等离子体辅助沉积HfO_2/SiO_2减反、高反光学薄膜

本文报导了用等离子体辅助（Ｐｌａｓｍａ－ＩＡＤ）沉积技术沉积ＨｆＯ２／ＳｉＯ２减反及高反光学薄膜。在波长１０６４ｎｍ处，ＨｆＯ２／ＳｉＯ２减反膜透过率大于９９．５％，ＨｆＯ２／ＳｉＯ２高反膜反射率大于９９．５％。     

反应离子镀光学薄膜的微观结构分析

用反应离子镀方法制备了ＴｉＯ２单层膜及ＴｉＯ２／ＳｉＯ２多层膜，用透射电子显微镜分别观察了由反应离子镀方法及传统蒸镀法二种不同工艺制得的ＴｉＯ２单层膜及ＴｉＯ２／ＳｉＯ２多层膜的断面结构，并对ＴｉＯ２单层膜进行了喇曼分析和卢瑟福背散射分析。     

玻璃基片上SiO_2膜层厚度的测量方法

钠钙玻璃基片在液晶显示器件（ＬＣＤ） 等制造业中得到了广泛的应用。为防止基片中的碱金属离子扩散到器件的工作介质中,进而影响其化学稳定性和使用寿命,一般要在基片表面镀上一定厚度的ＳｉＯ２ 膜层,以便起到阻挡层的作用。基于Ｐ 蚀刻剂对ＳｉＯ２ 膜层和基片有显著不同的蚀刻速度,提出了一种测量玻璃基片上的ＳｉＯ２ 膜层厚度的方法,即：利用表面轮廓仪,在测量三个不同的蚀刻数据后,计算出ＳｉＯ２ 膜层的厚度。以用射频溅射法制备的ＳｉＯ２ 膜层为样品进行了测量,具体的实验数据证实了该方法的可靠性和有效性     

非晶Si/SiO2超晶格结构的交流电致发光

设计并用磁控溅射方法制备了非晶Ｓｉ／ＳｉＯ２超晶格结构,以高纯多晶Ｓｉ为靶材,当以Ａｒ＋Ｏ２为溅射气氛时,得到ＳｉＯ２膜,仅以Ａｒ为气氛时,得到Ｓｉ膜。重复地开和关Ｏ２气,便交替地得到ＳｉＯ２和Ｓｉ膜。衬底在靶前往返平移,改变平移的速度或者改变溅射的功率,可以控制膜的厚度。通过透民镜的照片可以看出ＳｉＯ２和Ｓｉ膜具有均匀的周期结构,用低角Ｘ－射线反射谱表征了超晶格的周期结构和各层的厚度。透射光谱表     

一种评估液晶显示器件中使用的SiO2膜层性能的新方法

玻璃基片上的ＳｉＯ２膜已在液晶显示器件制造业中得到了广泛应用，ＳｉＯ２膜性能在很大程度上决定了液晶显示器件的化学稳定性及使用寿命，ＳｉＯ２膜致密性及膜厚可由Ｐ－蚀刻法测量出。本文提出了一种评估液晶显示器件中使用ＳｉＯ２膜层性能的简便而又快捷的方法。     

矩底拱面状微透镜阵列的氩离子束刻蚀

在ＺｒＯ２、ＩｎＰ、Ｓｉ及ＳｉＯ２即融凝石英衬底上用氩离子束刻蚀制作面阵矩底拱面状微透镜阵列，给出了氩离子束在不同的入射角度下刻蚀器件的速率与离子束能量之间的关系。实验表明，用国产ＢＰ２１２紫外正型光刻胶制作的光致抗蚀剂掩膜图形在经过优化的工艺条件下可以通过氩离子束刻蚀将预定图形转移到衬底材料中。     

波长1O64nm脉冲激光高阈值反射膜的研制

研究 Ｈｆ Ｏ２／ Ｓｉ Ｏ２ 高反射膜的制备工艺及其激光诱导损伤阈值的比较测试,分别采用了反应蒸镀 Ｈｆ Ｏ２、反应离子辅助蒸镀 Ｈｆ Ｏ２、反应离子辅助蒸镀金属 Ｈｆ 的源材料形成 Ｈｆ Ｏ２ 薄膜。采用这三种工艺制备了 Ｈｆ Ｏ２ ／ Ｓｉ Ｏ２ 高反射膜,在中心波长 １０６４ｎｍ 处,反射率 Ｒ≥９９．５％ ,其中反应蒸镀 Ｈｆ Ｏ２ ／ Ｓｉ Ｏ２ 高反射膜损伤阈值最高,可达 ６０ Ｊ／ｃｍ ２（１０６４ｎｍ ,５ｎｓ）。     

