同步辐射X射线荧光光谱国内外研究进展

同步辐射光源是带电粒子在加速器储存环中以接近光速的速度运动时,沿轨道切线方向发射出的辐射,同步辐射X射线荧光分析（SR-XRF）是以同步辐射X射线作为激发光源的X荧光光谱分析技术。同步辐射X射线荧光分析包括了用于微区及微量元素分析的同步辐射XRF、用于表面及薄膜分析的同步辐射全反射X射线荧光（SR-TXRF）以及用于三维无损分析的同步辐射X射线荧光扫描和成像方法（如X射线荧光CT、X射线荧光全场成像、共聚焦X射线荧光和掠出射X射线荧光等）。X射线荧光光谱法通过测量元素的特征X射线发射波长或能量,识别元素,该方法首先通过测量发射的特征线强度,然后将该强度与元素浓度联系起来,对给定元素进行量化分析。X射线荧光光谱技术可以进行多元素同时分析,同步辐射X射线荧光谱亮度高,可调谐,相干性、准直性及偏振性好,可以用于分析样品元素的含量和空间分布。近些年来随着新光源技术的使用、分析软件的更新换代和定量分析方法的发展,对同步X射线荧光光谱分析产生了极大促进,采用新型X射线光学元件和探测器,能极大提升分辨率和探测效率,促进相关学科应用的发展。介绍了近几年来国内外同步辐射X射线荧光光谱分析技术及其应用发展状况,给出了国内外比较典型的同步辐射X射线荧光光谱分析光束线站最新技术方面的发展概况,并列举了一些典型应用成果,例如在生物医学、环境科学、地质考古、材料科学和物理及化学等领域的应用。对于本领域及相关领域的专家学者了解国内外同步辐射技术发展现状、应用研究成果具有一定的参考意义。     

基于同步辐射的快速扫描X射线微束荧光成像方法

在上海光源硬X射线微聚焦光束线站(BL15U1)上, 基于EPICS软件平台, 集成运动控制, 光强探测, 荧光探测等功能, 实现了"飞行"模式 (on-the-fly) X射线扫描微束荧光成像方法. 用"飞行"扫描X射线荧光成像法获得了标准镍网, 以及微量元素Cu, Zn,K, Fe在样品老鼠脾内的分布图像, 结果显示该方法不但在速度上有了极大的提高, 而且获得的元素分布图像具有高质量. 关键词： 快速扫描X射线微束荧光成像 同步辐射 微量元素分布     

同步辐射X射线三维显微成像

本介绍了利用同步辐射进行X射线三维成像的工作原理及进展状况,详细论述了X射线三维成像的两种方法,X射线全息及CT技术,以及通过两的结合（HCT）进行高分辨率三维成像的有关理论与实验技术;介绍了同轴全息中消除“双生像”噪声的数字方法,讨论了影响分辨率的各种因素;本还介绍了在国家同步辐射实验室软X射线实验站进行的生物样品X射线三维成像的实验及其结果。     

同步辐射X射线荧光分析

同步辐射作为一种新型光源的出现，给Ｘ射线应用领域的各学科注入了新的活力，世界上许多国家纷纷建造同步辐射加速器并投入使用，使同步辐射的应用得到空前的发展，同步辐射Ｘ射线荧光分析就是其中的一个重要方面．文章讨论了常规Ｘ射线荧光分析的局限性，概略地描述了同步辐射在荧光分析方面的优越性，指出它为Ｘ射线荧光分析技术带来的新突破 痕量元素的检测和微区扫描分析，简要介绍了国际及国内同步辐射Ｘ射线荧光分析的水平及现状，并展望了以后的发展方向．     

