SnO_2/p~+-Si异质结器件的电致发光:利用TiO_2盖层提高发光强度

通过在重掺硼硅(p+-Si)衬底上溅射SnO2薄膜并在O2气氛下800℃热处理形成SnO2/p+-Si异质结.基于该异质结的器件可在低电压(电流)驱动下电致发光.进一步地,通过在SnO2薄膜上增加TiO2盖层,使器件的电致发光获得显著增强.这是由于TiO2盖层的引入,一方面使SnO2薄膜更加致密,减少了非辐射复合中心;另一方面TiO2较大的折射率和合适的厚度使SnO2薄膜电致发光的出光效率得到提高.     

p型导电掺In的SnO_2薄膜的制备及表征

采用溶胶 凝胶提拉法成功地制备了p型导电掺In的SnO2 薄膜 .x射线衍射测试结果表明 ,掺In的SnO2 薄膜保持SnO2 的金红石结构 .吸收谱测试结果表明 ,掺In的SnO2 禁带宽度为 3 8eV .霍尔测量结果表明 ,空穴浓度与热处理温度有很大的关系 ,5 2 5℃为最佳热处理的温度 .铟锡原子比在 0 0 5— 0 2 0范围内 ,空穴的浓度与In的含量有直接的关系 ,并随In含量的增加而增加     

p型导电掺In的SnO2薄膜的制备及表征

采用溶胶-凝胶提拉法成功地制备了p型导电掺In的SnO2薄膜.x射线衍射测试结果表明，掺In的SnO2薄膜保持SnO2的金红石结构.吸收谱测试结果表明，掺In的SnO2禁带宽度为3.8eV.霍尔测量结果表明，空穴浓度与热处理温度有很大的关系，525℃为最佳热处 理的温度.铟锡原子比在0.05—0.20范围内，空穴的浓度与In的含量有直接的关系，并随In含量的增加而增加. 关键词： SnO2 溶胶-凝胶法 p型导电     

图谱分析退火对本征SnO2多晶薄膜性能的影响

提高CdTe太阳电池转换效率的有效途径之一是适当减薄CdS窗口层,减薄了的CdS层会严重影响电池性能,解决方法是在窗口层和透明导电膜之间加一层高阻本征SnO2薄膜。采用反应磁控溅射制备了具有高阻抗的本征SnO2薄膜,并对其进行了后处理,利用XRD,XPS等方法研究了退火前后薄膜的结构,成分及表面化学状态的变化。结果表明:经N2/O2=4:1气氛550℃(0.5h)退火后,样品由非晶态转变为四方相结构的多晶薄膜,具有(110)择优取向;XPS分析表明退火后薄膜的氧含量增加、O(1s)峰向低能方向移动,SnO被氧化成SnO2,使得薄膜的透过率增大,退火后的本征SnO2高阻膜非常适合作为过渡层应用于CdTe太阳电池中。     

Sb掺杂对透明SnO_2薄膜导电性能影响的第一性原理计算(英文)

本文根据密度泛函理论(DFT),采用第一性原理平面波赝势方法,计算了Sb掺杂对透明导电薄膜SnO2电子结构及导电性能的影响,讨论了掺杂下SnO2晶体的结构变化、能带结构、电子态密度.计算结果表明,Sb掺杂的SnO2具有高的电导率,且随着掺杂浓度的增加,能带简并化加剧,浅施主杂质能级向远离导带底方向移动.     

Sb掺杂对透明SnO2薄膜导电性能影响的第一性原理计算

本文根据密度泛函理论（DFT），采用第一性原理平面波赝势方法，计算了Sb掺杂对透明导电薄膜SnO2电子结构及导电性能的影响，讨论了掺杂下SnO2晶体的结构变化、能带结构、电子态密度．计算结果表明，Sb掺杂的SnO2具有高的电导率，且随着掺杂浓度的增加，能带简并化加剧，浅施主杂质能级向远离导带底方向移动．     

Cd2SnO4薄膜光致发光某些性质的研究

本文研究了Cd2SnO4薄膜光致发光的某些性质.Cd2SnO4膜是利用Cd-Sn合金靶在Ar+O2气氛中反应溅射而成的.实验研究表明,Cd2SnO4膜的发光峰值随着氧浓度的增加移向长波方向.这是因为氧浓度的增加,减少了膜中的氧空位,导致了导带中电子浓度的减小,致使Burstein-Moss效应和电子散射作用相对减弱,从而改变了带隙宽度.     

