超陡倒掺杂分布对超深亚微米金属-氧化物-半导体器件总剂量辐照特性的改善

分析了沟道中超陡倒掺杂和均匀掺杂两种情况下超深亚微米MOS器件的总剂量辐照特性,主要比较了两种掺杂分布的器件在辐照情况下的泄漏电流与阈值电压的退化特性.结果表明,在辐照剂量500krad情况下,超陡倒掺杂器件的泄漏电流比均匀掺杂器件的泄漏电流低2—3个量级;而在辐照剂量500krad情况下,由于器件俘获的空穴量饱和,超陡倒掺杂的改善没有那么明显.但超陡倒掺杂的阈值电压漂移量比均匀掺杂的情况小约40mV.超陡倒掺杂有利于改善器件的总剂量辐照特性.文中还给出了用于改善器件辐照特性的超陡倒掺杂分布的优化设计,为超深亚微米器件抗辐照加固提供了依据.     

绝缘体上硅金属氧化物半导体场效应晶体管中辐射导致的寄生效应研究

基于⁶⁰Co γ射线源研究了总剂量辐射对绝缘体上硅（silicon on insulator,SOI）金属氧化物半导体场效应晶体管器件的影响.通过对比不同尺寸器件的辐射响应,分析了导致辐照后器件性能退化的不同机制.实验表明：器件的性能退化来源于辐射增强的寄生效应;浅沟槽隔离（shallow trench isolation,STI）寄生晶体管的开启导致了关态漏电流随总剂量呈指数增加,直到达到饱和;STI氧化层的陷阱电荷共享导致了窄沟道器件的阈值电压漂移,而短沟道器件的阈值电压漂移则来自于背栅阈值耦合;在同一工艺下,尺寸较小的器件对总剂量效应更敏感.探讨了背栅和体区加负偏压对总剂量效应的影响,SOI器件背栅或体区的负偏压可以在一定程度上抑制辐射增强的寄生效应,从而改善辐照后器件的电学特性.     

0.18 μm窄沟NMOS晶体管总剂量效应研究

为明确深亚微米NMOS器件抗辐照能力以及研究其加固措施, 本文对0.18 μm窄沟NMOS晶体管进行了⁶⁰Coγ总剂量辐射效应研究. 结果表明: 和宽沟器件不同, 阈值电压、跨导、漏源电导对总剂量辐照敏感, 此现象被称之为辐射感生窄沟道效应; 相比较栅氧化层, 器件隔离氧化层对总剂量辐照更敏感; 窄沟道NMOS器件阈值电压不仅和沟道耗尽区电荷有关, 寄生晶体管耗尽区电荷对其影响也不可忽略, 而辐照引起源漏之间寄生晶体管开启, 形成漏电通道, 正是导致漏电流、亚阈斜率等参数变化的原因. 关键词： 0.18μmm 窄沟NMOS晶体管 60Coγ辐照')" href="#">⁶⁰Coγ辐照 辐射感生窄沟道效应     

总剂量辐照效应对窄沟道SOI NMOSFET器件的影响

本文深入研究了130 nm Silicon-on-Insulator (SOI) 技术下的窄沟道n型metal-oxide-semiconductor-field-effect-transistor (MOSFET) 器件的总剂量辐照效应. 在总剂量辐照下, 相比于宽沟道器件, 窄沟道器件的阈值电压漂移更为明显. 论文利用电荷守恒定律很好地解释了辐照增强的窄沟道效应. 另外, 本文首次发现, 对于工作在线性区的窄沟道器件, 辐照产生的浅沟槽隔离氧化物(STI) 陷阱正电荷会增加沟道区载流子之间的碰撞概率和沟道表面粗糙度散射, 从而导致主沟道晶体管的载流子迁移率退化以及跨导降低. 最后, 对辐照增强的窄沟效应以及迁移率退化进行了三维器件仿真模拟, 仿真结果与实验结果符合得很好. 关键词： 总剂量效应(TID) 浅沟槽隔离(STI) 氧化层陷阱正电荷 SOI MOSFET     

