| SOI通道转换型多模干涉耦合器的研究 |
| |
| 引用本文： | 王章涛,樊中朝,陈少武,余金中.SOI通道转换型多模干涉耦合器的研究[J].光子学报,2004,33(9):1047-1049. |
| |
| 作者姓名： | 王章涛 樊中朝 陈少武 余金中 |
| |
| 作者单位： | 中国科学院半导体研究所,集成光电子国家重点联合实验室,北京,100083;中国科学院半导体研究所,集成光电子国家重点联合实验室,北京,100083;中国科学院半导体研究所,集成光电子国家重点联合实验室,北京,100083;中国科学院半导体研究所,集成光电子国家重点联合实验室,北京,100083 |
| |
| 基金项目： | NationalNaturalScienceFoundationofChina(No .6 9990 5 4 0 ) ,National 86 3Project(No .2 0 0 2AA312 0 6 0 )andStateKeyDevelopmentProgramforBasicResearchofChina(No.
G2 0 0 0 0 36 6 ) |
| |
| 摘 要： | 设计和制作了基于SOI的通道转换型多模干涉耦合器。用二维BPM方法分析了耦合器的性能与多模波导宽度和长度的依赖关系.制作出的耦合器能实现良好的通道转换,器件的功率转换比为73,附加损耗为2.2 dB.提高器件制作的精度将能进一步改善耦合器的性能.
|
| 关 键 词： | SOI 多模干涉 通道转换 |
| 收稿时间： | 2003-09-08 |
Fabrication of a SOI Based Channel-shifted Multimode Interference Coupler |
| |
| (State Key Laboratory on Integrated Optoelectronics.Fabrication of a SOI Based Channel-shifted Multimode Interference Coupler[J].Acta Photonica Sinica,2004,33(9):1047-1049. |
| |
| Authors: | (State Key Laboratory on Integrated Optoelectronics |
| |
| Institution: | (State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors,the Chinese Academy of Sciences, Beijing 100083 |
| |
| Abstract: | A silicon-on-insulator based channel-shifted multimode interference coupler is designed and fabricated. A two dimensional beam propagation method is used to analyze the dependence of coupler′s performances on the width and length of the multimode waveguide. The device fabricated has a power shift ratio of 73 and an excess loss of about 2.2 dB. An enhancement of fabrication accuracies could further improve the coupler performances. |
| |
| Keywords: | SOI Multimode interference Channel-shifted |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《光子学报》浏览原始摘要信息 |
| 点击此处可从《光子学报》下载免费的PDF全文 |
