掺铒氢化非晶氧化硅1.54μm发光性质的研究

采用等离子体增强化学汽相沉积技术生长不同氧含量的氢化非晶氧化硅薄膜(a-SiOx:H),离子注入铒及退火后在室温观察到很强的光致发光.当材料中氧硅含量比约为1和1.76时,分别对应77K和室温测量时最强的1.54μm光致发光.从15到250K的变温实验显示出三个不同的强度与温度变化关系,表明氢化非晶氧化硅中铒离子的能量激发和发光是一个复杂的过程.提出氢化非晶氧化硅薄膜中发光铒离子来自于富氧区,并对实验现象进行了解释.氢化非晶氧化硅中铒发光的温度淬灭效应很弱.从15到250K,光致发光强度减弱约1/2.     

氧、硼、磷掺杂对氢化非晶硅中铒1.54μm发光的作用

利用等离子体增强化学气相淀积(PECVD)技术生长氧、硼、磷掺杂的氢化非晶硅薄膜.在室温下注入铒离子后研究三种掺杂元素对铒离子发光的作用.室温下观察到很强的光致发光现象.氧的引入并且和铒离子形成发光中心,提高了铒离子的发光强度.退火实验表明氧、硼、磷的掺杂补偿了材料中的缺陷,提高了氢的逃逸温度,改善材料的热稳定性,使材料的退火温度因掺杂元素的加入而提高,铒的发光得到增强.讨论了铒离子的发光机制.     

磁控溅射淀积掺Er富Si氧化硅膜中Er3+ 1.54μm光致发光

用磁控溅射淀积不同富Si程度的掺Er富Si氧化硅薄膜.室温下测量其光致发光谱,观察到各谱中都含有1.54和1.38μm两个发光峰,其中1.54和1.38μm的光致发光峰分别来自Er³⁺和氧化硅中某种缺陷.系统研究了Er³⁺1.54μm光致发光峰强度对富Si程度及退火温度的依赖关系.还发现1.54μm发光峰强度与1.38μm发光峰强度相互关联,对此进行了讨论 关键词： Er 富Si氧化硅 光致发光 纳米硅     

氧，硼，磷掺杂对氢化非晶硅中饵1.54um发光的作用

利用等离子体增强化学气相淀积（PECVD）技术生长氧、硼、磷掺杂的氢化非晶硅薄膜。在室温下注入饵离子后研究三种掺杂元素对饵离子发光的作用。室温下观察到很强的光致发光现象。氧的引入并且和饵离子形成发光中心，提高了饵离子的发光强度。退火实验表明氧、硼、磷的掺杂补偿了材料中的缺陷，提高了氢的逃逸温度，改善的热稳性，使材料的退火温度因掺杂元素的加入而提高，饵的发光得到增强。讨论了饵离子的发光机制。     

磁控溅射淀积掺Er富Si氧化硅膜中Er~(3 ) 1.54μm光致发光

用磁控溅射淀积不同富Si程度的掺Er富Si氧化硅薄膜 .室温下测量其光致发光谱 ,观察到各谱中都含有 1.5 4和 1.38μm两个发光峰 ,其中 1.5 4和 1.38μm的光致发光峰分别来自Er3 和氧化硅中某种缺陷 .系统研究了Er3 1.5 4μm光致发光峰强度对富Si程度及退火温度的依赖关系 .还发现 1.5 4μm发光峰强度与 1.38μm发光峰强度相互关联 ,对此进行了讨论     

多孔硅衬底上溅射沉积SiC:Tb薄膜的光致发光行为

在多孔硅衬底上用射频溅射法沉积了非晶的SiC:Tb薄膜. 对样品在N2中进行了不同温度的退火处理. 用傅里叶红外变换谱分析了样品的结构.用荧光光谱仪测试了样品的光致发光，在紫外、可见光区域观测到了强的发光峰.发现随着衬底加热温度和样品退火温度的变化，发光峰有明显的强度变化和微弱的蓝移现象.分析了产生这种现象的机理，得出了紫外区域的发光峰是由于氧缺乏中心引起的，而可见区的发光是由于Tb离子产生的. 关键词： 碳化硅 光致发光 氧缺乏中心 多孔硅     