电子束蒸镀氧化铟透明导电薄膜

用电子束蒸发掺SnO2氧化铟靶,可以制得性能良好的透明导电薄膜,电阻率在2.5-3.5×10-4Ωcm,可见光透过率达90%.这种导电薄膜能代替SnO2透明导电薄膜,并优于SnO2导电薄膜. 本文着重研究了影响氧化铟透明导电薄膜导电性、透光性的主要因素,为获得性能良好的透明导电薄膜提供了重复性较好的工艺条件.]     

Sb，In，P掺杂对SnO_2薄膜透明导电性能的影响(英文)

采用溶胶凝胶(Sol-Gel)技术制备了SnO2:(Sb,In)透明导电薄膜,优化了制备工艺参数,获得了最佳制备条件,研究表明,4%的铟掺杂有效地改善了薄膜的内部结构,使得紫外-可见光的透过率显著增加;7%的锑掺杂释放出了更多的载流子,使薄膜的方块电阻降低,2%的磷掺杂因准连续杂质能带的形成进一步提高了薄膜的电导率.Sb、In、P的掺入使得SnO2薄膜的紫外-可见光的透过率达83%,方块电阻达38Ω/□     

溶胶凝胶法制备参氟二氧化锡薄膜

利用溶胶凝胶方法，在硅碱玻璃底板上制备的透明低电阻SnO2:F薄膜，是一种低辐射导电薄膜。将SnCl4·5H2O 和 NH4F 溶解在50%乙醇和50%水的溶液中。制备条件为底板温度450℃，喷嘴与底板之间的距离60mm,载气流速8 L/min，制备时间5分钟。制成的SnO2:F薄膜面电阻为2Ω/□，可重复性好。并且文中还定性给出了SnO2:F薄膜其红外反射率与面电阻之间的关系。     

光谱分析气体状态对近空间升华沉积CdTe多晶薄膜的影响

在CdTe多晶薄膜太阳电池制备中用近空间升华法生长了CdTe多晶薄膜,沉积工作气体的状态决定了薄膜的结构、性质。文章首先分析了近空间沉积的物理机制,测量了近空间沉积装置内的温度分布,使用氩氧混合气体为工作气体,其中重点讨论了该气体状态(包括气氛和气压)与薄膜的初期成核的关系,即择优取向程度和光能隙与气氛和气压的关系。结果表明,(1)不同气氛下沉积的CdTe薄膜均为立方相结构。随氧浓度的增加,σ增加,氧浓度为6%时,σ最大,之后随氧浓度增加,σ降低,在12%达到最小,然后随氧浓度的增加而增加, 在氧浓度为9%时沉积的结晶更完整。CdTe薄膜的光能隙为1.50～1.51 eV;(2)在氩氧气氛下氧浓度为9%,不同气压下制备的样品,均有立方相CdTe, 此外, 还有CdS和SnO₂:F衍射峰。CdTe晶粒随气压增加有减小趋势,随气压的增加,透过率呈下降趋势,相应的CdTe吸收边向短波方向移动;(3)在氩氧气氛下氧浓度为9%,采用衬底温度550 ℃,源温度620 ℃,沉积时间4 min时制备的CdTe多晶薄膜获得了转换效率优良的结构为SnO₂:F/CdS/CdTe/Au的集成电池。     

溅射银超细微晶膜分析

采用真空溅射沉积技术在硅单晶Si（111）面上制备厚度约为18nm的银超细微晶膜（AgUFCP）．用掠入射X射线散射技术分析了AgUFCP的结构和膜与衬底Ag/Si（111）界面形态．用广角X射线衍射和径向分布函数探索了AgUFCP的半晶态结构特征．用差热扫描量热法检测分析了银超细微晶粒子的表面原子结构，揭示了超细微晶粒子表面生长的热动力学机理对表面壳层结构的温度依赖性． 关键词：     

Effect of annealing on electrical resistivity of rf-magnetron sputtered nanostructured SnO2 thin films

Tin oxide (SnO₂) thin films were deposited by radio frequency (RF) magnetron sputtering on clean corning glass substrates. These films were then annealed for 15 min at various temperatures in the range of 100-500°C. The films were investigated by studying their structural and electrical properties. X-ray diffraction (XRD) results suggested that the deposited SnO₂ films were formed by nanoparticles with average particle size in the range of 23-28 nm. XRD patterns of annealed films showed the formation of small amount of SnO phase in the matrix of SnO₂. The initial surface RMS roughness measured with atomic force microscopy (AFM) was 25.76 nm which reduces to 17.72 nm with annealing. Electrical resistivity was measured as a function of annealing temperature and found to lie between 1.25 and 1.38 mΩ cm. RMS roughness and resistivity show almost opposite trend with annealing.     

