a-Si:H薄膜及MWECR-CVD制备技术

文章回顾了a—Si：H薄膜的发展历程，并介绍了其近10年的研究状况、为提高a—Si：H薄膜的沉积速度，还重点介绍了一种新的微波电子回旋共振等离子体CVD(MWECR—CVD)技术，该技术的特点是：不含电极，可避免电极溅射造成的污染；等离子区离子密度高，对硅烷能高度分解，从而可显著提高薄膜生长速率；改变磁场位形和结构，可改变等离子体分布及轰击基片离子的能量，文章还分析了其制备a—Si：H薄膜存在的问题，提出了今后的研究方向。     

a-Si∶H薄膜及MWECR-CVD制备技术

文章回顾了a -Si∶H薄膜的发展历程 ,并介绍了其近 10年的研究状况 .为提高a -Si∶H薄膜的沉积速度 ,还重点介绍了一种新的微波电子回旋共振等离子体CVD(MWECR -CVD)技术 .该技术的特点是 :不含电极 ,可避免电极溅射造成的污染 ;等离子区离子密度高 ,对硅烷能高度分解 ,从而可显著提高薄膜生长速率 ;改变磁场位形和结构 ,可改变等离子体分布及轰击基片离子的能量 .文章还分析了其制备a -Si∶H薄膜存在的问题 ,提出了今后的研究方向 .     

氢化非晶硅薄膜的热导率研究

采用铂电极为加热电阻,研究了厚度为300—370nm等离子体化学气相沉积(PECVD)工艺制备的氢化非晶硅(a-Si：H)薄膜的热导率随衬底温度的变化规律.用光谱式椭偏仪拟合测量薄膜的厚度,得到了沉积速率随衬底温度变化规律,傅里叶红外(FTIR)表征了在KBr晶片衬底上制备的a-Si：H薄膜的红外光谱特性,SiH原子团键合模的震动对热量的吸收降低了薄膜热导率.从动力学角度分析了薄膜热导率随平均温度升高而增大的原因,并比较了声子传播和自由电子移动在a-Si：H薄膜热导率变化上的作用差异. 关键词： 非晶硅 热导率 薄膜 热能     

基于反射和透射光谱的氢化非晶硅薄膜厚度及光学常量计算

采用紫外-可见透射光谱仪测量了对靶磁控溅射沉积法制备的氢化非晶硅（a-Si:H）薄膜的透射光谱和反射光谱.利用T/(1-R)方法来确定薄膜的吸收系数,进而得到薄膜的消光系数|通过拟合薄膜透射光谱干涉极大值和极小值的包络线来确定薄膜折射率和厚度的初始值,并利用干涉极值公式进一步优化薄膜的厚度值和折射率|利用柯西公式对得到的薄膜折射率进行拟合,给出了a-Si:H薄膜的色散关系曲线.为了验证该方法确定的薄膜厚度和光学常量的可靠性,将理论计算得到的透射光谱与实验数据进行了比较,结果显示两条曲线基本重合,可见这是确定a-Si:H薄膜厚度及光学常量的一种有效方法.     

原位等离子体逐层氧化a-Si:H/SiO2多层膜的光致发光研究

采用在等离子体增强化学汽相沉积系统中沉积a-Si:H和原位等离子体逐层氧化的方法制备a-Si:H/SiO2多层膜.改变a-Si:H层的厚度，首次在室温下观察到来自a-Si:H/SiO2多层膜较强的蓝色光致发光和从465到435nm的蓝移.x射线能谱证明，SiO2层是化学配比的SiO2；C-V特性表明，a-Si:H/SiO2界面得到了很好的钝化；透射电子显微镜表明，样品形成了界面陡峭的多层结构.结合光吸收谱和光致发光谱的研究，对其发光机理进行了讨论.用一维量子限制模型对光致发光峰随着a-Si:H层厚度的减小 关键词： a-Si:H/SiO2多层膜 光致发光     

