离子注入诱导量子阱界面混合效应的光致荧光谱研究

采用多元芯片方法获得了一系列不同离子注入剂量的GaAsAlGaAs非对称耦合量子阱单元,通过光致荧光谱测量,研究了单纯的离子注入导致的界面混合效应.荧光光谱行为与有效质量理论计算研究表明,Al原子在异质结界面的扩散在离子注入过程中已基本完成,而热退火作用主要是去除无辐射复合中心. 关键词： 量子阱 离子注入 光致荧光谱 界面混合     

张应变GaInP量子阱结构变温光致发光特性

对张应变GaInP量子阱激光器材料结构开展变温光致发光特性的研究,实验中激光器有源区为9nm Ga0.575In0.425P量子阱结构,采用N离子注入并结合730℃下的快速热退火处理来诱导有源区发生量子阱混杂.变温(10K～300K)光致发光特性研究表明:300K时,只进行快速热退火或者N离子注入的样品不发生峰值波长蓝移,N离子注入后样品在退火时发生波长蓝移,且蓝移量随退火时间的增加而增加;低温条件时,不同样品的光致发光特性差别较大,光致发光谱既有单峰,也有双峰,分析认为双峰中的短波长发光峰为本征激子的复合,长波长发光峰是由于有序区域中的电子与无序区域中的空穴复合引起.本研究可为半导体激光器长期工作可靠性和材料低温特性的相互关系提供一种新的研究思路.     

InGaAs(P)/InP量子阱混合处理对其光电特性的影响

用离子注入诱导无序（IICD）和无杂质空位扩散诱导无序（IFVD）方法研究了InGaAs(P)/InP量子阱结构的混合造成材料光电特性变化，带隙蓝移的规律。研究结果发现，IICD造成的带隙蓝移与离子注入的种类、剂量、注入后退火温度，时间有关，也和样品存在的应力有关。具有压应力的样品产生的蓝移量比具有应力的大。IFVD方法造成的带隙蓝移量与介质膜的种类，后继退火温度，退火时间有关。同时还发现，蓝移量与半导体盖层成分和介质层成分的组合有关，InGaAs与SiO2组合产生的蓝移比InP与SiO2组合的大。介质层的掺杂也影响蓝移量，掺P的SiOxPyNx可以产生高达224meV的蓝移，目前尚未见其他报道，二次离子质谱（SIMS）研究说明，量子阱层元素的互扩散可能是造成带隙蓝移的主要原因。     

有机量子阱的光学性质

采用多源有机分子气相沉积系统(OMBD)制备了Alq₃，PBD/Alq₃，PBD/Alq₃/PBD单层、双层以及量子阱结构，利用电化学循环伏安法和吸收光谱、荧光光谱研究了量子阱的类型和样品的光致发光特性.电化学循环伏安法和吸收光谱的测量结果表明，PBD/Alq₃有机量子阱为Ⅰ型量子阱结构.荧光光谱的研究结果表明，单层Alq₃的光致发光峰不随Alq₃厚度变化而变化；但是双层PBD/Alq₃结构光致发光峰随Alq₃厚度的减小而发生蓝移；同样对于PBD/Alq₃/PBD量子阱结构光致发光峰随Alq₃厚度的减小而发生蓝移.对引起光谱蓝移的原因进行了讨论. 关键词： 有机量子阱 光谱蓝移     

基于离子注入技术的ZnMnO半导体材料的制备及光谱表征

通过离子注入技术制备了ZnMnO半导体材料，研究离子注入剂量与退火对材料光谱性质的影 响.Raman光谱研究发现，575cm^-1处声子模展宽是由高剂量Mn注入引起的缺陷所 致，退火样品528cm^-1振动模来自Mn相关的杂质振动.室温光致发光谱表明，退 火对高剂量注入样品的可见发光带有增强作用. 关键词： ZnMnO 离子注入 Raman光谱 室温光致发光     

反应磁控溅射ZnO/MgO多量子阱的光致荧光光谱分析

采用反应射频磁控溅射方法，在Si(001)基片上制备了具有高c轴择优取向的ZnO/MgO多量子阱.利用X射线反射、X射线衍射、电子探针，光致荧光光谱等表征技术，研究了ZnO/MgO多量子阱的结构、成份和光致荧光特性.研究结果表明，多量子阱的调制周期在1.85—22.3 nm之间，所制备的多量子阱具有量子限域效应，导致了室温光致荧光峰的蓝移，并观测到了量子隧穿效应引起的荧光效率下降.建立了基于多声子辅助激子复合跃迁理论的室温光致荧光光谱优化拟合方法，通过室温光致荧光光谱拟合发现，ZnO/MgO比ZnO/ZnMgO多量子阱具有更大的峰位蓝移，探讨了导致光致荧光光谱展宽的可能因素. 关键词： ZnO/MgO 多量子阱 磁控溅射 光致荧光 量子限域效应     

