A Two-Photon Femtosecond Laser System for Three-Dimensional Microfabrication and Data Storage

Utilizing the well-focused femtosecond laser with extreme high pulse intensity, we built a two-photon micro-fabrication and data storage system, which was introduced through several functional parts. Based on this homemade system, several three-dimensional microstructures were fabricated by two-photon polymerization, and three-dimensional data storage of six-layers was achieved by two-photon excitation with a photochromic material.     

Effect of GaAs/GaSb Combination Strain-Reducing Layer on Self-Assembled InAs Quantum Dots

Self-assembled quantum dots capping with a GaAs/Gasb combined strain-reduced layer （CSRL） are grown by MBE. Their structural and optical properties are investigated by AFM and photoluminescence （PL）. PL measurements have shown that stronger emission about 1.3μm can be obtained by Sb irradiation and capping QDs with 3 ML GaAs/2 ML GaSh CSRL at room temperature. The full width at half maximum （FWHM） of the PL spectrum is about 20.2 meV （19.9 meV） at room temperature （2OK）, indicating that the QDs have high uniform, The result of FWHM is much better than the recently reported result, which is due to the fact that lower QD growth rate and growth interruption after the QDs deposition are adopted in our experiments.     

As保护下的生长中断时间对AlSb/InAs超晶格界面粗糙度的影响

用分子束外延设备(MBE)在GaAs(100)衬底上生长了InSb型界面的AlSb/InAs超晶格，界面生长过程中采用了As保护下不同的中断时间.运用掠入射X射线反射技术(GIXRR)对样品进行了测量，并对测量结果进行了模拟和分析，发现As保护下生长中断20 s能获得最平整的AlSb/InAs界面.结合分析显微镜下观察到的样品形貌，过短的界面中断时间会导致界面富In并形成In点，而过长的中断时间会导致AlAs型界面的形成，两者都使界面变得粗糙.另外，还讨论了生长中断在分子束外延生长中的应用. 关键词： 分子束外延 生长中断 超晶格 掠入射X射线反射     

关于RHEED振荡技术优化GaAs(110)量子阱生长的研究

在GaAs(110)衬底上生长的半导体材料有诸多优良性能，使得在非极性GaAs(110)衬底上获得高质量各类异质结材料，成为近年来分子束外延生长关注的课题.考虑GaAs(110)表面是Ga和As共面，最佳生长温度窗口很小；反射式高能电子衍射的(1×1)再构图案对生长温度和V/Ⅲ束流比不敏感，难于通过观察再构图案的变化，准确地找到最佳生长条件.作者在制备GaAs(110)量子阱过程中，观察到反射式高能电子衍射强度振荡呈现出的单双周期变化.这意味着不同工艺条件下，在 GaAs(110)衬底上量子阱有单层和双层两种生长模式.透射电子显微镜和室温光致荧光光谱测量结果表明：在双层生长模式下量子阱样品光学性能较差，而在单层生长模式下量子阱光学性能较好，但是界面会变粗糙.利用这一特点，我们采用反射式高能电子衍射强度振荡技术，找到了一种在GaAs(110)衬底上生长高质量量子阱的可行方法. 关键词： 反射高能电子衍射 量子阱 分子束外延     

GaSb/GaAs复合应力缓冲层上自组装InAs量子点的生长

研究了GaSb/GaAs复合应力缓冲层上自组装生长的InAs量子点.在2ML GaSb/1ML GaAs复合应力缓冲层上获得了高密度的、沿［100］方向择优分布量子点.随着复合应力缓冲层中GaAs层厚度的不同,量子点的密度可以在1.2×10¹⁰cm^-2和8×10¹⁰cm^-2进行调控.适当增加GaAs层的厚度至5ML,量子点的发光波长红移了约25nm,室温下PL光谱波长接近1300nm. 关键词： 自组装量子点 分子束外延 Ⅲ-Ⅴ族化合物半导体     

带有InGaAs覆盖层的InAs量子点红外探测器材料的发光与光电响应

利用分子束外延技术(MBE),在GaAs(001)衬底上自组织生长了不同结构的InAs量子点样品,并制备了量子点红外探测器件。利用原子力显微镜(AFM)和光致发光(PL)光谱研究了量子点的表面结构、形貌和光学性质。渐变InGaAs层的插入有效地释放了InAs量子点所受的应力,抑制了量子点中In组分的偏析,提高了外延层的生长质量,降低了势垒高度,使InAs量子点荧光波长红移。伏安特性曲线和光电流(PC)谱结果表明,生长条件的优化提高了器件的红外响应,具有组分渐变的InGaAs层的探测器响应波长发生明显红移。     

飞秒激光双光子微细加工技术及研究现状

飞秒激光双光子微细加工技术以其特有的高精度三维微加工优势,成为微型机械加工领域新的发展方向之一。介绍了飞秒激光双光子微细加工技术的原理和应用的现状。结合目前已有的微细加工技术,对双光子微细加工技术的特点加以评述。简要报道了利用飞秒激光双光子微细加工技术的一些研究进展。探讨了飞秒激光双光子微细加工技术今后的发展方向及其存在的基本问题。     

Growth, Antimony Incorporation Behaviour and Beryllium Doping of GaAs1-ySby Grown on GaAs by Molecular Beam Epitaxy

A series of GaAs1-ySby epilayers are grown on GaAs substrates under antimony compositions of samples with beryllium doping are obtained different growth conditions. Different A non-equilibrium thermodynamics model is used to calibrate and fit the Sb composition. Activation energy of 0.37 eV for the dissociation process of Sb4 molecules is obtained. Carrier mobility and concentration of samples are influenced by the Sb composition. Quasi-qualitative analysis of mobility is used to explain the relations among Sb composition, carrier mobility and concentration. High resolution x-ray diffraction （HRXRD） rocking curves and Hall effects measurements are used to determine the crystal quality, carrier mobility and concentration.