具有InAlAs浸润层的InGaAs量子点的制备和特性研究

采用自组装方法生长了一种新型的InGaAs量子点/InAlAs浸润层结构.通过选取合适的In组分 ，使InAlAs浸润层的能级与GaAs势垒相当，从而使浸润层的量子阱特征消失.通过低温光致 发光（PL）谱的测试分析得到InGaAs量子点/InAlAs浸润层在样品中的确切位置.变温PL谱的 研究显示，具有这种结构的量子点发光峰的半高全宽随温度上升出现展宽，这明显区别于普 通InGaAs量子点半高全宽变窄的行为.这是因为采用了InAlAs浸润层后，不仅增强了对InGaA s量子点的限制作用，同时切断了载流子的 关键词： InGaAs量子点 InAlAs浸润层 PL谱     

不同组分InxGa1-xAs(0≤x≤0.3)覆盖层对自组织InAs量子点的影响

研究了不同In组分的In_xGa_1-xAs(0≤x≤0.3)覆盖层对自组织InAs量子点的结构及发光特性的影响.透射电子显微镜和原子力显微镜表明,InAs量子点在InGaAs做盖层时所受应力较GaAs盖层时有所减小,并且x＝0.3时,InGaAs在InAs量子点上继续成岛.随x值的增大,量子点的光荧光峰红移,但随温度的变化发光峰峰位变化不明显.理论分析表明InAs量子点所受应力及其均匀性的变化分别是导致上述现象的主要原因. 关键词： 量子点 盖层 应力 红移     

带有InGaAs覆盖层的InAs量子点红外探测器材料的发光与光电响应

利用分子束外延技术(MBE),在GaAs(001)衬底上自组织生长了不同结构的InAs量子点样品,并制备了量子点红外探测器件。利用原子力显微镜(AFM)和光致发光(PL)光谱研究了量子点的表面结构、形貌和光学性质。渐变InGaAs层的插入有效地释放了InAs量子点所受的应力,抑制了量子点中In组分的偏析,提高了外延层的生长质量,降低了势垒高度,使InAs量子点荧光波长红移。伏安特性曲线和光电流(PC)谱结果表明,生长条件的优化提高了器件的红外响应,具有组分渐变的InGaAs层的探测器响应波长发生明显红移。     

不同组分InxGa1-xAs(0≤x≤0.3)覆盖层对自组织InAs量子点的影响

研究了不同In组分的InxGa1-xAs(0≤x≤0.3)覆盖层对自组织InAs量子点的结构及发光特性的影响.透射电子显微镜和原子力显微镜表明,InAs量子点在InGaAs做盖层时所受应力较GaAs盖层时有所减小,并且x＝0.3时,InGaAs在InAs量子点上继续成岛.随x值的增大,量子点的光荧光峰红移,但随温度的变化发光峰峰位变化不明显.理论分析表明InAs量子点所受应力及其均匀性的变化分别是导致上述现象的主要原因.     

量子阱渐变层材料及结构对GaN基LED性能的影响

In组分渐变InGaN/GaN量子阱结构可以有效解决晶格失配所带来的LED发光效率降低的问题。采用Silvaco软件建立了In组分渐变量子阱结构数值计算模型,研究了量子阱中渐变层In组分及渐变层厚度对极化电荷密度、载流子浓度及LED功率谱密度的影响。研究结果表明：随着渐变层中In组分的增加,载流子浓度以及极化电荷密度都在增大,但极化电荷密度增幅较小,峰值功率谱密度随着In组分增加的增长幅度逐渐减小;功率谱密度随着渐变层顶层厚度的增加先增大后减小,渐变层非顶层厚度不均匀时的功率谱密度比均匀时的功率谱密度小。     

退火及铟含量对InGaAs量子点光学特性的影响

 研究了退火条件和In组份对分子束外延生长的InGaAs量子点（分别 以GaAs或AlG aAs为基体）光学特性的影响。表明：量子点中In含量的增加将导致载流子的定域能增加和基态与激发态之间的能量间隔增大。采用垂直耦合的量子点及宽能带的AlGaAs基体可增 强材料的热稳定性。以AlGaAs为基体的InGaAs量子点,高温后退火工艺 (T= 830℃)可改善低温生长的AlGaAs层的质量,从而改善量子点激光器材料的质量。     