Effects of the oxygen partial pressure and annealing atmospheres on the microstructures and optical properties of Cu-doped ZnO films

Cu-doped zinc oxide (ZnO:Cu) films were deposited on p-Si (1 0 0) substrates at 200 °C under various oxygen partial pressures by using radio frequency reactive magnetron sputtering. The properties of the films were characterized by the X-ray diffraction spectroscopy (XRD), energy dispersive spectrometer, X-ray photoelectron spectroscopy (XPS) and fluorescence spectrophotometer with the emphasis on the evolution of microstructures, element composition, valence state of Cu, optical properties. The results indicated that the properties of ZnO:Cu films were significantly affected by oxygen partial pressures. XRD measurements revealed that the sample prepared at the ratio of O₂:Ar of 15:10 sccm had the best crystal quality among all ZnO:Cu films. XPS analysis results suggested that the valence of Cu in the ZnO films was a mixed state of +1 and +2, and the integrated intensity ratio of Cu²⁺ to Cu⁺ increased with the increment of oxygen partial pressure. The photoluminescence measurements at room temperature revealed a violet, two blue and a green emission. We considered that the origin of green emission came from various oxygen defects when the ZnO:Cu films grew in oxygen poor and enriched environment. Furthermore, the influence of annealing atmosphere on the microstructures and optical properties of ZnO:Cu films were discussed.     

氧气分压对TiO2薄膜结构、磁性及输运性质的影响

采用脉冲激光沉积技术在LaAlO_3(100)基片上制备了TiO_2薄膜,研究了氧气分压对薄膜结构、磁性与输运性质的影响.结构测量表明,TiO_2薄膜的结构与沉积过程中的氧气分压有关,氧气分压的增大有利于薄膜向锐钛矿相转变.磁性测量表明,在较高的氧气分压下制备的TiO_2薄膜表现为顺磁性,在较低氧气分压下制备的TiO_2薄膜表现出明显的室温铁磁性,其铁磁性与氧空位有密切关系.输运测量进一步表明,TiO_2薄膜表现为半导体导电特性,在具有铁磁性的薄膜中还观察到了低温磁电阻效应.     

Synthesis of SnO2−x nanoparticles tuned between 0 x 1 in a premixed low pressure H2/O2/Ar flame

The transition from tin monoxide to tin dioxide is investigated by doping a low pressure premixed H₂/O₂/Ar flame with dilute concentrations of tetramethyl tin (TMT) Sn(CH₃)₄. The H₂/O₂ ratio was varied between 1.97 and 0.97; the reactor pressure was set to 30 mbar. The inlet gas velocity was kept constant and the precursor concentration was varied between 200 and 700 ppm. Mean particle diameters between 3 nm d_p 7 nm were measured using a particle mass spectrometer (PMS), while X-ray diffraction (XRD) and transmission electron microscope (TEM) analysis revealed information on crystal structure as well as morphology of the synthesized oxides. A gray SnO film was observed in the reactor at low oxygen concentrations, while for higher oxygen concentrations light yellow sub-stoichiometric tin oxides and white SnO₂ were obtained. Further analysis of the sub-stoichiometric oxides, using atomic electron spectroscopy AES revealed that SnO_2−x (0.2 x 0.6) was obtained. Furthermore, electrical characterization of all materials, deposited on interdigital capacitors, showed a decrease in the conductivity of the nanoparticles with increasing oxidation (decreasing x).     

