氧掺入对纳米硅薄膜微结构及能带特性的影响

采用等离子体增强化学气相沉积法(PECVD)制备了富硅氧化硅薄膜,利用XRD衍射仪,傅里叶变换红外透射光谱仪以及紫外-可见光分光光度计分析了氧掺入对薄膜微观结构以及能带特性的影响。结果表明,随着氧掺入比(CO₂/SiH₄)的增加,薄膜晶粒尺寸减小,晶化度降低,纳米硅(nc-Si)表面的张应力先增加后减小。红外吸收谱分析表明,氧掺入比增加导致薄膜内氧含量增高,富氧Si—O键合密度增加,富硅Si—O键合密度降低。同时,薄膜结构因子减小,有序度增大,薄膜微观结构得到改善。当氧掺入比大于0.08时,薄膜结构因子增大,有序度降低。此外,氧掺入增加导致薄膜带隙不断增加,带尾宽度呈现先减小后增大的趋势。因此,通过氧掺入可以调节纳米硅薄膜微观结构及能带特性,氧掺入比为0.08时,薄膜具有高晶化度和较宽的带隙,微观结构得到有效改善,可用作薄膜太阳能电池的本征层。     

氢化纳米硅薄膜中氢的键合特征及其能带结构分析

对氢化纳米硅薄膜中氢的键合特征和薄膜能带结构之间的关系进行了研究.所用样品采用螺 旋波等离子体化学气相沉积技术制备，利用Raman散射、红外吸收和光学吸收技术对薄膜的 微观结构、氢的键合特征以及能带结构特性进行了分析.Raman结果显示不同衬底温度下所生 长薄膜的微观结构存在显著差异，从非晶硅到纳米晶硅转化的衬底温度阈值为200℃.薄膜中 氢的键合特征与薄膜的能带结构密切相关.氢化非晶硅薄膜具有较高的氢含量，因键合氢引 起的价带化学位移和低衬底温度决定的结构无序性，使薄膜呈现较大的光学带隙和带尾宽度 .升 关键词： 氢化纳米硅 螺旋波等离子体 能带结构     

氢稀释对多晶硅薄膜结构特性和光学特性的影响

以SiCl₄和H₂为气源，用等离子体增强化学气相沉积技术，在250℃的低温下，研究氢稀释度对多晶硅薄膜结构特性的影响.实验结果表明，对于以SiCl₄和H₂组成的反应源气体，氢对薄膜生长特性的影响有异于SiH₄/H₂，在一定功率下，薄膜的晶化率随氢稀释度的减小而增加，在一定的氢稀释度下薄膜晶化度达到最大值85％；随着氢稀释度的继续减小，薄膜晶化度迅速下降，并逐渐向非晶态结构转变.随氢稀释度的减小，薄膜的光学带隙由 1.5eV减小至约1.2eV，而后增大至1.8eV.沉积速率则随氢稀释度的减小先增加后减小，在无氢条件下，无薄膜形成.在最佳氢稀释度条件下，Cl基是促进晶化度提高，晶粒长大的一个主要因素. 关键词： 多晶硅薄膜 微结构 氢稀释 4')" href="#">SiCl₄     

氢稀释对纳米晶硅薄膜晶化特性的影响及薄膜生长机理

以SiH4与H2作为前驱气体,采用射频等离子增强化学气相沉积技术制备了纳米晶硅薄膜.利用Raman散射和红外吸收光谱等技术,对不同氢稀释比条件下薄膜的微观结构和键合特性进行了研究.结果表明,随着氢稀释比增加,薄膜的晶化率明显提高,而氢稀释比过高时,薄膜晶化率呈现减少趋势.红外吸收光谱分析表明,纳米晶硅薄膜中氢的键合模式与薄膜的晶化特性密切相关.随着氢稀释比增加,薄膜中整体氢含量和SiH2键合密度明显减少,而在高氢稀释比条件下,氢稀释比增加导致薄膜中SiH2键合密度和整体氢含量增加.     

氢稀释对纳米晶硅薄膜晶化特性的影响及薄膜生长机理

以SiH₄与H₂作为前驱气体,采用射频等离子增强化学气相沉积技术制备了纳米晶硅薄膜.利用Raman散射和红外吸收光谱等技术,对不同氢稀释比条件下薄膜的微观结构和键合特性进行了研究.结果表明,随着氢稀释比增加,薄膜的晶化率明显提高,而氢稀释比过高时,薄膜晶化率呈现减少趋势.红外吸收光谱分析表明,纳米晶硅薄膜中氢的键合模式与薄膜的晶化特性密切相关.随着氢稀释比增加,薄膜中整体氢含量和SiH₂键合密度明显减少,而在高氢稀释比条件下,氢稀释比增加导致薄膜中SiH₂键合密度和整体氢含量增加.     