一种毛细管聚焦的便携式微束X射线荧光谱仪

基于毛细管X光透镜技术的便携式能量色散X射线荧光分析因其无损分析等优点成为分析文物样品的有利工具。但由于文物样品的表面不平整或弧度以及毛细管X光透镜聚焦X射线的特点，导致在测量过程中样品测量点与毛细管X光透镜出端之间的距离产生变化，引起照射样品的X射线束斑大小发生改变，从而影响测量结果的准确性和元素区域扫描的分辨率。介绍了本实验室自行研发的一种新型便携式微束X射线荧光谱仪，此谱仪主要是由SDD X射线探测器、30 W低功率X射线管、毛细管X光透镜、CCD和一个新型闭环控制系统构成。该闭环控制系统是在激光位移传感器能够精确控制样品测量点到毛细管X光透镜出端距离的基础上，结合LabVIEW语言环境下开发的计算机控制程序以及步进电机、样品台等器件组成。基于此系统，该实验室研发的便携式微束X射线荧光谱仪在测量过程中可以时刻保证照射样品的X射线光斑大小固定不变。同时，该谱仪还可以通过调整样品测量点到透镜出端的距离来选择不同尺寸的X射线照射光斑。为了验证设备的可行性，使用该便携式微束X射线荧光谱仪在激活激光位移传感器和关闭激光位移传感器两种情况下测量了一块表面不平整古陶瓷样品釉彩层中K，Ca，Zn和Fe等元素的含量及分布，并将测量结果进行了对比。结果显示，在激活激光位移传感器的情况下测得的样品微区元素含量与真实值较接近，扫描区域元素分布图的分辨率更好，表明本谱仪基于激光位移传感器开发的自动调整样品测量点到透镜出口端距离的闭环控制系统能有效的减少由于样品表面不平整或弧度带来的测量误差，弥补了现有微束X射线荧光谱仪在此方面的不足。因此，本便携式微束X射线荧光谱仪在无损分析检测文物方面具有潜在的应用前景。     

基于单毛细管椭球镜的微束X射线荧光成像

X射线荧光成像是一种可无损获得样品内部元素空间分布信息的实验技术,可分为荧光mapping扫描成像与荧光CT成像,其空间分辨率由X射线聚焦束斑的大小决定。上海光源成像线站已建立X射线荧光成像系统并对用户开放,在多个领域取得较好的研究成果,该系统基于狭缝限束获取微束X射线,束斑为150μm,限制了该方法的广泛应用。椭球聚焦镜是反射面为椭球面的单次反射单毛细管光学元件,基于全反射原理,具有反射效率高、工作距离长、接收角宽、适用X射线能量范围宽、体积小等优点,已应用到X射线聚焦、全场纳米成像等领域。由于对面型精度的要求较高,制备椭球聚焦镜难度较大。为满足广大用户对微束荧光成像的需求,自行设计并成功研制了针对微束荧光成像系统的单毛细管椭球镜,并对其进行了X射线聚焦性能检测,结果显示可获得14μm聚焦光斑,焦点处增益可达255倍。基于自主研制的椭球镜,在上海光源BL13W搭建微束X射线荧光成像系统,并开展了微束荧光mapping成像与微束荧光CT实验研究:(1)对中风鼠脑切片的荧光mapping扫描成像,得到中风鼠脑中微量元素铜、铁、钙与锌的元素分布荧光光谱图;(2)对鼠脑及毛细管中浓度为0.5 mg·L~(-1)的标准砷溶液进行同步辐射微束X射线荧光CT成像,利用OSEM重构算法重构投影数据,获得了鼠脑中铜元素和毛细管中砷元素二维分布的切片图。两组实验表明,基于自行设计与研制的单毛细管椭球镜的微束X射线荧光成像系统,样品处的光通量密度增加,空间分辨率得到提高,单张荧光光谱的获取时间显著减少,同时也提高了系统的元素探测限。     