基片下磁场磁控对溅射辉光及薄膜梯度的影响

溅射时在基片下方放置磁铁，让来自基片下方的磁场发挥磁控作用，以此来研究基片下磁场磁控溅射的方法.发现辉光形貌以及沉积的薄膜厚度分布均发生明显变化的同时，辉光的外形也随着外加磁铁直径的变化而变化.运用磁荷理论对空间磁场分布进行模拟，解释了辉光形貌变化的机理；运用沉积粒子在外加梯度磁场中运动理论解释了膜厚分布. 关键词： 磁控溅射 辉光 磁场模拟 膜厚梯度     

异质结太阳电池中非晶钝化层的分光椭偏分析

采用分光椭偏(SE)测试技术研究晶体硅(c-Si)异质结太阳电池用氢化非晶硅(a-Si:H)薄膜钝化层的性能。采用有效媒介理论为基础进行分层多相拟合,研究了a-Si:H/c-Si界面层内部的缺陷散射周期(St)、a-Si:H体内孔隙率以及薄膜介电函数峰值随基底温度的变化规律。通过与傅里叶红外转换光谱计算得到的微结构数据对比,发现界面层的St与薄膜内部Si H和Si H2含量相关。依据高分辨率透射电镜(TEM)下呈现的形貌特征、有效少子寿命和异质结的implied开路电压等参数的辅助证明,确定SE技术作为一种有效的光学表征手段,能准确快速地判断a-Si:H对c-Si表面的钝化性能,继而定量给出适合晶体硅异质结太阳电池高质量a-Si:H钝化层生长的最优参数。     

氢化非晶硅薄膜中氢含量及键合模式的红外分析

Fourier红外透射(FTIR)谱技术是研究氢化非晶硅（a-Si∶H）薄膜中氢的含量（CH）及硅—氢键合模式（Si-Hn）最有效的手段.对用等离子体化学气相沉积（PCVD）方法在不同的衬底温度（Ts）下制备出的氢化非晶硅薄膜，通过红外透射光谱的基线拟合、高斯拟合分析，得到了薄膜中的氢含量，硅氢键合模式及其组分，并分析了这些参量随衬底温度变化的规律.     

沉积压力对氢化非晶硅薄膜特性的影响

采用等离子增强化学气相沉积(PECVD)系统,以乙硅烷和氢气为气源,普通钠钙玻璃为衬底制备了氢化非晶硅(a-Si∶H)薄膜,研究了沉积压力对非晶硅薄膜的沉积速率、光学带隙以及结构因子的影响。采用台阶仪、紫外可见分光光度计、傅里叶变换红外光谱仪和扫描电子显微镜等手段分别表征了a-Si∶H薄膜的沉积速率,光学带隙、结构因子和表面形貌。结果表明： 随着沉积压力的增加,沉积速率呈现先上升后下降的趋势,光学带隙不断下降。当沉积压力小于210 Pa时,以SiH键存在的H原子较多,而以SiH₂或SiH₃等形式存在的H较少; 当沉积压力大于210 Pa时,以SiH₂,(SiH₂)_n或SiH₃等形式存在的H较多。通过结构因子的计算,发现沉积压力在110～210 Pa的范围内沉积的薄膜质量较好。     

基于反射和透射光谱的氢化非晶硅薄膜厚度及光学常量计算

采用紫外-可见透射光谱仪测量了对靶磁控溅射沉积法制备的氢化非晶硅( a-Si:H)薄膜的透射光谱和反射光谱.利用T/(1-R)方法来确定薄膜的吸收系数,进而得到薄膜的消光系数;通过拟合薄膜透射光谱干涉极大值和极小值的包络线采确定薄膜折射率和厚度的初始值,并利用干涉极值公式进一步优化薄膜的厚度值和折射率;利用柯西公式对得...     