镶嵌有纳米硅的氮化硅薄膜键合特性分析

采用螺旋波等离子体化学气相沉积(HWPCVD)技术制备了非化学计量比的氢化氮化硅薄膜,对所沉积样品及氮气环境中920 ℃退火样品的微观结构及键合特性进行了分析。Raman散射结果表明,薄膜中过量硅以非晶纳米粒子形式存在,退火样品呈现纳米晶硅和氮化硅的镶嵌结构。红外吸收和可见光吸收特性比较结果显示,薄膜样品的微观结构依赖于化学计量比以及退火过程,硅含量较低样品因高的键合氢含量而表现出低的纳米硅表面缺陷态密度;退火过程将引起Si—H和N—H键合密度的减少,因晶态纳米颗粒的形成,退火样品表现出更高的结构无序度。     

Yttrium oxide thin films prepared under different oxygen-content atmospheres: microstructure and optical properties

Yttrium oxide films were prepared on silicon wafers by reactive magnetron sputtering at different oxygen flow rates to investigate the microstructure and optical properties for desirable planar optical waveguiding applications. Under the different conditions of target surface, the deposition rate, structure, and optical properties have great changes. The deposition rate increases to the maximum, and then monotonically decreases. Oxygen content in films increases and the composition of films transforms from stoichiometry to an oxygen-rich state. Y₂O₃ films grow with the (222) preferred growth orientation at low oxygen flow rate, and then turn into the (622) orientation; the microstructure evolves from crystal structure to amorphous state as oxygen flow rate increases from 2 to 12 sccm. Sufficient oxygen makes films low-order structure and oxygen-rich films have poor crystallinity. Very smooth film has been obtained at oxygen flow rate of 12 sccm. The refractive index can be greatly modulated by the oxygen-content factor. It is convincing that the controllable structure and optical properties of Y₂O₃ films can be achieved by adjustment the oxygen flow rate for desired optical design and applications.     

Preparation of hydrogenated microcrystalline silicon films with hot-wire-assisted MWECR-CVD system

Intrinsic hydrogenated microcrystalline silicon (\muc-Si:H) films have been prepared by hot-wire-assisted microwave electron-cyclotron-resonance chemical vapour deposition (HW-MWECR-CVD) under different deposition conditions. Fourier-transform infrared spectra and Raman spectra were measured. Optical band gap was determined by Tauc plots, and experiments of photo-induced degradation were performed. It was observed that hydrogen dilution plays a more essential role than substrate temperature in microcrystalline transformation at low temperatures. Crystalline volume fraction and mean grain size in the films increase with the dilution ratio (R=H₂/(H₂+SiH₄)). With the rise of crystallinity in the films, the optical band gap tends to become narrower while the hydrogen content and photo-induced degradation decrease dramatically. The samples, were identified as \mu c-Si:H films, by calculating the optical band gap. It is considered that hydrogen dilution has an effect on reducing the crystallization activation energy of the material, which promotes the heterogeneous solid-state phase transition characterized by the Johnson--Mehl--Avrami (JMA) equation. The films with the needed structure can be prepared by balancing deposition and crystallization through controlling process parameters.     

红外光谱法研究射频功率对微晶硅薄膜微结构的影响

采用射频等离子体增强化学气相沉积(RF-PECVD)技术,在硅衬底上以不同的射频功率生长微晶硅(μc-Si:H)薄膜,利用傅里叶变换红外透射光谱技术对薄膜进行测试.通过对红外透射光谱的高斯拟合分析,结果表明薄膜中的氢含量和硅氢键合模式跟射频功率密切相关;当射频率从30W增加到110W时,薄膜中的氢含量先减少后慢慢增加,而结构因子逐渐增加后再减小,并且硅氢键合模式由以SiH为主转变为以SiH2为主.并讨论了这些参量随射频功率变化的机理.     

Effects of hydrogen on photoluminescence properties of a-SiNx:H films prepared by VHF-PECVD

Luminescent hydrogenated amorphous silicon nitride films were prepared with different hydrogen flow rate in very high frequency plasma enhanced chemical vapor deposition system. Very bright orange-red light emissions can be clearly observed with the naked eye in a bright room for the films grown at the hydrogen flow rate of 30 sccm. The photoluminescence intensity of the film grown at the hydrogen flow rate of 30 sccm is found to be four times higher than that of the film without hydrogen dilution. However, with further increasing the hydrogen flow rate from 30 to 90 sccm, the photoluminescence intensity of the film rapidly decreases. Fourier-transform infrared absorption spectra indicate that the introduction of hydrogen concentration bonded to silicon and nitrogen is of a key role to enhance the photoluminescence intensity of the films. Based on the measurements of structural and bonding configurations, the improved photoluminescence intensity is attributed to the well hydrogen passivation of nonradiative defect states related to N and Si at proper hydrogen flow rate.     