镶嵌在氧化硅薄膜中纳米晶硅的可见光荧光谱与发光机制的研究

采用对非晶氧化硅薄膜退火处理方法，获得纳米晶硅与氧化硅的镶嵌结构．室温下观察到峰位为2.40eV光致发光．系统地研究了不同退火温度对薄膜的Raman谱、光荧光谱及光电子谱的影响．结果表明，荧光谱可分成两个不随温度变化的峰位为1.86和2.30eV的发光带．Si2p能级光电子谱表明与发光强度一样Si⁴⁺强度随退火温度增加而增加．Si平均晶粒大小为4.1—8.0nm，不能用量子限制模型解释蓝绿光的发射．纳米晶硅与SiO₂界面或SiO₂中与氧有关的缺陷可能是蓝绿光发射的主要原因 关键词：     

镱铒共掺Al2O3薄膜光致发光特性优化

用中频磁控溅射方法在SiO2/Si基底上制备了五组固定掺铒浓度不同镱铒浓度比率的镱铒共掺Al2O3薄膜样品.室温下测量了薄膜在1.430 μm~1.630 μm波段范围内光致发光光谱.研究发现,镱的掺入有效地提高了三价铒离子的光致发光强度,最优的镱铒掺杂为：掺铒0.33 mol%,Yb3+∶Er3+=10∶1,比相同掺铒浓度单掺铒样品光致发光峰值强度增强40倍；确定的掺铒浓度,有着固定的最佳镱铒浓度比率,主要是镱铒离子间的正向和反向能量传递相互作用的结果,但最佳镱铒浓度比率随着掺铒浓度的增加呈现下降趋势；单掺铒薄膜的光致发光峰值强度随掺铒浓度呈现近Gauss形状变化,而最佳镱铒共掺样品的光致发光峰值强度随掺铒浓度呈现了倒Gauss形状变化.     

锗/多孔硅和锗/氧化硅薄膜光致发光的比较研究

采用磁控溅射技术,以锗为溅射靶,在多孔硅上沉积锗薄膜,沉积时间分别为4,8和12 min,及以锗-二氧化硅复合靶为溅射靶,在n型硅衬底上沉积了含纳米锗颗粒的氧化硅薄膜,锗与总靶的面积比分别为5%,15%,30%.各样品在氮气氛中分别经过300,600及900℃退火30 min.对锗/多孔硅和锗/氧化硅薄膜进行了光致发光谱的对比研究,用红外吸收谱分析了锗/多孔硅的薄膜结构.实验结果显示,锗/多孔硅薄膜的发光峰位于517 nm附近,沉积时间对发光峰的强度有显著影响,锗层越厚峰强越弱.锗/氧化硅薄膜的发光峰位于580 nm附近,锗与总靶的面积比对发光峰的强度影响较大,锗/氧化硅薄膜中的锗含量越高峰强越弱.不同的退火温度对样品的发光峰强及峰位均没有明显影响.可以认为锗/多孔硅的发光峰是由多孔硅与孔间隙中的锗纳米晶粒两者界面的锗相关缺陷引起的,而锗/氧化硅的发光峰来自于二氧化硅的发光中心.     

