关于RHEED振荡技术优化GaAs(110)量子阱生长的研究

在GaAs(110)衬底上生长的半导体材料有诸多优良性能，使得在非极性GaAs(110)衬底上获得高质量各类异质结材料，成为近年来分子束外延生长关注的课题.考虑GaAs(110)表面是Ga和As共面，最佳生长温度窗口很小；反射式高能电子衍射的(1×1)再构图案对生长温度和V/Ⅲ束流比不敏感，难于通过观察再构图案的变化，准确地找到最佳生长条件.作者在制备GaAs(110)量子阱过程中，观察到反射式高能电子衍射强度振荡呈现出的单双周期变化.这意味着不同工艺条件下，在 GaAs(110)衬底上量子阱有单层和双层两种生长模式.透射电子显微镜和室温光致荧光光谱测量结果表明：在双层生长模式下量子阱样品光学性能较差，而在单层生长模式下量子阱光学性能较好，但是界面会变粗糙.利用这一特点，我们采用反射式高能电子衍射强度振荡技术，找到了一种在GaAs(110)衬底上生长高质量量子阱的可行方法. 关键词： 反射高能电子衍射 量子阱 分子束外延     

基于量子限制的受主带间跃迁太赫兹探测器的制备与测量

使用分子束外延生长设备,在GaAs（100）衬底上生长了量子阱宽度为3 nm的GaAs/AlAs多量子阱样品,并在量子阱层中央进行了Be受主的δ-掺杂。根据量子限制受主从束缚态到非束缚态之间的跃迁,设计并制备了δ-掺杂Be受主GaAs/AlAs多量子阱太赫兹光探测器原型器件。在4.2 K温度下,分别对器件进行了太赫兹光电流谱和暗电流-电压曲线的测量。在6 V直流偏压下,空穴载流子沿量子阱层方向输运。当正入射激光频率为6.8 THz时,器件响应率为2×10^-4 V/W（2 μA/W）。通过器件的暗电流-电压曲线计算了器件全散粒噪声电流,在4.2 K、6 V直流偏压下,全散粒噪声电流为5.03 fA·Hz^-1/2。     

高稳定线性调谐GaAs基波长可调谐共振腔增强型探测器

研制了一种GaAs基波长可调谐共振腔增强型探测器. 采用分子束外延设备生长In_0.25Ga_0.75As/GaAs量子阱作为器件的有源区, 无偏压时器件的响应峰波长在1071 nm,器件在21 V的直流调谐电压下,实现了波长大于23 nm的调谐. 统计结果表明,当调谐电压大于5 V时,调谐电压与响应波长之间具有稳定、精确的对应关系, 且近似线性调谐,同时对器件响应峰的特性进行了理论分析. 关键词： GaAs 共振腔增强型探测器 高稳定 线性调谐     

InGaAs/GaAs应变脊形量子线分子束外延非平面生长研究

提出了新型InGaAs/GaAs应变脊形量子线结构．这种应变脊形量子线结合了非平面应变外延层中沿不同晶向能带带隙的变化、非平面生长应变层In组分的变化，以及非平面外延层厚度的变化等三方面共同形成的横向量子限制效应的综合作用．在非平面GaAs衬底上用分子束外延生长了侧面取向为（113）的脊形AlAs/In GaAs/AlAs应变量子线．用10K光致荧光谱测试了其发光性质．用Kronig-Penney模型近似计算了这种应变脊形结构所具有的横向量子限制效应，发现其光致荧光谱峰位的测试结果，与计算结果相比，有10meV的“蓝移”．认为这一跃迁能量的“蓝移”是上述三方面横向量子限制效应综合作用的结果 关键词：     

GaSb/GaAs复合应力缓冲层上自组装InAs量子点的生长

研究了GaSb/GaAs复合应力缓冲层上自组装生长的InAs量子点.在2ML GaSb/1ML GaAs复合应力缓冲层上获得了高密度的、沿［100］方向择优分布量子点.随着复合应力缓冲层中GaAs层厚度的不同,量子点的密度可以在1.2×10¹⁰cm^-2和8×10¹⁰cm^-2进行调控.适当增加GaAs层的厚度至5ML,量子点的发光波长红移了约25nm,室温下PL光谱波长接近1300nm. 关键词： 自组装量子点 分子束外延 Ⅲ-Ⅴ族化合物半导体     

