Simulation of thermionic emission optimization in femtosecond laser irradiation metal film by two-layer structure

The thermionic emission of the single-layer gold thin film and the two-layer film was assembled by gold padded with other metals (Ag, Cu, and Ni) and irradiated by the femtosecond laser pulse. Additionally, the emission was simulated by a two-temperature model combined with the Richardson–Dushman equation. It was found that the two-layer metal structure can change the electron temperature of the gold surface and control the thermionic emission compared with the single-layer gold film. With the same laser fluence, the two-layer film structure may shorten the duration of thermionic emission, and the duration of the thermionic emission can be further optimized by changing the proportion of thin film thickness with gold layer in the two-layer structure. The result can be especially beneficial in the context of ultrafast electron emission induced by femtosecond laser.     

Heating process and damage threshold analysis of Au film coated on Cu substrate for femtosecond laser

The heating processes of a two-layer film assembly of Au padded with Cu irradiated by femtosecond laser pulse are studied using a two-temperature model. It is found that the chosen substantially influence the energy transport, and consequently the temperature variation, and thermal equilibrium time. At the same laser fluence, the different thickness of gold film leads to a change of gold surface temperature. By choosing the thickness of the gold layer in the two-layer film assemblies, the damage threshold of the gold film can be maximized. The results can be used to optimize the damage threshold of gold coating optical components.     

光学玻璃基底原子层同质材料沉积薄膜光谱及激光诱导损伤特性研究

通过原子层沉积技术在熔石英玻璃表面制备了同质材料的单层SiO₂薄膜,对光学薄膜的物理化学性质和强激光辐照下的激光诱导损伤性能进行了深入研究。实验中采用双叔丁基氨基硅烷（BTBAS）和臭氧（O₃）作为反应前驱体,在熔石英光学元件表面进行了SiO₂薄膜的原子层沉积工艺研究,以不同沉积温度条件制备了一系列膜样品。首先对原子层沉积特性和薄膜均匀性展开了研究,发现薄膜生长厚度与沉积循环次数之间符合线性生长规律,验证了制备薄膜的原子级逐层生长特性,并且表面沉积膜层的均匀性很好,其测得膜厚波动不超过2%。然后针对不同温度条件下沉积的SiO₂薄膜,对其粗糙度及各类光谱特性展开了研究,对比结果表明：样品的表面粗糙度在镀膜后有轻微的降低;薄膜样品在200～1 000 nm范围内具有出色的透过率,均超过90%并逐渐趋近于93.3%,且其透射光谱与在裸露熔石英衬底上测得的光谱没有明显差异;镀膜前后荧光光谱和傅里叶变换红外光谱的差异证实了原子层沉积SiO₂膜中点缺陷（非桥键氧、氧空位、羟基等）的存在,这将会影响薄膜耐损伤性能。最后对衬底和膜样品进行了紫外激光诱导损伤测试,损伤阈值的变化表明熔石英元件表面沉积薄膜后的激光损伤性能有所降低,其零概率损伤阈值从31.8 J·cm-2减小到20 J·cm-2左右,与光谱缺陷情况表征相符合。薄膜中点缺陷部位会吸收紫外激光能量,导致局域温度升高,进而出现激光诱导损伤现象并降低抗激光损伤阈值。在选定的沉积温度范围内,较高温度条件下沉积的SiO₂薄膜其激光诱导损伤性能更好,可以控制沉积温度条件使得元件的抗损伤性能更为接近衬底本身,后续有望通过其他反应参数的优化来获得薄膜抗损伤性能的进一步提升。     

The formation of different structures in the interaction between a single femtosecond laser pulse and a thin Au film

The interactions between femtosecond (fs) laser pulses and a thin Au film deposited on a silica glass substrate were systematically investigated based on experimental data. Different structures, including microholes, nanoholes, and nanobumps, are obtained when pulses with different energies are incident on the surface of a gold film. The experimental results are discussed according to specific experimental parameters. Two physical models were constructed in order to explain the experimental results. The formation of nanoholes in a silica substrate is attributed to etching by higher order harmonic generations (HHG) when the femtosecond laser pulse interacts with the generated plasma layer, while the formation of nanobumps on the surface of an Au film is attributed to the elastic and plastic characteristics of the metal film under laser pulse irradiation.     

Computer simulation of heating of nickel films on two-layer graphene

The behavior of a nickel film on two-layer graphene in the temperature range 300 K ≤ T ≤ 3300 K has been investigated using the molecular dynamics method. The kinetic, structural, and mechanical properties of this film have been compared with the corresponding characteristics of a similar nickel film on single-layer graphene. It has been shown that the second layer of heated graphene plays a stabilizing role in retaining the hexagonal cellular structure of the graphene layer contacting with the metal.     