利用InAs/GaAs数字合金超晶格改进InAs量子点有源区的结构设计

利用分子束外延技术,通过InAs/GaAs数字合金超晶格代替传统的直接生长InGaAs层的方式,在GaAs(100)衬底上生长了InAs量子点结构并成功制备了1.3μm InAs量子点激光器.通过原子力显微镜和光致荧光谱测试手段,对传统生长模式和数字合金超晶格生长模式的两种样品进行了表征,研究发现采用32周期InAs/GaAs数字合金超晶格样品的量子点密度非常高,发光性能良好.通过与常规生长方式所制备激光器的性能对比,发现采用InAs/GaAs数字合金超晶格生长InAs量子点的有源区也可以得到高质量的激光器.利用该方式生长的InAs量子点激光器的阈值电流为24 mA,相应的阈值电流密度仅为75 A/cm2,最高工作温度达到120℃.InAs/GaAs数字合金超晶格既可以保证生长过程中源炉的温度保持不变,还可以对InGaAs层的组分实现灵活调控.不需要改变生长速度,通过改变InAs/GaAs数字合金超晶格的周期数以及InAs层和GaAs层的厚度,便可以获得任意组分的InGaAs,从而得到不同发光波长的激光器.这种生长方式对量子点有源区的结构设计和外延生长提供了新思路.     

941nm2%占空比大功率半导体激光器线阵列

计算了半导体激光器的激射波长与量子阱宽度以及有源层中In组分的关系,确定了941nm波长的量子阱宽度和In组分.并利用金属有机化合物气相淀积(MOCVD)技术生长了InGaAs/GaAs/AlGaAs分别限制应变单量子阱激光器材料.利用该材料制成半导体激光器线阵列的峰值波长为940.5 nm,光谱的FWHM为2.6 nm,在400 μs,50 Hz的输入电流下,输出峰值功率达到114.7 W(165 A),斜率效率高达0.81 W/A,阈值电流密度为103.7 A/cm2;串联电阻5 mΩ,最高转换效率可达36.9%.     

InGaAs/GaAsP应变补偿多量子阱MOCVD生长

利用金属有机化学气相沉积技术在GaAs衬底上开展了大失配InGaAs多量子阱的外延生长研究。针对InGaAs与GaAs之间较大晶格失配的问题,设计了GaAsP应变补偿层结构;通过理论模拟与实验相结合的方式,调控了GaAsP材料体系中的P组分,设计了P组分分别为0,0.128,0.184,0.257的三周期In_xGa_(1-x)As/GaAs_(1-y)P_y多量子阱结构;通过PL、XRD、AFM测试对比发现,高势垒GaAsP材料的张应变补偿可以改善晶体质量。综合比较,在P组分为0.184时,PL波长1 043.6 nm,半峰宽29.9 nm, XRD有多级卫星峰且半峰宽较小,AFM粗糙度为0.130 nm,表面形貌显示为台阶流生长模式。     

高功率1060 nm垂直腔面发射激光器

为了提高1060 nm垂直腔面发射激光器（VCSEL）的性能,本文对大功率1060 nm VCSEL进行了理论模拟和实验研究。计算得到红移速度为0.40 nm/K,据此确定增益和腔模失配量为-20 nm。对比分析了6种不同InGaAs组分和厚度的量子阱,以及3种不同势垒材料的增益特性和输出特性,模拟结果表明,应变补偿的InGaAs/GaAsP量子阱有源区在温度稳定性、阈值电流以及功率方面更有优势。对P型分布式布拉格反射镜（DBR）进行优化设计,优化DBR渐变层厚度和对数,有助于获得更好的输出特性。采用金属有机化学气相沉积生长了InGaAs/GaAsP应变补偿量子阱结构的VCSEL外延片,并制备了单管和阵列VCSEL,实验数据和理论分析基本吻合。实验测得,288单元VCSEL阵列在4.5 A电流下,连续输出功率为2.62 W,最高电光转换效率为36.8%,5 mm×5 mm VCSEL阵列准连续条件下（脉宽为100μs,占空比为1%）,且在100 A电流下,获得峰值功率为53.4 W。     

双层堆垛长波长InAs/GaAs量子点发光性质研究

研究了双层堆垛InAs/GaAs/InAs自组织量子点的生长和光致发光(PL)的物理性质。通过优化InAs淀积量、中间GaAs层厚度以及InAs量子点生长温度等生长条件,获得了室温光致发光1391～1438nm的高质量InAs量子点。研究发现对量子点GaAs间隔层实施原位退火、采用Sb辅助生长InGaAs盖层等方法可以增强高密度(2×1010 cm-2)InAs量子点的发光强度,减小光谱线宽,改善均匀性和红移发光波长。     

GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride

A low-temperature passivation method for GaAs surfaces is investigated. Ultrathin AlN layers are deposited by plasma-enhanced atomic-layer-deposition at 200 ° C on top of near-surface InGaAs/GaAs quantum well structures. A significant passivation effect is seen as shown by up to 30 times higher photoluminescence intensity and up to seven times longer lifetime compared to uncoated reference samples. The improved optical properties are accompanied by a redshift of the quantum well photoluminescence peak likely caused by a combination of the nitridation of the GaAs capping layer and a surface coupling effect.     

