图形化蓝宝石衬底上InGaN/GaN多量子阱发光二极管的光谱特性研究

运用电致发光(EL)和光致发光(PL)实验,分析了图形化蓝宝石衬底(PSSLEDs)和常规平面蓝宝石衬底(C-LEDs)InGaN/GaN多量子阱发光二极管的光谱特性。对比EL谱,发现PSSLEDs拥有更强的光功率和更窄的半峰宽(FWHM),说明PSSLEDs具有较高的晶体质量。其次,PSSLEDs的EL谱半峰宽随电流增加出现了更快的展宽,而这两种LED样品的PL谱半峰宽随激光功率增加呈现了基本相同的展宽变化,说明在相同电流下,PSSLEDs量子阱中载流子浓度更高,能带填充效应更强。另外,随着电流的增加,PSSLEDs和C-LEDs的峰值波长都发生蓝移,且前者的蓝移程度较小,结合半峰宽的对比分析,说明PSSLEDs量子阱中的极化电场较小。最后,对比了PSSLEDs和C-LEDs的外量子效率随电流的变化,发现PSSLEDs拥有更严重的efficiency droop,说明量子阱中极化电场不是导致efficiency droop的主要原因。     

纳米折叠InGaN/GaN LED材料生长及器件特性

在以自组织Ni纳米岛为掩膜制作的n-GaN纳米柱上,利用MOCVD方法外延生长了具有折叠InGaN/GaN多量子阱(MQW)的LED结构外延片,进而制作了LED器件.外延片上中下游的光致荧光测试,结果表明外延片具有很好的均匀性.用该外延片制作的LED的电致发光谱,随注入电流增加没有明显蓝移,这表明纳米结构能更好地释放应力,纳米柱上外延生长的多量子阱,具有较低的压电极化电场.正向工作电流20 mA时,LED器件的工作电压为4.6 V. 关键词： 纳米柱LED 光致发光 电致发光     

硅基纳米柱GaN-LED的制备与光谱特性分析

Ⅲ-Ⅴ族氮化物发光二极管因具有寿命长、尺寸小、高效、节能等优点,得到广泛的研究与应用。随着光通信、万物互联等领域的进一步发展,需要开发高质量的微纳光源和微纳光波导。纳米柱氮化镓发光二级管(GaN-LED)是一种重要的微纳光源,具有广阔的应用前景。另一方面,作为应用最广的硅半导体材料本身并不是直接半导体,发光效率低下而不能作为光源使用。因此,研究基于硅基板的纳米柱GaN-LED微纳光源具有非常重要的意义。采用射频分子束外延技术（MBE）在Si基板上沉积并生长具有GaN缓冲层、Si掺杂的n-GaN层、4个周期的InGaN/GaN量子阱层和Mg掺杂的p-GaN层的GaN基PN结构。利用扫描电子显微镜（SEM）观察其表面和侧面形貌,可观察到以一定的倾斜角度生长于衬底表面、排列紧密且整齐的纳米柱。利用微纳加工技术制备纳米柱GaN-LED,对已获得的纳米柱外延片进行SOG填充、FAB刻蚀,在p-GaN层和Si衬底侧蒸镀电极,并对LED两电极施加直流电压,进行I/V曲线和电致发光（EL）特性的测试。纳米柱GaN-LED的阈值电压为1.5 V,在室温下的峰值波长为433 nm。纳米柱结构可有效减小LED的阈值,在相同电压情况下,纳米柱LED的亮度更高,展现了良好的发光特性。GaN纳米材料与体材料相比,纳米结构中存在应力弛豫可以有效地降低位错密度,尺寸小于光生载流子或激子的扩散长度,因而能够减小光电子器件激活层中的局域化效应。通过TCAD仿真,对与实验结构相同的纳米柱GaN-LED两电极分别施加5,6和7 V的电压,可得到纳米柱LED的发光光谱。仿真结果显示纳米柱GaN-LED的发光波长在414～478 nm之间,发光颜色为天青蓝到蓝紫色之间,峰值波长为442 nm,发出鲜亮蓝色的光,与实验获得的EL光谱结果相近。随电压增大,发光光谱峰值波长减小,出现轻微的峰值波长蓝移。在纳米柱结构中InGaN/GaN区域产生强烈的极化效应,纳米柱结构在量子阱区域的载流子浓度增加,削弱了量子限制斯塔克效应,从而使LED波长峰值向高频率移动即蓝移。其次,纳米柱结构能够引起应力释放,也会引起峰值波长蓝移。     

