超声清洗与激光预处理对减反膜阈值的影响

 研究了超声清洗和激光预处理两种后处理手段对减反膜的损伤特性的影响。采用电子束蒸发技术制备了1 064 nm减反膜，利用超声清洗及激光预处理的方法分别对样品进行处理，并对处理前后的样品分别进行激光损伤阈值测试及破斑深度测量。结果表明：处理后减反膜的损伤阈值均有所提升，但激光预处理的阈值增强效果更加明显；超声清洗前后的破斑深度没有大的变化，而激光预处理后的破斑深度比处理前浅得多；原因在于超声清洗只能去除表面杂质，激光预处理可减少和抑制膜层内较深处的缺陷。     

Damage investigations of AR coating under atmospheric and vacuum conditions

The damage characteristics of anti-reflection films exposed to 1064 nm nanosecond laser pulses in vacuum and air were investigated. The laser-induced damage thresholds (LIDT) in vacuum and air environments were compared. The damage morphologies were locally analyzed using optical microscopy and scanning electron microscopy (SEM). The depth of the damage sites in the two environments was analyzed by Alpha2Step 500 m. The differences between the damage observed in the two environments were discussed based on the temperature distribution, absorption and vacuum gaseous composition measurements and gas pressure influence analysis. Increased coupling of the plasma shock wave and adsorbing water in the coating layer may be considered as the primary cause of the low LIDT observed in vacuum.     

Nanosecond multi-pulse damage investigation of optical coatings in atmosphere and vacuum environments

The cumulative effect of nanosecond multi-pulse irradiation on the dielectric coatings in atmosphere and vacuum environments was investigated. The laser-induced damage thresholds (LIDT) and the life span submitted to multi-pulse irradiation in two environments were compared. For both environments, we observe a decrease in laser-induced damage thresholds (LIDT) when shot number increase. However, the fatigue effect under repetitive shots under atmosphere environments and vacuum cases leads to different speeds of degradation. The correlative theory models were built to explain the experimental results.     

酸蚀与紫外激光预处理结合提高熔石英损伤阈值

采用HF酸刻蚀和紫外激光预处理相结合的方式提升熔石英元件的负载能力,用质量分数为1%的HF缓冲溶液对熔石英刻蚀1~100 min,综合透过率、粗糙度和损伤阈值测试结果,发现刻蚀时间为10min的熔石英抗损伤能力最佳。采用355 nm紫外激光对HF酸刻蚀10 min的熔石英进行预处理,结果表明:紫外预处理能量密度在熔石英零损伤阈值的60%以下时,激光损伤阈值单调递增;能量到达80%时,阈值反而低于原始样片的损伤阈值。适当地控制酸蚀时间和紫外激光预处理参数能有效提高熔石英的抗损伤能力。     

A comparative study of the influence of different post-treatment methods on the properties of HfO2 single layers

Heat treatment, laser conditioning and ion post-treatment were used, respectively, on HfO₂ single layers deposited by electron beam evaporation (EBE). Optical, structural and laser-induced damage threshold (LIDT) properties of the films had been studied. It was found that all of the post-treatment methods are effective for improving the LIDT, but the mechanism for the improvement differs. Heat treatment in atmosphere was found to be effective for improving film stoichiometry. Laser conditioning was useful to decrease the defects by stress release. While in the ion post-treatment, the defects were removed by ion sputtering and the absorption was reduced at the effect of compression induced by ion bombardment. The most suitable method should be chosen for the required characteristics of the coatings.     

HfO2/SiO2多层高反膜激光预处理技术

采用不同的光斑移动距离,对电子束蒸发制备的HfO2/SiO2多层高反膜进行了单步及多步预处理。结果表明:为了使薄膜不产生损伤,预处理最高能量密度最好不超过薄膜零几率损伤阈值的90%; 相同预处理效率下进行的单步预处理对提高光学薄膜抗激光损伤阈值的效果比多步预处理好;对HfO2/SiO2高反膜进行98.4%能量覆盖的两步预处理后薄膜损伤阈值提高81%;控制薄膜的缺陷源,初始物质应采用金属Hf。     

Calculation of temperature fields with a film-substrate interfacial layer model to discuss the layer-pair number effects on the damage thresholds of LaF3/MgF2 high reflectors at 355 nm

Laser induced damage thresholds (LIDT) of LaF₃/MgF₂ high reflectors at 355 nm were measured and investigated as a function of layer-pair number. Generally, LaF₃/MgF₂ coatings with more layer pairs possessed higher LIDT, but coatings with too high layer-pair number crazed because of high tensile stress, so the LIDT of them decreased badly. The temperature rise in the coatings was calculated based on a film-substrate interfacial absorption model, and the depth of the damage in the coatings were measured by a Veeco optical profilograph. The two characterization methods together were used to interpret the effects of layer-pair number on LIDT, and the damage mechanism of coatings at laser wavelength of 355 nm was also discussed.     

