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Laser Induced Damage in CVD Diamond Films
作者单位:Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,P.O.Box 800211,Shanghai 201800,China
摘    要:LaserInducedDamageinCVDDiamondFilmsQIUHongFANZhengxiu(ShanghaiInstituteofOpticsandFineMechanics,ChineseAcademyofSciences,P.O....

收稿时间:1997/4/15

Laser Induced Damage in CVD Diamond Films
Abstract:Thin diamond films, mostly as a protect layer, are gradually applied in high power laser field to increases the LIDT(Laser Induced Damage Threshold). Temperature field concept and PTL method are used to understand film absorption. XRD microprobe studies are focused on the determination of film compositions. The laser damage experiment shows that the LIDT of the films deposited by the hot filasment CVD method is greatly affected by included impurities, such as graphite, diamond like carbon, diamond like hydrogenated carbon and filament pollution. The thickness effect has been apparently observed.
Keywords:CVD diamond film  XRD  LIDT  absorption
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