PEG200改性SiO_2溶胶制备光学增透膜的研究

采用ＴＥＭ、ＳＤＰ 等分析手段对ＰＥＧ２００ 改性的ＳｉＯ２ 溶胶制备参数与光学增透膜的性质进行了研究。结果表明：ＰＥＧ２００ 改性后的ＳｉＯ２ 溶胶簇团粒度分布与交联状况发生显著变化,形成不同的网络结构特征,由此影响膜层的光学增透性能。     

双离子束溅射沉积薄膜的光学特性与激光损伤研究

对氧化物薄膜的双离子束溅射沉积作用了系统地实验研究。考察了离子束溅射工艺参数对薄膜光学特性的影响。制备了折射率接近于块材料的ＴｉＯ２和ＺｒＯ２薄膜，显著降低了ＴｉＯ２，ＺｒＯ２和ＳｉＯ２薄膜的光吸收损耗，ＴｉＯ２和ＺｒＯ２薄膜的抗激光损伤阈值得到显著提高。用双离束溅射沉积１．０６μｍ多层高反，是到了大于９９．５％的高反射率，经高温退火处理的双离子束溅射沉积高反膜的抗激光损伤阈值同热蒸发沉积的高反膜     

PbZr0.53Ti0.47O3/SiO2/Si复合薄膜的取向生长及铁电性研究

利用超薄的ＳｉＯ２做缓冲层,用脉冲激光沉积法在Ｓｉ（１００）上制备了具有良好铁电性的高度（１００）取向的ＰＺＴ薄膜．通过对不同条件下在ＳｉＯ２／Ｓｉ（１００）上生长的ＰＺＴ薄膜的研究,分析了ＳｉＯ２厚度、沉积温度、退火时间对ＰＺＴ性能的影响     

Transmission enhanced optical lenses with self-organized antireflective subwavelength structures for the UV range

We present transmission increased fused silica lenses produced by using self-organized antireflective structures for which we developed an efficient manufacturing process. The spectral transmission measured over the whole lens aperture shows a significant transmission enhancement of up to 3.5% in the UV range. Local measurements on the lens's surface reveal a strongly reduced reflection of below 0.1% for 300 nm wavelength, which is homogeneous over the whole lens. Further, the lenses show a broadband spectral antireflection behavior. For 600 nm wavelength the reflection was measured at about 1%.     

Nanosized titania encapsulated silica particles using an aqueous TiCl4 solution

In this study, sub-micron sized silica particles were encapsulated with nanosized titania particles using an aqueous TiCl₄ solution. The particle size distribution of the synthesized titania particles in the coating layer was estimated to be 10 nm from X-ray powder diffraction and transmission electron microscopy. The thickness of the coating layer ranged from a few nm to about 30 nm from transmission electron microscopy analysis. Zeta potential analysis demonstrated the presence of a titania particle coating layer and the extent of its coverage on the surface of silica particles. X-ray photoelectron spectroscopy analysis also demonstrated that titania particles were successfully deposited on the surface of core silica particles from the chemical shift of binding energies of O 1s, Ti 2p and Si 2p.     

热透镜技术中反射和透射两种探测方式的比较分析

热透镜技术按照测量方式的不同可以分为反射式和透射式两种。这两种方式的灵敏度强烈地依赖于样品的热物理性质,对于不同的样品,选择合适的测量构型尤为重要。采用高斯激光束作为加热光源,分别从理论和实验上比较分析了模式不匹配的反射式和透射式两种热透镜探测构型在测量以BK7玻璃和石英为基底的高反射光学薄膜弱吸收中的应用,结果表明,对以BK7玻璃为基底的样品,采用反射式探测构型具有较高的灵敏度,而对以石英为基底的样品而言,采用透射式探测构型则具有更高的灵敏度,为实际光学薄膜吸收损耗测试灵敏度的提高提供了理论和实验依据。     

紫外光固化丙烯酸酯/二氧化硅杂化光学增透膜的研制

 采用旋转镀膜工艺和紫外光固化技术在石英基片上制备出了快速固化的丙烯酸酯/二氧化硅有机/无机杂化单层宽带光学增透膜，考察了丙烯酸酯与正硅酸乙酯的物质的量之比对薄膜增透性能等的影响。实验结果表明，该比值为2.0时，增透膜的最大透射率为99.0%，采用旋转镀膜工艺制备的有机/无机杂化单层增透膜在425～1060nm的较宽波段范围内透射率均达98%以上。     

Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate

Nano-sized ceria particles were coated on the silica surface by the precipitation method using ammonium cerium nitrate and urea as precipitant with poly(vinylpyrrolidone) (PVP) as assistant. The structures and compositions of ceria-coated silica particles were characterized using X-ray diffraction (XRD), field-emission scanning microscopy (FE-SEM), energy dispersive spectroscopy (EDS), transmission electron microscopy (TEM) and dynamic light scattering (DLS) measurements. The results show that nano-size ceria particles were coated uniformly around the surface of silica particles when PVP was used as assistant during coating process, while without PVP, the ceria particles were grown sparsely on the silica particle surface and many ceria particles grow up through independent nucleation in the solution. Then, the chemical mechanical polishing (CMP) behaviors of the as-prepared ceria-coated silica particles on glass substrate were investigated. The CMP test results suggest that the as-prepared ceria-coated silica particles exhibit higher removal rate than pure silica particles without deteriorating the surface quality. In addition, online coefficient of friction (COF) was conducted during the polishing process. The COF data indicate that the COF values of ceria-coated silica particles are larger than those of pure silica particles due to their surface properties.     

Effect of cerium doping on corrosion resistance of amorphous silica–titanium sol–gel coating

The aim of this study was to investigate the effects of ceria doping on corrosion resistance of amorphous silica–titania coating. The microstructural and phase properties of titania–silica and titania–silica–Ceria composite films were investigated by SEM, EDAX and XRD. Potentiodynamic polarization and EIS spectroscopy have been used to study the corrosion behavior of composite coating in 3.5% NaCl solution. Results showed that by cerium doping into silica–titania coating as an inhibitor, the corrosion resistance of the film increased. In addition this study revealed that cerium doping enhanced pitting resistance of the coating.     

Sol-gel preparation of a silica antireflective coating with enhanced hydrophobicity and optical stability in vacuum

A new silica antireflective coating with improved hydrophobicity and optical stability in a vacuum is obtained by a two-step route. Firstly, silica sols are prepared with a sol-gel process, in which tetraethyl orthosilicate is utilized as a precursor. And by introduction of fluorine containing glycol into the sols,the porosity of silica particles and surface polarity of the coatings are decreased. Afterward, coatings are constructed with low surface roughness by modification of PMBA-PMMA. The coatings retain transmission of up to 99.6%, and laser damage threshold of about 50 J/cm2at a wavelength of 532 nm(1-on-1, 10 ns).     

单甲基原位改性SiO2疏水减反膜的制备与性能研究

 在碱性条件下通过TEOS和MTES的共水解缩聚反应制备了单甲基原位改性的SiO₂溶胶，并使用提拉法在K9玻璃基片上镀制了疏水减反膜。通过透射电镜（TEM）考察了镀膜溶胶的微结构，分别使用红外光谱（FTIR）分析了薄膜的组分，用原子力显微镜（AFM）观察了薄膜的表面形貌和起伏状况，用紫外可见光谱（UV-vis）考察了薄膜的减反射性能，用接触角仪测量了薄膜对水的接触角。并使用“R-on-1”的方式测量了薄膜在Nd:YAG激光（1 064 nm，1 ns）作用下的损伤阈值。结果表明，通过共水解缩聚反应可以把甲基引入镀膜溶胶簇团中，改善了溶胶簇团的网络结构，使薄膜得到相当好的疏水性能和更好的抗激光损伤性能，同时薄膜能保持较好的减反射性能。     

塑料透镜表面预处理及其镀膜工艺

本文介绍了塑料透镜的特性及其真空镀膜的基本原理;描述了镀膜前塑料透镜表面的预处理方法;讨论了在选择光学薄膜材料时的一些基本考虑,着重于蒸发过程中材料的化学稳定性,膜层牢固度及所希望的光学和物理性质;较详细地探讨了塑料镀膜的工艺过程;评述了某些重要的薄膜性质对淀积条件的依赖关系。     

利用氟硅烷提高溶胶-凝胶SiO2增透膜的疏水性

 以正硅酸乙酯为前驱体，氨水为催化剂，采用溶胶 凝胶法制备了二氧化硅增透膜；通过自组装技术，用氟硅烷对膜层进行表面修饰，制得了疏水增透膜，克服了常规增透膜亲水的缺点。采用红外光谱、分光光度计、扫描探针显微镜和静滴接触角测量仪等测试手段分析了薄膜的特性。结果表明：疏水增透膜的峰值透光率为99.7％，疏水角为110°；氟硅烷自组装改性不影响二氧化硅增透膜的光学性能。