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1.
为了探索低温可调控ZnO薄膜沉积技术,提出了一种新的ZnO薄膜制备方法,即离化团簇束(ICB)法,并自行设计研制了应用该方法制备ZnO薄膜的专门装置.采用超音速喷嘴获得高速锌原子团簇束,用Hall等离子体源产生氧离子束离化锌原子团簇,获得了较高的离化率.在沉积过程中,可以通过调节衬底偏压、氩氧比、衬底加热温度等参数,来控制成膜的质量;应用这个装置成功地在硅衬底上制备的ZnO薄膜,经XRD和EDS检测,薄膜的c轴取向一致,Zn、O原子百分比接近于1:1,成膜质量好. 相似文献
2.
本文提出采用气体团簇离子束的两步能量修形法来改善4H-SiC(1000)晶片表面形貌.先用15 keV的高能Ar团簇离子进行整体修形,再用5 keV的低能团簇离子优化表面.结果表明,在相同的团簇离子剂量下,与单一15 keV的高能团簇处理相比,两步法修形后的表面具有更低的均方根粗糙度,两者分别为1.05 nm和0.78 nm.本文还以原子级平坦表面为研究对象,揭示了载能团簇引起的半球形离子损伤(弧坑)与团簇能量的关系,及两步能量修形法在弧坑修复中的优势.在原子力显微镜表征的基础上,引入了二维功率谱密度函数,以直观全面地给出材料的表面形貌特征及其随波长(频率)的分布.结果表明,经任何能量的团簇离子轰击的表面,在0.05—0.20μm波长范围内,团簇轰击都能有效地降低粗糙度,而在0.02—0.05μm范围内,则出现了粗化效应,这是由于形成了半球形离子损伤,但第二步更低能量的团簇离子处理可以削弱这种粗化效应. 相似文献
3.
Magnetic Properties and Magnetoresistance of CdMnS:Au Based Structures Prepared by Co-evaporation 下载免费PDF全文
Polycrystalline CdMnS and CdMnS:Au films with hexagonal structure on Si(111) substrates are prepared by co-evaporation, and exhibit ferroelectric and ferromagnetic properties, respectively. Under optimized growth conditions, CdMnS:Au samples with an average crystallite size of 90nm and Mn concentration of 5.0at.% are obtained, and an all-semiconductor spin valve device of Co/Au/CdMnS:Au/CdMnS/Pt is fabricated. Electrical measurement of the device reveals the clear dependence of resistance on applied magnetic field, with a relative magnetoresistance of 0.06% and a switching field of 100 Oe at 77K. 相似文献
4.
InFeP layers are prepared by ion implantation of InP with 100-keV Fe+ ions to a dose of 5 ×10^16 cm-2 and investigated by optical, magnetic, and ion beam analysis measurements. Photoluminescence measurements show a deep-level peak at 1.035 eV due to Fe in InP and two exciton-related luminescences at 1.426 eV and 1.376 eV in the implanted samples annealed at 400℃. Conversion electron Mossbauer spectroscopy reveals a doublet corresponding to Fe3+ ions in the indium sites. Atomic force microscopy and magnetic force microscopy show that magnetic clusters are formed in the annealing process. The magnetization-field hysteresis loops show ferromagnetic properties persisting up to room temperature with a coercive field of 100 0e (10e = 79.5775 A-m-1), saturation magnetization of 4.35 × 10-5 emu, and remnant magnetization of 4.4× 10 6 emu. 相似文献
5.
Off-stoichiometry indexation of BiFeO_3 thin film on silicon by Rutherford backscattering spectrometry 下载免费PDF全文
BiFeO_3 is a multiferroic material with physical properties very sensitive to its stoichiometry.BiFeO_3 thin films on silicon substrate are prepared by the sol–gel method combined with layer-by-layer annealing and final annealing schemes.X-ray diffraction and scanning electron microscopy are employed to probe the phase structures and surface morphologies.Using Rutherford backscattering spectrometry to quantify the nonstoichiometries of BiFeO_3 thin films annealed at 100?C–650?C.The results indicate that Bi and Fe cations are close to the stoichiometry of BiFeO_3,whereas the deficiency of O anions possibly plays a key role in contributing to the leakage current of 10~(-5) A/cm~2 in a wide range of applied voltage rather than the ferroelectric polarizations of BiFeO_3 thin films annealed at high temperature. 相似文献
6.