Interrelation between microstructure and optical properties of erbium-doped nanocrystalline thin films

Nanocrystalline silicon thin films codoped with erbium, oxygen and hydrogen have been deposited by co-sputtering of Er and Si. Films with different crystallinity, crystallite size and oxygen content have been obtained in order to investigate the effect of the microstructure on the photoluminescence properties. The correlation between the optical properties and microstructural parameters of the films is investigated by spectroscopic ellipsometry. PL response of the discussed structures covers both the visible wavelength range (a crystallite size-dependent photoluminescence detected for 5–6 nm sized nanocrystals embedded in a SiO matrix) and near IR range at 1.54 μm (Er-related PL dominating in the films with 1–3 nm sized Si nanocrystals embedded in a-Si:H). It is demonstrated that the different PL properties can be also discriminated on the basis of ellipsometric spectra.     

Dependence of Optical Absorption in Silicon Nanostructures on Size of Silicon Nanoparticles

The amorphous silicon nanoparticles (Si NPs) embedded in silicon nitride (SiN_x) films prepared by helicon wave plasma-enhanced chemical vapor deposition (HWP-CVD) technique are studied. From Raman scattering investigation, we determine that the deposited film has the structure of silicon nanocrystals embedded in silicon nitride (nc-Si/SiNx) thin film at a certain hydrogen dilution amount. The analysis of optical absorption spectra implies that the Si NPs is affected by quantum size effects and has the nature of an indirect-band-gap semiconductor. Further, considering the effects of the mean Si NP size and their dispersion on oscillator strength, and quantum-confinement, we obtain an analytical expression for the spectral absorbance of ensemble samples. Gaussian as well as lognormal size-distributions of the Si NPs are considered for optical absorption coefficient calculations. The influence of the particlesize-distribution on the optical absorption spectra was systematically studied. We present the fitting of the optical absorption experimental data with our model and discuss the results.     

纳米晶硅薄膜中氢含量及键合模式的红外分析

采用传统射频等离子体化学气相沉积技术在100—350℃的衬底温度下高速沉积氢化硅薄膜. 傅里叶变换红外光谱和Raman谱的研究表明,纳米晶硅薄膜中的氢含量和硅氢键合模式与薄膜的晶化特性有密切关系,当薄膜从非晶相向晶相转变时,氢的含量减少了一半以上,硅氢键合模式以SiH₂为主. 随着衬底温度的升高和晶化率的增加,纳米晶硅薄膜中氢的含量以及其结构因子逐渐减少. 关键词： 氢化纳米晶硅薄膜 红外透射谱 氢含量 硅氢键合模式     

氢稀释对FTS沉积a-Si:H薄膜结构特性的影响

采用对靶磁控反应溅射技术,以氢气作为反应气体在不同的氢稀释比条件下制备了氢化非晶硅薄膜.利用台阶仪、傅里叶红外透射光谱、Raman谱和紫外-可见光透射谱测量研究了不同氢稀释比对氢化非晶硅薄膜生长速率和结构特性的影响.分析结果发现,利用对靶磁控溅射技术能够实现低温快速沉积高质量氢化非晶硅薄膜的制备.随着氢稀释比不断增加,薄膜沉积速率呈现先减小后增大的趋势.傅里叶红外透射光谱表明,氢化非晶硅薄膜中氢含量先增大后变小.而Raman谱和紫外-可见光透射谱分析发现,氢稀释比的增加使氢化非晶硅薄膜有序度和光学带隙均先增大后减小.可见,此技术通过改变氢稀释比R能够实现氢化非晶硅薄膜结构的有效控制.     

The optoelectronic properties of silicon films deposited by inductively coupled plasma CVD

Hydrogenated amorphous and microcrystalline silicon films were deposited by inductively coupled plasma chemical vapor deposition (ICP-CVD) at low substrate temperatures using H₂-diluted SiH₄ as a source gas. High-density plasma generated by inductively coupled excitation facilitates the crystallization of silicon films at low temperatures, and microcrystalline silicon films were obtained at the substrate temperature as low as 180 °C. The columnar structure of the films becomes more and more compact with an increase of their crystallinity. The reduction of hydrogen content in the films causes a narrowing of the optical bandgap and an enhancement of the absorption with increasing the substrate temperature. The microcrystalline silicon films show two electronic transport mechanisms: one is related to the density of state distribution in the temperature region near room temperature and the other is the variable range hopping between localized electronic states close to the Fermi level below 170 K. A reasonable explanation is presented for the dependence of the optoelectronic properties on the microstructure of the silicon films. The films prepared at a substrate temperature of 300 °C have highly crystalline and compact columnar structure, high optical absorption coefficient and electrical conductivity, and a low hydrogen content of 3.8%.     