p-GaN插入层调控InGaN基黄绿双波长LED发光光谱

采用MOCVD技术在硅衬底上生长了含有7个黄光量子阱和1个绿光量子阱的混合有源区结构的InGaN基黄绿双波长LED外延材料,研究了电子阻挡层前p-GaN插入层厚度对黄绿双波长LED载流子分布及外量子效率(EQE)的影响。通过LED变温电致发光测试系统对LED光电性能进行了表征。结果表明,100 K小电流时随着电流密度的增大,三组样品的绿光峰与黄光峰相对强度的比值越来越大,且5.5 A·cm^-2的电流密度下,随着温度从300 K逐步降低至100 K,三组样品的绿光峰与黄光峰相对强度的比值也越来越大,说明其载流子都在更靠近p型层的位置发生辐射复合。三组样品的p-GaN插入层厚度为0,10,30 nm时,EQE峰值依次为29.9%、29.2%和28.2%,呈现依次减小的趋势,归因于p-GaN插入层厚度越大,p型层越远离有源区,空穴注入也越浅。电子阻挡层前p-GaN插入层可以有效减小器件EL光谱中绿光峰随着电流密度增加时峰值波长的蓝移(33 nm),实现了对低温发光光谱的调控。     

Zn杂质扩散诱导AlGaInP/GaInP量子阱混杂

杂质扩散诱导量子阱混杂技术可用于制作腔面非吸收窗口,提高大功率半导体激光器的输出功率.以Zn2As2为扩散源,采用闭管扩散方式,在550℃下对650 nm半导体激光器的外延片进行了一系列Zn杂质扩散诱导量子阱混杂的实验.实验发现,随着扩散时间从20～120 min,样品光致发光(PL)谱蓝移偏移增加,峰值波长蓝移53 nm;当扩散时间超过60 min后,样品的PL谱中不仅出现了常见的蓝移峰,同时还出现了红移峰,峰值波长红移32 nm.分析表明PL谱蓝移来自Zn扩散引起的AlGaInP/GaInP间的量子阱混杂;红移来自Zn杂质扩散对样品中Ga0.51In0.49P缓冲层的影响.还研究了扩散温度(550℃)和扩散时间对样品晶体品质的影响,并在理论上计算了AlGaInP/GaInP量子阱混杂巾的Al-Ga的互扩散系数.     

MOVPE生长的InGaN/GaN单量子阱的光致发光和光吸收特性

研究了用金属有机物气相外延(MOVPE)法在蓝宝石衬底上生长的In组分浓度保持不变的InGaN/GaN单量子阱结构在室温下的发光特性和光吸收特性.实验结果表明,在InGaN厚度<3nm时,随着样品InGaN势阱层宽度的增加(1nm),光致发光(PL)谱的发光峰值波长出现明显的红移33nm现象,而且发光强度下降8%,谱线半峰全宽(FWHM)展宽,通过对样品的透射、反射光谱研究发现,量子阱层窄(1.5nm)的样品在波长接近红外区时出现无吸收的现象,即R+T达到了100%,而在阱层较宽的样品中没有发现这一现象,对引起这些现象的原因进行了讨论.这些结果有助于开发和优化三族氮化物半导体光电器件的进一步研究工作.     

