In_(0.22)Ga_(0.78)As/GaAs量子阱光致发光谱电子辐照效应研究

对未掺杂的In_(0.22)Ga_(0.78)As/GaAs量子阱材料开展了能量为1 MeV、电子注量达1×1016/cm~2的电子束辐照实验。实验结果显示,电子束轰击量子阱材料,通过能量传递在材料中引入缺陷,导致光致发光减弱;电子束辐照后的量子阱中同时存在应力释放和原子互混现象,导致量子阱的发光峰先红移后蓝移;辐照后的量子阱发光波长取决于应变弛豫和扩散的共同作用。     

快速热退火引起GaAs/AlGaAs双量子阱中铝原子的扩散研究

用分子束外延生长了GaAs/AlGaAs双量子阱激光器结构样品，并对不同温度快速热退火导致量子阱组分无序即阱和垒中三族元素的扩散过程进行了实验和理论研究.用光荧光技术测量退火样品的n=1量子阱能级跃迁峰值位置，结果表明退火前后样品量子阱能级位置发生蓝移，蓝移量随温度的提高而增大.对退火过程中GaAs/AlGaAs量子阱中三族元素的扩散过程进行了理论分析，并与实验结果相比较，获得了不同退火温度下铝原子的扩散系数和扩散过程的激活能.950℃，30s退火条件下，铝原子的扩散系数为6.6×10^{-16相似文献}   

无杂质空位扩散法造成InGaAsP/InP多量子阱结构带隙蓝移规律的研究

采用光荧光谱(PL)和光调制反射谱(PR)的方法,研究了由Si₃N₄、SiO₂电介质盖层引起的无杂质空位(IFVD)诱导的InGaAsP四元化合物半导体多量子阱(MQWs)结构的带隙蓝移。实验中Si₃N₄、SiO₂作为电介质盖层,用来产生空位,再经过快速热退火处理(RTA)。实验结果表明:多量子阱结构带隙蓝移和退火温度、复合盖层的组合有关。带隙蓝移随退火温度的升高而加大。InP、Si₃N₄复合盖层产生的带隙蓝移量大于InP、SiO₂复合盖层。而InGaAs、SiO₂复合盖层产生的带隙蓝移量则大于InGaAs、Si₃N₄复合盖层。同时,光调制反射谱的测试结果与光荧光测试的结果基本一致,因此,PR谱是用于测试带隙变化的另一种方法。     

InGaAs/GaAs应变量子阱的发光特性研究

利用低压金属有机化学气相沉积技术(LP-MOCVD)生长InGaAs/GaAs单量子阱(SQW),通过改变生长速率、优化生长温度和V/III比改善了量子阱样品的室温光致发光(PL)特性。测试结果表明,当生长温度为600℃、生长速率为1.15μm/h时,生长的量子阱PL谱较好,增加V/III比能够提高量子阱的发光强度。实验分析了在不同的In气相比条件下,生长速率对量子阱质量的影响,利用模型解释了高In气相比时,随着生长速率增加PL谱蓝移现象消失的原因。     

生长温度和结构参数对InGaAs／GaAs量子阱光学特性的影响

研究了不同生长温度下制备的In0.15Ga0.85As/GaAs应变量子阱的PL谱,结果表明,生长温度越高,In偏析和In-Ga互混越严重,同时,导致更多的In脱附,PL谱发光峰蓝移。对不同In含量的和不同InGaAs厚度的InGaAs/GaAs量子阱进行PL谱测试,分析表明In含量<0.2,生长温度低于560℃时,In含量和InGaAs层量子阱的厚度对In偏析、脱附和In-Ga互混基本没有影响。     

离子注入诱导的具有两个不同发射波长的混合双量子阱结构

叙述了磷离子注入方法诱导具有不同发射波长的InGaAsP双量子阱结构的混合,并通过光致发光谱和断面透射电子显微术对量子阱混合的程度进行了研究。在特定条件下快速热退火处理后,光致发光谱显示,在离子注入剂量低于7×10¹¹/cm²情况下,两个阱的谱峰能保持较好的分离,注入剂量从10¹¹ /cm²增大到10¹²/cm²的过程中,两个阱的带隙蓝移值都似乎存在一个极大值,并且在同样的条件下,上阱(发射波长为1.52 μm)的带隙蓝移值较下阱(发射波长为1.59 μm)大些。当离子注入剂量达到10¹²/cm²时,上阱的谱峰近乎消失,双阱光致发光谱出现了一个谱峰。用断面透射电子显微术对原生长样品与带隙蓝移具有极大值的退火样品进行微结构比较,结果显示,对比原生长样品,退火样品的晶格原子基本得到修复,但阱与垒间的界面显得模糊,这说明离子注入导致两阱完全混合。     

