GaN基量子阱的激子跃迁和光学性质

采用光致发光谱、光致发光激发谱以及拉曼光谱对GaN基量子阱材料进行了实验观察和分析 .实验结果表明样品中量子点结构不均匀及InGaN层中In成分分布不均匀 ,且其光致发光谱的波峰是由自由激子辐射复合发光引起的 .同时由室温下InGaN/GaN量子阱的拉曼谱可得知InGaN/GaN多量子阱的结构特征     

利用选择性外延法生长单芯片双波长白光InGaN/GaN多量子阱结构

为了制备单芯片无荧光粉白光InGaN/GaN多量子阱发光结构,利用选择性外延生长法在SiO2条纹掩膜板上生长出具有梯形形貌的GaN微面结构,并在该GaN微面结构上生长InGaN/GaN多量子阱结构,最终在单芯片上获得了双波长发光.结果表明:梯形GaN微面由(0001)和(11-22)面组成,两者的表面能和极性不同,并且在InGaN/GaN多量子阱生长过程中,In原子和Ga原子迁移速率不同,从而使得(0001)和(11-22)面上的多量子阱具有不同的发光波长;该性质可以使(11-22)面的微面量子阱发出蓝光(峰值波长为420nm),而(0001)面的量子阱发出黄光(峰值波长为525nm),最终形成双波长的复合白光外延结构.     

渐变型量子阱垒层厚度对GaN基双波长发光二极管发光特性调控的研究

采用软件理论分析的方法对渐变型量子阱垒层厚度的InGaN双波长发光二极(LED)的载流子浓度分布、 能带结构、自发发射谱、内量子效率、发光功率及溢出电子流等进行研究.分析结果表明, 增大量子阱垒层厚度会影响空穴在各量子阱的注入情况, 对双波长LED各量子阱中空穴浓度分布的 均衡性及双波长发光光谱的调控起到一定作用,但会导致内量子效率严重下降; 而当以特定的方式从n电极到p电极方向递减渐变量子阱垒层厚度时, 活性层量子阱的溢出电子流 得到有效的控制, 双发光峰强度达到基本一致, 同时芯片的内量子效率下降得到了有效控制, 且具备大驱动电流下较好的发光特性.     

影响GaN基蓝光LED能带结构与光谱特性关系的仿真研究

本文采用Silvaco TCAD软件对GaN基InGaN/GaN量子阱蓝光发光二极管(LED)的光谱特性进行了仿真研究。研究结果表明:光谱会随着注入电压的增加而产生蓝移现象,并出现0.365μm处的紫外光发光峰;发光效率在正向电流较小时增长很快,随着正向电流进一步增加而逐渐趋于饱和;随着量子阱中In组分和量子阱阱层厚度的增加,发光光谱出现红移现象,并且发光效率下降。仿真结果对GaN基InGaN/GaN量子阱结构蓝光LED的设计和优化提供一定的依据。     

垒层厚度对InGaN/GaN多量子阱电注入发光性能的影响及机理

研究了不同垒厚对InGaN/GaN多量子阱电注入发光性能的影响及机理。实验发现,当GaN垒层的厚度从6 nm增大到24 nm时,垒厚的样品发光强度更强,而且当注入电流增加时,适当增加垒厚,可以更显著增加发光强度。进一步结合发光峰位和光谱宽度的研究表明,由于应力和极化效应的存在,当垒层厚度在6~24 nm范围内时,适当增加垒层厚度不仅会使得能带的倾斜加剧,减少电子泄露,而且也会增加InGaN阱层的局域态深度,从而改善量子阱的发光性能。     

Zn杂质扩散诱导AlGaInP/GaInP量子阱混杂

杂质扩散诱导量子阱混杂技术可用于制作腔面非吸收窗口,提高大功率半导体激光器的输出功率.以Zn2As2为扩散源,采用闭管扩散方式,在550℃下对650 nm半导体激光器的外延片进行了一系列Zn杂质扩散诱导量子阱混杂的实验.实验发现,随着扩散时间从20～120 min,样品光致发光(PL)谱蓝移偏移增加,峰值波长蓝移53 nm;当扩散时间超过60 min后,样品的PL谱中不仅出现了常见的蓝移峰,同时还出现了红移峰,峰值波长红移32 nm.分析表明PL谱蓝移来自Zn扩散引起的AlGaInP/GaInP间的量子阱混杂;红移来自Zn杂质扩散对样品中Ga0.51In0.49P缓冲层的影响.还研究了扩散温度(550℃)和扩散时间对样品晶体品质的影响,并在理论上计算了AlGaInP/GaInP量子阱混杂巾的Al-Ga的互扩散系数.     