GaAs(001)图形衬底上InAs量子点的定位生长

InAs/GaAs量子点是重要的单光子源,位置可控量子点对实现可寻址易集成的高性能量子点光源具有重要意义.本文详细研究了氢原子条件下GaAs (001)图形衬底的低温脱氧过程,低温GaAs缓冲层生长中沟槽形貌的演化过程,以及沟槽形貌对量子点形核位置的影响.发现GaAs衬底上纳米沟槽侧壁的倾斜角较小时, InAs量子点会优先生长于沟槽底部;当沟槽的侧壁倾斜角较大时, InAs量子点则会优先生长于沟槽两侧的外边沿位置.此外,本文还研究了纳米孔洞侧壁的倾斜角对量子点成核位置的影响,实现了双量子点分子和四量子点分子的定位生长.     

GaAs/SrTiO3外延半导体单晶薄膜带间跃迁研究

报道了在钙钛矿型结构的SrTiO₃衬底上用分子束外延方法生长闪锌矿型结构的GaAs半导体单晶薄膜.应用光调制反射光谱和光荧光方法 ,研究了GaAs半导体薄膜的带间跃迁,并与通常的GaAs体材料特性进行了对比研究.结果表明,在钙钛矿型结构SrTiO₃衬底上生长的GaAs单晶薄膜具有与单晶体材料相似的禁带与光学特性,在带间跃迁的弛豫上,外延薄膜相对体材料大了约5倍. 关键词：     

垂直腔面发射激光器的结构生长及特性研究

在偏〈111〉A 2°的GaAs (100) 衬底上生长了Al0.9Ga0.1As /Al0.2Ga0.8As周期结构的垂直腔面发射激光器（VCSEL）外延片P 型DBR的周期数为24.5对,N型DBR的周期数为34.5对.用光荧光 (PL) 谱、扫描电子显微镜 (SEM)和X射线双晶衍射 (XRD) 方法对VCSEL的光学特性和结构特性进行了分析室温量子阱材料的PL谱峰值波长为837.0 nm,半高宽达到28.9 nm在X射线双晶衍射回摆曲线中,除了“0”级衍射峰外,还观察到一级和二级卫星峰.“0”级双晶衍射峰的半高宽为12.56弧秒(″),衬底GaAs的衍射峰半高宽为11.79″.“0”级衍射峰半高宽与衬底GaAs的衍射峰半高宽比较接近,表明晶格具有很高的完整性.实验结果表明腔模波长为837.2 nm,腔模波长与PL谱峰值波长相匹配.     

以S-K和V-W模式生长ZnCdSe和ZnSeS量子点及其特性

用低压金属有机化学气相外延(LP-MOCVD)技术,以Stranski Krastanow(S-K)模式,在GaAs衬底上生长了CdSe和ZnCdSe量子点(QDs)。用原子力显微镜(AFM),观测到了外延层低于临界厚度时,CdSe自组装量子点的形成过程,并把其机理归结为表面扩散效应和应变弛豫效应的联合作用。依据理论计算外延层临界厚度值的指导,用LP-MOCVD技术在GaAs衬底上生长了ZnCdSe量子点,详细观测了ZnCdSe量子点的形成和演变,这些过程可用Ostwald熟化过程和形成过程的联合作用来解释。用LP-MOCVD技术,以Volmer Weber(V-W)模式,在GaAs衬底上生长了ZnSeS量子点,随着生长时间的增加,量子点尺寸增大,而量子点密度减少,这些现象可用表面自由能来解释。     

V形GaAs/AlGaAs量子线结构的微区光致发光谱研究

在室温下用显微光致发光的方法对单根V形GaAs/AlGaAs量子线进行了沿垂直于量子线方向的 空间分辨扫描测试,观察到各种量子结构的光致发光谱随空间位置的变化.在量子线区域附 近观察到来自量子线(QWR)、颈部量子阱(NQWL)和垂直量子阱(VQWL)等各种结构的发光,而 在距离量子线约1μm以远的发光光谱表现出侧面量子阱(SQWL)的发光.对全部发光光谱用高 斯线形进行了拟合,发现QWR和SQWL的发光包含了两个荧光峰,将它们分别归诸为电子到轻 、重空穴的跃迁.拟合后发光强度的空间变化直接确定了与量子线 关键词： V形GaAs/AlGaAs量子线 显微光致发光 空间分辨扫描     

