ZnS/CdS复合窗口层对CdTe太阳能电池短波光谱响应的影响

采用磁控溅射法制备了ZnS/CdS复合窗口层,并将其应用于CdTe太阳能电池。对所制备薄膜的形貌和结构等进行了研究。测试了具有不同窗口层的CdTe太阳电池的量子效率和光Ⅰ-Ⅴ特性,分析了ZnS薄膜制备条件对CdTe电池器件性能影响;研究了CdS薄膜厚度和ZnS/CdS复合窗口层对短波区透过率以及CdTe太阳电池的光谱响应的影响。着重研究了具有ZnS/CdS复合窗口层的CdTe太阳电池的短波光谱响应。结果表明,CdS窗口层厚度从100 nm减至50 nm后,其对短波区光子透过率平均提高了18.3%,CdTe太阳电池短波区光谱响应平均提高了27.6%。衬底温度250 ℃条件下制备的ZnS晶粒尺寸小于室温下制备的ZnS。具有ZnS/CdS复合窗口层的CdTe电池中,采用衬底温度250 ℃沉积ZnS薄膜来制备窗口层的电池器件,其性能要优于室温下沉积ZnS制备窗口层的电池器件。这说明晶粒尺寸的大小对电子输运有一定影响。在相同厚度CdS的前提下,具有ZnS/CdS复合窗口层的CdTe电池比具有CdS窗口层在短波的光谱响应提高了约2%。这说明ZnS/CdS复合窗口层能够做到减少对短波光子的吸收,从而使更多的光子被CdTe电池的吸收层吸收。     

衬底温度对HfO_2薄膜结构和光学性能的影响

采用直流磁控反应溅射法,分别在室温,200,300,400和500℃下制备了HfO2薄膜。利用X射线衍射(XRD)、椭圆偏振光谱(SE)和紫外可见光谱(UVvis)研究了衬底温度对HfO2薄膜的晶体结构和光学性能的影响。XRD研究结果显示:不同衬底温度下制备的HfO2薄膜均为单斜多晶结构;随衬底温度的升高,(-111)面择优生长更加明显,薄膜中晶粒尺寸增大。SE和UVvis研究结果表明:随衬底温度升高,薄膜折射率增加,光学带隙变小;制备的HfO2薄膜在250～850nm范围内有良好的透过性能,透过率在80%以上。     

生长温度对Ga掺杂ZnO薄膜光电性能的影响

在不同衬底温度(室温~750 ℃)条件下,采用脉冲激光沉积(PLD)方法在石英玻璃和单晶硅(111)衬底上制备了Ga掺杂ZnO(GZO)薄膜。结果显示:衬底温度的变化导致衬底表面吸附原子扩散速率和脱附速率的不同,从而导致合成薄膜结晶质量的差异,衬底温度450 ℃时制备的GZO薄膜具有最好的结晶特性;GZO薄膜中载流子浓度随衬底温度升高而单调减小的现象与GZO薄膜中的本征缺陷密切相关,晶界散射强度的变化导致迁移率出现先增大后减小的趋势,衬底温度450 ℃时制备的GZO薄膜具有最小的电阻率~0.02 Ω·cm;随着衬底温度的升高,薄膜载流子浓度的单调减小导致了薄膜光学带隙变窄,所有合成样品的平均可见光透过率均达到85%以上。采用PLD方法制备GZO薄膜,衬底温度的改变可以对薄膜的光电性能起到调制作用。     

氢化非晶硅薄膜的热导率研究

采用铂电极为加热电阻,研究了厚度为300—370nm等离子体化学气相沉积(PECVD)工艺制备的氢化非晶硅(a-Si：H)薄膜的热导率随衬底温度的变化规律.用光谱式椭偏仪拟合测量薄膜的厚度,得到了沉积速率随衬底温度变化规律,傅里叶红外(FTIR)表征了在KBr晶片衬底上制备的a-Si：H薄膜的红外光谱特性,SiH原子团键合模的震动对热量的吸收降低了薄膜热导率.从动力学角度分析了薄膜热导率随平均温度升高而增大的原因,并比较了声子传播和自由电子移动在a-Si：H薄膜热导率变化上的作用差异. 关键词： 非晶硅 热导率 薄膜 热能     

