A Movable Mass Spectroscopy Sampling Apparatus for Measuring Spatial Distribution of Neutral Radicals in Silane Plasma

A movable mass spectroscopy gas sampling apparatus has been established and a straight-line fit of silane depletion fraction f is proposed. The spatial density distributions of SiHn (n=0-3) radicals in silane radio frequency glow discharge have been measured by a mass spectrometer. The experimental results demonstrate that the densities of the neutral radicals have the peak value near the middle position of electrodes, and the densities of SiH2 and SiH3 are higher than those of Si and SiH in silane plasma. This reveals that SiH2 and SiH3 may be the primary precursors in forming the a-Si:H film.     

The reliability of measurements on electron energy distribution function in silane rf glow discharges

Electron energy distribution function(EEDF) is a key parameter of plasmas,which is driectly proportional to the second derivative of the probe I-V characteristics,Because of an amplifying effect of unavoidable noises in the experimental probe I-V curves during the derivation process,the experimental I-V curves should be smoothed before performing the numerical derivation,This paper investigates the effect of adjustable factors used in the smoothing process on the deduced second derivative of the I-V curves,and an optimum group of the adjustable factors is selected to make the rms deviation of the smoothed I-V curves from the measured curves less than 1%,A simple differentiation circuit is designed and used to measure the EEDF parameter straghtforwardly.It is the first time,so far as we know,to measure the EEDF parmeters simultaneously by means of both numerical and circuit derivative methods under the sae discharge conditions and on the smae discharge equipment.The deviation between two groups of mean electron energy E and elcetron density ne obtained by the above different methods is within about 7%.This apparently improves the reliability of the measurements of the EEDF parameters.     

Low-Temperature Growth of Polycrystalline silicon Films by SiCl4／H2 rf Plasma Enhanced Chemical Vapour Deposition

Polycrystalline silicon film was directly fabricated at 200℃ by the conventional plasma enhanced chemical vapour deposition method from SiCl4 with H2 dilution. The crystallization depends strongly on the deposition power.The maximum crystMlinity and the crystalline grain size are over 80% and 200—50Onm, respectively. The results of energy dispersive spectroscopy and infrared spectroscopy measurements demonstrate that the film is mostly composed of silicon, without impurities such as Cl, N, C and bonded H. It is suggested that the crystallization at such a low temperature originates from the effects of chlorine, i.e., in-situ chemical, etching, in-situ chemical cleaning, and the detachment of bonded H.     

用SiCl4-H2低温沉积多晶硅薄膜微结构的Raman分析

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非晶硅薄膜的低温快速晶化及其结构分析

在镀铝的廉价玻璃衬底上高速沉积的非晶硅薄膜在不同的温度下退火10min.退火温度为500℃时,薄膜表面形成了硅铝的混合相,非晶硅薄膜开始呈现了晶化现象 退火温度为550℃时,大部分(约80%)的非晶硅晶化为多晶硅,平均晶粒尺寸为500nm 退火温度为600℃时,几乎所有的非晶硅都转化为多晶硅,其平均晶粒尺寸约为15μm.     

La0.5Sr0.5CoO3薄膜的外延生长及其电性能的研究

系统研究了在LaAlO3,SrTiO3和MgO衬底上、在不同的温度条件下利用脉冲激光法制备的La0.5Sr0.5CoO3薄膜的外延生长和电输运特性,测定了薄膜的电阻-温度关系.研究表明薄膜的电输运性质对其外延结构具有密切的依赖性,外延生长的薄膜具有低的电阻率和金属性导电特征;在LaAlO3衬底上在700℃左右外延生长的薄膜具有最佳的性能;探讨了这一薄膜的外延生长与其电输运性能的关系及其机理.     

La0.5Sr0.5CoO3薄膜的外延生长及其机理研究

利用脉冲激光制膜法,在多种衬底和温度条件下,系统研究了La_0.5Sr_0.5CoO₃(LSCO)薄膜的结构和外延生长特性,在LaAlO₃,SrTiO₃和MgO衬底上实现了LSCO薄膜的外延生长.外延生长的薄膜具有低的电阻率和金属性导电特征.研究表明,外延生长的最佳温度范围为700—800℃,最佳衬底为LaAlO₃.并着重探讨了衬底材料和淀积温度等多种因素对LSCO薄膜的生长与性 关键词：     

射频辉光放电等离子体的电探针诊断及数据处理

Langmuir探针是等离子体诊断的一个重要方法.对探针I-V曲线进行求解二次微商是获得等离子体中的电子能量分布函数的关键.由Fourier变换导出一个求解微商的数值解方法.克服了现有方法所存在的缺点.实现了对探针I-V曲线求解二次微商的精确、自动运算.测量了硅烷射频辉光放电等离子体的平均电子能量(温度)和浓度随放电功率的变化. 关键词：     

Effects of Flow Rate Variation on SiCln （n 〈 3） Densities in SICl4 Plasmas

Radicals produced by the plasma enhanced chemistry vapour deposition technique in SiCl4 plasma are identified by mass spectrometry using our newly proposed straight-line fit method. Since flow rate is one of the most important parameters in depositing thin films, we present the effects of SiCl4 flow rate variation on SiCln （n 〈 3） densities. The experimental results demonstrate that Si and SiCln （n = 1, 2） densities decrease with increasing SiCl4 flow rate. After reaching the minimum values at a flow rate of 17 and 13sccm, respectively, Si and SiCln （n = 1, 2） densities slightly increase with further increase of flow rate to 20.5sccm. These results could be interpreted to which the depletion fraction of SiCl4 decreases and the residence time of SiCl4 molecule becomes shorter, with the increasing SICl4 flow rate. In order to obtain high-quality poly-Si films with high growth rate, it is better to use smaller flow rate of SICl4 source gas for depositing films.     

铝诱导非晶硅薄膜的场致低温快速晶化及其结构表征

铝诱导非晶硅薄膜晶化可以降低退火温度、缩短退火时间，是制备多晶硅薄膜的一种重要方法.在此基础上，通过在退火过程中加入电场加速了界面处硅、铝原子间的互扩散，实现了非晶硅薄膜的快速低温晶化.实验结果表明，外加电场，退火温度为400℃，退火时间为60min时，薄膜的晶化率大于60％；退火温度为450℃退火时间为30min时，薄膜已经呈现明显的晶化现象；退火温度为500℃退火时间为15min时，薄膜的x射线多晶峰强度与非晶峰强度之比为未加电场的3—4倍. 关键词： 非晶硅薄膜 多晶硅薄膜 外加电场