基于GaAs膜的GaInP/AlGaInP无杂质空位扩散诱导量子阱混杂的研究（英文）

在红光半导体激光器芯片上采用GaAs介质膜进行无杂质空位扩散诱导量子阱混杂研究。激光器芯片的有源区由一个9 nm厚的GaInP量子阱和两个350 nm厚的AlGaInP量子垒构成,利用MOCVD方法在芯片表面生长GaAs介质膜。在950℃的情况下进行不同时长不同GaAs层厚度的高温快速热退火诱发量子阱混杂。通过光致发光光谱分析样品混杂之后的波长蓝移情况和光谱半峰全宽变化规律。当退火时间达到120 s时,样品获得53.4 nm的最大波长蓝移;在1 min退火时间下获得18 nm的最小光谱半峰全宽。     

InGaAs(P)/InP量子阱混合处理对其光电特性的影响

用离子注入诱导无序（IICD）和无杂质空位扩散诱导无序（IFVD）方法研究了InGaAs(P)/InP量子阱结构的混合造成材料光电特性变化，带隙蓝移的规律。研究结果发现，IICD造成的带隙蓝移与离子注入的种类、剂量、注入后退火温度，时间有关，也和样品存在的应力有关。具有压应力的样品产生的蓝移量比具有应力的大。IFVD方法造成的带隙蓝移量与介质膜的种类，后继退火温度，退火时间有关。同时还发现，蓝移量与半导体盖层成分和介质层成分的组合有关，InGaAs与SiO2组合产生的蓝移比InP与SiO2组合的大。介质层的掺杂也影响蓝移量，掺P的SiOxPyNx可以产生高达224meV的蓝移，目前尚未见其他报道，二次离子质谱（SIMS）研究说明，量子阱层元素的互扩散可能是造成带隙蓝移的主要原因。     

Zn杂质扩散诱导AlGaInP/GaInP量子阱混杂

杂质扩散诱导量子阱混杂技术可用于制作腔面非吸收窗口,提高大功率半导体激光器的输出功率.以Zn2As2为扩散源,采用闭管扩散方式,在550℃下对650 nm半导体激光器的外延片进行了一系列Zn杂质扩散诱导量子阱混杂的实验.实验发现,随着扩散时间从20～120 min,样品光致发光(PL)谱蓝移偏移增加,峰值波长蓝移53 nm;当扩散时间超过60 min后,样品的PL谱中不仅出现了常见的蓝移峰,同时还出现了红移峰,峰值波长红移32 nm.分析表明PL谱蓝移来自Zn扩散引起的AlGaInP/GaInP间的量子阱混杂;红移来自Zn杂质扩散对样品中Ga0.51In0.49P缓冲层的影响.还研究了扩散温度(550℃)和扩散时间对样品晶体品质的影响,并在理论上计算了AlGaInP/GaInP量子阱混杂巾的Al-Ga的互扩散系数.     

后退火对InxGa1xAs 单层量子点光学性质的影响

 研究了以GaAs和Al_0.15Ga_0.85As为基体, 当铟的摩尔分数（x）不同时, 后退火对InxGa1-xAs 单层量子点光致荧光（PL）谱特性的影响。后退火将导致铟含量不同的样品（x=0.23, 0.37, 0.50, 1.0）的PL谱线宽度变窄和蓝移。对于GaAs 基体, 在700℃退火90分钟所造成的PL谱蓝移与退火30分钟相似;(仅当x=0.23时, 退火90分钟所造成的PL谱蓝移小于30分钟)。对于Al0.15Ga0.85As基体, 在700℃退 火30分钟和90分钟, 其PL谱蓝移是不同的。     

Sb/As intermixing in self-assembled GaSb/GaAs type II quantum dot systems and control of their photoluminescence spectra