稳态、瞬态X射线辐照引起的互补性金属-氧化物-半导体器件剂量增强效应研究

重点开展了稳态、瞬态X射线辐照引起的金属氧化物半导体(CMOS)器件剂量增强效应relative dose enhancement effect(RDEF)研究.通过实验给出辐照敏感参数随总剂量的变化关系,旨在建立CMOS器件相同累积剂量时Χ射线辐照和γ射线辐照的总剂量效应损伤等效关系.在脉冲X射线源dense plasma focus(DPF)装置上,采用双层膜结构开展瞬态翻转增强效应研究,获得了瞬态翻转剂量增强因子.这些方法为器件抗X射线辐照加固技术研究提供了实验技术手段. 关键词： X射线 剂量增强因子 总剂量效应 剂量率效应     

总剂量效应致0.13μm部分耗尽绝缘体上硅N型金属氧化物半导体场效应晶体管热载流子增强效应

空间科学的进步对航天用电子器件提出了更高的性能需求, 绝缘体上硅(SOI)技术由此进入空间科学领域, 这使得器件的应用面临深空辐射环境与地面常规可靠性的双重挑战. 进行SOI N型金属氧化物半导体场效应晶体管电离辐射损伤对热载流子可靠性的影响研究, 有助于对SOI器件空间应用的综合可靠性进行评估. 通过预辐照和未辐照、不同沟道宽长比的器件热载流子试验结果对比, 发现总剂量损伤导致热载流子损伤增强效应, 机理分析表明该效应是STI辐射感生电场增强沟道电子空穴碰撞电离率所引起. 与未辐照器件相比, 预辐照器件在热载流子试验中的衬底电流明显增大, 器件的转移特性曲线、输出特性曲线、跨导特性曲线以及关键电学参数V_T, GM_max, ID_SAT退化较多. 本文还对宽沟道器件测试中衬底电流减小以及不连续这一特殊现象进行了讨论.     

0.18 μm MOSFET器件的总剂量辐照效应

对0.18 μm metal-oxide-semiconductor field-effect-transistor (MOSFET)器件进行γ射线辐照实验,讨论分析器件辐照前后关态漏电流、阈值电压、跨导、栅电流、亚阈值斜率等特性参数的变化,研究深亚微米器件的总剂量效应. 通过在隔离氧化物中引入等效陷阱电荷,三维模拟结果与实验结果符合很好. 深亚微米器件栅氧化层对总剂量辐照不敏感,浅沟槽隔离氧化物是导致器件性能退化的主要因素. 关键词： 总剂量效应 浅沟槽隔离 氧化层陷阱正电荷 MOSFET     

非对称Halo异质栅应变Si SOI MOSFET的二维解析模型

为了进一步提高深亚微米SOI (Silicon-On-Insulator) MOSFET (Metal-Oxide Semiconductor Field Effect Transistor) 的电流驱动能力, 抑制短沟道效应和漏致势垒降低效应, 提出了非对称Halo异质栅应变Si SOI MOSFET. 在沟道源端一侧引入高掺杂Halo结构, 栅极由不同功函数的两种材料组成. 考虑新器件结构特点和应变的影响, 修正了平带电压和内建电势. 为新结构器件建立了全耗尽条件下的表面势和阈值电压二维解析模型. 模型详细分析了应变对表面势、表面场强、阈值电压的影响, 考虑了金属栅长度及功函数差变化的影响. 研究结果表明,提出的新器件结构能进一步提高电流驱动能力, 抑制短沟道效应和抑制漏致势垒降低效应, 为新器件物理参数设计提供了重要参考. 关键词： 非对称Halo 异质栅 应变Si 短沟道效应     

同步辐射X射线源的剂量增强效应实验研究

设计了多层平板铝电离室,利用北京同步辐射装置BSRF产生的30—100keV同步辐射硬X射线,测量了不同材料界面Kovar/Au/Al,Pb/Al,Ta/Al的辐射剂量梯度分布,给出了不同材料界面剂量增强因子DEF.在该装置上同时开展了硬X射线辐照引起的CMOS器件4069的剂量增强效应RDEF研究.采用双层膜结构,通过实验给出辐照敏感参数随总剂量的变化关系,从而给出器件损伤增强因子.这些方法为器件抗硬X射线辐射加固技术研究提供了实验技术手段.     