Dynamical resolidification behavior of silicon thin films during frontside and backside excimer laser annealing

Excimer laser annealing (ELA) is frequently employed to fabricate low-temperature polycrystalline silicon films on glass substrate. The grain size and crystallinity of polycrystalline silicon films are significantly affected by the resolidification behavior during ELA. A real-time in situ time-resolved optical measurement system is developed to record the rapid phase transformation process during ELA. The average solidification velocity of liquid-Si is calculated from these optical spectra using MATLAB and Excel softwares. Field emission scanning electron microscopy images reveal maximum grain size of poly-Si films with a diameter of 1 μm, which is obtained in the complete melting regime of both frontside ELA and backside ELA. Recrystallization mechanisms of complete melting of Si thin films in frontside ELA and backside ELA are demonstrated. Resolidification scenarios of partial melting, near-complete melting and complete melting in frontside ELA and backside ELA are proposed.     

氢稀释对FTS沉积a-Si∶H薄膜结构特性的影响

采用对靶磁控反应溅射技术,以氢气作为反应气体在不同的氢稀释比条件下制备了氢化非晶硅薄膜.利用台阶仪、傅里叶红外透射光谱、Raman谱和紫外-可见光透射谱测量研究了不同氢稀释比对氢化非晶硅薄膜生长速率和结构特性的影响.分析结果发现,利用对靶磁控溅射技术能够实现低温快速沉积高质量氢化非晶硅薄膜的制备.随着氢稀释比不断增加,薄膜沉积速率呈现先减小后增大的趋势.傅里叶红外透射光谱表明,氢化非晶硅薄膜中氢含量先增大后变小.而Raman谱和紫外-可见光透射谱分析发现,氢稀释比的增加使氢化非晶硅薄膜有序度和光学带隙均先增大后减小.可见,此技术通过改变氢稀释比R能够实现氢化非晶硅薄膜结构的有效控制.     

掺锰氧化锌的结构和光学特性

采用直流反应磁控溅射的方法,在玻璃衬底上沉积了Zn0.93Mn0.07O薄膜,研究了氧分压对薄膜结构和光学特性的影响。X射线衍射测试结果显示,Zn0.93Mn0.07O薄膜都具有高度的c轴择优取向,在氧分压为0.4的时候,薄膜的衍射峰具有最小的半峰全宽,最大的晶粒尺寸。X射线光电子能谱测试结果表明:Mn2 离子已经取代了氧化锌晶格中的部分Zn2 ,但还掺杂有少量的MnO2分子;处在1 021 eV的Zn 2p3/2能级只有单一的Zn2 ;而O2 -则来自Zn-O和Mn-O。由于伯斯坦-莫斯效应,Zn0.93Mn0.07O薄膜光吸收跃迁过程只能在价带态和费密能级附近及以上的导带空态之间发生,其吸收谱线显示,与纯ZnO薄膜吸收谱线相比,产生了蓝移现象。同时还伴随有导带尾跃迁的发生,研究表明,这是由3d5多重能级的d-d跃迁而引起的。经过计算,在氧分压为0.4的时,Zn0.93Mn0.07O薄膜的禁带宽度是最大的,这可能是由交换作用的减弱而引起的。     

还原氮化对V2O5薄膜SERS效应的影响

探讨还原氮化后对V2O5薄膜SERS效应的影响。以乙酰丙酮氧钒(C10H14O5V)为V源,采用非水解溶胶-凝胶法制备V2O5凝胶,通过氨气还原氮化V2O5薄膜。利用XRD、FE-SEM、UV-VIS-NIR、RAMAN测试薄膜结构、光学性能及SERS效应。结果表明,氮化后V以氮氧化合物的形式存在,随着氮化温度升高,氮元素逐步替代氧元素。随着氮化温度升高,薄膜上晶粒逐渐增大,成板条状,晶体粒径达25 nm。经600℃还原氮化得到的薄膜的紫外可见近红外区域的吸收率最高,且禁带宽度相对于未氮化时的V2O5薄膜较小。利用R6G作为探针分子研究了薄膜的SERS效应,结果表明氮化温度600℃时薄膜具有显著的拉曼增强效应,且高于未氮化时的V2O5薄膜的拉曼增强效果,在620 cm^-1处拉曼信号峰强度达485 cps.     

Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects

We report results obtained from measurements of optical transmittance spectra carried out on a series of silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane diluted with hydrogen. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (μc-Si:H). Spectral refractive indices and absorption coefficients were determined from transmittance spectra. The spectral absorption coefficients were used to determine the Tauc optical band gap energy, the B factor of the Tauc plots, E ₀₄ (energy at which the absorption coefficient is equal to 10⁴ cm⁻¹), and the Urbach energy as a function of the hydrogen dilution. The results were correlated with microstructure, namely volume fractions of the amorphous and crystalline phase with voids, and with the grain size.