria,a new stabilization condition is developed,in which the controller gain and the maximum allowable delay bound can be obtained simultaneously.The conditions are all derived in the form of linear matrix inequality,which are easy to verify.Finally,numerical examples are given to show the effectiveness of the proposed methods.     

基于光子晶体带隙特性的反射式多通道滤光片设计

反射式多通道滤光片在光学通讯、光学成像、遥感高光谱等方面有着重要的应用。利用含缺陷一维光子晶体独特的带隙特性,依据其相应的能带理论,设计了一种由金属和介质组成的反射式多通道滤光片。这种滤光片通道的工作范围由光子带隙理论计算得到,通道个数由"光子晶体"缺陷的周期数决定,通道的位置利用等效相位厚度的方法确立。相对于传统的以经验为主的反射式多通道滤光片设计方法,这种基于光子晶体的带隙理论的设计能够从"光子"的角度给出此类反射式滤光元件的设计思路和理论解释。     

旋转入射面法的进一步研究与推广

光学薄膜的反射率和透射率是其主要光学特性。透射率易于测量且精度较高,常用于光学薄膜光学常数和膜厚的拟合。许多光学薄膜工作在倾斜入射条件下,常需要测量其倾斜入射透射率(Ts和Tp)。在测量过程中,需要使用起偏器产生高偏振度的线偏振光。对于小型分光光度计来说,为其提供一个满足要求的起偏器,无疑将增加相当的成本。为解决这一问题,对旋转入射面法进行了进一步的研究和推广。考虑到旋转入射面法可使用具有一定偏振度的部分偏振光进行倾斜入射透射率的测量,且分光光度计的输出光束通常为具有一定偏振度的部分偏振光,旋转入射面法在满足一定条件的前提下可以不使用起偏器测量光学薄膜的倾斜入射透射率。研究表明:当偏振因子绝对值大于0.167时,旋转起偏器可以精确测量光学薄膜的倾斜入射透射率,且偏振因子绝对值越大测量精度越高。该方法所测平均透射率在整个测量波段内都具有很高的精度;而Ts和Tp在透射率对入射角较不敏感或随波长变化较平坦的波段具有较高的测量精度。     

一种抑制二倍频半波孔现象的短波通设计方法

短波通滤色片是光学系统,尤其是激光系统中普遍使用的一种薄膜,它的基本结构为(0.5LH0.5L)N。但薄膜的非均质性会产生半波孔现象,从而影响滤色片的光学特性。利用导纳技术分析了折射率非均质性产生半波孔现象的原因:非均质性使常规膜系基本周期内导纳轨迹的终点偏离起点;这种偏离越大,半波孔现象就越严重。优化了常规膜系的基本周期结构,通过在高低折射率膜层之间引入导纳匹配层,使得改良后的基本周期导纳轨迹的终点与起点偏差大大减小,提高了半波处的透射率,从而提出了一种可以抑制由非均质性引起的半波孔现象的短波通设计方法,并依据实际制备工艺进行了误差分析。最终成功制备出了具有超宽透射带的短波通滤色片,实验和理论曲线具有很好的一致性。     

Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2 /Si multilayer Laue lens

The multilayer Laue lens (MLL) is a novel diffraction optics which can realize nanometer focusing of hard X-rays with high efficiency. In this paper, a 7.9 μm-thick MLL with the outmost layer thickness of 15 nm is designed based on dynamical diffraction theory. The MLL is fabricated by first depositing the depth-graded multilayer using direct current (DC) magnetron sputtering technology. Then, the multilayer sample is sliced, and both cross-sections are thinned and polished to a depth of 35-41 μm. The focusing property of the MLL is measured at the Shanghai Synchrotron Facility (SSRF). One-dimensional (1D) focusing resolutions of 205 nm and 221 nm are obtained at E=14 keV and 18 keV, respectively. It demonstrates that the fabricated MLL can focus hard X-rays into nanometer scale.     

X射线天文望远镜的进展

综述了近年来X射线天文望远镜(如准直型望远镜、编码孔径望远镜、正入射周期多层膜望远镜、掠入射单层膜望远镜和掠入射非周期多层膜望远镜以及新型的“龙虾眼”型望远镜)的发展；阐述了各种X射线天文望远镜工作的原理和成像特点，指出各种X射线天文望远镜之间的性能是相互补充的；简要说明了国内近年来在X射线天文望远镜研究方面取得的进展，并展望了下一步工作．