Fabrication and optical properties of quantum dots and wires

We describe photoluminescence measurements made on mesa geometry quantum dots and wires with exposed side walls fabricated by laterally patterning undoped GaAs/AlGaAs quantum wells using electron beam lithography and dry etching. At low temperature the photoluminescence efficiency of many but not all of the GaAs quantum dot arrays scales with the volume of quantum well material down to lateral dimensions of 50nm. This behaviour contrasts with that found in wires produced at the same time where the intensity falls off rapidly with decreasing wire width for dimensions below 500nm but is recovered by overgrowth with indium tin oxide, possibly as a result of strain. Narrow overgrown wires exhibit anisotropy in polarized excitation spectra which is discussed in relation to strain and lateral confinement effects.     

Electronic structure of ZnO wurtzite quantum wires

The electronic structure and optical properties of ZnO wurtzite quantum wires with radius R≥3 nm are studied in the framework of six-band effective-mass envelope function theory. The hole effective-mass parameters of ZnO wurtzite material are calculated by the empirical pseudopotential method. It is found that the electron states are either two-fold or four-fold degenerate. There is a dark exciton effect when the radius R of the ZnO quantum wires is in the range of [3,19.1] nm (dark range in our model). The dark ranges of other wurtzite semiconductor quantum wires are calculated for comparison. The dark range becomes smaller when the |Δ_so| is larger, which also happens in the quantum-dot systems. The linear polarization factor of ZnO quantum wires is larger when the temperature is higher.     

Optical emission from the one-dimensional electron gas in narrow modulation-doped GaAs/(InGa)As/(AlGa)As quantum wires fabricated by lateral top barrier modulation

We report on the fabrication and photoluminescence characterisation of n-type doped quantum wires, which are based on a modulation-doped GaAs/(InGa)As/(AlGa)As quantum well structure, as used in inverted high electron mobility transistors. Lateral patterning was performed by electron beam lithography followed by a selective wet etch process to remove the n-type doped GaAs top barrier between the wire regions. The removal of the top barrier was verified by micro-Raman spectroscopy. Spatially indirect emission from the one-dimensional (ID) electron gas formed in the quantum wires is observed in low-temperature photoluminescence, even for the narrowest geometrical wire width of 23 nm. The emission shows a blue-shift for wire widths below 100 nm, which amounts to up to 60 meV for the narrowest wires.PACS: 78.66.Fd, 73.20.Dx, 78.55.Cr     

Temperature dependent time-resolved exciton luminescence in GaAs/AlGaAs quantum wires and dots

Transient photoluminescence of GaAs/AlGaAs quantum wires and quantum dots formed by strain confinement is studied as a function of temperature. At low temperature, luminescent decay times of the wires and dots correspond to the radiative decay times of localized excitons. The radiative decay time can be either longer or shorter than that of the host quantum well, depending on the size of the wires and dots. For small wires and dots (∼ 100 nm stressor), the exciton radiative recombination rate increases due to lateral confinement. Exciton localization due to the fluctuation of quantum well thickness plays an important role in the temperature dependence of luminescent decay time and exciton transfer in quantum wire and dot structures up to at least ∼ 80 K. Lateral exciton transfer in quantum wire and dot structures formed by laterally patterning quantum wells strongly affects the dynamics of wire and dot luminescence. The relaxation time of hot excitons increases with the depth of strain confinement, but we find no convincing evidence that it is significantly slower in quasi 1-D or 0-D systems than in quantum wells.     

Nonlinear optical properties of semiconductor quantum wires

Nonlinear optical transmission at discrete frequencies (bleaching bands) has been observed in CdSe and GaAs quantum wires crystallized in chrysotile asbestos nanotubes with average diameter ≈ 6 nm and in nanocrystals of CdS (crystallized in the transparent molecular filter—mica with empty channels of designed diameter). The induced decrease of absorption in quantum wires has been explained by filling of the size-quantized energy bands with nonequilibrium carriers (saturation effect) and by the phase-space filling of excitons.     