浮栅ROM器件x射线剂量增强效应实验研究

给出了浮栅ROM器件在钴源和北京同步辐射装置(BSRF)3W1白光束线辐照的实验结果;比较了两种辐照的实验结果及其损伤异同性.通过实验在线测得位错误数随总剂量的变化,给出相同累积剂量时x射线辐照和γ射线辐照的总剂量效应损伤等效关系.获得了浮栅ROM器件x射线剂量增强因子.这些结果对器件抗x射线辐射加固技术研究有重要价值 关键词： EEPROM x射线 剂量增强剂量效应 同步辐射     

Hot-Carrier Effects on Total Dose Irradiated 65 nm n-Type Metal-Oxide-Semiconductor Field-Effect Transistors

The influence of total dose irradiation on hot-carrier reliability of 65 nm n-type metal-oxide-semiconductor fieldeffect transistors(nMOSFETs) is investigated.Experimental results show that hot-carrier degradations on irradiated narrow channel nMOSFETs are greater than those without irradiation.The reason is attributed to radiation-induced charge trapping in shallow trench isolation(STI).The electric field in the pinch-off region of the nMOSFET is enhanced by radiation-induced charge trapping in STI,resulting in a more severe hot-carrier effect.     

First-principles study on the doping effects of Al in α-MnO2

In this paper, first-principles calculations have been implemented to study the structural relaxation, formation energies and electronic structure of Al doped α-MnO₂. Both Al insertion and Al substitution reactions in the α-MnO₂ were considered. Calculated formation energies indicate that Mn atom is easier to be displaced by Al atom under the O-rich growth condition compared with Al insertion reaction. Besides, it can be found that Al doping can afford acceptor impurity level which can accommodate electrons, thus contributing to the improvement of conductivity of α-MnO₂. The conductivity of α-MnO₂ is gradually improved with the increasing doping concentration of Al, and Al_0.0417Mn_0.9583O₂ exhibits the best conductivity. Lastly, the electronic structure of Al_0.0417Mn_0.9583O₂ was further investigated by analysis of total charge density and Bader charge. It is clear that Al doping can afford more electrons for α-MnO₂, which also contributes to improvement of its conductivity.     

Bias dependence of a deep submicron NMOSFET response to total dose irradiation

Deep submicron n-channel metal-oxide-semiconductor field-effect transistors (NMOSFETs) with shallow trench isolation (STI) are exposed to ionizing dose radiation under different bias conditions.The total ionizing dose radiation induced subthreshold leakage current increase and the hump effect under four different irradiation bias conditions including the worst case (ON bias) for the transistors are discussed.The high electric fields at the corners are partly responsible for the subthreshold hump effect.Charge trapped in the isolation oxide,particularly at the Si/SiO 2 interface along the sidewalls of the trench oxide creates a leakage path,which becomes a dominant contributor to the offstate drain-to-source leakage current in the NMOSFET.Non-uniform charge distribution is introduced into a threedimensional (3D) simulation.Good agreement between experimental and simulation results is demonstrated.We find that the electric field distribution along with the STI sidewall is important for the radiation effect under different bias conditions.     

基于环形栅和半环形栅N沟道金属氧化物半导体晶体管的总剂量辐射效应研究

在商用0.35 μm互补金属氧化物半导体工艺上制备了两种栅氧化层厚度(t_ox)的条形栅、环形栅和半环形栅N沟道金属氧化物半导体 (n-channel metal oxide semiconductor, 简记为NMOS) 晶体管, 并进行了2000 Gy(Si)的总剂量辐射效应实验. 实验结果显示, 栅氧厚度对阈值电压漂移的影响大于栅氧厚度的3次方. 对于t_ox为11 nm的低压NMOS晶体管, 通过环形栅或半环形栅的加固方式能将其抗总剂量辐射能力从300 Gy(Si)提高到2000 Gy(Si)以上; 而对于t_ox为26 nm的高压NMOS晶体管, 通过环栅或半环栅的加固方式, 则只能在低于1000 Gy(Si)的总剂量下, 一定程度地抑制截止漏电流的增加. 作为两种不同的版图加固方式, 环形栅和半环形栅对同一t_ox的NMOS器件加固效果类似, 环形栅的加固效果略优于半环形栅. 对于上述实验结果, 进行了理论分析并阐释了产生这些现象的原因. 关键词： 环形栅 半环形栅 总剂量 辐射效应     

