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溶胶-凝胶法制备有机硅掺杂有机/无机复合疏水性减反射膜的研究 总被引:1,自引:0,他引:1
以正硅酸乙酯(TEOS)和硅油为前驱体,在碱性催化体系中制备出有机硅改性二氧化硅溶胶,采用提拉法获得了具备疏水性能的二氧化硅减反膜。通过透射电镜、扫描探针显微镜、红外光谱、分光光度计、表面轮廓仪等多种方法研究了改性后的膜层性能。在高湿度环境中存放两周后,在波长确定的情况下,常规二氧化硅减反膜透过率由99.2%降到了96.5%,疏水改性膜层透过率仍然高于99%。与常规减反膜相比,疏水改性减反膜在高湿度条件下防止潮气侵蚀的性能得到了大幅度的提高。 相似文献
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本文提出一种测量激光谐振腔反射镜高反射率和测量镀有减反膜的高透过率光学元件的有效方法.特点是同时测量几块高反射率凹面镜或高透过率光学元件,其误差是普通单块测量方法的1/n.详细分析了一组激光腔镜高反射率和一组镀减反膜的平行薄片高透过率的测量结果. 相似文献
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根据惯性约束聚变系统技术要求,提出了镀膜减反方案,以解决现有光栅由于元件表面反射影响零级透过率的问题。使用严格耦合波理论分析了镀sol-gel减反膜的取样光栅特性,详细地分析了仿形膜和平面膜的减反情况和取样效率的变化。结果发现,镀平面膜是一种可行的技术方案,光栅表面反射几乎完全消除,表明可以通过取样光栅镀膜减反来达到提高透射率的目的;裸光栅的深度为12 nm时,平面减反膜厚为60 nm,即光学厚度为等效1/4波长:72 nm。此时的透射率为99.8%,取样效率为0.241‰。 相似文献
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紫外激光SiO2减反膜的制备 总被引:7,自引:0,他引:7
介绍溶胶-凝胶制备SiO2减反膜的溶液配制,基片清洗和膜层制备过程,利用正硅酸乙酯的碱性催化水解,通过浸入移液法在石英透镜的表面涂敷一层多孔SiO2减反膜,涂膜后石英透镜的透过率在350nm波长处达到98.0%以上。 相似文献
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采用溶胶凝胶法制备得到以正丙醇锆和正硅酸乙酯为前驱体的ZrO2和SiO2溶胶,通过TFCalc光学薄膜软件模拟了ZrO2/SiO2三层“宽M型”基频二倍频减反膜,并使用提拉法制备得到了该均匀膜层。三层减反膜在527 nm和1053 nm处的透过率约为99.5%,且透过率大于99%的波长范围均超过150 nm。经热处理后的膜层表面均方根粗糙度为1.34 nm,表面平整性良好;并运用1-on-1激光损伤阈值测试方法测得该减反膜的零几率激光损伤阈值达到36.8 J·cm-2(1064 nm,10.7 ns)。 相似文献
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以正硅酸乙酯为原料,采用溶胶-凝胶法制备SiO_2溶胶,通过提拉法涂制多孔SiO_2减反膜,并在多孔SiO_2减反膜上涂制一层甲基三乙氧基硅烷(MTES)预聚体。通过疏水的MTES预聚体涂制在多孔SiO_2减反膜上,对多孔SiO_2减反膜的表面进行改性,以提高膜层的环境稳定性。经过表面改性的复合膜层的透过率峰值可达99.67%,折射率为1.231,水接触角达123.6°,在相对湿度为95%的环境中放置475 d后膜层的峰值透过率为99.09%,稳定性提高明显。膜层表面平整,激光损伤阈值约为24.5 J/cm~2。 相似文献
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为了制备满足设计要求的宽角度、宽波段减反膜,利用离子束溅射沉积技术,在时间-功率控厚的模式下,对膜层沉积速率进行了精确修正。在实验中,利用时间-功率控厚的离子束溅射沉积技术,选择HfO2和SiO2作为高低折射率组合,在超抛ZF6玻璃基底上制备了宽角度、宽带减反膜,通过对实验后的透过率光谱曲线的数值反演计算,获得膜层厚度修正系数,初步得到了沉积速率随沉积时间变化的规律。利用修正后的沉积参数制备设计的膜系,在0°~30°入射角度下,600~1 200 nm波段的平均透过率达到99%以上。 相似文献
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采用离子束溅射制备了Al F3、Gd F3单层膜及193 nm减反和高反膜系,分别使用分光光度计、原子力显微镜和应力仪研究了薄膜的光学特性、微观结构以及残余应力。在优选的沉积参数下制备出消光系数分别为1.1×10~(-4)和3.0×10~(-4)的低损耗AlF_3和GdF_3薄膜,对应的折射率分别为1.43和1.67,193 nm减反膜系的透过率为99.6%,剩余反射几乎为零,而高反膜系的反射率为99.2%,透过率为0.1%。应力测量结果表明,AlF_3薄膜表现为张应力而GdF_3薄膜具有压应力,与沉积条件相关的低生长应力是AlF_3和GdF_3薄膜残余应力较小的主要原因,采用这两种材料制备的减反及高反膜系应力均低于50 MPa。针对平面和曲率半径为240 mm的凸面元件,通过设计修正挡板,250 mm口径膜厚均匀性均优于97%。为亚纳米精度的平面元件镀制193 nm减反膜系,镀膜后RMS由0.177 nm变为0.219 nm。 相似文献
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V2O5薄膜具有很好的离子注入/退出可逆性,是最有潜力的锂离子储存层的候选材料之一,它的电学特性与制备方法、化学计量比、结构和取向等有直接关系,仔细控制工艺参量是制备出在锂电池上应用的V2O5薄膜关键。研究中采用脉冲磁控反应溅射方法,通过精确地控制氧分压、基底温度等关键工艺参量,在石英玻璃和硅片上制备V2O5薄膜。利用X射线衍射和X射线光电子谱,分析了薄膜的成分、相结构、结晶和价态情况,用原子力显微镜表征了薄膜的微观结构,用分光光度计测量从200—2500nm波段V2O5薄膜纯度高、相结构单一、结晶度好。高低温电阻变化2个量级,薄膜的光学能隙为2.46eV。 相似文献
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基于表面等离子激元的新型超薄金属减色滤波器具有可靠、易制备、高透射率等诸多优点.本文对银、铜、铝、镍等不同金属材料的超薄一维光栅减色滤波器进行了系统研究.仿真获得了透射光谱,理论计算了对应透射光谱的色品坐标,并推导出了银、铜、铝三种材料透射率最低点波长与膜厚、周期关系的经验公式.仿真研究发现:除了镍的选波性较差外,银、铜、铝均表现出较好的、不同的滤波特性,其中银的滤波范围较广,而铜、铝则分别在长、短波段表现出较好的滤波性能.为了验证仿真结果,利用磁控溅射技术和聚焦离子束刻蚀技术进行了三种材料的一维光栅减色滤波器的制备实验,并在显微镜下观察滤波器的颜色效应,结果与理论仿真相符合.研究结果表明:不同金属材料在相同微结构下的颜色效应存在较大差异,可根据实际滤波需要,选择材料和微结构参数来获得最佳性价比的滤波器. 相似文献
