纳米Cu3 N薄膜的制备与性能

采用柱状靶多弧直流磁控溅射法,100℃基底温度下在玻璃衬底上制备了纳米氮化铜(Cu3N)薄膜.用x射线衍射研究了不同氮气分压对Cu3N薄膜晶体结构及晶粒尺寸的影响.结果显示薄膜由Cu3N和Cu的纳米微晶复合而成,其中Cu3N纳米微晶具有立方反ReO3结构.通过原子力显微镜对薄膜表征显示,膜表面比较光滑,具有较低的粗糙度.x射线光电子能谱对薄膜表面的成分分析表明,Cu3N薄膜表面铜元素同时以+1价和+2价存在.Cu3N的Cu2p3/2,Cu2p1/2及Nls峰分别位于932.7,952.7和399.9 eV,Cu2p原子自旋-轨道耦合裂分能量间距为20eV.用台阶仪和四探针方法测量了薄膜的厚度及电阻率,薄膜的沉积速率和电阻率在很大程度上受到氮气分压的调制.     

TiN/SiO2纳米多层膜的晶体生长与超硬效应

高硬度的含氧化物纳米多层膜在工具涂层上具有重要的应用价值.研究了TiN/SiO2_{2纳米多 层膜的晶体生长特征和超硬效应.一系列具有不同SiO22和TiN调制层厚的纳米多 层膜采用多 靶磁控溅射法制备；采用x射线衍射、x射线能量色散谱、高分辨电子显微镜和微力学探针表 征了多层膜的微结构和力学性能.结果表明，虽然以单层膜形式存在的TiN和SiO22分别形成 纳米晶和非晶结构，它们组成多层膜时会因晶体生长的互促效应而呈现共格外延生长的结构 特 关键词： 2纳米多层膜')" href="#">TiN/SiO22纳米多层膜 外延生长 非晶晶化 超硬效应}     

氮分压对氮化铜薄膜结构及光学带隙的影响

在不同的氮分压r(r=N₂/［N₂+Ar］)和射频功率P下，使用反应射频磁控溅射法，在玻璃基片上制备了氮化铜薄膜样品.用台阶仪测得了薄膜的厚度，用原子力显微镜、X射线衍射仪、紫外-可见光谱仪对薄膜的表面形貌、结构及光学性质进行了表征分析.结果表明，薄膜的沉积速率随P和r的增加而增大.薄膜表面致密均匀，晶粒尺寸为30nm左右.随着r的增加，薄膜颗粒增大，且薄膜由(111)晶面转向(100)晶面择优生长.薄膜的光学带隙E_g在1.47—1.82eV之间，随r的增加而增大. 关键词： 氮化铜薄膜 反应射频磁控溅射 晶体结构 光学带隙     

氧化钒薄膜微观结构的研究

采用直流磁控反应溅射在Si(100)衬底上溅射得到(001)取向的V₂O₅薄膜.x射线衍射(XRD)、扫描电镜(SEM)和傅里叶变换红外光谱(FTIR)的结果表明，氧分压影响薄膜的成分和生长取向，在氧分压0.4Pa时溅射得到(001)取向的纳米V₂O₅薄膜，即沿c轴垂直衬底方向取向生长的薄膜.V₂O₅薄膜经过真空退火得到(001)取向的VO₂薄膜，晶体颗 关键词： 微观结构 氧化钒薄膜 择优取向 直流磁控溅射     

Cu/TiOx复合薄膜的电子态分析及其对亲水性的影响

在室温下,采用射频磁控溅射法制备了Cu/TiO_x纳米晶复合薄膜.利用X射线粉末衍射（XRD）、X射线光电子能谱（XPS）对其结构进行表征,并研究了Cu/TiO_x复合薄膜的UV-vis吸收谱和亲水性.结果表明,退火前后薄膜中钛元素皆以Ti³⁺形式存在.薄膜在可见区有吸收,吸收限为600 nm左右.Cu/TiO_x复合薄膜具有良好的亲水性.这主要是由于Cu的掺杂,使得薄膜的性能的亲水性变好. 关键词： x复合薄膜')" href="#">Cu/TiO_x复合薄膜 射频磁控溅射 XPS 亲水性     