90 nm CMOS工艺下p+深阱掺杂浓度对电荷共享的影响

基于3维TCAD器件模拟,研究了90 nm CMOS双阱工艺下p⁺深阱掺杂对电荷共享的影响. 研究结果表明:改变p⁺深阱的掺杂浓度对PMOS管之间的电荷共享的影响要远大于NMOS管;通过增加p⁺深阱的掺杂浓度可以有效抑制PMOS管之间的电荷共享. 这一结论可用于指导电荷共享的加固. 关键词： 电荷共享 单粒子效应 +深阱掺杂')" href="#">p⁺深阱掺杂 双极晶体管效应     

ESR response of soda–lime glasses irradiated with gamma radiation in the 0.5–20.0 Gy range

ABSTRACT

ESR readout improvement of gamma-irradiated soda–lime glasses is presented by considering the dose-dependent differences in temperature behaviour of the radiation-induced signal and background signal, and effective difference in g-values of those two signals. Our experimental results demonstrate that the dose-dependent temperature behaviour can improve the ESR signal response for 30–80% in the dose range below 20 Gy by detection at 200?K compared to the room temperature signal readout. The application of improvement can be expected in the low-level dose range where the radiation-induced signal is comparable with an inhomogeneous background signal.     

Research on total-dose hardening for H-gate PD NMOSFET/SIMOX by ion implanting into buried oxide

In this work,we investigate the back-gate I-V characteristics for two kinds of NMOSFET/SIMOX transistors with H gate structure fabricated on two different SOI wafers.A transistors are made on the wafer implanted with Si+ and then annealed in N2,and B transistors are made on the wafer without implantation and annealing.It is demonstrated experimentally that A transistors have much less back-gate threshold voltage shift AVth than B transistors under X-ray total dose irradiation.Subthreshold charge separation technique is employed to estimate the build-up of oxide charge and interface traps during irradiation,showing that the reduced △Vth for A transistors is mainly due to its less build-up of oxide charge than B transistors.Photoluminescence (PL) research indicates that Si implantation results in the formation of silicon nanocrystalline (nanocluster) whose size increases with the implant dose.This structure can trap electrons to compensate the positive charge build-up in the buried oxide during irradiation,and thus reduce the threshold voltage negative shift.     

Effect of iodine doping on the photoconduction behaviour of pristine and high-energy heavy ion-irradiated kapton-H polyimide

The effect of iodine doping on the photoconduction behaviour of pristine and 75 MeV oxygen ion-irradiated (fluence: 3.12×10¹² ions/cm²) kapton-H polyimide film in the visible region has been investigated for different doping hours at various operating temperatures ranging 40–250°C and at different electric fields (40–400 kV/cm). The formation of charge transfer complexes in polymers effectively decreases the trapping sites by handling the charge carriers. A decrease in the photocurrent in ion-irradiated samples at higher exposure time for iodine vapours as compared with pristine samples has been associated with the enhancement in the trapping sites which may deplete the charge carriers and a loss in the photoactive groups owing to radiation-induced demerisation. The evidence of Frankel-type conduction (based on the estimation of Schottky coefficients) mechanism in irradiated samples is observed. A strong dependence of photocurrent on temperature in doped pristine and ion-irradiated samples reconfirms the thermal ionisation process of exciton for photogeneration of charge carriers.     

表面悬挂键导致硅纳米线掺杂失效机理的第一性原理研究

利用第一性原理方法, 本文计算了B/N单掺杂SiNWs, 以及含有表面悬挂键的B/N单掺杂硅纳米线的总能和电子结构, 计算结果表明, 悬挂键的出现会导致单原子掺杂失效. 能带结构分析表明, B/N掺杂的H钝化的SiNWs表现出正常的p/n特性, 而表面悬挂键(dangling binding, DB)的存在会导致p型(B原子)或者n型(N原子)掺杂失效; 其失效的原因主要是因为表面悬挂键所引入的缺陷能级俘获了n型杂质(p型杂质)所带来的电子(空穴); 利用小分子(SO₂)吸附饱和悬挂键可以起到激活杂质的作用, 进而实现Si纳米线的有效掺杂.