In组分渐变提高InGaN/GaN多量子阱发光二极管发光性能

利用金属有机物化学气相沉积系统在蓝宝石衬底上通过有源层的变温生长,得到In组分渐变的量子阱结构,从而获得具有三角形能带结构的InGaN/GaN多量子阱发光二极管(LED)(简称三角形量子阱结构LED).变温光致发光谱结果表明,相对于传统具有方形能带结构的量子阱LED(简称方形量子阱结构LED),三角形量子阱结构有效提高了量子阱中电子和空穴波函数的空间交叠,从而增加了LED的内量子效率;电致发光谱结果表明,三角形量子阱结构LED器件与传统结构LED器件相比,明显改善了发光峰值波长随着电流的蓝移现象.通过以上     

Nano-LED半极性面InGaN/GaN单量子阱结构极化和光谱仿真分析

通过有限元分析,利用COMSOL软件模拟计算了Nano-LED半极性面InGaN/GaN单量子阱距离边缘不同位置的应变和压电极化分布,并结合模拟得到的量子阱极化电场,采用Silvaco软件计算得到了Nano-LED InGaN/GaN单量子阱距离边缘不同位置的发光光谱。应变和压电极化分布结果表明,其在距离半极性面量子阱边缘100 nm的范围内变化明显。然而,在半极性面内部,应力释放现象消失,压电极化电场变强,量子限制Stark效应导致InGaN/GaN单量子阱发光强度降低。发光光谱分析表明,60 mA工作电流下,Nano-LEDInGaN/GaN半极性面量子阱边缘位置的光谱峰值最大蓝移达21 nm,其原因在于边缘的应力释放作用。Nano-LED非极性面和半极性面的整体光谱分析表明,在固定Nano-LED高度条件下,Nano-LED的直径越大,半极性面占比越高,器件整体发光光谱的双峰值现象越明显,这将为多波长Nano-LED器件的设计提供借鉴。     

硅衬底生长的InGaN/GaN多层量子阱中δ型硅掺杂n-GaN层对载流子复合过程的调节作用

为了解决在单晶硅衬底上生长的InGaN/GaN多层量子阱发光二极管器件发光效率显著降低的问题,使用周期性δ型Si掺杂的GaN取代Si均匀掺杂的GaN作为n型层释放多层界面间的张应力。采用稳态荧光谱及时间分辨荧光谱测量,提取并分析了使用该方案前后的多层量子阱中辐射/非辐射复合速率随温度（10~300 K）的变化规律。实验结果表明引入δ-Si掺杂的n-GaN层后,非辐射复合平均激活能由（18±3）meV升高到（38±10）meV,对应非辐射复合速率随温度升高而上升的趋势变缓,室温下非辐射复合速率下降,体系中与阱宽涨落有关的浅能级复合中心浓度减小,PL峰位由531 nm左右红移至579 nm左右,样品PL效率随温度的衰减受到抑制。使用周期性δ型Si掺杂的GaN取代Si均匀掺杂的GaN作为生长在Si衬底上的InGaN/GaN多层量子阱LED器件n型层,由于应力释放,降低了多层量子阱与n-GaN界面、InGaN/GaN界面的缺陷密度,使得器件性能得到了改善。     

GaN基纳米阵列LED器件制备及发光特性

为了降低GaN材料中因应变诱导的量子斯托克斯效应,增加器件有源区内的电子-空穴波函数在实空间的交叠从而提高GaN基LEDs的发光效率,采用紫外软压印技术制备了均匀的周期性纳米柱阵列结构,结合常规LED器件微加工技术获得了In GaN/GaN基蓝光与绿光纳米阵列LED器件并对其进行了表征分析。结果表明:纳米柱阵列LED器件具有均匀的发光和稳定的光电性能。纳米结构不仅有效缓解了量子阱中的应力积累(弛豫度~70%),提高了器件的辐射复合几率和出光效率,同时结合纳米柱侧壁的化学钝化处理进一步降低了器件有源区的缺陷密度,显著降低了LED器件的漏电流(~10-7),最终提高了器件的发光效率。     