磁控溅射法制备的CaCu3Ti4O12薄膜

采用溅射方法成功地制备了CaCu3₃Ti4₄O12₁₂薄膜， 用原子力显微镜、x射线衍射（XRD）仪和LCR分析仪对样品进行形貌、物相结构和介电性质的研究.XRD表明，薄膜比块体的晶 格常数小但晶格畸变较大；LCR测量结果显示，在相同温度下薄膜比块体的相对介电常数低 ，薄膜相对介电常数由低到高转变时对应的温度较高且激活能较大.分析表明：薄膜的相对 介电常数较低是样品中晶相含量较低、缺陷较多使内部阻挡层电容大量减小、致密度不高引 起的；薄膜中 关键词： 磁控溅射 3Ti4₄O12₁₂')" href="#">CaCu3₃Ti4₄O12₁₂ 介电常 数 激活能     

Cu掺杂对FexPt1－x薄膜有序化的影响

利用磁控溅射制备了薄膜厚度为50nm的系列(Fe_xPt_1-x)_100-yCu_y(x=0.46—0.56,y=0,0.04,0.12) 样品.利用直流共溅射方法精确控制Fe和Pt的原子比.实验结果表明，当x>0.52时，样品中添加Cu不能促进FePt的有序化，但是对于FePt化学原子定比或富Pt的样品，添加Cu可以促进FePt有序化，而且随着Fe含量的减少，需要更多的Cu添加才能实现较低温度下FePt薄膜的有序化.实验结果表明，原子比(FeCu)/Pt达到1.1—1.2的范围时，即可实现较低温度的有序化. 关键词： 0-FePt有序相')" href="#">L1₀-FePt有序相 磁控溅射 有序度 Cu掺杂     

利用［Fe/Pt］n多层膜降低L10-FePt有序化温度

采用直流磁控溅射方法制备了Fe/Pt多层膜和FePt单层薄膜，再经不同温度真空热处理得到 了有序相L10₀-FePt薄膜.通过x射线衍射谱和磁性研究表明，FePt单层薄膜需 要在500℃ 以上热处理，才能开始有序化转变，而Fe/Pt多层膜可以降低FePt薄膜有序化温度.［Fe(1 5nm)/Pt(15nm)］13₁₃薄膜在350℃热处理后，有序度已经增加到 06，相应矫 顽力达到了501kA/m.多层膜化促进有序化在较低的温度下进行，这是由于热处理过程中多 关键词： 0-FePt有序相')" href="#">L10₀-FePt有序相 磁控溅射 有序度 Fe/Pt多层膜     

纳米TiO2多孔膜的微结构对染料敏化纳米薄膜太阳电池性能的影响

采用溶胶-凝胶方法，在不同的实验条件下获得平均粒径从15到25nm左右的纳米TiO２2颗粒.利用这些颗粒制备出的纳米多孔薄膜，应用于染料敏化纳米薄膜太阳电池. 通过x射线 衍射仪分析，得到TiO２₂颗粒的晶相以及晶粒度大小，用透射电子显微镜观察 了纳米TiO２₂颗粒的形貌和尺寸.应用于太阳电池的纳米TiO２₂多 孔膜，经基于布朗诺尔-埃米特-泰 勒（BET）的多层吸附理论的比表面积测试和孔径分布测试，获得了多孔膜的微 关键词： 溶胶-凝胶法 2')" href="#">纳米TiO２₂ 染料敏化 太阳电池     

蓝宝石衬底上Gd2O3掺杂CeO2氧离子导体电解质薄膜的生长及电学性能

采用反应磁控溅射方法,在(0001)蓝宝石单晶衬底上,制备了纳米多晶Gd₂O₃掺杂CeO₂(GDC)氧离子导体电解质薄膜,采用X射线衍射仪(XRD)、原子力显微镜(AFM)对薄膜物相、结构、粗糙度、表面形貌等生长特性进行了表征,利用交流阻抗谱仪测试了GDC薄膜不同温度下的电学性能;实验结果表明,GDC薄膜为面心立方结构,在所研究的衬底温度范围内,均呈强(111)织构生长;薄膜表面形貌随衬底温度发生阶段性变化：衬底温度由室温升高到300℃时, 关键词： 2O₃掺杂CeO₂电解质薄膜')" href="#">Gd₂O₃掺杂CeO₂电解质薄膜 反应磁控溅射 生长特性 电学性能     

金属有机物化学气相沉积法生长Ga2（1-x）In2xO3薄膜的结构及光电性能研究

采用金属有机物化学气相沉积（MOCVD）法在蓝宝石（0001）衬底上制备出了Ga_2（1-x）In_2xO₃（x=01—09）薄膜,研究了薄膜的结构、电学和光学特性以及退火处理对薄膜性质的影响.测量结果表明：当In组分x=02时,样品为单斜β-Ga₂O₃结构;x=05的样品,薄膜呈现非晶结构,退火处理后薄膜结构得到明显的改善 关键词： 金属有机物化学气相沉积 2（1-x）In_2xO₃薄膜')" href="#">Ga_2（1-x）In_2xO₃薄膜 蓝宝石衬底 退火     