InGaAs/GaAs单量子阱PL谱的温度变化特性

采用分子束外延方法制备了InGaAs/GaAs单量子阱,利用自组装的光致荧光探测系统,对其进行了光致荧光谱研究。考察了不同温度下荧光峰波长、峰形的影响。研究结果表明:高温时荧光主要是源于带—带间载流子跃迁,而在低温时则来源于束缚在量子阱中激子的跃迁。     

GaAIAs／GaAs非均匀阱宽多量子阱超辐射发光管材料制备及表征

超辐射发光二极管（SLD）具有不同于半导体激光器和普通发光二极管的优异性能。为了制备高功率半导体超辐射发光管，并且得到比较大的光谱宽度、大的单程增益和抑制电流饱和，我们研究设计了具有850nm辐射波长的GaAlAs／GaAs非均匀阱宽多量子阱超辐射发光二极管结构，采用分子束外延（MBE）方法进行了材料制备。同时利用X射线双晶衍射，变温（10～300K）光致发光（PL）等方法检测分析了外延薄膜的结构和光电特性。在光致发光谱线中我们得到了发射波长850nm的谱峰，谱峰范围跨跃800～880nm，双晶回摆曲线结果显示了设计的结构得到实现。在注入电流140mA时，器件输出光谱的半峰全宽可以达到26nm，室温下连续输出功率达到6mw。     

Ce3+注入对不同尺寸的nc-Si/SiO2 超晶格发光特性的影响

通过电子束蒸发方法以及高温退火处理,得到nc-Si/SiO₂超晶格。将样品分别注入剂量为2.0×10¹⁴ cm^-2和2.0×10¹⁵ cm^-2的Ce³⁺,再对其进行二次退火处理,获得多组样品。通过对样品光致发光光谱的分析发现,样品发光强度的变化不仅受到Ce³⁺注入剂量的影响,而且也受到nc-Si颗粒大小的影响。在相同注入计量和相同的二次退火处理温度下,nc-Si颗粒较大的样品经Ce³⁺注入后其发光强度增强较为明显。     

Si杂质扩散诱导InGaAs/AlGaAs量子阱混杂的研究（英文）

光学灾变损伤(COD)常发生于量子阱半导体激光器的前腔面处,极大地影响了激光器的出光功率及寿命。通过杂质诱导量子阱混杂技术使腔面区波长蓝移来制备非吸收窗口是抑制腔面COD的有效手段,也是一种高效率、低成本方法。本文选择了Si杂质作为量子阱混杂的诱导源,使用金属有机化学气相沉积设备生长了InGaAs/AlGaAs量子阱半导体激光器外延结构、Si杂质扩散层及Si 3 N 4保护层。热退火处理后,Si杂质扩散诱导量子阱区和垒区材料互扩散,量子阱禁带变宽,输出波长发生蓝移。退火会影响外延片的表面形貌,而表面形貌则可能会影响后续封装工艺中电极的制备。结合光学显微镜及光致发光谱的测试结果,得到825℃/2 h退火条件下约93 nm的最大波长蓝移量,也证明退火对表面形貌的改变,不会影响波长蓝移效果及后续电极工艺。     

Sb/As intermixing in self-assembled GaSb/GaAs type II quantum dot systems and control of their photoluminescence spectra

The intermixing of Sb and As atoms induced by rapid thermal annealing (RTA) was investigated for type II GaSb/GaAs self-assembled quantum dots (QD) formed by molecular beam epitaxy growth. Just as in InAs/GaAs QD systems, the intermixing induces a remarkable blueshift of the photoluminescence (PL) peak of QDs and reduces the inhomogeneous broadening of PL peaks for both QD ensemble and wetting layer (WL) as consequences of the weakening of quantum confinement. Contrary to InAs/GaAs QDs systems, however, the intermixing has led to a pronounced exponential increase in PL intensity for GaSb QDs with annealing temperature up to 875 °C. By analyzing the temperature dependence of PL for QDs annealed at 700, 750 and 800 °C, activation energies of PL quenching from QDs at high temperatures are 176.4, 146 and 73.9 meV. The decrease of QD activation energy with annealing temperatures indicates the reduction of hole localization energy in type II QDs due to the Sb/As intermixing. The activation energy for the WL PL was found to drastically decrease when annealed at 800 °C where the QD PL intensity surpassed WL.     