Improvement of green InGaN-based LEDs efficiency using a novel quantum well structure

The green light emitting diodes(LEDs)have lower quantum efficiency than LEDs with other emission wavelengths in the visible spectrum.In this research,a novel quantum well structure was designed to improve the electroluminescence(EL)of green InGaN-based LEDs.Compared with the conventional quantum well structure,the novel structure LED gained 2.14times light out power(LOP)at 20-mA current injection,narrower FWHM and lower blue-shift at different current injection conditions.     

Reflective photoluminescence fiber temperature probe based on the CdSe/ZnS quantum dot thin film

A reflective fiber temperature sensor based on the optical temperature dependent characteristics of a quantum dots (QDs) thin film is developed by depositing the CdSe/ZnS core/shell quantum dots on the SiO₂ glass substrates. As the temperature is changed from 30 to 200°C, the peak wavelengths of PL spectra from the sensing head increase linearly with the temperature, while the peak intensity and the full width at half maximum (FWHM) of PL spectra vary exponentially according to the specific physical law. Using the obtained temperature-dependent peak-wavelength shift, the average resolution of the designed fiber temperature sensor can reach 0.12 nm/°C, while it reaches 0.056 nm/°C according to the FWHM of PL spectrum.     

Internal quantum efficiency of GaN-based light-emitting diodes grown on silicon substrates determined from rate equation analyses

We present a convenient and reliable method for determining the internal quantum efficiency (IQE) in GaN-based blue light-emitting diodes (LEDs) grown on Si(111) substrates based on the carrier rate equation model. By using the peak point of the efficiency curve in photoluminescence (PL) measurements as the parameter of the rate equation analysis, the IQE can be unambiguously determined without any pre-assumed parameters. The theoretical IQE model is used to fit the measured PL efficiency curves and the IQE of LED samples are determined. The maximum IQE of the LED sample grown on the Si substrate was obtained to be 0.74, which is found to agree well with the results obtained by conventional temperature-dependent PL measurements.     

高色域量子点LED及其在背光显示中的应用研究

量子点因其独特优异的光学特性而被广泛应用于发光领域,其中最突出的特点是光谱调谐方便,只需要改变材料的尺寸,就可实现发光光谱的调谐。结合实际应用的需要,选取CdSe材料作为主要研究对象,通过改进工艺,采用希莱克技术隔绝水氧,使用高温热注入法,调整原料中镉源和锌源,硒源和硫源的比例,获得了尺寸分别约为6.0和4.2 nm,发光峰分别为625和525 nm,半高宽分别为30和28 nm,荧光量子产率分别达到82%和61%的粒径均一、色纯度高且高效稳定核壳结构CdSe/ZnS红光和绿光量子点材料。然后对量子点LED在背光显示中的应用进行了研究,采用合成的红光和绿光量子点材料替代传统工艺中的荧光粉材料,通过改进封装方式,对量子点光转换层采用双层环氧树脂AB胶保护,同时引入PMMA透镜包覆,从根本上隔绝水氧。最终得到的量子点白光LED,红绿蓝光发射峰分别为630, 535和453 nm,半高宽别为20, 28和30 nm,三段光谱发射峰两侧对称性良好,有效解决了传统荧光粉白光LED在红色光谱波段缺失的问题,并同时实现了单色性好、色纯度高、色彩饱和度高等优点。在LED积分球光色电测试系统中20 mA电流条件下测试,得到了CIE色坐标为(0.329, 0.324)的白光量子点LED,这是非常接近标准白光的色坐标。其色温为5 094 K,光效达到94.72 lm·W-1,显色指数Ra可达78.6,寿命超过400 h。最后对量子点LED灯条进行封装得到背光源,根据测试获取的白光量子点LED发射光谱,可以得到sRGB颜色三角形,即色域,通过对比NTSC1931标准色域,得到了色域覆盖率可以达到109.7%的高色域量子点LED背光源。开发的LED背光由240个白光量子点LED制成,并且首次成功演示了29英寸液晶电视面板,这一结果将进一步开发量身定制的量子点,特别是在高性能显示器应用领域。     