非晶氧化硅薄膜带尾发光特性

采用等离子体增强化学气相沉积技术,通过改变CO2流量制备了不同氧含量的非晶氧化硅薄膜。利用紫外可见吸收谱、傅里叶红外吸收谱和稳态/瞬态光致发光谱等技术研究了薄膜的微观结构和光学特性。实验结果表明,随着氧含量的增加,薄膜的带隙增大,光致发光强度增加、峰值朝高能方向移动、光谱半峰全宽展宽。时间分辨光谱显示薄膜发光峰值处的衰减时间随氧含量的增加从6.2ns单调增加到21ns,而同一样品的发光寿命随发射波长能量增加而减小。综合分析光学吸收、发射及发光衰减特性表明,薄膜的发光机制主要归结为非晶材料带尾态之间的辐射复合。     

Photoluminescence properties of Er-doped β-FeSi2 grown by ion implantation

Photoluminescence (PL) properties of Er-doped β-FeSi₂ (β-FeSi₂:Er) and Er-doped Si (Si:Er) grown by ion implantation were investigated. In PL measurements at 4.2 K, the β-FeSi₂:Er showed the 1.54 μm PL due to the intra-4f shell transition of ⁴I_13/2→⁴I_15/2 in Er³⁺ ions without a defect-related PL observed in Si:Er. In the dependence of the PL intensity on excitation photon flux density, the obtained optical excitation cross-section σ in β-FeSi₂:Er (σ=7×10⁻¹⁷ cm²) is smaller than that in Si:Er (σ=1×10^-15 cm²). In the time-resolved PL and the temperature dependence of the PL intensity, the 1.54 μm PL in β-FeSi₂:Er showed a longer lifetime and larger activation energies for non-radiative recombination (NR) processes than Si:Er. These results revealed that NR centers induced by ion implantation damage were suppressed in β-FeSi₂:Er, but the energy back transfer from Er³⁺ to β-FeSi₂ was larger than Si:Er.     

Photoluminescence from Er-doped silicon rich oxide thin films

 Photoluminescence (PL) properties of Er-doped silicon rich oxide thin films deposited on Si substrate by co-evaporation of silicon monoxide and Er under different atmospheres are investigated. The samples exhibit luminescence peak at 1.54 μm which could be assigned to the recombination in intra-4f Er³⁺ transition. PL shows that this transition is highest when ammonia atmosphere is used during deposition followed by an annealing temperature at 850 °C in 95% N₂+5% H₂ gas (forming gas). In fact, we believe that the presence of the N atoms around Er ions increases the intensity of the 1.54 μm luminescence.     

Analysis of the gain and luminescence properties of Si/Si<Subscript>1−<Emphasis Type="Italic">x</Emphasis></Subscript>G<Subscript>x</Subscript>: Er/Si heterostructures produced by sublimation molecular-beam epitaxy in a gas phase

Si/Si_1?xGe_x: Er/Si structures grown by sublimation molecular-beam epitaxy (SMBE) in a gas phase are studied. These structures are considered possible structures for realizing a Si/Er-based laser. It is shown that SMBE in a gas phase can be applied to create effective light-emitting structures that generate an intense luminescence signal at a wavelength of 1.54 μm. The structures and chemical compositions of the Si/Si_1?xG_x: Er/Si structures, whose parameters are close to those calculated for creating laser-type structures, are examined, and their photoluminescence (PL) spectra and kinetics are studied at 4.2 and 77 K. It is shown that the fraction of Er³⁺ optically active centers in the Si_1?xG_x: Er layers thus grown reaches ～10% of the total erbium-impurity concentration. The optical gains in the active Si_1?xG_x: Er layers at x = 0.1 and 0.02 are estimated to be ～0.03 and ～0.2 cm^?1, respectively. The gain in structures of this type can be significantly increased via the intentional formation of isolated Er³⁺ optically active centers whose PL spectra have a characteristic fine structure.     

