锥形多模干涉耦合器一般成像特性分析

锥形多模干涉耦合器克服了传统多模干涉(MMI)耦合器结构尺寸大的缺点,满足当前集成光器件高集成度的要求.其成像特性对设计基于它的集成光器件至关重要.根据多模干涉耦合器的自映像原理,对锥形多模干涉耦合器成像特性进行分析,发现成像特性与输入场位置、位置数、多模波导初始宽度及渐变率等参量密切相关,得到成像位置的解析表达式并总...     

弱导波导多模干涉耦合器结构参量优化设计

本文分析了以硅基底上二氧化硅波导为代表的弱导波导多模干涉(MMI)耦合器件输入(出)波导位置及宽度和MMI长度等结构参量对器件性能的影响.提出了参量空间法,在给定工艺材料参量和多模波导宽度情况下,通过匹配各结构参量,制出均匀性好、附加损耗低的弱导波导多模干涉耦合器件.     

采用三维波束传输法的多模干涉耦合器成像位置的数值计算

多模干涉(MMI)耦合器需要精确定位成像位置,以便器件的设计制作。针对强限制和弱限制的三维多模波导干涉耦合器,采用三维交替方向隐式有限差分光束传输法(BPM),数值计算得出多模波导长度、输入波导和输出波导位置。首先通过对对称干涉多模干涉耦合器的数值分析求得多模干涉耦合器的等效宽度Weq及最低二阶模之间的拍长Lc,然后将这些参量结合光束传输法直接用于器件设计。计算显示该方法得到的成像位置和导模传输分析法(MPA)的理论预测比较接近,但Weq和Lc却是由光束传输法计算得到的,导模传输分析法理论只能在得到Weq和Lc的前提下才能得到成像位置。该方法直接针对三维波导进行,没有采用基于等效折射率方法的从三维波导到二维波导的简化处理,并且也没有采用导模传输分析法所采用的近似,保证了计算精度,对于实际多模干涉器件的设计制作可起参考作用。     

M MI功分器结构参量的优化设计

基于精确模式传输分析方法(MPA),提出等效宽度的概念,在此基础上重新修正了自成像理论中有关多模干涉(MMI)功分器的输入(出)波导位置和干涉区长度.并且以1×4,4×4耦合器为例,对各个结构参量进行扫描,证明修正后的耦合器结构使耦合器分光均匀性提高,附加损耗减小,具有实际应用价值.     

新型1×N多模干涉分束器的三维设计与模拟

相比于传统的1×N对称型多模干涉（Mult-Mode Interference,MMI）分束器设计,提出了一种新型埋入式弱限制光波导分束器件.它的干涉区及输入输出波导采用倒锥形式,器件尺寸减小,且不均匀性与附加损耗也减小.以1×4的对称型MMI分束器为例,当只对干涉区采用倒锥形结构后,在TE偏振中心波长为1.55 μm时,器件长度减小了500 μm,均匀性增加了0.131 dB,而附加损耗仅增加了0.02 dB,波长响应较传统设计增加了40 nm.在此基础上,又在输入输出臂上也各增加倒锥形结构后,相比于传统设计附加损耗减小了0.02 dB,均匀性增加了0.139 dB,器件长度减小了500 μm.改进后的器件具有优越的容差性.器件采用掺氟型聚合物材料进行优化设计,通过在合理范围内偏离输出波导位置,使输出光强达到最大值.     

一种新型多模干涉分束器的设计模拟

相比于传统的1×N对称型多模干涉(MMI)分束器,提出了一种新型埋入式弱限制光波导分束器件,它的干涉区及输入输出波导采用倒锥形式.以1×4的对称型MMI分束器为例,在输入输出臂上各增加了倒锥形结构后,较传统设计附加损耗减小了0.02 dB,均匀性增加了0.139 dB,器件长度减小了500 μm.同时,改进后的器件具有优越的偏振相关性及容差性.器件采用掺氟型聚合物材料进行优化设计,通过在合理范围内偏离输出波导位置,使输出光强达到最大值.     

SOI通道转换型多模干涉耦合器的研究

设计和制作了基于SOI的通道转换型多模干涉耦合器。用二维BPM方法分析了耦合器的性能与多模波导宽度和长度的依赖关系.制作出的耦合器能实现良好的通道转换,器件的功率转换比为73,附加损耗为2.2 dB.提高器件制作的精度将能进一步改善耦合器的性能.     