量子阱垒层掺杂变化对双波长LED调控作用研究

采用APSYS软件研究了InGaN/GaN量子阱垒层掺杂变化对双波长 发光二极管发光光谱的调控问题. 在不同掺杂类型和浓度下对器件电子空穴浓度分布、 载流子复合速率、 能带结构、 发光光谱进行分析, 结果表明, 调节量子阱垒层n型和p型的掺杂浓度可以精确而有效地根据需要调控发光光谱, 解决发光光谱调控难的问题. 这些现象归因于掺杂的量子阱垒层对电子空穴分布的调控作用.     

MOCVD生长InxGa1-xN合金微观结构和光学特性

利用发光光谱、X射线衍射(XRD)、原子力显微(AFM)等实验方法对MOCVD生长的InxGa1-xN合金进行了研究。原子力显微图样表明样品表面出现纳米尺度为微岛状结构。样品PL和PLE谱表明,其主要吸收峰位于波长为365,474nm,发光峰的位置位于波长为545,493nm处,其中545nm发光峰半高宽较493nm发光峰宽,这两个峰分别起源于In(Ga)N浸润层和InGaN层发光,浸润层局域化激子和岛状微观结构弛豫特性是产生发光峰Stokes移动的重要原因。     

利用C-V法研究GaN基蓝光LED的多量子阱结构

利用C-V测量法研究了GaN基高亮度蓝光发光二极管的InGaN/GaN多量子阱结构(MQWs),通过样品的C-V曲线及对应的杂质浓度分布曲线得出MQWs的结构特性.实验结果表明:MQWs为5个周期的InGaN/GaN多量子阱.室温下InGaN阱层的平均阱宽为2.00nm,阱层的平均杂质浓度为7.12×1018 cm-3,GaN垒层的平均垒宽为12.32nm,垒层的平均杂质浓度为0.82×1018 cm-3.温度降低,InGaN阱宽变窄,杂质浓度增大,而GaN垒宽变宽,杂质浓度降低.     

蓝光激光器结构中InGaN/GaN多量子阱界面效应的精细光致发光光谱研究

金属有机化学气相沉积（MOCVD）方法制备InGaN/GaN多量子阱结构时,在GaN势垒层生长的N₂载气中引入适量H₂,能够有效改善阱/垒界面质量从而提升发光效率。本工作利用光致发光（PL）光谱技术,对蓝光激光器结构中的InGaN/GaN多量子阱的发光性能进行了精细的光谱学测量与表征,研究了通H₂生长对量子阱界面的调控效应及其发光效率提升的物理机制。室温PL光谱结果显示,GaN势垒层生长载气中引入2.5%的H₂使InGaN/GaN多量子阱的发光效率提升了75%、发光峰的峰位蓝移了17 meV、半峰宽（FWHM）减小了10 meV。通过功率依赖的PL光谱特征分析,我们对InGaN/GaN量子阱中的量子限制Stark效应（QCSE）和能带填充（Band Filling）效应进行了清晰的辨析,发现了发光峰峰位和峰宽的光谱特征主要受QCSE效应影响,H₂的引入能够大幅度降低QCSE效应,并且确定了QCSE效应被完全屏蔽情况下的发光峰能量为2.75 eV。温度依赖的PL光谱数据揭示了通H₂生长量子阱结构中显著减弱的载流子局域化行为,显示界面质量提高有效降低了限制势垒的能量波动,从而导致更窄的发光峰半峰宽。PL光谱强度随温度的变化规律表明,通H₂生长并不改变量子阱界面处的非辐射复合中心的物理本质,却能够显著减少非辐射复合中心的密度,有助于提升量子阱的发光效率。通过时间分辨PL光谱分析,发现通H₂生长会导致量子阱结构中更短的载流子辐射复合寿命,但不影响非辐射复合寿命。载流子复合寿命的变化特征进一步确认了通H₂生长对量子阱结构中QCSE效应和非辐射复合中心的影响规律。综合所有PL光谱分析结果,我们发现通H₂生长能够提高InGaN/GaN多量子阱的界面质量、显著减弱应力效应（更弱的QCSE效应）、降低限制势垒的能量波动以及减少界面处非辐射复合中心的密度,从而显著提升量子阱的发光效率。该研究工作充分显示了PL光谱技术对半导体量子结构发光性能的精细表征能力,光谱分析结果能够为InGaN/GaN多量子阱生长提供有价值的参考。     

