电离总剂量对纳米SRAM器件单粒子翻转敏感性的影响

电离总剂量（TID）与单粒子效应（SEE）是纳米SRAM器件在航天应用中的主要威胁。随着CMOS工艺的进步,两种辐射效应在纳米SRAM器件中的协同效应出现了一些新现象,有必要进一步开展深入研究。利用γ射线以及不同种类重离子对两款纳米SRAM器件开展了辐照实验,研究了不同辐照参数、测试模式以及数据图形条件下,电离总剂量对单粒子翻转（SEU）敏感性的影响。研究结果表明,γ射线辐照过后,存储单元中反相器开关阈值减小,漏电流增大,导致SRAM存储单元抗翻转能力降低,SEU截面有明显增大;未观察到"印记效应",数据图形对测试结果没有明显影响;多位翻转（MBU）比例无明显变化。     

准单能中子单粒子效应研究现状

对国际上用于单粒子效应(SEE)研究的准单能中子源进行了相关调研,对产生准单能中子源的7Li(p, n)7Be核反应、装置布局以及表征中子场性质的中子注量率、中子能谱、中子束流轮廓及其均匀性、热中子本底等参数的理论计算及实验测量进行了系统的介绍。进行准单能中子SEE实验要求中子源有较高的中子注量率水平、较大的束流轮廓、较好的束流均匀性以及较低的热中子本底,并且能测量出精确的中子能谱。对准单能中子SEE实验过程以及三种中子SEE截面的尾部修正方法进行了介绍。     

随机静态存储器低能中子单粒子翻转效应

 建立了中子单粒子翻转可视化分析方法,对不同特征尺寸（0.13~1.50 μm）CMOS工艺商用随机静态存储器(SRAM)器件开展了反应堆中子单粒子翻转效应的实验研究,获得了SRAM器件的裂变谱中子单粒子翻转截面随特征尺寸变化的变化趋势。研究结果表明:SRAM器件的特征尺寸越小,其对低能中子导致的单粒子翻转的敏感性越高。     

累积剂量影响静态随机存储器单粒子效应敏感性研究

本文利用60Coγ源和兰州重离子加速器,开展不同累积剂量下,静态随机存储器(static random access memory,SRAM)单粒子效应敏感性研究,获取不同累积剂量下SRAM器件单粒子效应敏感性的变化趋势,分析其辐照损伤机理.研究表明,随着累积剂量的增加,SRAM器件漏电流增大,影响存储单元低电平保持电压、高电平下降时间等参数,导致"反印记效应".研究结果为空间辐射环境中宇航器件的可靠性分析提供技术支持.     

累积辐照影响静态随机存储器单粒子翻转敏感性的仿真研究

基于解析分析对比了大尺寸与深亚微米尺度下静态随机存取存储器(static random access memory, SRAM)单元单粒子翻转敏感性的表征值及引入累积辐照后的变化趋势. 同时借助仿真模拟计算了0.18 μm工艺对应的六管SRAM单元在对应不同累积剂量情况下, 离子分别入射不同中心单管时的电学响应变化, 计算结果与解析分析所得推论相一致, 即只有当累积辐照阶段与单粒子作用阶段存储相反数值时, SRAM单元的单粒子翻转敏感性才会增强. 关键词： 累积辐照 单粒子翻转 静态随机存储器 器件仿真     

铁电存储器中高能质子引发的单粒子功能中断效应实验研究

利用中国原子能科学研究院的中高能质子实验平台,针对两款商用铁电存储器开展了中高能质子单粒子效应实验研究,发现其中一款器件在质子辐照下发生了单粒子翻转和单粒子功能中断.本文主要针对单粒子功能中断效应展开了后续实验研究.首先通过改变质子能量对器件进行辐照,发现单粒子功能中断截面随质子能量的提高而增加.为进一步研究器件发生单粒子功能中断的机理,利用激光微束平台开展了辅助实验,对铁电存储器的单粒子功能中断效应的敏感区域进行了定位,最后发现铁电存储器单粒子功能中断是由器件外围电路发生的微锁定导致的.     