Composition and morphological characteristics of chemically sprayed fluorine-doped zinc oxide thin films deposited on Si(1 0 0)

Fluorine-doped zinc oxide thin films (ZnO:F) were deposited on Si(1 0 0) substrates by the chemical spray technique (CST) from an aged-solution. The effect of the substrate temperature on the morphology and composition of the ZnO:F thin films was studied. The films were polycrystalline, with a preferential growth along the ZnO (0 0 2) plane, irrespective of the deposition temperature. The average crystal size within the films was ca. 35 nm and the morphology of the surface was found to be dependent on the substrate temperature. At low substrate temperatures irregular-shaped grains were observed, whereas at higher temperatures uniform flat grains were obtained. Elemental analysis showed that the composition of the films is close to stoichiometric ZnO and that samples contain quite a low fluorine concentration, which decreases as a function of the deposition temperature.     

新干商墓青铜器非晶与纳米晶锈蚀产物结构的分析研究

应用微区X射线衍射仪(μXRD)及高分辨透射电镜(HTEM)分析江西新干商墓出土的青铜器粉状锈蚀产物,结果表明锈蚀产物主要为具有锡石结构的SnO2,晶态形式为非晶与晶粒尺寸为4～5.7nm的纳米晶共混;能谱分析表明样品中除含有大量锡外,还有少量的铜、硅、铅与铁等元素。通过对锈蚀产物的高分辨透射电镜晶格条纹像计算,说明纳米晶SnO2的晶格中并没有其他原子的掺杂;对该锈蚀产物拉曼光谱的分析研究表明,样品不含有表征SnO2的体相拉曼峰,更具有非晶SnO2的特征,而973cm-1的弱而宽的峰表明样品含有非晶的硅酸盐类的锈蚀物,推测锈蚀产物中的少量铜、硅、铅与铁等元素应以非晶的形式存在。     

Structural properties of single and multilayer ITO and TiO2 films deposited by reactive pulsed laser ablation deposition technique

Indium tin oxide (ITO) and titanium dioxide (TiO₂) single layer and double layer ITO/TiO₂ films were prepared using reactive pulsed laser ablation deposition (RPLAD) with an ArF excimer laser. The films were deposited on SiO₂ substrates heated at 200 and 400 °C. ITO and TiO₂ films with uniform thicknesses of about 400 and 800 nm, respectively, over large areas were prepared. X-ray diffraction (XRD) analysis revealed that the ITO films are formed of highly orientated nanocrystals with an average particle size of 10-15 nm. Atomic force microscopy (AFM) observations indicate rough ITO films surfaces with average roughness of 26-30 nm. Pores were also observed. TiO₂ films deposited on the prepared ITO films result less crystalline. Annealing at 300 and 500 °C for three consecutive hours promoted formation of TiO₂ anatase phase, with crystal size of ∼6-7 nm. From the scanning transmission electron microscope (STEM) images, it can be seen that the TiO₂ films deposited onto the prepared ITO films present a relatively high pore sizes with an average pore diameter of ∼40 nm and excellent uniformity. In addition, STEM cross-sectional analysis of our films showed a columnar structure but no evidence of voids in the structure. Therefore, films exhibited large surface area, well suited for dye-sensitized solar cells (DSSC) applications.     

Influence of ambient oxygen pressure on the preferred orientation, microstructures, and dielectric properties of (Ba1-xSrx)TiO3 thin films with compositionally graded structures

Compositionally graded (Ba_1-xSr_x)TiO₃ (BST) thin films, with x decreasing from 0.25 to 0.0, were deposited on Pt(111)/Ti/SiO₂/Si(100) substrates by pulsed-laser ablation at 600 °C and under ambient oxygen pressures ranging from 50 to 400 mTorr. The influence of the ambient gas pressure on the preferred orientation, microstructures, and dielectric properties of compositionally graded BST films was investigated by X-ray diffraction, scanning electron microscopy, and dielectric frequency spectra, respectively. As the ambient oxygen pressure was increased, the preferred orientation evolved in the order: (100)+(110)(110)+(111) random orientation, and the surface roughness of the graded BST films also increased. The graded BST films deposited at high ambient oxygen pressures (300400 mTorr) exhibited a grainy structure with polycrystalline grains throughout the film thickness, whereas the graded films deposited at low ambient oxygen pressures (50200 mTorr) possessed a columnar structure. The evolution of the microstructure was ascribed to the different physical and chemical properties of the species that were incident onto the substrates at the various oxygen pressures. The dielectric properties of the graded BST films were dependent upon the ambient oxygen pressures. The graded BST films deposited at 200 mTorr exhibited the highest dielectric constant. PACS 77.55.+f; 77.22.Ch; 81.15.Fg