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激光预处理中缺陷上的激光能量覆盖
引用本文:代福,杨李茗.激光预处理中缺陷上的激光能量覆盖[J].强激光与粒子束,2012,24(6):1385-1390.
作者姓名:代福  杨李茗
作者单位:1.成都精密光学工程研究中心, 成都 61 0041
摘    要:分析了不同预处理方式下缺陷上的激光能量的覆盖特点。理论分析表明,相同预处理效率下,单步预处理缺陷上激光能量覆盖率优于多步预处理。实验研究了电子束蒸发制备的HfO2/SiO2多层高反膜的激光预处理,结果发现单步预处理后薄膜的单脉冲激光损伤阈值比相同效率的4步预处理后薄膜的单脉冲激光损伤阈值要好。采用最高能量密度为112%激光损伤阈值的5步预处理后,光学薄膜的激光损伤阈值提高了83.5%。

关 键 词:激光预处理    缺陷    能量覆盖    高反射膜
收稿时间:2012/2/2

Laser coverage on defect in laser conditioning process
Dai Fu , Yang Liming.Laser coverage on defect in laser conditioning process[J].High Power Laser and Particle Beams,2012,24(6):1385-1390.
Authors:Dai Fu  Yang Liming
Affiliation:1.Chengdu Fine Optical Engineering Research Center,Chengdu 610041,China
Abstract:The laser energy covering the defect in laser-conditioning process is studied, and its characteristics in different laser-conditioning processes are analyzed. Theoretical analysis shows that, with the same conditioning efficiency, the laser energy coverage rate of single-step conditioning is better than that of multi-step conditioning. From laser-conditioning experiments of the HfO2/SiO2 high reflective coating deposited by E-beam evaporation, we know that the LIDT (laser-induced damage threshold) enhancement of the coating after single-step conditioning is better than that of the coating after multi-step conditioning with the same conditioning efficiency. Using the highest irradiating energy of 112%E0, the LIDT of coating after 5-step conditioning is 183.5% of that before conditioning.
Keywords:laser-conditioning  defect  energy coverage  high reflective coating
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