基于多模干涉耦合器的阵列波导光栅设计研究

研究了基于多模干涉(MMI)耦合器的阵列波导光栅(AWG).通过模式传输分析方法,分析了多模干涉耦合器及阵列波导;并给出在硅基底上的二氧化硅波导上四通道100 GHz-AWG普通结构和紧凑结构的设计结果.     

一种基于聚合物材料的延迟线阵列与热光开关集成器件的设计

设计了一种基于聚合物材料的延迟线阵列与热光开关的集成器件.利用Rsoft软件设计并模拟了多模干涉热光开关的性能,可实现输出光场强度随电极加热温度变化.设计了螺旋结构的延迟线阵列,利用BPM软件对螺旋结构波导进行数值模拟,综合考虑器件尺寸和损耗参量设计出螺旋结构的弯曲半径.将延迟线阵列结构与热光开关进行集成,能够实现热光控制的聚合物延迟线阵列,该器件可实现的最大延迟时间为399.4ps,延迟间隔为9.2ps.以SiO2为下包层,SU-8紫外固化光刻胶为波导芯层,聚甲基丙烯酸甲脂为上包层,采用旋涂、光刻、湿法腐蚀等工艺制备了1×4延迟线阵列与MMI热光开关的集成器件,测试得到了延迟线阵列的近红外输出光斑,插入损耗为15~19dB.     

InP基1×4多模干涉耦合器的设计与制作

在密集波分复用系统中,多波长DFB激光器阵列与多模干涉耦合器集成光源器件具有重要的应用前景.为了研制多波长集成光源中的宽带可用低损耗光耦合器,利用三维有限差分光束传播法仿真设计了一种具有强限制作用的InP/InGaAsP材料的多模干涉型耦合器.输入/输出端波导均采用楔形结构以降低多模干涉型耦合器的插入损耗,提高各个输出端口的出光平衡度.根据仿真结果,结合波导芯层为采用外延生长设备,采用反应离子刻蚀工艺制作了1×乘4多模干涉型耦合器.利用自动对准波导耦合测试系统对所制作器件的插入损耗和出光平衡度进行测量.测试结果表明,该器件在1 550nm波长附近的40nm带宽范围内获得了约2.6dB的通带平坦度,在1 550nm通信波长处,器件的插入损耗低于10dB.     

Analysis of multiple reflections in hybrid photonic crystal multimode interference coupler

In this paper the analysis of multiple reflections in photonic crystal (PhC) multimode interference (MMI) couplers using eigen-mode expansion method is presented. The analysis is conducted on a hybrid PhC structure which consisted of 1-D PhC multimode waveguide sandwiched between 2-D PhC input/output waveguides. In PhC multimode waveguide, where the mechanism of wave confinement is not due to total internal reflection but due to photonic bandgap properties, the reflectivity at 2-D PhC facet wall would be very large for all the guided modes in the waveguide when ever the image formed due to MMI effect does not coincides with the output access waveguide.     

折叠矩形槽波导行波管输入输出过渡波导

为了将槽波导端与标准矩形波导相连接,设计了一种适用于折叠槽波导结构行波管的输入输出过渡波导, 可将其视为槽宽渐变的双槽加载矩形波导。利用电磁仿真软件CST微波工作室对该结构进行仿真计算,讨论了各个结构参数对其性能的影响。对比了直线渐变、抛物线渐变和指数渐变3种槽宽渐变规律在W波段对其传输特性及损耗特性的影响。研究结果表明:指数渐变结构的驻波系数小于1.15的带宽比其他两种结构都要宽,且在90~99 GHz、驻波系数小于1.25时,该结构的整体长度也远小于另外两种结构,能够实现良好的过渡效果; 而直线渐变结构的损耗在90~97 GHz为最低。     

Optimal design of multimode interference couplers using an improved self-imaging theory

Self-imaging theory is widely accepted as a good method in designing 1 × N multimode interference (MMI) couplers, but it is also true that self-imaging theory is not suitable for low-contrast structures. An improved self-imaging theory is proposed in this paper for the optimal design of low-contrast 1 × N MMI couplers. The average effective width of MMI waveguide and the average effective propagation constant of MMI waveguide are used as the basis to modify the conventional self-imaging theory. A direct calculation of the average effective width of low-contrast MMIs is presented. We use this approach in the optimal design of a 1 × 4 silica MMI coupler, and the results show that the improved self-imaging theory is more accurate than conventional self-imaging theory for low-contrast structures, the results also show that if the material parameters and the width of an MMI waveguide are fixed, the average effective width of the MMI waveguide will increase with the decrease of the height of the core layer.     