毛细管X光透镜三维共聚焦微束X射线荧光技术在岩矿样品分析中的应用

利用毛细管X光透镜搭建了三维共聚焦微束X射线荧光谱仪,处在激发道的多毛细管X射线会聚透镜和处在探测道的多毛细管X射线平行束透镜处于共聚焦状态,该共聚焦结构降低了X射线荧光光谱的背底,从而有利于降低的X射线荧光分析技术的探测极限。在上述共聚焦结构中,多毛细管X射线会聚透镜和多毛细管X射线平行束透镜的焦斑重合形成共聚焦微元,探测器只能探测到来自该共聚焦微元内的X射线荧光信号,当该共聚焦微元在样品移动时,就可利用该共聚焦技术原位无损得到样品内部的三维X射线荧光信息。该共聚焦技术使用的多毛细管X射线会聚透镜具有103量级的功率放大倍数,从而降低了该共聚焦技术对高功率X射线源的依赖程度,即利用低功率普通X射线源就可以设计毛细管X光透镜共聚焦X射线荧光技术。利用上述共聚焦微束X射线荧光谱仪对两种岩矿样品进行三维无损分析,在其中一种岩石中发现：Fe浓度大的区域Cu的浓度也大,这在一定程度上反映了岩矿自然生长的机理。实验结果证明：该共聚焦X射线荧光技术可以在不破坏样品情况下分析岩矿样品中元素成分组成和元素三维分布情况。该共聚焦三维微束X射线荧光技术在矿石勘察、玉器选材和鉴别、石质食用器皿、“赌石”和家用石质地板检测等领域具有潜在的应用。     

一种新型的微束X射线荧光谱仪及其在考古学中的应用

介绍了一种新型的基于X光透镜的微束X射线荧光分析系统的结构、性能和特点及其在考古学中的应用.X光透镜将旋转阳极X射线发生器产生的X射线束聚成直径为几十微米的光束，实现了对考古样品的无损、原位、微区的分析.为了检验微束分析系统的可行性，分析了一片明代青花瓷残片中青花部位的元素分布，结果表明青花中Mn和Co元素的含量与青花颜色的深浅相一致；相关性分析表明Mn和Co呈现非常好的线性相关；Mn和Co的含量或比值对青花的产地和真伪的辨别有着重要的意义. 关键词： X光透镜 微束X射线荧光 青花     

中国微束X射线荧光分析技术应用评介

简述了X射线荧光(XRF)分析与微束X射线荧光(MXRF)分析的技术特点、仪器构成、应用领域和工作范围。从准直的微束X射线荧光、整体X射线荧光与微束X射线荧光组合、波谱/能谱多功能组合和毛细管X光会聚透镜微束X射线荧光仪器四类仪器评介了中国微束X射线荧光仪器和分析技术的应用与发展。从分析功能定位和技术发展两方面,展望了微束X射线荧光技术的发展。提出将XRF分析中传统的微束原位(微区)XRF(MXRF)分析进一步区分为"微-纳区分析(μ/n-XRF)"和"微-毫区分析(μ/m-XRF)",如此区分该项技术及适用范围定位,对两者原位分析技术的发展都是有益的,特别也明确定位说明了整体/微区组合仪器的功能和适用范围发展与应用。作者强调:原位(微区)分析并非仅为单纯的分析工作,更重要的在于对被测样品特性的研究与结果解读!分析人员和专业科学家的密切合作,才能充分发挥原位微区分析技术的效能,充分解读展现分析结果的科学意义。     

同步辐射X射线衍射增强CT方法研究

本文将同步辐射硬X射线衍射增强成像方法应用于材料无损检测CT方法中（简称衍射增强CT法），并对自制样品进行投影成像重建，获得了非常清晰的样品内部结构图像,并与样品的单晶吸收成像CT重建结果进行对比.结果表明，对于吸收系数相近的结构材料,衍射增强CT法可得到更好的物质内部边界.     

First results of the application of scanning XRF analysis with synchrotron-radiation beams from the VEPP-3 to study the spatial distribution of trace elements in samples of stratiform chromite ores

A sample from chromite horizon UG1 of the platiniferous Bushveld complex (South Africa) is studied by scanning X-ray fluorescence (XRF) microanalysis using synchrotron-radiation beams from the VEPP-3 storage ring. The sample contains plagioclase and chromite layers 3–5 mm in thickness. The experimental study is conducted at excitation energies of 15 and 30 keV; the spot size of the excitation radiation is 0.1 ± 2 mm; and the scanning step is 100 µm. The distribution profiles of more than 20 trace elements over the surface of the sample are obtained.     