光学元件激光预处理技术

国外学者用1064 nm激光对pickoff镜进行预处理,发现损伤阈值平均提高38.8%。国内研究者用CO2激光中度抛光后,熔石英基片的损伤阈值提到了30%左右,激光波长、扫描方式等对处理效果影响也比较明显。介绍了三种公认的预处理机制,将离线与在线处理方式做了简单地比较,并对国内外激光预处理技术的发展和前景进行了展望。     

Effect of native defects and laser-induced defects on multi-shot laser-induced damage in multilayer mirrors

The roles of laser-induced defects and native defects in multilayer mirrors under multi-shot irradiation condition are investigated. The HfO 2 /SiO 2 dielectric mirrors are deposited by electron beam evaporation(EBE) . Laser damage testing is carried out on both the 1-on-1 and S-on-1 regimes using 355-nm pulsed laser at a duration of 8 ns. It is found that the single-shot laser-induced damage threshold(LIDT) is much higher than the multi-shot LIDT. In the multi-shot mode,the main factor influencing LIDT is the accumulation of irreversible laser-induced defects and native defects. The surface morphologies of the samples are observed by optical microscopy. Moreover,the number of laser-induced defects affects the damage probability of the samples. A correlative model based on critical conduction band(CB) electron density(ED) is presented to simulate the multi-shot damage behavior.     

真空退火对355nm Al2O3/MgF2高反射薄膜性能的影响

 采用电子束蒸发沉积技术制备了355nm Al₂O₃/MgF₂ 高反射薄膜，并在真空中进行不同温度梯度的退火，用X射线衍射（XRD）观察了薄膜微结构的变化，用355nm Nd：YAG脉冲激光测试了薄膜的激光损伤阈值，用Lambda 900光谱仪测试了薄膜的透过和反射光谱。结果表明在工艺条件相同的条件下真空退火过程对薄膜的性能有很大的影响，退火温度梯度越小的样品，吸收越小，阈值越大，并且是非晶结构。选择合适的真空退火过程可以减少355nm Al₂O₃/MgF₂ 高反射膜的膜层吸收，提高薄膜的激光损伤阈值。     

激光预处理中缺陷上的激光能量覆盖

分析了不同预处理方式下缺陷上的激光能量的覆盖特点。理论分析表明,相同预处理效率下,单步预处理缺陷上激光能量覆盖率优于多步预处理。实验研究了电子束蒸发制备的HfO2/SiO2多层高反膜的激光预处理,结果发现单步预处理后薄膜的单脉冲激光损伤阈值比相同效率的4步预处理后薄膜的单脉冲激光损伤阈值要好。采用最高能量密度为112%激光损伤阈值的5步预处理后,光学薄膜的激光损伤阈值提高了83.5%。     

气氛环境对真空窗口紫外激光诱导损伤阈值的影响机制

基于氟橡胶圈密封测试了熔石英真空窗口在351 nm激光辐照下的激光诱导损伤阈值（LIDT）,实验发现真空窗口和氟橡胶圈紧密接触后LIDT下降约50%,氟橡胶圈经多次挤压后,其对真空窗口LIDT的影响显著减弱,在此基础上对比了大气、103 Pa和10?2～10?1 Pa下真空窗口的LIDT,结果显示随着气压降低真空窗口LIDT显著下降且气压再次升高后其LIDT未有提升。基于铟丝密封对比测试了真空窗口在不同气压下的LIDT,结果未发现气体含量差异对真空窗口LIDT的影响。对比两种密封材料测试结果,认为真空窗口LIDT下降是由氟橡胶圈污染引起,且低气压下有机物释放加剧。     

激光输出特性对介质薄膜损伤的影响

 采用输出特性不同的几种激光器测量了多种介质光学薄膜的破坏阈值,并对典型的破坏过程进行显微分析。研究了激光输出特性的不同对薄膜损伤效果的影响:在相同能量输出的条件下,脉冲激光比连续激光更容易形成有效的破坏;连续激光则能通过能量积累而更容易对作用目标造成烧蚀破坏。     

不同工艺制备的高反射薄膜在真空与大气环境下的激光损伤特性

 建立了光学元件在真空环境下的激光损伤测量系统,采用电子束蒸发和离子辅助技术制备了Hf­₂/SiO₂高反射薄膜。对不同工艺制备的薄膜在真空与大气环境下的1 064 nm波长的激光损伤阈值进行了测量,对薄膜的损伤形貌进行了观测。对薄膜的损伤特性研究分析结果表明：薄膜在真空环境中的损伤阈值相对大气环境中有明显下降,其1∶1测试和R1测试损伤阈值下降约30%;两种环境中的薄膜损伤特性也不同,真空环境中损伤阈值的下降可能与热传导的不同有关。     