基于中国散裂中子源的商用静态随机存取存储器中子单粒子效应实验研究

利用中国散裂中子源反角白光中子束线开展13款商用静态随机存取存储器的中子单粒子效应实验.研究了测试图形、特征尺寸和版图工艺差异对单粒子效应的影响.结果表明测试图形对器件的单粒子翻转截面影响不大,但对部分器件的多单元翻转占比有较大的影响;特征尺寸对器件单粒子翻转截面的影响没有明显的规律,但对多单元翻转的影响规律明显,多单元翻转占比和最大位数都随着特征尺寸的降低而增大;器件版图工艺差异对器件的单粒子翻转截面和多单元翻转占比都有较大的影响.此外,通过与高原辐照实验结果对比,发现在反角白光中子源获得的多单元翻转占比小于高原辐照实验的结果,其原因是反角白光中子源实验中,中子的最高能量和高能成分占比偏小,且中子束流只有垂直入射.因此,利用反角白光中子源评估器件的大气中子单粒子效应时可能会低估多单元翻转情况.本文的结果可为研究者利用反角白光中子源开展相关研究提供参考.     

中子单粒子效应TCAD仿真

分析了核裂变与聚变情况下,典型能量的中子与半导体器件反应,所产生的次级粒子及其能谱分布。根据中子所能导致的最恶劣情况,讨论了65nm工艺尺寸下,半导体静态存储器的单粒子效应,并给出了TCAD仿真的结果。结果显示,商用6管单元难以避免中子单粒子效应的发生。双互锁存储单元(DICE)结构在高密度设计时,也由于电荷共享效应,发生了单粒子翻转。由于电荷共享效应难以用SPICE仿真的方法得到,TCAD仿真更适用于中子单粒子免疫的SRAM设计验证。最后,讨论了65nm工艺下,中子单粒子免疫的SRAM设计,指出6管单元加电容的方式,可能是更有竞争力的方案。     

高电荷态氙离子辐照下的6H碳化硅表面纳米结构变形（英文）

高电荷态离子比普通的离子携带较高的势能,势能在材料表面的瞬间释放,能在材料表面形成nm量级的结构损伤。它在纳米刻蚀、小型纳米器件、纳米材料、超小尺寸半导体芯片制作、固体表面处理和固体结构分析等领域具有广泛应用前景。因此对高电荷态重离子(Xeq+)引起半导体材料表面(6H-SiC)纳米结构变形进行了研究。采用Xe18+和Xe26+离子,选取从1×1014到5×1015 ions·cm-2逐渐递增的剂量,以垂直和倾斜60°角两种入射方式辐照6H-SiC薄膜样品,经原子力显微镜分析表明,辐照后的表面肿胀凸起。对于Xe18+离子辐照的样品,辐照区至未辐照区边界的台阶高度随离子剂量增加而连续增大,而对于Xe26+离子辐照的样品则先增加而后减小。在相同入射角和剂量条件下,Xe26+离子辐照样品形成的台阶高度大于Xe18+离子辐照形成的台阶高度,在相同离子和剂量的条件下,垂直照射时形成的台阶高度大于倾斜照射时形成的台阶高度。根据损伤机理和实验数据,首次初步建立了一个包括势能、电荷态、入射角和剂量等物理量的理论模型来预测高电荷态离子在半导体材料表面形成的纳米结构变形。暗示了高电荷态离子的潜在的应用价值及进一步研究的必要性。     

高电荷态氙离子辐照下的6H碳化硅表面纳米结构变形（英）

高电荷态离子比普通的离子携带较高的势能,势能在材料表面的瞬间释放,能在材料表面形成nm量级的结构损伤。它在纳米刻蚀、小型纳米器件、纳米材料、超小尺寸半导体芯片制作、固体表面处理和固体结构分析等领域具有广泛应用前景。因此对高电荷态重离子（Xeq+）引起半导体材料表面（6H-SiC）纳米结构变形进行了研究。采用Xe18+和Xe26+离子,选取从11014到51015 ionscm-2逐渐递增的剂量,以垂直和倾斜60角两种入射方式辐照6H-SiC薄膜样品, 经原子力显微镜分析表明,辐照后的表面肿胀凸起。对于Xe18+离子辐照的样品,辐照区至未辐照区边界的台阶高度随离子剂量增加而连续增大,而对于Xe26+离子辐照的样品则先增加而后减小。在相同入射角和剂量条件下,Xe26+离子辐照样品形成的台阶高度大于Xe18+离子辐照形成的台阶高度,在相同离子和剂量的条件下,垂直照射时形成的台阶高度大于倾斜照射时形成的台阶高度。根据损伤机理和实验数据,首次初步建立了一个包括势能、电荷态、入射角和剂量等物理量的理论模型来预测高电荷态离子在半导体材料表面形成的纳米结构变形。暗示了高电荷态离子的潜在的应用价值及进一步研究的必要性。     

High capacity production of >65% spin polarized xenon-129 for NMR spectroscopy and imaging