Micro-patterning of NdFeB and SmCo magnet films for integration into micro-electro-mechanical-systems

The integration of high-performance RE-TM (NdFeB and SmCo) hard magnetic films into micro-electro-mechanical-systems (MEMS) requires their patterning at the micron scale. In this paper we report on the applicability of standard micro-fabrication steps (film deposition onto topographically patterned substrates, wet etching and planarization) to the patterning of 5-8 μm thick RE-TM films. While NdFeB comprehensively fills micron-scaled trenches in patterned substrates, SmCo deposits are characterized by poor filling of the trench corners, which poses a problem for further processing by planarization. The magnetic hysteresis loops of both the NdFeB and SmCo patterned films are comparable to those of non-patterned films prepared under the same deposition/annealing conditions. A micron-scaled multipole magnetic field pattern is directly produced by the unidirectional magnetization of the patterned films. NdFeB and SmCo show similar behavior when wet etched in an amorphous state: etch rates of approximately 1.25 μm/min and vertical side walls which may be attributed to a large lateral over-etch of typically 20 μm. Chemical-mechanical-planarization (CMP) produced material removal rates of 0.5-3 μm/min for amorphous NdFeB. Ar ion etching of such films followed by the deposition of a Ta layer prior to film crystallization prevented degradation in magnetic properties compared to non-patterned films.     

Two-dimensional imaging with a single-sided NMR probe

A new low field unilateral NMR sensor equipped with a two-dimensional gradient coil system was built. A new NMR-MOUSE concept using a simple bar magnet instead of the classical U-shaped geometry was used to produce magnetic field profiles comparatively homogeneous in extended lateral planes defining a suitable field of view for 2D spatial localization. Slice selection along the depth direction is obtained by means of the highly constant static magnetic field gradient produced by this magnet geometry. Implementing a two-dimensional phase-encoding imaging method 2D cross sections of objects were obtained with high spatial resolution. By retuning the probe it was possible to change the depth of the selected slice obtaining a 3D imaging method. The details of the construction of the new device are presented together with imaging tests to show the quality of space encoding.     

Development of a temperature-variable magnetic resonance imaging system using a 1.0T yokeless permanent magnet

A temperature variable magnetic resonance imaging (MRI) system has been developed using a 1.0 T permanent magnet. A permanent magnet, gradient coils, radiofrequency coil, and shim coil were installed in a temperature variable thermostatic bath. First, the variation in the magnetic field inhomogeneity with temperature was measured. The inhomogeneity has a specific spatial symmetry, which scales linearly with temperature, and a single-channel shim coil was designed to compensate for the inhomogeneity. The inhomogeneity was drastically reduced by shimming over a wide range of temperature from −5 °C to 45 °C. MR images of an okra pod acquired at different temperatures demonstrated the high potential of the system for visualizing thermally sensitive properties.     

Levitation in the field of a nonsuperconducting coil with magnetic flux stabilization

A method providing the “frozen flux” conditions in a nonsuperconducting coil is suggested and demonstrated with a model. The feasibility of permanent magnet stable levitation in the field of the coil with magnetic flux stabilization and mean current control is shown. The method allows researchers to exploit permanent magnet-superconducting body interaction in physical devices, for example, to reproduce, using nonsuperconducting coils, the frozen magnetic flux conditions required for the stable levitation of the magnet over a superconducting body.     

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HL-2A装置上建设了1套3.7GHz/2MW/2s的低杂波系统,高功率长脉冲波源使用TH2103型速调管。设计了1套可以固定探针的机构,完成了速调管配套磁体的磁场测量,得到了中心轴线上的磁场分布特性,中心磁场最强达到176mT。在不同的空间位置,3组线圈电流分别对磁场分布起主要影响。1号电源主要影响阴极附近磁场分布,同时对谐振腔也有部分影响;2号电源主要对谐振腔产生影响,同时在功率输出窗口附近有一定影响;3号电源主要在输出窗口附近有影响,其他位置影响不明显。结果为速调管工作状态优化提供了方向。     