The temperature dependence of the photoluminescence from overgrown GaAs/Al0.3Ga0.7As quantum dots and wires

Photoluminescence measurements on GaAs/Al_0.3Ga_0.7As quantum dots and wires fabricated using electron bears lithography and reactive ion etching are reported both before and after regrowth with a layer of Al_0.4Ga_0.6As. Dots exhibit little change in luminescence efficiency from the bulk with a reduction in diameter either before or after regrowth. Surface recombination therefore appears to be suppressed. In wires, however, luminescence intensity is very sensitive to wire width, decreasing rapidly with this parameter, but recovers and becomes independent of size after overgrowth. The temperature dependence of the photoluminescence from the dots and wires showed that dots and wires less than 150nm in width luminesced to higher temperatures than the larger diameter structures and dots liminesced to higher temperatures than wires of comparable width. This suggests that there is a finite coherence area effect which increases the radiative lifetimes of excitons in the quantum structures due to the geometric constraint, in the lateral direction in the wires and in all three directions in the dots. Below 20K bound exciton luminescence dominates in the dots but not in the wires. In wires it is still possible for the excitons to diffuse to nonradiative sites within the exciton lifetime. Regrowth at 750°C causes migration of aluminium into the quantum well and causes the shape of the well to become parabolic resulting shifts in the exciton emission to shorter wavelengths, making it difficult to separate the effect of processing from those due to quantum confinement.     

Fabrication of quantum wires by selective intermixing induced in GaAs/AlGaAs quantum well heterostructures by SiO2 capping and subsequent annealing

Results are presented demonstrating that selective intermixing of GaAs/AlGaAs quantum well heterostructures by SiO₂ capping and subsequent annealing can be spatially localized with a length scale compatible with the observation of lateral quantum confinement effects. Patterning of a 400 nm-thick SiO₂ encapsulation layer deposited by rapid thermal chemical vapor deposition into arrays of wires was performed using high resolution electron beam lithography and subsequent reactive ion etching. After high temperature (850°C) annealing, photoluminescence experiments indicate the creation of double barrier quantum wires when small trenches (< 100 nm) are etched in the SiO₂ film at a period greater than 800 nm. Signatures of the formation of one-dimensional subbands are observed both in photoluminescence excitation spectroscopy and linear polarization anisotropy analysis. A mechanism involving the ability of the stress field generated during annealing at the SiO₂ film edges to pilot the diffusion of the excess gallium vacancies which are responsible for the enhanced interdiffusion under SiO₂ is suggested to account for the high lateral selectivity achievable with this novel process.     

Cylindrical GaAs quantum wires incorporated within chrysotile asbestos nanotubes: fabrication and polarized optical absorption spectra

GaAs has been injected into chrysotile asbestos channels. GaAs quantum wires (nanocylinders) with diameters ∼ 6 nm have been observed in the channels by means of transmittance electron microscopy. Polarized optical absorption spectra of asb-GaAs (chrysotile asbestos containing GaAs wires) have been studied. A high anisotropy of the absorption has been observed, and intersubband transitions in the visible light region due to a strong quantum size effect have been found.     

Terahertz photoresponse of quantum wires in magnetic fields

We have investigated the terahertz photoresponse of quantum wires in high magnetic fields, employing intense far-infrared (FIR) radiation from the UCSB Free-Electron Lasers. Both GaAs-based and InAs-based quantum wires, with widths ranging from 50 nm to 1 μm, were studied. At high FIR power we observed Shubnikov–de Haas type oscillations in photoresponse versus magnetic field,B, resulting from non-resonant electronic heating the oscillations were much more pronounced than those in resistance versusB. At low FIR power we observed resonant peaks due to magnetoplasmon excitations, whose strength shows strong polarization-dependence and whose energy extrapolates to a finite value at zeroB. These results provide a powerful tool for characterizing 1D electronic states in quantum wires.     

Capacitance spectroscopy of compressible and incompressible stripes in a narrow electron channel

We study the capacitance of single electron wires in high quantizing magnetic fields. The capacitance spectra obtained on 300 nm wide electron channels are interpreted with a simple model considering the geometry of the incompressible stripes in the electron channel as function of filling factor. The capacitance spectra directly reflect the potential form of the wire edge. This is experimentally demonstrated by the dependence on the confinement potential as well as by a clear asymmetry of the capacitance minimum at filling factor v=2 that can be well explained with the model. For comparison we present capacitance spectra obtained on very narrow, but otherwise similar quantum wires, in which quantization into one-dimensional subbands dominates the behavior.