A rubidium spin exchange optical pumping system for high capacity production of >65% spin polarized 129Xe gas is described. This system is based on a fiber coupled multiple laser diode array capable of producing an unprecedented 210 W of circularly polarized light at the pumping cell with a laser line width of 1.6 nm. The 129Xe nuclear spin polarization is measured as a function of flow rate, pumping cell pressure, and laser power for varying pumping gas compositions. A maximum 129Xe nuclear polarization of 67% was achieved using a 0.6% Xe mixture at a Xe flow rate of 2.45 sccm. The ability to generate 12% polarized 129Xe at rates in excess of 1L-atm/h is also demonstrated. To achieve production of 129Xe gas at even higher polarization will rely on further optimization of the pumping cell and laser beam geometries in order to mitigate problems associated with temperature gradients that are encountered at high laser power and Rb density.     

Hyperpolarised gas filling station for medical imaging using polarised 129Xe and 3He

We report the design, construction, and initial tests of a hyperpolariser to produce polarised ¹²⁹Xe and ³He gas for medical imaging of the lung. The hyperpolariser uses the Spin-Exchange Optical Pumping method to polarise the nuclear spins of the isotopic gas. Batch mode operation was chosen for the design to produce polarised ¹²⁹Xe and polarised ³He. Two-side pumping, electrical heating and a piston to transfer the polarised gas were some of the implemented techniques that are not commonly used in hyperpolariser designs. We have carried out magnetic resonance imaging experiments demonstrating that the ³He and ¹²⁹Xe polarisation reached were sufficient for imaging, in particular for in vivo lung imaging using ¹²⁹Xe. Further improvements to the hyperpolariser have also been discussed.     

Interdependence of in-cell xenon density and temperature during Rb/129Xe spin-exchange optical pumping using VHG-narrowed laser diode arrays

The (129)Xe nuclear spin polarization (P(Xe)) that can be achieved via spin-exchange optical pumping (SEOP) is typically limited at high in-cell xenon densities ([Xe](cell)), due primarily to corresponding reductions in the alkali metal electron spin polarization (e.g. P(Rb)) caused by increased non-spin-conserving Rb-Xe collisions. While demonstrating the utility of volume holographic grating (VHG)-narrowed lasers for Rb/(129)Xe SEOP, we recently reported [P. Nikolaou et al., JMR 197 (2009) 249] an anomalous dependence of the observed P(Xe) on the in-cell xenon partial pressure (p(Xe)), wherein P(Xe) values were abnormally low at decreased p(Xe), peaked at moderate p(Xe) (~300 torr), and remained surprisingly elevated at relatively high p(Xe) values (>1000 torr). Using in situ low-field (129)Xe NMR, it is shown that the above effects result from an unexpected, inverse relationship between the xenon partial pressure and the optimal cell temperature (T(OPT)) for Rb/(129)Xe SEOP. This interdependence appears to result directly from changes in the efficiency of one or more components of the Rb/(129)Xe SEOP process, and can be exploited to achieve improved P(Xe) with relatively high xenon densities measured at high field (including averaged P(Xe) values of ~52%, ~31%, ~22%, and ~11% at 50, 300, 500, and 2000 torr, respectively).     

Gas flow MRI using circulating laser-polarized 129Xe.

We describe an experimental approach that combines multidimensional NMR experiments with a steadily renewed source of laser-polarized 129Xe. Using a continuous flow system to circulate the gas mixture, gas phase NMR signals of laser-polarized 129Xe can be observed with an enhancement of three to four orders of magnitude compared to the equilibrium 129Xe NMR signal. Due to the fact that the gas flow recovers the nonequilibrium 129Xe nuclear spin polarization in 0.2 to 4 s, signal accumulation on the time scale of seconds is feasible, allowing previously inaccessible phase cycling and signal manipulation. Several possible applications of MRI of laser-polarized 129Xe under continuous flow conditions are presented here. The spin density images of capillary tubes demonstrate the feasibility of imaging under continuous flow. Dynamic displacement profiles, measured by a pulsed gradient spin echo experiment, show entry flow properties of the gas passing through a constriction under laminar flow conditions. Further, dynamic displacement profiles of 129Xe, flowing through polyurethane foams with different densities and pore sizes, are presented.     

