Rapid nucleation of diamond films by pulsed laser chemical vapor deposition

The nucleation of diamond films could be greatly enhanced on mirror-polished Si substrate by a pulsed Nd:YAG laser beam without any thermal- and plasma-assisted processes during a very short time. The nucleation density increased with decreasing laser power density from 1.38×10¹⁰ to 1.17×10⁹ W/cm² and deposition pressure from 1013 to 4 mbar. The pulsed laser beam made no contribution to enhance nucleation at substrate temperature as low as 650°C. X-ray diffraction measurements showed the (1 1 1) diffraction peak of diamond for the samples obtained using only pulsed laser during 40 min. The enhanced nucleation and growth of diamond crystallites were attributed to effective excitation of reactive gases and etching of non-diamond carbon phases by the pulsed laser beam.     

Purification of Single-walled Carbon Nanotubes Grown by a Chemical Vapour Deposition (CVD) Method

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Detection of large cluster ions by time-of-flight mass spectrometry with a conversion dynode

A linear time-of-flight mass spectrometer (TOF-MS) has been constructed to measure mass distribution of negatively-charged clusters formed in the hot filament diamond chemical vapor deposition (CVD) process and in the metal evaporation. A conversion dynode made of CsI was employed to enhance detection efficiency of the large clusters greater than 10 000 amu. An atomic peak from the tungsten evaporation was used for the mass calibration of the carbon clusters. The carbon clusters produced in the CVD diamond process was loosely bound so that they were easily fragmented during passage through accelerating electric fields. The mass distribution measured with the TOF-MS system showed much less abundance of large clusters than those measured previously with the energy analyzer and Wien filter.     

一种节状纳米碳纤维的CVD生长

介绍了以发泡Ni为催化剂、用CVD法生长节状纳米碳纤维的工艺过程,讨论了工艺参数对生成样品的产率和形貌的影响,同时还探讨了该样品的生长机理。认为催化剂的不同晶面分别有利于烃类气体的吸附解离或碳的沉积,因此催化剂颗粒的原始形貌影响了不同开貌的碳纤维生长。     

CVD方法生长平面和曲面块状多晶硫化锌

采用化学气相沉积方法成功地生长出硫化锌多晶红外光学材料.加工后的成品多晶硫化锌尺寸为直径150mm,厚度为6mm;既有曲面的整流罩,又有平面窗口,蒸镀多层防反膜.由于采用了自制的活性硫化氢为原料,以及较好的工艺生长条件,生长的硫化锌红外光学材料长波透射比达到理论值75;.镀多层防反膜以后,中、长红外波段透过率均有所提高,但镀膜技术还有待改进.文中对硫化锌的透过曲线进行了分析与比较,结果表明我们生长的硫化锌杂质较少,是红外透过率高的原因.文中还测试了硫化锌的其它主要性能.     

多孔氧化铝模板催化制备定向碳纳米管阵列

Well-aligned open-ended multi-walled carbon nanotube (MWCNT) arrays were prepared via chemical vapor deposition (CVD) method in porous anodic aluminum oxide (AAO) templates without depositing any transition metals as catalyst. Effects of the CVD temperature and heat treatment were studied in detail.Well-aligned open-ended MWCNT arrays were obtained at the CVD temperature above 600 ℃; when CVD temperature is reduced to around 550 ℃, CNTs, CNFs and other structures existed at the same time; no CNTs or carbon nanofibres (CNFs) could be found as the CVD temperature is below 500 ℃, and only amorphous carbon in the porous AAO template was found. Experimental results showed that the AAO template is catalytic during the CVD process, and it has the following two effects: to catalyze thermal decomposition of acetylene and to catalyze conversion of carbon decomposed from acetylene into CNTs or CNFs. Heat treatment could improve the graphitization degree, but it might also introduce new defects.     

Controlled growth and field emission of vertically aligned AlN nanostructures with different morphologies

The controllable growth of three different morphologies of AlN nanostructures (nanorod, nanotip and nanocrater) arrays are successfully realized by using chemical vapour deposition (CVD) technology. All three nanostructures are of single crystal h-AlN with a growth orientation of [001]. Their growth is attributed to the vapour-liquid-solid (VLS) mechanism. To investigate the factors affecting field emission (FE) properties of AlN nanostructures, we compare their FE behaviours in several aspects. Experimental results show that AlN nanocrater arrays possess the best FE properties, such as a threshold field of 7.2~V/μm and an emission current fluctuation lower than 4%. Moreover, the three AlN nanostructures all have good field emission properties compared with a number of other excellent cathode nanomaterials, which suggests that they are future promising FE nanomaterials.     

ZnO纳米钉的制备和光学性质研究

通过化学气相沉积(CVD)方法在Si(100)衬底上制备出新型的ZnO纳米钉结构.X射线衍射(XRD)结果表明纳米钉是六角纤锌矿结构.纳米钉顶部对角线在450～750 nm之间,纳米钉长度为几个微米.研究了不同气氛下退火样品的可见发光性质,认为绿光发射来自于导带电子和反位氧中空穴的辐射复合.     

用热壁CVD法在SiC衬底上生长SiCGe合金的热场分析与设计

采用有限元法,对热壁CVD法SiCGe合金生长炉中加热组件的感应加热和温度分布进行了研究.分析了感应线圈匝数和石墨衬托的厚度对磁矢势和温度分布的影响,获取了感应线圈数越多感应生成焦耳热越大且越均匀的结论,得出了随石墨厚度的增加升温速率而增加,相反轴向温度均匀性而变差的设计准则.模拟结果表明选取16匝线圈和10mm左右的石墨壁厚为优化的设计参数.     

固体单相催化剂CVD法制备成束或分散MWCNT

CVD法制备纳米碳管的催化剂多是以Al2O3、SiO2或MgO作载体,Fe、 Ni或Co等过渡族金属为活性组分[1-3].