双掺杂BaxAgyCa3-x-yCo4O9氧化物的织构与电输运性能

采用柠檬酸溶胶凝胶和放电等离子烧结制备了Ca位双掺杂型的Ba_xAg_yCa_3-x-yCo₄O₉烧结体,利用X射线衍射仪、扫描电子显微镜、电阻率测试仪等研究了烧结体相组成、取向度、织构及电性能.结果表明：含Ag的掺杂试样中出现了偏离化学计量比分布的Ag单质,掺杂试样取向度随Ba与Ag掺杂量之比x/y的增大而提高,含Ag的掺杂试样取向度低于未掺杂试样,不含Ag的掺杂试样取向度高于未掺杂试样.x=y=01的试样导电机理发生变化.Ba,Ag掺杂量相等的试样保持较低取向度的同时具有较低的电阻率,在973 K时达到最低值（73 mΩcm）,而取向度最低的Ag单掺杂试样电阻率在所有试样中最低,在973 K时为63 mΩcm. 关键词： 3Co₄O₉')" href="#">Ca₃Co₄O₉ 双掺杂 织构 电输运性能     

Effects of different deposition conditions on the properties of Cu2S thin films

Cu₂S thin films deposited on glass substrate by chemical bath deposition were studied at different deposition temperatures and times. The results of X-ray diffraction (XRD), scanning electron microscope (SEM), energy dispersive X-ray analysis (EDX), the Hall Effect measurement system and UV-Vis absorption spectroscopy indicate that both deposition temperature and time are important to obtain polycrystalline thin films. XRD showed that the polycrystalline Cu₂S thin films have monoclinic structure. Meanwhile, the structural variations were analyzed using SEM. EDX analysis results of the thin film showed that the atomic ratio of Cu/S was close to 2:1. It was found from the Hall Effect measurement that the resistivity varied from 4.59?×?10^?3 to 13.8?×?10^?3 (Ω?cm). The mobility values of the Cu₂S thin films having p-type conductivity varied from 15.16 to 134.6?cm²/V.s. The dark electrical resistivity measurements were studied at temperatures in the range 303–423?K. The electrical activation energies of Cu₂S thin films were calculated by using Arrhenius plots, from which two different activation energy values are estimated for each thin film. Using UV-Vis absorption spectroscopy (Ultraviolet/visible), the direct and indirect allowed optical band gap values were determined to lie between 2.16 and 2.37?eV and 1.79 and 1.99?eV, respectively. In addition, the values of the refractive index (n) and the extinction coefficient (k) were determined.     

带隙可调的Al，Mg掺杂ZnO薄膜的制备

利用射频磁控溅射（RF-MS）方法,固定Al₂O₃掺杂量2 wt%,Mg掺杂量分别为1 wt%,3 wt%和5 wt%,在玻璃基底上制备了Al掺杂和Al,Mg共掺杂的ZnO薄膜,在500 ℃空气中退火2 h后,测量并比较了它们的光学和电学性质．结果表明,Al,Mg共掺杂的ZnO薄膜结晶质量良好,具有ZnO纤锌矿结构,具有较强的（002）面衍射峰,表明薄膜晶体沿c轴优先生长;与Al掺杂ZnO薄膜相比蓝端光透射率增加,1 wt%和3 wt% Mg掺杂薄 关键词： 射频磁控溅射 ZnO薄膜 Al Mg共掺杂     

Structural, electrical and optical properties of TiO2 doped WO3 thin films

TiO₂ doped WO₃ thin films were deposited onto glass substrates and fluorine doped tin oxide (FTO) coated conducting glass substrates, maintained at 500 °C by pyrolytic decomposition of adequate precursor solution. Equimolar ammonium tungstate ((NH₄)₂WO₄) and titanyl acetyl acetonate (TiAcAc) solutions were mixed together at pH 9 in volume proportions and used as a precursor solution for the deposition of TiO₂ doped WO₃ thin films. Doping concentrations were varied between 4 and 38%. The effect of TiO₂ doping concentration on structural, electrical and optical properties of TiO₂ doped WO₃ thin films were studied. Values of room temperature electrical resistivity, thermoelectric power and band gap energy (E_g) were estimated. The films with 38% TiO₂ doping in WO₃ exhibited lowest resistivity, n-type electrical conductivity and improved electrochromic performance among all the samples. The values of thermoelectric power (TEP) were in the range of 23-56 μV/K and the direct band gap energy varied between 2.72 and 2.86 eV.     