氧压对飞秒激光沉积ZnO/Si(100)薄膜光学性能的影响

利用飞秒脉冲激光沉积法在n-Si（100）单晶衬底上制备了ZnO薄膜, 分析了衬底温度、激光能量、氧压及退火处理对薄膜结构和光学性能的影响. X射线衍射结果表明, 当激光能量为15?mJ、氧压为10?mPa时, 80?℃生长的薄膜取向性最好. 场扫描电子显微镜结果显示薄膜的晶粒尺寸随激光能量的增加而减小、随衬底温度的升高而增大且退火后明显变大. 紫外-可见透射光谱显示薄膜具有90%以上的可见光透过率.光致发光谱表明当氧压为10 mPa时,除了ZnO的紫外本征峰外, 还有一波长为410 nm的强紫光峰, 当氧压增至20 mPa以上, 所有缺陷峰均消失, 只有376 nm处的紫外本征峰. 与纳秒激光法所制备的薄膜特性进行了比较, 结果表明, 虽然纳秒激光沉积所制备的薄膜具有更高的c轴取向度, 但飞秒激光沉积制备的薄膜具有更好的发光性能. 关键词： 氧化锌 飞秒脉冲激光沉积 透过率 光致发光     

溅射工艺参数对硅薄膜微结构影响的Raman分析

为了解决碳化硅难以进行光学加工的问题,该文采用射频磁控溅射方法,在碳化硅反射镜坯体上沉积与碳化硅具有相近热膨胀系数且易于进行光学加工的硅薄膜。利用拉曼光谱(Raman)对衬底温度、射频功率、衬底偏压等溅射工艺条件对硅膜微结构的影响进行了分析。研究发现：随着衬底温度的升高,薄膜的晶化率先增大后减小;衬底偏压的增加不利于薄膜有序结构的形成;射频功率对薄膜微结构的影响比较复杂,随着功率的升高,薄膜晶粒尺寸减小,晶化率降低,当射频功率进一步升高时,薄膜中有序团簇尺寸和晶化率逐渐升高。但过高的射频功率反而不利于薄膜的晶化。     

化学浴沉积法制备CdS多晶薄膜

利用化学浴沉积法制备适合于铜铟镓硒薄膜太阳能电池缓冲层材料的CdS多晶薄膜,研究了在不同温度和不同时间下沉积薄膜的性质．薄膜生长开始由ion-by-ion机制控制,随着时间的进行,cluster-by-cluster机制占据主导．薄膜的生长速度随着沉积温度的升高而快速增加,直到达到饱和厚度．并且饱和厚度随温度升高而相应降低．SEM表明随沉积时间增加以及温度升高,薄膜表面形貌从多孔到粗糙的不均匀转变．XRD结果显示,薄膜由立方和六方两相结构组成,控制沉积时间对薄膜的主要晶相结构很关键．所有温度下沉积的CdS     

光谱分析气体状态对近空间升华沉积CdTe多晶薄膜的影响

在CdTe多晶薄膜太阳电池制备中用近空间升华法生长了CdTe多晶薄膜,沉积工作气体的状态决定了薄膜的结构、性质。文章首先分析了近空间沉积的物理机制,测量了近空间沉积装置内的温度分布,使用氩氧混合气体为工作气体,其中重点讨论了该气体状态(包括气氛和气压)与薄膜的初期成核的关系,即择优取向程度和光能隙与气氛和气压的关系。结果表明,(1)不同气氛下沉积的CdTe薄膜均为立方相结构。随氧浓度的增加,σ增加,氧浓度为6%时,σ最大,之后随氧浓度增加,σ降低,在12%达到最小,然后随氧浓度的增加而增加, 在氧浓度为9%时沉积的结晶更完整。CdTe薄膜的光能隙为1.50～1.51 eV;(2)在氩氧气氛下氧浓度为9%,不同气压下制备的样品,均有立方相CdTe, 此外, 还有CdS和SnO₂:F衍射峰。CdTe晶粒随气压增加有减小趋势,随气压的增加,透过率呈下降趋势,相应的CdTe吸收边向短波方向移动;(3)在氩氧气氛下氧浓度为9%,采用衬底温度550 ℃,源温度620 ℃,沉积时间4 min时制备的CdTe多晶薄膜获得了转换效率优良的结构为SnO₂:F/CdS/CdTe/Au的集成电池。     