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Zinc telluride thin films with different thicknesses have been deposited by electron beam gun evaporation system onto glass substrates at room temperature. X-ray and electron diffraction techniques have been employed to determine the crystal structure and the particle size of the deposited films. The stoichiometry of the deposited films was confirmed by means of energy-dispersive X-ray spectrometry. The optical transmission and reflection spectrum of the deposited films have been recorded in the wavelength optical range 450-2500 nm. The variation of the optical parameters, i.e. refractive index, n, extinction coefficient, k, with thickness of the deposited films has been investigated. The refractive index dispersion in the transmission and low absorption region is adequately described by the single-oscillator model, whereby the values of the oscillator strength, oscillator position, dispersion parameter as well as the high-frequency dielectric constant were calculated for different film thickness. Graphical representations of the surface and volume energy loss function were also presented. 相似文献
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空间遥感应用中的光学有效载荷对系统偏振控制提出了越来越高的要求,作为常用的宽光谱反射镜,金属银(Ag)膜反射镜的偏振特性随着环境温度的改变而变化。本文设计并制备了低偏振灵敏度的Ag膜反射镜,研究了反射镜在45°和60°入射角下,从室温25℃升温到150℃时的偏振特性变化和反射光谱变化情况。随着温度的升高,Ag膜的折射率在350~1 200 nm波长范围内有所增加;Ag膜反射镜的反射光中s和p光的相位差Δ在350~600 nm波长范围内减小,在600~650 nm波长范围内基本稳定,在650~1 200 nm波长范围内增大。温度上升到125℃时,Ag膜和反射镜表面形貌发生改变,增加了表面散射和吸收,导致350~900 nm波段反射率降低,在波长350 nm附近的降低约25%。 相似文献
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Transmission measurements have been carried out on InN thin films grown by radio frequency magnetron sputtering on a sapphire (0001) substrate at 10–300 K. With the aid of a novel procedure developed for analyzing the transmission spectra, the effect of temperature on optical properties, such as the absorption coefficient, band-gap, Urbach bandtail characteristics, refractive index and extinction coefficient, of InN thin films has been determined. The wavelength and temperature dependence of the absorption coefficient in both the Urbach and intrinsic absorption regions has been described by a series of empirical formulae. The temperature dependence of the refractive index dispersion below the band-gap is also found to follow a Sellmeier equation. These formulae are very useful for the characterization and device design of InN films. The free-electron concentration in the InN thin film determined here is also found to be in good agreement with that obtained from infrared reflection measurements. PACS 78.66.Fd; 78.40.Fy; 78.20.Bh; 78.20.Ci 相似文献
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A.V. RahachouA.A. Rogachev M.A. YarmolenkoJiang Xiao-Hong Liu Zhu Bo 《Applied Surface Science》2012,258(6):1976-1980
The molecular organization of polytetrafluoroethylene (PTFE) thin coatings with incorporated Ag, Cu, and Mo nanoparticles that are deposited from an active gas component has been studied. Polyethylene terephtalate film coated by aluminium served as a substrate. The active gas component was produced by electron beam dispersion of original components in vacuum. The effect of metal particle size and its nature on the molecular structure of coatings have been investigated. Dichroism of thin nanocomposite coatings has been examined by polarized Fourier transform infrared spectroscopy using an attenuated total reflection unit. The morphology of the coatings has been analyzed by transmission (TEM), atomic-force (AFM), and scanning electron (SEM) microscopy. It is found that introduction of a metal (Ag or Cu) yields oriented layers at a lesser efficient thickness of a coating. The surface plasmon resonance of such structures was studied by measuring optical absorption of the coatings in the ultraviolet and visible ranges. The results show that the composite coatings containing Ag clusters are diameter less than 30 nm and absorb within the short-wave range from 400 to 550 nm. 相似文献