Midinfrared photoluminescence from SnTe/PbTe/CdTe double quantum wells grown by molecular beam epitaxy

Molecular beam epitaxial growth and photoluminescence (PL) properties of SnTe/PbTe/CdTe double quantum wells (DQWs) on (1 0 0)-oriented GaAs substrates are reported. These DQWs were consisted of a very thin SnTe/PbTe QW nested in a 10-nm-thick PbTe/CdTe QW. Efficient midinfrared PL was observed from the DQWs at 300 K in agreement with the coherent SnTe/PbTe growth on the thick CdTe barrier layer. The PL peak wavelength of the DQWs was found to increase with the SnTe thickness d by covering a wide range of the 3–5 μm atmospheric window with d≤2.5 monolayer.     

Partial intermixing of strained InGaAs/GaAs quantum wells

Shallow ion implantation and rapid thermal annealing (RTA) was used to modify the optical properties of strained InGaAs/GaAs quantum wells (QWs). After RTA, QW exciton energies, determined from peak positions of the photoluminescence spectra, shifted significantly to higher energies in the implanted areas, whereas they remained basically unaffected in the unimplanted regions. The magnitudes of the energy shifts depend on the well width, RTA temperature and ion implantation fluence. The shifts were interpreted as arising from modification of the shapes of the as-grown QWs due to diffusion of In out of the well material. This process is enhanced by diffusion of vacancies generated near the sample surface by ion implantation. QWs with compositions near the critical thickness exhibit different behaviour from that of fully pseudomorphic layers, due to the presence of dislocations in these layers.     

有机多层量子阱结构的光致发光特性的研究

采用多源高真空有机分子束沉积系统(OMBDs),将两种有机小分子材料PBD和Alq₃以交替生长的方式,制备了不同厚度的PBD/Alq₃有机多层量子阱结构(OMQWs), 并利用电化学循环伏安法和光吸收分别测定了PBD和Alq₃的最低空分子轨道(LUMO)和最高占据分子轨道(HOMO)。该结构类似于无机半导体中的Ⅰ型量子阱结构,PBD层作为势垒层,Alq3层作为势阱层和发光层,并进行了小角X射线衍射(XRD)的测量。利用荧光光谱研究了OMQWs光致发光(PL)特性,得到随着阱层厚度的降低,光致发光的峰位将蓝移;同时随垒层厚度的减小,PBD的发光峰逐渐消失。利用量子阱结构可以使PBD的能量有效的传递给Alq₃,从而增强Alq₃的发光。     

退火及溅射气氛对氮化硅薄膜光致发光的影响

利用射频磁控反应溅射方法制备富硅的氮化硅薄膜。衬底材料为抛光的硅片,靶材为硅靶,在Ar-N₂气环境下,通过改变两种气体的组分比来改变样品成分,并在高纯N₂气氛下对其进行高温退火处理。用X射线光电子能谱(XPS)和X射线衍射(XRD)对样品进行了表征,并测试了样品的光致发光谱 (PL)。实验结果表明：X射线光电子能谱中出现了Si—N键合结构,同时还有少量的Si—O键生成,通过计算得出Si/N比值约为1.51,制备出了富硅的氮化硅薄膜;薄膜未经退火前,在可见光区域没有观察到明显的光致发光峰,经过高温退火后,XRD中新出现的衍射峰证实了纳米硅团簇的生成,PL图谱中在可见光区域出现了光致发光峰的蓝移现象,结合XRD结果,用纳米晶的量子限域效应对上述现象进行了合理解释。     

离子注入对InAs/GaAs量子点光学效质的影响

研究了低能质子注入诱导的界面混合和快速热退火对量子点发光效率的影响，对其光致发光 峰强进行了拟合计算.研究发现量子点的发光峰强度主要由载流子俘获时间和非辐射复合寿 命决定.由于后退火处理能够部分的消除因质子注入造成的缺陷，量子点中非辐射复合中心 浓度与注入剂量成亚线性关系；退火温度越高，非辐射复合中心被消除越多，亚线性程度越 高.界面混合导致的俘获效率的增加和注入损伤引起的非辐射复合是相互竞争过程，存在一 个临界的注入剂量N_C，当注入剂量N小于N_C，界面混合作 用较为明显，量子点 发光峰强随注入剂量增加而增强；当N大于N_C时，质子注入引起了大量的非 辐射复合 中心，主要表现为注入损伤，量子点的发光峰强随注入剂量增加而迅速减弱.退火温度越高 ，N_C越大. 关键词： 量子点 离子注入 峰强     