The intermixing of Sb and As atoms induced by rapid thermal annealing (RTA) was investigated for type II GaSb/GaAs self-assembled quantum dots (QD) formed by molecular beam epitaxy growth. Just as in InAs/GaAs QD systems, the intermixing induces a remarkable blueshift of the photoluminescence (PL) peak of QDs and reduces the inhomogeneous broadening of PL peaks for both QD ensemble and wetting layer (WL) as consequences of the weakening of quantum confinement. Contrary to InAs/GaAs QDs systems, however, the intermixing has led to a pronounced exponential increase in PL intensity for GaSb QDs with annealing temperature up to 875 °C. By analyzing the temperature dependence of PL for QDs annealed at 700, 750 and 800 °C, activation energies of PL quenching from QDs at high temperatures are 176.4, 146 and 73.9 meV. The decrease of QD activation energy with annealing temperatures indicates the reduction of hole localization energy in type II QDs due to the Sb/As intermixing. The activation energy for the WL PL was found to drastically decrease when annealed at 800 °C where the QD PL intensity surpassed WL.     

不同退火条件对纳米多孔氧化铝薄膜光致发光的影响

以草酸为电解液,采用二次阳极氧化法制备出了纳米多孔氧化铝薄膜,经不同退火温度和退火气氛处理氧化铝薄膜后,通过分析其光致发光光谱得出：相同的退火气氛中, 退火温度T≤600 ℃ 时,T=500 ℃具有最大的光致发光强度;退火温度T≥700 ℃时,随着退火温度的升高,样品的发光强度增大。在不同的退火气氛中,多孔氧化铝薄膜随着退火温度的升高,发光峰位改变不同,即在空气中退火处理后,随着退火温度的升高,发光峰位蓝移,而在真空中退火处理后,发光峰位并不随退火温度的升高而变化;通过对1 100 ℃高温退火处理后的氧化铝薄膜的光致发光曲线的高斯拟合,可以看出,经退火处理后的多孔氧化铝,主要存在三个发光中心,发光曲线在350～600 nm范围内对应三个发射峰, 发射波长分别为387,410,439 nm。相同的退火温度下,空气中退火得到的氧化铝薄膜的光致发光强度大于真空中退火处理后的氧化铝薄膜。基于实验结果,结合X射线色散能谱(EDS)、红外反射光谱等表征手段,探讨了多孔氧化铝薄膜的发光机制,并对经过不同退火条件得到的多孔氧化铝薄膜的光致发光特性的改变做出了合理的解释。     

Effect of thermal annealing in the microstructural and the optical properties of uncapped InAs quantum dots grown on GaAs buffer layers

The effect of thermal annealing on self-assembled uncapped InAs/GaAs quantum dots (QDs) has been investigated using transmission electron microscopy (TEM) and photoluminescence (PL) measurements. The TEM images showed that the lateral sizes and densities of the InAs QDs were not changed significantly up to 650 °C. When the InAs/GaAs QDs were annealed at 700 °C, while the lateral size of the InAs QDs increased, their density decreased. The InAs QDs disappeared at 800 °C. PL spectra showed that the peaks corresponding to the interband transitions of the InAs QDs shifted slightly toward the high-energy side, and the PL intensity decreased with increasing annealing temperature. These results indicate that the microstructural and the optical properties of self-assembled uncapped InAs/GaAs can be modified due to postgrowth thermal annealing.     

GaAsN/AlAs/AlGaAs double barrier quantum wells grown by molecular beam epitaxy as an alternative to infrared absorption below 4 μm

In this work, we report on the design, growth and characterization of GaAsN/AlAs/AlGaAs double barrier quantum well infrared detectors to achieve intraband absorption below 4 μm. Due to the high effective mass of N-dilute alloys, it is common for these N-containing double barrier quantum well structures to have more than one bound state within the quantum well, enabling the possibility of achieving multispectral absorption from these confined levels to the quasi-bound. Based on a transfer matrix calculation we will study the influence of the potential parameters, in particular the well width and the introduction of a GaAs spacer layer in between the N-well and the AlAs barriers. We will compare the case in which there are two confined levels with the case in which only one level is bound, like in the conventional AlGaAs/AlAs/GaAs structures. On the basis of the simulation, we have grown and characterized some N-containing double barrier detectors. Moreover, an optimization of the post-growth annealing treatments of the GaAsN quantum well structures has also been performed. Finally, room temperature absorption measurements of both as-grown and annealed samples are presented and analyzed.     