A rapid and precise probe for measurement of liquid xenon polarization

The relaxation time of liquid (129)Xe is very long (>15 min) and the signal at thermal equilibrium is weak. Therefore, determination of the absolute polarization enhancement of hyperpolarized (129)Xe by direct measurement is tedious. We demonstrate a fast and precise alternative, based on the dipolar field created by liquid hyperpolarized (129)Xe contained in a cylindrical sample tube. The dipolar field is homogeneous in the bulk of the tube and adds to the external field, causing a shift in the Larmor frequencies of all nuclear spins. We show that the frequency shift of the proton in CHCl(3) (chloroform), which dissolves homogeneously in xenon over a fairly broad temperature range, is an excellent probe for (129)Xe polarization. Frequency measurements are precise and the experiment is much faster than by direct measurement. Furthermore the (129)Xe polarization is minimally disturbed since no rf pulses are applied directly to (129)Xe and since chloroform is a fairly weak source of (129)Xe relaxation. The experiments are reproducible and require only standard NMR instrumentation.     

129Xe and131Xe NMR of xenon on silica surfaces at 77 K

Little is known about¹²⁹Xe NMR spectral features and spin-lattice relaxation behavior, and the dynamics of xenon atoms, for xenon adsorbed on solid surfaces at cryogenic temperatures (≤77 K), where exchange with gas-phase atoms is not a significant complication. We report¹²⁹Xe NMR experiments at 9,4 T that provide such information for xenon adsorbed onto the hydroxylated surface of a number of microporous silica samples at 77 K. A convenient design for these cryogenic experiments is described. Dynamics of surface-adsorbed xenon atoms on the time scale of seconds can be observed by¹²⁹Xe NMR hole-burning experiments; much slower dynamics occurring over hours and days are evidenced from changes with time of the¹²⁹Xe NMR chemical shifts. The peak maxima occur in the region ca. 180–316 ppm, considerably downfield of¹²⁹Xe shifts previously reported on surfaces at higher temperatures, and closer to the shift of xenon bulk solid (316.4±1 ppm). The¹²⁹Xe spin-lattice relaxation timesT ₁ range over five orders of magnitude; possible explanations for both nonexponential relaxation behavior and extremely shortT ₁ values (35 ms) are discussed. Preliminary¹³¹Xe and¹H NMR results are presented, as well as a method for greatly increasing the sensitivity of¹²⁹Xe NMR detection at low temperatures by using closely-spaced trains of rf pulses.     

Transverse spin relaxation in liquid 129Xe in the presence of large dipolar fields

Using spin-echo NMR techniques we study the transverse spin relaxation of hyperpolarized liquid 129Xe in a spherical cell. We observe an instability of the transverse magnetization due to dipolar fields produced by liquid 129Xe, and find that imperfections in the pi pulses of the spin-echo sequence suppress this instability. A simple perturbative model of this effect is in good agreement with the data. We obtain a transverse spin relaxation time of 1300 sec in liquid 129Xe, and discuss applications of hyperpolarized liquid 129Xe as a sensitive magnetic gradiometer and for a permanent electric dipole moment search.     

The characteristic spectral lines of target atoms in the impact of ~(40)Ar~(q+) ions on metal surfaces

1 Introduction It has been found that a large number of ions and atoms can be sputtered; and elec-trons and X-ray can be emitted in the impact of slow highly charged ions (SHCI) onmetal surfaces. It has also been shown that a slow highly charged ion can deposit anamount of potential energy ranging from tens to hundreds of keV within a nanometer-sized volume on femtosecond time scale during impinging on a solid surface. Theequivalent power density is about 1014 W/cm2 and bombardment craters …     

T(1) of (129)Xe in blood and the role of oxygenation.

In previous experiments by the authors, in which hyperpolarized (129)Xe was dissolved in fresh blood samples, the T(1) was found to be strongly dependent on the oxygenation level, the values increasing with oxygenation: T(1) was about 4 s in deoxygenated samples and about 13 s in oxygenated samples. C. H. Tseng et al. (1997, J. Magn. Reson. 126, 79-86), on the other hand, recently reported extremely long T(1) values using hyperpolarized (129)Xe to create a "blood foam" and found that oxygenation decreased T(1). In their experiments, the continual and rapid exchange of hyperpolarized (129)Xe between the gas phase (within blood-foam bubbles) and the dissolved phase (in the skin of the bubbles) necessitated a complicated analysis to extract the effective blood T(1). In the present study, the complications of hyperpolarized (129)Xe exchange dynamics have been avoided by using thermally polarized (129)Xe dissolved in whole blood and in suspensions of lysed red blood cells (RBC). During T(1) measurements in whole blood, the samples were gently and continuously agitated, for the entire course of the experiment, to avert sedimentation. Oxygenation was found to markedly increase the T(1) of (129)Xe in blood, as originally measured, and it shifts the RBC resonance to a higher frequency. Carbon monoxide has a similar but somewhat stronger effect.