Formation of highly textured (1 1 1) Bi2O3 films by anodization of electrodeposited bismuth films

Highly textured bismuth oxide (Bi₂O₃) thin films have been prepared using anodic oxidation of electrodeposited bismuth films onto stainless steel substrates. The Bi₂O₃ films were uniform and adherent to substrate. The Bi₂O₃ films were characterized for their structural and electrical properties by means of X-ray diffraction (XRD), electrical resistivity and dielectric measurement techniques. The X-ray diffraction pattern showed that Bi₂O₃ films are highly textured along (1 1 1) plane. The room temperature electrical resistivity of the Bi₂O₃ films was 10⁵ Ω cm. Dielectric measurement revealed normal oxide behavior with frequency.     

Influence of annealing temperature on properties of Cu(In,Ga)(Se,S)2 thin films prepared by co-sputtering from quaternary alloy and In2S3 targets

Pentanary Cu(In,Ga)(Se,S)₂ (CIGSS) thin films were deposited on soda-lime glass substrate by co-sputtering quaternary alloy, and In₂S₃ targets. In this study, we investigated the influence of post-annealing temperature on structural, compositional, electrical, and optical properties of CIGSS films. Our experimental results show that the CIGS quaternary target had chalcopyrite characteristics. All CIGSS films annealed above 733 K exhibited a polycrystalline tetragonal chalcopyrite structure, with (1 1 2) preferred orientation. The carrier concentration and resistivity of the resultant CIGSS layer annealed above 763 K was 4.86×10¹⁶ cm⁻³ and 32 Ω cm, respectively, and the optical band-gap of the CIGSS absorber layer was 1.18 eV. Raman spectral analysis demonstrated the existence of many different phases, including CuInSe₂, CuGaSe₂, and CuInS₂. This may be because the vibration frequencies of In-Se, In-S bonds are similar to the Ga-Se and Ga-S bonds, causing their absorption bands overlap.     

射频磁控溅射法生长MgxZn1-xO薄膜的结构和光学特性

用射频磁控溅射法在80℃的衬底温度下制备出Mg_xZn_1-xO(0≤x ≤030)薄膜.x射线 衍射(XRD)结果表明，Mg_xZn_1-xO薄膜为单相六角纤锌矿结构， 没有形成任何显著 的MgO分离相，Mg_xZn_1-xO薄膜的择优取向平行于与衬底垂直的 c轴；c轴晶格常数随着Mg含量的增加逐渐减小.在Mg_xZn_1-xO薄膜的光透射谱中出现 锐利的吸收边，由透 射谱估算出Mg_xZn_1-xO薄膜的带隙宽度由332eV(x=0)线性地 增加到396eV(x=030). 关键词： xZn_1-xO薄膜')" href="#">Mg_xZn_1-xO薄膜 射频磁控溅射 Mg含量     

Structural-optical study of high-dielectric-constant oxide films

High-k polycrystalline Pr₂O₃ and amorphous LaAlO₃ oxide thin films deposited on Si(0 0 1) are studied. The microstructure is investigated using X-ray diffraction and scanning electron microscopy. Optical properties are determined in the 0.75-6.5 eV photon energy range using spectroscopic ellipsometry. The polycrystalline Pr₂O₃ films have an optical gap of 3.86 eV and a dielectric constant of 16-26, which increases with film thickness. Similarly, very thin amorphous LaAlO₃ films have the optical gap of 5.8 eV, and a dielectric constant below 14 which also increases with film thickness. The lower dielectric constant compared to crystalline material is an intrinsic characteristic of amorphous films.     

Y掺杂Al2O3高k栅介质薄膜的制备及性能研究

利用射频反应共溅射方法制备了Y掺杂Al₂O₃电介质薄膜，用掠入射x射线衍射检测了薄膜的结构，用高分辨率扫描电子显微镜(HRSEM)、原子力显微镜(AFM)观察了薄膜断面和表面形貌，用高频C-V和变频C-V及J-V测量了样品的电学特性. 结果表明，Y的掺入使电介质薄膜的介电常数k有了很大提高(8.14—11.8)，并体现出了较好的介电特性. 分析认为：与氧具有较大电负性差的Y离子的加入，增大了薄膜中的金属—氧键(M—O)的强度；同时，Y的加入使Al₂O₃的结构和原子配位发生了改变，从而提高了离子极化对薄膜介电常数的贡献. 退火前后的XRD谱均显示薄膜为非晶态；HRSEM断面和AFM形貌像显示所制备的薄膜非常平整，能够满足器件要求. 关键词： 高k栅介质 掺杂氧化铝 射频反应溅射