A new microfocus x‐ray source,iMOXS, for highly sensitive XRF analysis in scanning electron microscopes

Scanning electron microscopes are usually equipped with energy‐dispersive X‐ray detectors for electron probe microanalysis. This widespread analytical method allows investigators to determine the elemental composition of specimens with a spatial resolution of about 1 µm. However, owing to the electron–specimen interaction, the emitted spectra reveal, in addition to characteristic lines, also a high level of continuous bremsstrahlung background. As a result, elements with low concentrations cannot be identified. The minimum detection limit can be diminished by two orders of magnitude if the characteristic lines are excited as fluorescence by an additional x‐ray source. In this case, the emergence of bremsstrahlung is considerably reduced. Combining a high‐brilliance microfocus x‐ray tube with efficient polycapillary optics enables one to realize an experimental arrangement for performing local fluorescence analysis at the same point where the electron beam hits the sample. The polycapillary optics under consideration focuses the emitted x‐radiation onto focal spots between 30 and 100 µm in diameter. Count rates of several thousands cps have been achieved. Elemental maps have been obtained by means of the motorized specimen stage of the microscope. Copyright © 2005 John Wiley & Sons, Ltd.     

Speciation of inclusions and precipitates in steel by means of XRF and LEEIXS

Fundamentals of x‐ray fluorescence spectrometry and X‐ray emission spectrometry in the case of electron probe x‐ray microanalysis and low‐energy electron induced x‐ray spectrometry are compared. The different aluminum and titanium compounds occurring in steel can be investigated by examining soft x‐ray spectra, arising from valence shell orbitals. The non‐metallic inclusions were isolated by galvanometric electrolysis. In the case of the speciation of titanium, direct electron bombardment of the sample is used to generate soft x‐rays. By investigating the Ti L lines, titanium carbide, nitride and sulfide can be distinguished. To specify aluminum compounds, the Kβ transition in the x‐ray fluorescence spectrum was examined. The concentration of aluminum oxide and nitride in precipitates of special steel qualities can be determined with a satisfactory determination limit. Finally, pre‐operational studies for the determination of different silicon inclusions using electron excitation were carried out. Copyright © 2003 John Wiley & Sons, Ltd.     

Subject Index to Volume 33

This paper reports the investigation of microdroplet sample preparation for phosphate, strontium and rubidium using X-ray fluorescence. Sample filter papers were prepared by drying under several different conditions and the front and the back sides of the filter papers were measured using X-ray fluorescence (XRF), scanning electron microscopy (SEM), X-ray diffraction (XRD), and electron-probe microanalysis (EPMA).

It was reported by Murata and Murokado that the elemental distribution difference between the front and the back sides after drying the filter paper led to erratic data.¹ It has been found that the intensity difference between the front and the back sides was due to the condensation of the material of interest on the surface of the filter papers and the amount of the condensed material on the filter paper was related to the temperature at which the filter paper was dried.

Optimum temperature at which a filter paper is dried and an appropriate internal standard are essential to reproducible measurements.     

X-ray spectroscopic identification of garnet from the placer deposits of the Taman peninsula

Garnet from recent placer deposits of the Taman peninsula has been investigated by energy-dispersive X-ray fluorescence microanalysis and X-ray absorption near-edge structure (XANES) spectroscopy. Energy-dispersive X-ray fluorescence microanalysis showed that the chemical composition of the garnet under study corresponds to pyrope-almandine-spessartine series. The Fe K-edge X-ray absorption spectra of garnet have been recorded using a Rigaku R-XAS laboratory spectrometer. Iron K-edge XANES spectra for two iron-containing garnet minals (components), almandine and andradite, have been calculated using the full multiple-scattering and finite-difference methods. Based on a comparison of the experimental and theoretical Fe K-XANES spectra, it is concluded that recent magnetite-garnet placer deposits of the Taman peninsula contain garnet in the form of almandine.     