Synthesis of Pr-doped ZnO nanoparticles: Their structural,optical, and photocatalytic properties 下载免费PDF全文
Undoped and praseodymium-doped zinc oxide(Pr-doped ZnO)(with 2.0-mol%–6.0-mol% Pr) nanoparticles as sunlight-driven photocatalysts are synthesized by means of co-precipitation with nitrates followed by thermal annealing.The structure, morphology, and chemical bonding of the photocatalysts are studied by x-ray diffraction(XRD), scanning electron microscopy(SEM) with energy dispersive x-ray emission spectroscopy(EDS), x-ray photoelectron spectroscopy(XPS), and Fourier transform infrared spectroscopy(FTIR), respectively. The optical properties are studied by photoluminescence(PL) and UV-vis diffuse reflectance spectroscopy(UV-vis DRS). We find that Pr doping does not change the crystallinity of ZnO; but it reduces the bandgap slightly, and restrains the recombination of the photogenerated electron–hole pairs. The photocatalytic performance of the photocatalysts is investigated by the photodegradation reaction of 10-mg/L rhodamine B(RhB) solution under simulated sunlight irradiation, showing a degradation rate of 93.75% in ZnO doped with6.0-mol% Pr. 相似文献
7.
本文采用在武汉大学1.7MV串列加速器上的铯溅射负离子源(SNICS)产生碳团簇离子束,然后将离子注入到镍膜中,在样品表面成功制备了少数层石墨烯,用拉曼光谱进行了表征. 相似文献
8.
根据超声膨胀原理,n(10-10^4)个气体原子可以绝热冷却后凝聚在一起形成团簇,经过离化后,形成带一个电荷量的团簇离子,比如Arn^+.当团簇离子与固体材料相互作用时,由于平均每个原子携带的能量(~eV)较低,仅作用于材料浅表面区域,因此,气体团簇离子束是材料表面改性的优良选择.本文介绍了一台由武汉大学加速器实验室自主研制的气体团簇离子束装置,包括整体构造、工作原理及实验应用.中性团簇束由金属锥形喷嘴(F=65-135μm,q=14°)形成,平均尺寸为3000 atoms/cluster,经离化后,其离子束流达到了50μA.Ar团簇离子因其反应活性较低,本文运用Ar团簇离子(平均尺寸为1000 atoms/cluster)进行了平坦化和自组装纳米结构的研究.单晶硅片经Ar团簇离子束处理后,均方根粗糙度由初始的1.92 nm降低到0.5 nm,同时观察到了束流的清洁效应.利用Ar团簇离子束的倾斜(30°-60°)轰击,在宽大平坦的单晶ZnO基片上形成了纳米波纹,而在ZnO纳米棒表面则形成了有序的纳米台阶,同时,利用二维功率谱密度函数分析了纳米结构在基片上的表面形貌和特征分布,并计算了纳米波纹的尺寸和数量. 相似文献
10.
Mn+注入p型GaN薄膜的结构和磁学特性 总被引:1,自引:0,他引:1
用低压MOCVD法在(0001)面的蓝宝石衬底上生长纤锌矿结构的GaN.GaN膜总厚度为4μm,包括0.5μm掺Mg的p型表面层.Mn 离子注入的能量为90keV,剂量为1.0×1015~5.0×1016cm-2,被注入的p型GaN处于室温.对注入样品的快速热退火处理是在N2气流中进行的,温度约为800℃,时间为30~90s.采用X射线衍射(XRD)、卢瑟福背散射(RBS)和原子力显微镜(AFM)研究,发现Mn 注入GaN膜的结构受注入剂量和退火条件的控制.通过超导量子干涉仪(SQUID)分析,在Mn 注入剂量为5.0×1015cm-2、并经850℃退火30s的GaN膜中发现了铁磁性,表明离子注入方法是进行GaN掺杂改性的有效手段. 相似文献