Growth and characterization of InGaN nanodots hybrid with InGaN/GaN quantum wells

Uniform InGaN nanodots were successfully grown on SiO₂ pretreated GaN surface. It was found that the InGaN nanodots were 20?nm in diameter and 5?nm in height, approximately. After the growth of two periods of InGaN/GaN quantum wells on the surface of InGaN nanodots, nanodot structure still formed in the InGaN well layer caused by the enhanced phase separation phenomenon. Dual-color emissions with different behavior were observed from photoluminescence (PL) spectrum of InGaN nanodots hybrid with InGaN/GaN quantum wells. A significant blueshift and a linewidth broadening were measured for the low-energy peak as the increase of PL excitation power, while a slight blueshift and a linewidth narrowing occurred for the high-energy peak. Accordingly, these two peaks were assigned to be from the In-rich nanodots and quantized state transition from the InGaN/GaN quantum wells with indium content, respectively.     

MOVPE 生长GaN薄膜的 光致黄带发光与激发光源的相关性

用四种不同光源作为激发光源,研究了蓝宝石衬底金属有机物汽相外延方法生长的氮化镓薄膜的光致发光特性。结果发现用连续光作为激发光源时,光致发光谱中除出现365 nm的带边发射峰外,同时观察到中心波长位于约550 nm 的较宽黄带发光;而用脉冲光作为激发光源时其发光光谱主要是365 nm附近的带边发光峰,未观察到黄带发光。氮化镓薄膜的光致发光特性依赖于所用的激发光源性质。     

Investigation of electron energy states in InGaN/GaN multiple quantum wells

Blue light emitting diodes (LED) consisting of InGaN/GaN multiple quantum wells (MQWs) have been grown by metal organic chemical vapor deposition (MOCVD) on sapphire. The width of the quantum wells (InGaN) was maintained in the range of 3–5 nm with a barrier of 10–15 nm of GaN. Various diagnostic techniques were employed for the characterization of the InGaN/GaN heterostructure. Carrier concentration depth profile from C–V measurements demonstrated the presence of MQWs. The higher value of built-in voltage (15 V) determined from C⁻²–V plot also supported the presence of MQWs as assumed to alter the space-charge region width and hence the intercept voltage. Arrhenius plots due to DLTS spectra from the device revealed at least four energy states (eV) 0.1, 0.12, 0.15 and 0.17, respectively in the quantum wells, with respect to the barrier. Further the photoluminescence spectrum showed an InGaN-based broad band centered at 2.9 eV and the GaN peak at 3.4 eV. A comparison of the PL spectrum with the literature helped to estimate the indium content in the QW (InGaN) and its width to be ∼13% and ∼3 nm, respectively. The results were consistent with the DLTS findings.     

InGaN蓝光与CdTe纳米晶基白光LED

报道了倒装焊InGaN蓝光LED与黄光CdTe纳米晶的复合结构。利用蓝光作为CdTe纳米晶的激发源,通过光的下转换机制,将部分蓝光转化为黄光,复合发射出白光。室温下正向驱动电流为10mA时,发光色品坐标为x=0.29,y=0.30。实验表明,该复合结构白光LED的一大优点在于,复合光的色品坐标几乎不随正向驱动电流大小变化,颜色稳定。     

Temperature dependent growth of InGaN/GaN single quantum well

InGaN/GaN single quantum well (SQW) structures under various InGaN growth temperatures have been grown by metal organic chemical vapor deposition (MOCVD), the surface morphologies and optical properties are investigated. The radius of the typical V-pits on the SQW surface is affected by the InGaN well-temperature, and the surface roughness decreased as the well-temperature reduced. Room-temperature photoluminescence (PL) and cathode luminescence (CL) shows the quantum well and quantum dot (QD)-like localized state light emission of the SQWs grown at 700 and 690 °C, respectively, whereas the samples grown at 670 and 650 °C present hybrid emission peaks. Excitation power dependent PL spectra indicates the QD-like localized state emission dominates at low excitation power and the quantum well emission starts to take over at high excitation power.     