掺铒SiOx的光致发光特性

利用分子束外延设备生长了掺铒SiO_x,观察到铒掺入的同时O的掺入效率也得到提高.铒可以促进氧的掺入的原因是铒与氧在硅衬底表面反应，以络合物形式掺入硅中，从而提高了硅中氧的浓度.测量了铒在SiO_x中的光致发光特性，结果表明掺铒的SiO_x的发光强度从18K到300K仅下降了约1/2，这说明Er掺在SiO_x中是一种降低发光强度的温度淬灭效应的途径，最后讨论了温度淬灭的机制. 关键词：     

1.54 μm emission mechanism of Er-doped zinc oxide thin films

Zinc oxide (ZnO) and Er-doped zinc oxide (ZnO:Er) thin films were formed by pulsed laser deposition, and characterized by photoluminescence (PL) and X-ray diffraction (XRD) in order to clarify the 1.54 μm emission mechanism in the ZnO:Er films. Er ions were excited indirectly by the 325 nm line of a He-Cd laser, and the comparison of the ultraviolet to infrared PL data of ZnO and ZnO:Er films showed that the 1.54 μm emission of Er³⁺ in ZnO:Er film appears at the expense of the band edge emission and the defect emission of ZnO. The crystallinity of the films was varied with the substrate temperature and post-annealing, and it was found that the intensity of the 1.54 μm emission is strongly related with the crystallinity of the films. There are three processes leading to the 1.54 μm emission; absorption of excitation energy by the ZnO host, energy transfer from ZnO to Er ions, and radiative relaxation inside Er ions, and it is suggested that the crystallinity plays an important role in the first two processes.     

掺铒硅基材料发光的新途径

关键词：     

Enhanced emission of Er from alternately Er doped Si-rich Al2O3 multilayer film with Si nanocrystals as broadband sensitizers

Alternately Er doped Si-rich Al₂O₃ (Er:SRA) multilayer film, consisting of alternate Er-Si-codoped Al₂O₃ (Er:Si:Al₂O₃) and Si-doped Al₂O₃ (Si:Al₂O₃) sublayers, has been synthesized by co-sputtering from separated Er, Si, and Al₂O₃ targets. The dependence of Er³⁺ related photoluminescence (PL) properties on annealing temperatures over 700-1100 °C was studied. The maximum intensity of Er³⁺ PL, about 10 times higher than that of the monolayer film, was obtained from the multilayer film annealed at 950 °C. The enhancement of Er³⁺ PL intensity is attributed to the energy transfer from the silicon nanocrystals in the Si:Al₂O₃ sublayers to the neighboring Er³⁺ ions in the Er:Si:Al₂O₃ sublayers. The PL intensity exhibits a nonmonotonic temperature dependence: with increasing temperature, the integrated intensity almost remains constant from 14 to 50 K, then reaches maximum at 225 K, and slightly increases again at higher temperatures. Meanwhile, the PL integrated intensity at room temperature is about 30% higher than that at 14 K.     

Population inversion of the energy levels of erbium ions induced by excitation transfer from the semiconductor matrix in Si-Ge based structures

Population inversion of the energy levels of Er³⁺ ions in Si/Si_1?xGe_x:Er/Si (x = 0.28) structures has been achieved due to electron excitation transfer from the semiconductor matrix. An analysis of the photoluminescence kinetics at a wavelength of 1.54 μm shows that up to 80% of the Er³⁺ ions are converted into excited states. This effect, together with the high photoluminescence intensity observed in the structures studied, shows good prospects for obtaining lasers compatible with planar silicon technology.     

The effects of ambient oxygen pressure on the 1.54 μm photoluminescence of Er-doped silicon-rich silicon oxide films grown by laser ablation of a Si+Er target

We fabricated Er-doped silicon-rich silicon oxide (SRSO:Er) films by pulsed laser deposition. A Si+Er target consisting of an Er metallic strip and a silicon disk was adopted with a goal to achieve a convenient control of the Er and oxygen density in the film. We found that the photoluminescence (PL) at 1.54 m is highly dependent on the ambient oxygen pressure, which determines the relative ratio of Si-Si, SiO_x, and SiO₂ phase in the film. The PL intensity increased drastically with increase in the annealing temperature and reached the maximum intensity at 500 °C. PACS 81.15.Fg; 81.07.-b