Enhancement of photoluminescence of the CdSe/CdS quantum dots on quartz substrates in the presence of silver nanoparticles

Multilayer systems consisting of layers of hybrid quantum dots are fabricated. The quantum dots with the CdSe/CdS core/shell structure are chemically synthesized and deposited on the surface of quartz glass that contains ion-synthesized silver nanoparticles in the near-surface region. Silver nanoparticles exhibit optical absorption owing to the localized surface plasmon resonance. Variations in the photoluminescence intensity of the layer related to an increase in the distance from the quartz surface with metal nanoparticles are studied. An increase in the photoluminescence intensity is observed under excitation in the spectral region of the plasmon absorption of silver nanoparticles. An optimal distance between the layers is determined to maximize the enhancement of the photoluminescence of quantum dots in the presence of the near field of metal nanoparticles.     

干法刻蚀影响应变量子阱发光的机理研究

采用感应耦合等离子体刻蚀技术对InAsP/InP应变多量子阱和InAsP/InGaAsP应变单量子阱材料的覆盖层进行了不同厚度的干法刻蚀. 实验结果表明，干法刻蚀后量子阱光致荧光强度得到了不同程度的增强. 干法刻蚀过程不仅增加了材料表面粗糙度，同时使其内部微结构发生变化. 采用湿法腐蚀方法去除表面变粗糙对量子阱发光特性的影响，得到干法刻蚀覆盖层20 nm后应变单量子阱微结构变化和其表面粗糙度变化两个因素分别使荧光强度提高1.8倍和1.2倍的结果. 关键词： 干法刻蚀 应变多量子阱 光致发光谱 损伤     

AlGaAs capping effect on InAs quantum dots self-assembled on GaAs

The effects of AlGaAs capping on InAs quantum dots self-assembled on GaAs are investigated. It is observed that, the photoluminescence intensity becomes stronger up to twice when Al is incorporated into the cap layer. In the mean time, the full width at half maximum of the photoluminescence spectrum becomes narrower, the peak splitting between the ground and first excited exciton levels becomes wider, and the photoluminescence peak wavelength becomes longer. With considerations of the increased barrier height and the changed microstructures of the quantum dots induced by AlGaAs capping, the mechanisms of the observed improvements are discussed.     

Photoluminescence of InAs quantum dots embedded in graded InGaAs barriers

The effects of the top barrier and the dot density on photoluminescence (PL) of the InAs quantum dots (QDs) sandwiched by the graded In_xGa_1−xAs barriers grown by metal-organic vapor phase epitaxy (MOVPE) have been studied. Two emission peaks corresponding to the ground state and the 1st excited state transitions of the QD structures have been observed, which matches well to the theoretical calculation. The PL emission linewidth and intensity of the InAs QDs structure are improved by reducing the Indium/Gallium composition variation of the graded In_xGa_1−xAs top barrier layer of the structure. The QDs’ ground states filling excitation power depends on the crystal quality of the InGaAs barrier layer and the QD density. The extracted thermal activation energy for the QDs’ PL emission is sensitive to the QD size.     

Carrier tunneling in asymmetric coupled quantum dots

Exciton spin relaxation at low temperatures in InAlAs–InGaAs asymmetric double quantum dots embedded in AlGaAs layers has been investigated as a function of the barrier thickness by the time-resolved photoluminescence measurements. With decreasing the thickness of the AlGaAs layer between the dots, the spin relaxation time change from 3 ns to less than 500 ps. The reduction in the spin relaxation time was considered to originate from the spin-flip tunneling between the ground state in InAlAs dot and the excited states in InGaAs dot, and the resultant tunneling leads to the spin depolarization of the ground state in InGaAs dot.     

Stepwise dependence of the photoconductivity of Si/Ge structures with quantum dots on the interband illumination intensity

It was found that a stepwise increase in the interband light intensity causes an increase in the low-temperature lateral photoconductivity of a Si/Ge structure containing six layers of germanium quantum dots in a silicon host. As was previously observed in structures with a single layer of quantum dots, strengthening of the driving field results in the step positions shifting to lower light intensities. This effect was also found to take place under a dark driving field. The results are discussed in terms of the percolation theory of nonequilibrium electrons localized in the states between quantum dots.     

Abnormal temperature dependence of photoluminescence from self-assembled InAs quantum dots covered by an InAlAs/InGaAs combination layer

In this report we have investigated the temperature dependence of photoluminescence (PL) from self-assembled InAs quantum dots (QDs) covered by an InAlAs/InGaAs combination layer. The ground state experiences an abnormal variation of PL linewidth from 15 K up to room temperature. Meanwhile, the PL integrated intensity ratio of the first excited state to the ground state for InAs QDs unexpectedly decreases with increasing temperature, which we attribute to the phonon bottleneck effect. We believe that these experimental results are closely related to the partially coupled quantum dots system and the large energy separation between the ground and the first excited states.