CCT型超导组合磁体样机结构设计

基于斜螺线管型(Canted-Cosine-Theta,简称CCT)线圈结构,研制了一台四极与六极组合的超导磁体样机,它的四极和六极梯度场分别为22 T/m和120 T/m²。该组合型磁体的好场区范围为Φ0.16 m×1.3 m,有效长度为1.3 m。其中四极与六极磁体均采用两层骨架结构,每层骨架的线槽内并排放置多层多根超导线。本文根据导体轨迹,以约束电磁力为结构设计目标,设计了磁体关键部件线圈支撑骨架和磁体内外支撑结构,并介绍了磁体制造过程中的关键环节。     

Multi-objective optimization of gradient coil for benchtop magnetic resonance imaging system with high-resolution

Significant high magnetic gradient field strength is essential to obtaining high-resolution images in a benchtop mag- netic resonance imaging （BT-MRI） system with permanent magnet. Extending minimum wire spacing and maximum wire width of gradient coils is one of the key solutions to minimize the maximum current density so as to reduce the local heating and generate higher magnetic field gradient strength. However, maximum current density is hard to optimize together with field linearity, stored magnetic energy, and power dissipation by the traditional target field method. In this paper, a new multi-objective method is proposed to optimize the maximum current density, field linearity, stored magnetic energy, and power dissipation in MRI gradient coils. The simulation and experimental results show that the minimum wire spacings are improved by 159% and 62% for the transverse and longitudinal gradient coil respectively. The maximum wire width increases from 0.5 mm to 1.5 mm. Maximum gradient field strengths of 157 mT/m and 405 mT/m for transverse and lon- gitudinal coil are achieved, respectively. The experimental results in BT-MRI instrument demonstrate that the MRI images with in-plane resolution of 50 ~tm can be obtained by using the designed coils.     

利用轴向磁化的永磁环制造轴向梯度磁场

首先叙述了由单个轴向磁化环所产生的磁场,并就两个永磁环所产生的纵向磁场进行了分析.对于两个沿同一方向磁化的永磁体环,沿磁环中心线将会产生一个强度较为均匀的轴向磁场.如果两者的磁化方向相反,则在两磁铁间的区域将产生一个纵向的梯度磁场,其磁场强度介于-B₀到+B₀之间.设计制造了一个高梯度的轴向磁场,其磁场梯度为47.2Tm,测量结果与计算结果非常一致.文中还讨论了产生变梯度磁场的方法.由于永磁环所产生的磁场和螺线管的磁场较为相似,磁铁外部空间将有较大的漏场,最后还讨论了屏蔽漏场的问题.     

Atom probe study on the bulk nanocomposite SmCo/Fe permanent magnet produced by ball-milling and warm compaction

The microstructure and compositions of the bulk nanocomposite SmCo/Fe permanent magnet were studied using transmission electron microscopy and 3-dimensional atom probe techniques. The excellent magnetic properties were related to the uniform nanocomposite structure with nanometer α-Fe particles uniformly distributed in the SmCo phase matrix. The α-Fe phase contained ∼26 at% Co, and the SmCo phase contained ∼19 at% Fe, confirming that the interdiffusion of Fe and Co atoms between the two phases occurred. The formation of the α-Fe(Co) phase explained why the saturation magnetization of the nanocomposite permanent magnet was higher than that expected from the original pure α-Fe and SmCo₅ powders, which enhanced further the maximum energy product of the nanocomposite permanent magnet.     

Finite size disc gradient coil set for open vertical field magnets

A new analytical approach is used in the design of disc-like gradient coils suitable for magnet geometries with main field direction perpendicular to the surface of the disc. An inverse procedure is used to optimize the coil's characteristics, subject to the restrictions imposed by the desired field behavior over a certain set of constraint points inside a predetermined imaging volume. Excellent agreement between the expected values of the gradient magnetic field and the numerical values generated by applying the Biot-Savart law to a discrete current pattern of the perspective disc coil was found. A Finite Element Analysis package was used to predict the fringe gradient field levels for a non-shielded axial disc coil and for a self-shielded transverse disc coil in the vicinity of the magnet poles. The numerical results indicate that for the self-shielded design the gradient fringe field is 1000 times smaller than the corresponding fringe field for the non-shielded disc case. Also no significant spatial dependence was noticed for the shielded coil's fringe field.