氮化蓝宝石衬底上GaN薄膜的微结构与光学性质

用透射电子显微镜(TEM),X射线衍射(XRD)和光荧光谱(PL)等测量手段研究了GaN薄膜的微结构和光学性质。样品是用光辐射加热MOCVD在蓝宝石衬底上制备的。随着衬底氮化时间的增加,扩展缺陷的密度显著增加。在位错密度增加一个数量级时,XRD摇摆曲线半宽度(FWHM)由11″增加到15″,PL谱的黄光发射从几乎可忽略增加到带边发射强度的100倍。结合生长条件,我们对黄光与微结构的关系作了讨论。     

Effect of annealing on photoluminescence and microstructures of InGaN／GaN multi-quantum well with Mg-doped p-type GaN

InGaN/GaN multi-quantum well structure with Mg-doped p-type GaN was grown by low-pressure metalorganic vapour phase epitaxy. After rapid-thermal-annealing at 700 and 900${^\circ}$C, both the red-shift and the blue-shift of the photoluminescence (PL) peak, the decreased and the enhancement of the PL intensity were observed. The transmission electron microscopic images showed that InGaN multi-quantum-dots-like (MQD-like) structures with dimensions less than 5$\tm$10nm were formed in InGaN wells. The changes of PL spectra could be tentatively attributed to the competition between the red-shift mechanism of the quantum-confined Stark effect and the blue-shift mechanism of the quantum size effect due to MQD-like structures.     

The enhancement of light-emitting efficiency using GaN-based multiple quantum well light-emitting diodes with nanopillar arrays

The quest for higher modulation speed and lower energy consumption has inevitably promoted the rapid development of semiconductor-based solid lighting devices in recent years. GaN-based light-emitting diodes （LEDs） have emerged as promising candidates for achieving high efficiency and high intensity, and have received increasing attention among many researchers in this field. In this paper, we use a self-assembled array-patterned mask to fabricate InGaN/GaN multi- quantum well （MQW） LEDs with the intention of enhancing the light-emitting efficiency. By utilizing inductively coupled plasma etching with a self-assembled Ni cluster as the mask, nanopillar arrays are formed on the surface of the InGaN/GaN MQWs. We then observe the structure of the nanopillars and find that the V-defects on the surface of the conventional structure and the negative effects of threading dislocation are effectively reduced. Simultaneously, we make a comparison of the photoluminescence （PL） spectrum between the conventional structure and the nanopillar arrays, achieved under an experimental set-up with an excitation wavelength of 325 mm. The analysis demonstrates that MQW-LEDs with nanopillar arrays achieve a PL intensity 2.7 times that of conventional LEDs. In response to the PL spectrum, some reasons are proposed for the enhancement in the light-emitting efficiency as follows： 1） the improvement in crystal quality, namely the reduction in V-defects; 2） the roughened surface effect on the expansion of the critical angle and the attenuated total reflection; and 3） the enhancement of the light-extraction efficiency due to forward scattering by surface plasmon polariton modes in Ni particles deposited above the p-type GaN layer at the top of the nanopillars.     

Fabrication and optical properties of InGaN/GaN multiple quantum well light emitting diodes with amorphous BaTiO3 ferroelectric film

BaTiO3 （BTO） ferroelectric thin films are prepared by the sol,el method. The fabrication and the optical properties of an InGaN/GaN multiple quantum well light emitting diode （LED） with amorphous BTO ferroelectric thin film are studied. The photolumineseence （PL） of the BTO ferroelectric film is attributed to the structure. The ferroeleetric film which annealed at 673 K for 8 h has the better PL property. The peak width is about 30 nm from 580 nm to 610 nm, towards the yellow region. The mixed electroluminescence （EL） spectrum of InGaN/GaN multiple quantum well LED with 150-nm thick amorphous BTO ferroelectric thin film displays the blue-white light. The Commission Internationale De L＇Eclairage （CIE） coordinate of EL is （0.2139, 0.1627）. EL wavelength and intensity depends on the composition, microstructure and thickness of the ferroelectric thin film. The transmittance of amorphous BTO thin film is about 93% at a wavelength of 450 nm-470 nm. This means the amorphous ferroelectrie thin films can output more blue-ray and emission lights. In addition, the amorphous ferroelectric thin films can be directly fabricated without a binder and used at higher temperatures （200 ℃-400 ℃）. It is very favourable to simplify the preparation process and reduce the heat dissipation requirements of an LED. This provides a new way to study LEDs.