Visible photoluminescence in porous GaAs capped by GaAs

A typical porous structure with pores diameters ranging from 10 to 50 nm has been obtained by electrochemical etching of (1 0 0) heavily doped p-type GaAs substrate in HF solution. Room temperature photoluminescence (PL) investigations of the porous GaAs (π-GaAs) reveal the presence of two PL bands, I₁ and I₂, located at 1.403 and 1.877 eV, respectively. After GaAs capping, the I₁ and I₂ PL bands exhibit opposite shift trends. However, the emission efficiency of these two bands is not strongly modified. Low temperature PL of capped porous GaAs versus injection levels shows that the I₁ PL band exhibits a red shift while the I₂ PL band exhibits a blue shift with increasing injection levels. The I₂ PL band intensity temperature dependence shows an anomalous behaviour and its energy location shows a blue shift as temperature increases. The observed PL bands act independently and are attributed to electron – hole recombination in porous GaAs and to the well-known quantum confinement effects in GaAs nanocrystallites. The I₂ PL band excitation power and temperature dependencies were explained by the filling effect of GaAs nanocrystallites energy states.     

{1 1 1} Quantum wells of dilute nitrides grown on GaAs by molecular beam epitaxy

Dilute nitrides are promising alloys in view of extending potential micro- and opto-electronics applications of GaAs technology. Orientation effects on nitrogen incorporation in GaAs have been scarcely addressed. Here, GaAsN on (1 0 0) and on As(B)- and Ga(A)-rich (1 1 1) substrates was grown by molecular beam epitaxy at different substrate temperatures. Nitrogen content measured by secondary ion mass spectrometry as a function of the growth temperature highlights the influence of orientation on nitrogen incorporation. Furthermore, thermal annealing is shown to improve the optical quality of GaAsN quantum wells whatever their substrate orientations.     

Si杂质扩散诱导InGaAs/AlGaAs量子阱混杂的研究（英文）

光学灾变损伤(COD)常发生于量子阱半导体激光器的前腔面处,极大地影响了激光器的出光功率及寿命。通过杂质诱导量子阱混杂技术使腔面区波长蓝移来制备非吸收窗口是抑制腔面COD的有效手段,也是一种高效率、低成本方法。本文选择了Si杂质作为量子阱混杂的诱导源,使用金属有机化学气相沉积设备生长了InGaAs/AlGaAs量子阱半导体激光器外延结构、Si杂质扩散层及Si 3 N 4保护层。热退火处理后,Si杂质扩散诱导量子阱区和垒区材料互扩散,量子阱禁带变宽,输出波长发生蓝移。退火会影响外延片的表面形貌,而表面形貌则可能会影响后续封装工艺中电极的制备。结合光学显微镜及光致发光谱的测试结果,得到825℃/2 h退火条件下约93 nm的最大波长蓝移量,也证明退火对表面形貌的改变,不会影响波长蓝移效果及后续电极工艺。     

硒化锌的气相外延生长

采用改进的气相外延法在(100)GaAs衬底上外延生长了ZnSe单晶膜。最大生长速率为每小时10μm左右。淀积过程的激活能为10kcal/mol。在77K的温度下测量了外延膜的光致发光,4460Å附近可以观察到很强的蓝色发射。外延膜的电阻率～1.1Ω·cm。     

Effects of thermal annealing on the interband transitions of single and vertically stacked InAs/GaAs self-assembled quantum dots

Photoluminescence (PL) measurements have been carried out to investigate the annealing effects in one-period and three-periods of InAs/GaAs self-assembled quantum dots (QDs) grown on GaAs substrates by using molecular beam epitaxy. After annealing, the PL spectra for the annealed InAs/GaAs QDs showed dramatic blue shifts and significant linewidth narrowing of the PL peaks compared with the as-grown samples. The variations in the PL peak position and the full width at half-maximum of the PL peak are attributed to changes in the composition of the InAs QDs resulting from the interdiffusion between the InAs QDs and the GaAs barrier and to the size homogeneity of the QDs. These results indicate that the optical properties and the crystal qualities of InAs/GaAs QDs are dramatically changed by thermal treatment.