X射线荧光层析成像中消除散射光的方法

介绍了X射线荧光层析成像技术的成像原理及其在微量分析领域中的应用。针对X射线与物质相互作用时，不仅产生荧光，而且会产生各种散射光，为消除这些散射光对成像结果的影响，提出采用在与入射X射线垂直方向放置一个圆环状的晶体单色器，即双聚焦模式晶体单色器，使荧光与各种散射光分离，并聚焦在探测器上。这样不仅大大增强了荧光信号的强度，而且可使荧光探测器小型化。     

Solving the direct problem of quantitative electron microprobe analysis for binary alloys with a known composition

The results of solving the direct problem of quantitative electron microprobe analysis (calculation of the relative intensities of analyzed lines in a material with a known composition up to an accuracy of 2–5%) are presented. An additional matrix correction caused by the difference in the concentrations of atoms in the reference and sample is shown to be necessary for the microanalysis results and the value of this new fundamental correction is determined. The obtained solution of the direct problem is used to refine the value of an important parameter in electron microprobe analysis, i.e., the mass absorption factor of the analyzed X-ray line.     

激光烧蚀-电感耦合等离子体质谱技术在材料表面微区分析领域的应用进展

激光烧蚀-电感耦合等离子体质谱(LA-ICP-MS)技术不仅可以对导体及非导体进行元素的成分含量分析,而且还可进行元素分布及涂层深度表面微区分析,故在元素分析领域引起广泛的关注。主要介绍了LA-ICP-MS的仪器装置及其表面微区分析理论,同时对LA-ICP-MS在钢铁、有色金属及半导体等材料科学领域中的元素分布及涂层深度表面微区分析应用进展情况进行回顾,与SEM/EDS(扫描电子显微镜/能谱仪)、EPMA(电子探针微区分析)、AES(俄歇电子能谱)等传统经典的表面分析方法的比较,LA-ICP-MS具有无需或很少样品制备、空间分辨率可调、多元素同时分析及灵敏度高等优点,目前LA-ICP-MS已成为这些经典表面微区分析工具强有力的补充。随着LA-ICP-MS分析技术进一步的发展与成熟,相信不久的将来越来越多的元素分析工作者会使用这一强有力的分析工具,它像LIBS(激光诱导击穿光谱)一样,将会成为元素分析领域非常耀眼的一颗新星。     

Improvement of sensitivity using principal component analysis by dual focused ion beam time-of-flight secondary ion mass spectrometry

It is important to develop and to practically use the method to analyze a micro-nanometer order area. Especially, three-dimensional microanalysis for minute structure that consists of the organic compounds and the polymer is difficult. We developed a novel three-dimensional microanalysis method by means of focused ion beam (FIB) for section processing and ToF-SIMS for mapping method. For the purpose of realization of three-dimensional microanalysis and a chemical and structural analysis of the organic matter, the sensitivity improvement of ToF-SIMS in the three-dimensional analysis device and the method of the spectral analysis are examined. To improve the sensitivity of ToF-SIMS, the sample stage was modified to arrange perpendicularly with the ToF optical axis, and the distortion of electric field was corrected. And, by analyzing the fragment ions by using the principal component analysis (PCA) to raise the efficiency of the spectrum analysis, spatial resolution has improved. As a result, the resolution of the device improved to sub micrometer order, and advanced to the achievement of the three-dimensional microanalysis.     

散斑照明宽场荧光层析显微成像技术研究

介绍了一种新的宽场荧光层析显微方法.在传统宽场显微镜中引入散斑图案照明样品,控制散斑图案的动态变化,利用CCD相机记录对应的一系列荧光图像.由于焦平面内强度变化远比焦平面外强度变化剧烈,通过合适的算法能够获得焦平面的层析分辨的荧光显微图像.标定了系统参数,并研究了不同的图像重建算法对系统性能的影响,获得了不同生物组织样品的层析图像.实验表明,该显微方法能用于组织光学切片成像,在临床医学中具有实际应用价值. 关键词： 荧光 散斑照明 荧光显微 层析