双离子束溅射沉积薄膜的光学特性与激光损伤研究

对氧化物薄膜的双离子束溅射沉积作用了系统地实验研究。考察了离子束溅射工艺参数对薄膜光学特性的影响。制备了折射率接近于块材料的ＴｉＯ２和ＺｒＯ２薄膜，显著降低了ＴｉＯ２，ＺｒＯ２和ＳｉＯ２薄膜的光吸收损耗，ＴｉＯ２和ＺｒＯ２薄膜的抗激光损伤阈值得到显著提高。用双离束溅射沉积１．０６μｍ多层高反，是到了大于９９．５％的高反射率，经高温退火处理的双离子束溅射沉积高反膜的抗激光损伤阈值同热蒸发沉积的高反膜

Laser-Induced Damage and Optical Properties of Dual Ion Beam Sputter Deposited Coatings

Experiments of dual ion beam sputter deposited (DIBS) oxide coatings wereinvestigated systematically. The influences of ion beam sputter parameters on opticalproperties of thin film were analysized. Refractive indices of TiO2 and ZrO2 filmsapproach to those of bulk materials. Optical absorptions of TiO2, ZrO2 adn SiO2 coatingsare reduced significantly. Laser-induced damage thresholds of TiO2 and ZrO2 are enhancedobviously. DIBS HR coating was prepared and its reflectance is higher than 99. 5%. Itslaser induced damage threshold is improved by high temperature annealing treatment,higher than that of e-gun evaporated eoating.