沉积温度对微晶硅薄膜结构特性的影响

采用PECVD技术，在玻璃衬底上沉积μc-Si:H薄膜. 用拉曼光谱、SEM和UV分光光度计对不同沉积温度下沉积的薄膜的结构特性进行分析. 研究发现：沉积温度较低时，随着沉积温度的升高，薄膜的晶化率增加；当沉积温度超过某一温度值时，随着温度的进一步升高，薄膜的晶化率降低. 这时，表面反应由表面扩散限制转变为流量控制. 该温度值随着硅烷含量的降低而降低. 关键词： 氢化微晶硅薄膜 拉曼散射谱 晶化率 UV分光光度计     

埋点靶中CH薄膜的制备工艺研究

 CH薄膜的制备是埋点靶制备的关键技术之一,本文主要研究了钨丝辅助裂解制备CH薄膜的制备工艺。研究表明蒸发舟温度和衬底温度对沉积速率影响较大,而衬底距离对沉积速率影响较小;红外光谱和质谱分析表明薄膜的主要成分是聚对二甲苯。     

不同温度下制备的CdTe薄膜对太阳电池光电性能的影响

在不同温度下用近空间升华法（CSS）制备了CdTe多晶薄膜,结合I-V,C-V特性及深能级瞬态谱研究了不同温度制备的CdTe薄膜对CdS/CdTe太阳电池性能的影响.结果表明,制备温度对电池组件的开路电压影响不大,对短路电流和填充因子有影响,CdTe薄膜的深中心对温度和频率的响应基本一致.580℃制备的样品暗饱和电流密度最小,载流子浓度较高,光电特性较好,而且空穴陷阱浓度较低,深中心复合作用较小.在此研究基础上制备出了面积为300 mm×400 mm 关键词： 制备温度 CdTe薄膜 深能级瞬态谱（DLTS） CdS/CdTe太阳电池     

氧对于在Ar/O氛围下用近空间升华法制备的CdS薄膜的影响

采用近空间升华法（CSS）在氩/氧气氛中制备了硫化镉（CdS）多晶薄膜.利用XRD,XPS,AFM,UV-VIS光谱和四探针技术等测试和分析手段系统研究了氧对薄膜的成分、结构、光学和电学等性质的影响.结果表明,用近空间升华法制备的CdS薄膜具有六方相结构,膜层致密、均匀,平均晶粒大小约为40 nm,富硫.氧掺入后部分与镉生成氧化镉,并随着氧含量的增加,薄膜的成分有趋于化学计量比的趋势,光学带隙加宽,光暗电导比增加.此外,还利用扫描电镜（SEM）观察了CdS/CdTe断面结合光谱响应（QE）的结果讨论了氧对CdS/CdTe界面互扩散的影响.发现,随着CdS薄膜制备气氛中氧分压的升高,CdS/CdTe界面的互扩散程度降低,有利于提高器件在500—600 nm波长范围内的光谱响应.认为,氧含量的增加不但使CdS薄膜在光伏应用方面的质量得到改善,而且CdTe太阳电池器件中的CdS/CdTe界面也得到了优化. 关键词： CdS多晶薄膜 近空间升华法 窗口层 界面     