Semi-vectorial analysis of a compact wavelength demultiplexer based on the tapered multimode interference coupler

Based on a parabolically tapered multimode interference (MMI) coupler with a deep-etched SiO₂/SiON rib waveguide, a compact wavelength demultiplexer operating at 1.30 and 1.55\mum wavelengths is proposed and analysed by using three-dimensional semi-vectorial finite-difference beam propagation method (3D-SV-FD-BPM). The results show that a MMI section of 330.0\mum in length, which is only 76% length of a straight MMI coupler, is achieved with the contrasts of 42.3 and 39.2dB in quasi-TE mode, and 38.4 and 37.8dB in quasi-TM mode at wavelengths 1.30 and 1.55\mum, respectively, and the insertion losses below 0.2dB at both wavelengths and in both polarization states. The alternating direction implicit algorithm with the Crank--Nicholson scheme is applied to the discretization of the 3D-SV-FD-BPM formulation along the longitudinal direction. Moreover, a modified FD scheme is constructed to approximate the resulting equations along the transverse directions, in which the discontinuities of the derivatives of magnetic field components H_y and H_x along the vertical and horizontal interfaces, respectively, are involved.     

Compact 3-dB tapered multimode interference coupler in silicon-on-insulator

We have fabricated a compact 3-dB multimode interference coupler with a large silicon-on-insulator cross section. To reduce the length of the usual symmetric interference multimode interference coupler, we propose using a parabolically tapered structure. The length of the device is 398microm . The device has a uniformity of 0.28 dB.     

一种基于多模干涉耦合器的模转换与合并器件的设计

多模波导干涉（MMI）耦合器在集成光路中被用来实现波导模式的转换或合并。对于实际的基于硅绝缘体（SOI）的三维波导，数值设计方法是必需的。采用有限差分波束传输法（FD-BPM）设计了一种66％模式转换、合并器。首先由FD-BPM求出MMI耦合器的输入、输出波导所支持的基模和一阶导模的模场分布，通过数值方法得到MMI耦合器的长度，然后将求得的模场作为输入波场，经过FD-BPM运算后在器件输出面上计算交叉积分得出实际的由基模转换为一阶模的功率百分比。对于算例中采用的SOI波导，器件长度为829μm，65．7％的功率由基模转换为一阶模。     

Power splitting ratio couplers based on MMI structures with high bandwidth and large tolerance using silicon waveguides

We show that it is possible to obtain 2 × 2 couplers based on multimode interference (MMI) structures with nineteen new power-splitting ratios by cascading three or four MMI couplers. The other aim of this study is to use silicon waveguides, that are compatible with the existing CMOS (Complementary Metal-Oxide-Semiconductor) fabrication technology, for designing the proposed devices. The proposed MMI couplers with new power splitting ratios have simple geometries and low losses. These MMI couplers can offer valuable new possibilities for designing MMI waveguide-based photonic integrated circuits such as all-optical interconnects, microring resonators, clock distribution, Mach Zehnder Interferometer based on MMI couplers and other all-optical processing applications. The transfer matrix method (TMM) and modified effective index method (MEIM) along with the support of the 3D Beam Propagation Method (3D BPM) are used to optimize the proposed devices.     

Optimal design for a flat-top AWG demultiplexer by using a fast calculation method based on a Gaussian beam approximation

Passband broadening of an AWG (array waveguide grating) demultiplexer with an MMI (multimode interference) coupler connected at the end of a tapered input waveguide is considered. An explicit formula based on the field propagation of an approximate Hermit-Gaussian beam is used to calculate quickly and reliably the spectral response of the AWG demultiplexer. The widths of the input waveguide, the output waveguides and the MMI coupler are optimized. The optimal design is verified with the experimental measurement.     

Design of a wavelength demultiplexer based on a parabolically tapered multimode interference coupler

A compact wavelength demultiplexer is designed for the operation at 1.30 and 1.55 μm wavelengths using the three-dimensional semi-vectorial beam propagation method. The parabolically tapered multimode interference (MMI) coupler based on the deep-etched SiO₂/SiON rib waveguide is introduced into the present demultiplexer for reducing the length. The numerical results show that a MMI section of 330.0 μm in length, which is only 76% length of a straight MMI coupler, is achieved with the contrasts of 42.3 and 39.2 dB in quasi-TE mode, and 38.4 and 37.8 dB in quasi-TM mode at wavelengths 1.30 and 1.55 μm, respectively and the insertion losses below 0.2 dB. The modified finite difference scheme is applied to approximate the resulting equations along the transverse directions, in which the discontinuities of the derivatives of magnetic field components H_y and H_x along the vertical and horizontal interfaces, respectively, are involved.