Evaluating the Quantum Confinement Effect of Isolated ZnO Nanorod Single-Quantum-Well Structures Using Near-Field Ultraviolet Photoluminescence Spectroscopy

Using low-temperature near-field spectroscopy, we obtained spatially and spectrally resolved photoluminescence (PL) images of individual ZnO nanorod single-quantum-well structures (SQWs) with a spatial resolution of 20 nm. We observed the dependence of the quantum confinement effect of the PL peak on the well width (L _aw), from which the linewidths of near-field PL spectra of ZnO nanorod SQWs (L _aw = 2.5 and 3.75 nm) were determined to be as narrow as 3 meV. However, near-field PL spectra of individual SQWs with L _aw = 5.0 nm exhibited two PL peaks, presumably due to strains or defects in the ZnMgO in the nanorod SQWs. Since the exciton in a quantum structure is an ideal two-level system with long coherence times, our results provide criteria for designing nanophotonic devices.     

Effect of localized states on internal quantum efficiency of III‐nitride LEDs

A model is suggested accounting for effects of localized electron and hole states formed by composition fluctuations in the InGaN active region of a III‐nitride LED on non‐radiative carrier recombination at threading dislocations. The model enables explanation of the abnormal temperature dependence of internal quantum efficiency (IQE) of a green LED structure recently observed at low current densities. The theoretical predictions are in quantitative agreement with experiment in the temperature range between 200 K and 453 K. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Photoluminescence of InAs Self-Organized Quantum Dots Formation on InP Substrate by MOCVD

In this letter, we present results of photoluminescence (PL) emission from single-layer and multilayer InAs self-organized quantum dots (QDs), which were grown on (001) InP substrate. The room temperature PL peak of the single-layer QDs locates at 1608 nm, and full width at half-maximum (FWHM) of the PL peak is 71 meV. The PL peak of the multilayer QDs locates at 1478 nm, PL intensity of which is stronger than that of single-layer QDs. The single-layer QD PL spectra also display excited state emission and state filling as the excitation intensity is increased. Low temperature PL spectra show a weak peak between the peaks of QDs and wetting layer (WL), which suggests the recombination between electrons in the WL and holes in the dots.     

InxGa1-xAs/GaAs量子阱应变量对变温光致发光谱的影响

利用变温光致发光(PL)研究了In0.182Ga0.818As/GaAs应变及应变补偿量子阱在77～300 K温度范围内的发光特性.随着温度T的升高,PL峰位向低能方向移动.在应力作用下In0.182Ga0.818As/GaAs量子阱的价带顶轻空穴带和重空穴带发生了劈裂.通过理论计算推导应变随温度变化对InxGa1-x...     

Temperature-dependent efficiency droop behaviors of GaN-based green light-emitting diodes

The efficiency droop behaviors of GaN-based green light-emitting diodes (LEDs) are studied as a function of temperature from 300 K to 480 K. The overall quantum efficiency of the green LEDs is found to degrade as temperature increases, which is mainly caused by activation of new non-radiative recombination centers within the LED active layer. Meanwhile, the external quantum efficiency of the green LEDs starts to decrease at low injection current level (<1 A/cm2 ) with a temperature-insensitive peak-efficiency-current. In contrast, the peak-efficiency-current of a control GaN-based blue LED shows continuous up-shift at higher temperatures. Around the onset point of efficiency droop, the electroluminescence spectra of the green LEDs also exhibit a monotonic blue-shift of peak energy and a reduction of full width at half maximum as injection current increases. Carrier delocalization is believed to play an important role in causing the efficiency droop in GaN-based green LEDs.