化学水浴法和磁控溅射法制备硫化镉薄膜的性能研究

以氯化铵、氯化镉、氢氧化钾和硫脲为反应物采用化学水浴法制备了硫化镉薄膜,为了作对比研究,采用射频磁控溅射以硫化镉为靶材,氩气为溅射气体,制备了硫化镉薄膜。采用X射线衍射、扫描电子显微镜和紫外-可见光光谱仪分别表征了硫化镉薄膜的结构、形貌和光学吸收特性。结果表明,采用以上两种方法制备的硫化镉均具有(002)择优取向,溅射法制备的硫化镉薄膜较致密,薄膜表面较光滑,平均晶粒尺寸在20～30nm;水浴法制备的硫化镉薄膜颗粒尺寸较小,缺陷较多。除了在短波段溅射所得硫化镉薄膜的透过率略差于水浴法所得硫化镉薄膜之外,溅射法制备的硫化镉薄膜的性能整体上优于水浴法制备的薄膜。两种方法制备的硫化镉薄膜的能隙在2.3～2.5eV。     

Low temperature ferromagnetic properties of CdS and CdTe thin films

The magnetic property in a material is induced by the unpaired electrons. This can occur due to defect states which can enhance the magnetic moment and the spin polarization. In this report, CdS and CdTe thin films are grown on FTO glass substrates by chemical bath deposition and close-spaced sublimation, respectively. The magnetic properties, which are introduced from oxygen states, are found in CdS and CdTe thin films. From the hysteresis loop of magnetic moment it is revealed that CdS and CdTe thin films have different kinds of magnetic moments at different temperatures. The M–H curves indicate that from 100 K to 350 K, CdS and CdTe thin films show paramagnetism and diamagnetism, respectively.A superparamagnetic or a weakly ferromagnetic response is found at 5 K. It is also observed from ZFC/FC curves that magnetic moments decrease with temperature increasing. Spin polarized density functional calculation for spin magnetic moment is also carried out.     

Two-step annealed CdS/CdSe co-sensitizers for quantum dot-sensitized solar cells

CdS/CdSe co-sensitizers on TiO₂ films were annealed using a two-step procedure; high temperature (300 °C) annealing of TiO₂/CdS quantum dots (QDs), followed by low temperature (150 °C) annealing after the deposition of CdSe QDs on the TiO₂/CdS. For comparison, two types of films were prepared; CdS/CdSe-assembled TiO₂ films conventionally annealed at a single temperature (150 or 300 °C) and non-annealed films. The 300 °C-annealed TiO₂/CdS/CdSe showed severe coalescence of CdSe QDs, leading to the blocked pores and hindered ion transport. The QD-sensitized solar cell (QD-SSC) with the 150 °C-annealed TiO₂/CdS/CdSe exhibited better overall energy conversion efficiency than that with the non-annealed TiO₂/CdS/CdSe because the CdSe QDs annealed at a suitable temperature (150 °C) provided better light absorption over long wavelengths without the hindered ion transport. The QD-SSC using the two-step annealed TiO₂/CdS/CdSe increased the cell efficiency further, compared to the QD-SSC with the 150 °C-annealed TiO₂/CdS/CdSe. This is because the 300 °C-annealed, highly crystalline CdS in the two-step annealed TiO₂/CdS/CdSe improved electron transport through CdS, leading to a significantly hindered recombination rate.     

Effect of CdS deposition temperature for thermally grown Cu(In,Ga)Se2 and two-step chalcogenized Cu(In,Ga)(S,Se)2 absorbers on solar cell performances

CdS buffer layer of varying thickness ranging from 23 to 58 nm deposited at different substrate temperature were prepared as n-type junction partner for thermally grown Cu(In,Ga)Se₂ and two-step chalcogenized Cu(In,Ga)(S,Se)₂ photovoltaic absorber films and the effect of deposition temperature and time on the CdS growth behavior and solar cell performance were evaluated. High deposition temperature resulted in a thicker CdS layer and more importantly lower density and shallower depth of open voids, which attributed to the improved open-circuit voltage and fill factor due to reduced interface recombination. The solar cell efficiency of thermally grown absorber saturated at about 30 nm thickness of CdS, while that of chalcogenized absorber gradually increased with CdS thickness up to 60 nm without significant loss of short-circuit current density.     