GaAs/AlAs super-flat interfaces in GaAs/AlAs and GaAs/(GaAs) (AlAs) quantum wells grown on (4 1 1)A GaAs substrates by MBE

Effectively atomically flat GaAs/AlAs interfaces over a macroscopic area (“super-flat interfaces”) have been realized in GaAs/AlAs and GaAs/(GaAs) (AlAs) quantum wells (QWs) grown on (4 1 1)A GaAs substrates by molecular beam epitaxy (MBE). A single and very sharp photoluminescence (PL) peak was observed at 4.2 K from each GaAs/AlAs or GaAs/(GaAs) (AlAs) QW grown on (4 1 1)A GaAs substrate. The full-width at half-maximum (FWHM) of a PL peak for GaAs/AlAs QW with a well width ( ) of 4.2 nm was 4.7 meV and that for GaAs/(GaAs) (AlAs) QW with a smaller well width of 2.8 nm (3.9 nm) was 7.6 meV (4.6 meV), which are as narrow as that for an individual splitted peak for conventional GaAs/AlAs QWs grown on (1 0 0) GaAs substrates with growth interruption. Furthermore, only one sharp peak was observed for each GaAs/(GaAs) (AlAs) QW on the (4 1 1)A GaAs substrate over the whole area of the wafer (7 7 mm ), in contrast with two- or three-splitted peaks reported for each GaAs/AlAs QW grown on the (1 0 0) GaAs substrate with growth interruption. These results indicate that GaAs/AlAs super-flat interfaces have been realized in GaAs/AlAs and GaAs/(GaAs) (AlAs) QWs grown on the (4 1 1)A GaAs substrates.     

不同周期数的GaInAs/GaAsP多量子阱太阳能电池

为了研究不同量子阱周期数下GaInAs/GaAsP多量子阱太阳能电池性能的变化规律,利用金属有机化学气相沉积技术(MOCVD)制备了不同周期数的双结多量子阱太阳能电池样品以及无量子阱双结结构的参考样品,利用高分辨率X射线衍射仪(HXRD)和高分辨率透射电镜(TEM)测试了样品的晶体质量,同时在AM0(1×)光谱条件下测试了样品的I-V特性曲线和相应子电池的外量子效率。最终得到了高晶体质量、吸收截止波长在954 nm的Ga_(0.89)In_(0.11)As/GaAs_(0.92)P_(0.08)多量子阱结构,扩展波段的外量子效率最高达到75.18%,电池光电转换效率相对于无量子阱结构提升2.77%。通过对比测试结果发现,随着量子阱结构周期数的增加,太阳能电池在扩展波段(890~954 nm)的外量子效率不断提高,常规波段的短波响应(300~700 nm)会出现下降,长波响应(700~890 nm)会出现上升,短路电流和转换效率相应提升并趋于饱和。     

Anomalous photoluminescence of InAs quantum dots implanted by Mn ions

The photoluminescence (PL) of Mn-implanted quantum dot (QD) samples after rapid annealing is studied. It is found that the blue shift of the PL peak of the QDs, introduced by the rapid annealing, decreases abnormally as the implantation dose increases. This anomaly is probably related to the migration of Mn atoms to the InAs QDs during annealing, which leads to strain relaxation when Mn atoms enter InAs QDs or to the suppression of the inter-diffusion of In and Ga atoms when Mn atoms surround QDs. Both effects will suppress the blue shift of the QD PL peaks. The temperature dependence of the PL intensity of the heavily implanted QDs confirms the existence of defect traps around the QDs.     

Thermally induced quantum well shape modification in strained heterostructures

We have demonstrated that shallow ion (⁷⁵As⁺) implantation and rapid thermal annealing (RTA) of strained InGaAs/GaAs quantum well (QW) structures can modify the optical properties of these epitaxial semiconductor heterostructures in a spatially selective manner. After RTA, QW exciton energies, determined from peaks in the photoluminescence spectra, shifted significantly to higher values only in the implanted regions. The magnitudes of the shifts were dependent on QW widths, RTA temperatures, and ion implantation fluences. The shifts were interpreted as arising from the modification of the shapes of the as-grown QWs from square (abrupt interfaces) to rounded (gradual interfaces) due to enhanced indium diffusion out of the well layers in irradiated areas as a consequence of the in-diffusion of vacancies generated near the surface by the implantation. Except for QWs near the critical thickness boundary, the presence of strain in the quantum well layers due to the difference in the lattice constant of the well and barrier layers had negligible effect on the QW shape modification due to thermal processing.