Effects of water vapor in high vacuum chamber on the properties of HfO2 films

The influence of water vapor content in high vacuum chamber during the coating process on physical properties of HfO2 films was investigated. Coatings were deposited on BK7 substrates by electron beam evaporation and photoelectric maximum control method. An in situ residual gas analyzer (RGA) was used to monitor the residual gas composition in the vacuum chamber. The optical properties, microstructure,absorption and laser-induced damage threshold (LIDT) of the samples were characterized by Lambda 900 spectrophotometer, X-ray diffraction (XRD), surface thermal lensing (STL) technique and 1064-nm Qswitched pulsed laser at a pulse duration of 12 ns respectively. It was found that a cold trap is an effective equipment to suppress water vapor in the vacuum chamber during the pumping process, and the coatings deposited in the vacuum atmosphere with relatively low water vapor composition show higher refractive index and smaller grain size. Meanwhile, the higher LIDT value is corresponding to lower absorbance.     

Laser Induced Damage in CVD Diamond Films

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光学薄膜的激光损伤研究进展

从理论、实验两方面对薄膜的激光损伤机理和提高损伤阈值的手段进行了回顾。概括了现有理论模型及其适用范围,对缺陷的行为进行了多方面的论述,重点比较了各种制备方法及后处理手段的特点,分析了主要工艺参数对薄膜损伤阈值的影响。结合本实验室及国内外同行的工作,对溶胶-凝胶法制备高损伤阈值薄膜的工艺进行了总结。从吸收、热传导、抗拉强度等角度对物理膜和化学膜在结构与性能上进行了比较,提出了从化学键、成膜过程等方面分析损伤机理的建议,并结合真空污染、亚表面损伤等新问题提出了未来工作的发展方向。     

1 064 nm高反射薄膜激光损伤阈值测量方法

 参照国际上对激光损伤阈值不同测量技术建立起来的相应检测规范和标准,分别采用1-on-1,S-on-1,R-on-1和光栅扫描共4种测量方式,在1 064 nm波长下对HfO₂/SiO₂周期性高反射薄膜进行了激光损伤阈值的测量研究。根据测量结果,比较并分析了这4种测量方式之间的差异,重点研究了R-on-1和光栅扫描测量方式中存在的激光预处理效应对薄膜损伤阈值的影响,以及辐照激光光斑尺寸与损伤阈值之间的联系,并讨论了光栅扫描方式中预处理效应与扫描间距和扫描能量密度梯度的关系。研究表明：R-on-1方式下测得的损伤阈值最高,光栅扫描和1-on-1次之,S-on-1最小;1 000个脉冲激光辐照下的累积效应不显著,并且在激光光斑尺寸的差异较小时,阈值与光斑尺寸的对应关系并不明显;光斑尺寸相同时,扫描光斑的间距越小,激光预处理效果越好。     

多重分形谱研究溶胶-凝胶SiO2疏水减反膜的激光预处理作用

采用溶胶-凝胶提拉技术制备了SiO₂疏水减反膜.使用Nd：YAG激光（波长为1064nm,脉宽为7.5ns）采用“R on 1”方式对所得膜层进行了激光预处理.在预处理前后采用“1 on 1”方式考察了薄膜的激光损伤阈值的变化,使用原子力显微镜（AFM）观察了薄膜的表面形貌的变化,并使用多重分形谱（MFS）方法分析了薄膜分形结构的变化.结果表明经过激光预处理后薄膜的抗激光损伤阈值有了明显提高,均方根表面粗糙度（R_q）稍有减小,膜面变平整,多重分形谱宽度收缩,分形区间的分布均匀性改善.这说明经过激光预处理后薄膜表面微结构趋向规整,使之能够承受更强的激光的辐照.同时也说明借助多重分形谱可以获得更多薄膜表面结构变化的信息,多重分形谱是探索强激光对光学薄膜辐照作用机理的一个十分有用的方法. 关键词： 2疏水减反膜')" href="#">SiO₂疏水减反膜 激光预处理 多重分形谱 激光损伤阈值     

Impact of organic contamination in vacuum on laser-induced damage threshold of TiO2/SiO2 dielectric mirrors

The influence of organic contamination in vacuum on the laser-induced damage threshold (LIDT) of coatings is studied. TiO2/SiO2 dielectric mirrors with high reflection at 1064 nm are deposited by the electronbeam evaporation method and their LIDTs are measured in vacuum and atmosphere, respectively.It is found that the contamination in vacuum is easily attracted to optical surfaces because of the low pressure and becomes the source of damage, O2 molecules in vacuum with contamination can accelerate the laser-induced damage by observing LIDT and damage morphologies. LIDTs of mirrors have a little change in vacuum compared with in atmosphere when the organic contamination is wiped off. The results indicate that organic contamination is a significant reason to decrease the LIDT in vacuum.