Photoluminescence studies on nanostructured cadmium sulfide thin films prepared by chemical bath deposition method and annealed at different temperatures

Nanostructured cadmium sulfide (CdS) thin films have been prepared by chemical bath deposition (CBD) method and after post deposition annealing of the thin films at different temperatures, photoluminescence (PL) property has been studied. The effects of various photoexcitation wavelengths on the PL behaviour of different annealed films of CdS were studied by recording the PL spectra. The intensity of PL, the profile of the PL spectra and the effects of photoexcitation wavelength depend drastically on the temperature of the post deposition annealing of the thin films. The XRD patterns of the films show the presence of both the hexagonal and cubic phases (mixed phases). The emission peak arises from the surface defects of the CdS nanocrystalline thin films. Significant modification in the surface morphology of the CdS films upon annealing has been observed from the FESEM images. The morphology of the thin films is expected to influence the PL behaviour of the CdS thin films. The quantum size effect and size dependant PL have been observed.     

Controlled synthesis, characterization and optical properties of CdS nanocrystalline thin films via chemical bath deposition (CBD) route

In this study, the CdS nanocrystalline thin films obtained from an ammonia-free chemical bath deposition process. The crystallites with a size range of 10–20 nm in diameter with zinc blend (cubic) and wurtzite (hexagonal) crystal structure and strong photoluminescence were prepared from the mixture solutions of: cadmium chloride dihydrate as a cadmium source, thiourea as a sulfur source and sodium citrate dihydrate as a complexing agent for cadmium ions. The well-cleaned glass used as a substrate for thin films deposition. The obtained samples were characterized by the techniques such as scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), X-ray photoelectron spectra (XPS), atomic force microscopy (AFM) and fluorescence spectroscopy. Also, the effect of two parameters such as pH and temperature of reaction on the synthesis of CdS nanocrystals was studied. Finally, it was found the CdS nanocrystals showed sharp excitation features and strong “band-edge” emission.     

The effect of annealing temperature on structural and optical properties of undoped and Cu doped CdS thin films

Cadmium sulphide (CdS) thin films were prepared chemical bath deposition technique. The films were doped with copper using the direct method consisting in the addition of a copper salt in the deposition bath of CdS. The doped films were annealed in air, at 250, 300 and 350 °C, for 1 h. The deposition films were characterized with X-ray diffraction (XRD), scanning electron microscope (SEM), energy dispersive analysis by X-rays (EDAX) and optical properties of CdS thin films before and after Cu doping. XRD analysis shows that the films are polycrystalline in nature with cubic crystalline structure. The various parameters such as crystallite size, micro strain and dislocation density were evaluated. SEM study shows that the total substrate surface is well covered by uniformly distributed spherical shaped grains. Optical transmittance study shows the presence of direct transition with band gap energy decrease 2.5–2.2 eV.     

CdTe多晶薄膜沉积制备及其性能

在氩气和氧气混合气氛下,近空间升华法制备了CdTe多晶薄膜。薄膜的结构、性质决定于整个沉积过程。深入研究沉积过程中的热交换、物质输运,有助于获得结构致密具有良好光电性质的CdTe薄膜。分析了近空问沉积的物理机制,测量了近空间沉积装置内的温度分布,讨论了升温过程、气压与薄膜的初期成核的关系。结果表明,不同气压下制备的样品,均有立方相CdTe。此外,还有CdS和SnO2：F衍射峰。CdTe晶粒随气压增加有减小趋势;随气压的增加,透过率呈下降趋势,相应的CdTe吸收边向短波方向移动。采用衬底温度500℃,源温度620℃,在120℃的温差下,沉积时间4min上制备CdTe多晶薄膜,获得转换效率优良的结构为SnO2：F／CdS／CdTe／Au的集成电池。