Solving the direct problem of quantitative electron microprobe analysis for binary alloys with a known composition

The results of solving the direct problem of quantitative electron microprobe analysis (calculation of the relative intensities of analyzed lines in a material with a known composition up to an accuracy of 2–5%) are presented. An additional matrix correction caused by the difference in the concentrations of atoms in the reference and sample is shown to be necessary for the microanalysis results and the value of this new fundamental correction is determined. The obtained solution of the direct problem is used to refine the value of an important parameter in electron microprobe analysis, i.e., the mass absorption factor of the analyzed X-ray line.