Optical properties of gold electrode surfaces covered with metal monolayers

The relative reflectivity changes ΔR/R of a gold electrode surface caused by the deposition of monolayers of thallium, copper and lead from electrolytic solutions at underpotentials have been studied in situ in the photon energy range between 1.8 and 5.2 eV. The optical constants of the surface layer giving rise to this measured reflectivity change have been calculated and compared to the results of the electroreflectance effect on bare gold surfaces. It is shown that the reflectance change observed during the monolayer deposition is to first order due to a change in the gold electrode surface layer and not to absorption processes in the monolayer itself. The latter ones cause a fine structure superimposed to the substrate spectrum. The relatively strong change in the gold surface optical constants upon metal monolayer deposition is explained in terms of an enhanced electroreflectance effect due to the partially ionic character of the metal adatoms, which alters the free electron concentration in the substrate surface layer. Electroreflectance spectra obtained on gold surfaces covered with a monolayer of thallium compare favourably with dielectric loss functions computed for charged gold surfaces. This supports the assumption that the reflectivity changes observed upon metal monolayer deposition are mostly due to changes in the optical properties of the substrate metal surface.     

聚甲基丙烯酸甲酯间隔的金纳米立方体与金膜复合结构的表面增强拉曼散射研究

金属纳米颗粒与金属薄膜的复合结构由于其局域表面等离子体和传播表面等离子体间的强共振耦合作用,可作为表面增强拉曼散射(SERS)基底,显著增强吸附分子的拉曼信号.本文提出了一种聚甲基丙烯酸甲酯(PMMA)间隔的90 nm金纳米立方体与50 nm金膜复合结构的SERS基底,通过有限元方法数值模拟,得到PMMA的最优化厚度为15 nm.实验制备了PMMA间隔层厚度为14 nm的复合结构,利用罗丹明6G (R6G)为拉曼探针分子, 633 nm的氦氖激光器作为激发光源,研究了复合结构和单一金纳米立方体的SERS效应,发现复合结构可以使探针分子产生比单一结构更强的拉曼信号.在此基础上,研究了不同浓度金纳米立方体水溶液条件下复合结构中R6G的拉曼光谱.结果表明,当金纳米立方体水溶液浓度为5.625μg/mL的条件下复合结构中R6G的拉曼信号最强,且可测量R6G的最低浓度达10~(–11) mol/L.     

ZrO2/SiO2溶胶-凝胶薄膜膜层间的渗透行为

 分别以丙醇锆和正硅酸乙酯为原料，采用溶胶-凝胶工艺制备了性能稳定的ZrO₂和SiO₂溶胶。用旋转镀膜法在K9玻璃上分别制备了单层SiO₂薄膜、单层ZrO₂薄膜、ZrO₂/ SiO₂双层膜和SiO₂/ZrO₂双层膜。采用原子力显微镜观察了薄膜的表面形貌，用椭偏仪测量薄膜的厚度与折射率，用紫外-可见光分光光度计测量了薄膜的透射率。对薄膜的透射光谱和椭偏仪模拟的数据进行分析，发现SiO₂/ZrO₂双层膜之间的渗透十分明显，而ZrO₂/SiO₂双层膜之间几乎不发生渗透。利用TFCalc模系设计软件,采用三层膜模型对薄膜的透射率进行模拟，得出的透射曲线与用紫外-可见光分光光度计测量的透射曲线十分符合。     

不同沉积参量下ZrO2薄膜的微结构和激光损伤阈值

ZrO2采用X射线衍射(XRD)技术分析了不同充氧条件和沉积温度对ZrO2溥膜组成结构的影响,并对不同工艺下制备的薄膜的表面粗糙度和激光损伤阈值进行了测量。结果发现随着氧压的升高,ZrO2溥膜将由单斜相多晶态逐渐转变为非晶态结构,而随着基片温度的增加,溥膜将由非晶态逐渐转变为单斜相多晶态。同时发现随着氧压升高晶粒尺寸减小,而随着沉积温度增加,晶粒尺寸增大。氧压增加时工艺对表面粗糙度有一定程度的改善,而沉积温度升高,工艺对表面粗糙度的改善不明显。晶粒尺寸大小变化与表面粗糙度变化存在对应关系。激光损伤测量表明,氧压条件和沉积温度对ZrO2薄膜的抗激光损伤能力有着较大影响。     

ZrO_2/SiO_2溶胶-凝胶薄膜膜层间的渗透行为

分别以丙醇锆和正硅酸乙酯为原料,采用溶胶-凝胶工艺制备了性能稳定的ZrO2和SiO2溶胶。用旋转镀膜法在K9玻璃上分别制备了单层SiO2薄膜、单层ZrO2薄膜、ZrO2/SiO2双层膜和SiO2/ZrO2双层膜。采用原子力显微镜观察了薄膜的表面形貌,用椭偏仪测量薄膜的厚度与折射率,用紫外-可见光分光光度计测量了薄膜的透射率。对薄膜的透射光谱和椭偏仪模拟的数据进行分析,发现SiO2/ZrO2双层膜之间的渗透十分明显,而ZrO2/SiO2双层膜之间几乎不发生渗透。利用TFCalc模系设计软件,采用三层膜模型对薄膜的透射率进行模拟,得出的透射曲线与用紫外-可见光分光光度计测量的透射曲线十分符合。     

激光等离子体效应对薄膜损伤特性的影响

高能激光的发展对光学元件的抗损伤能力要求越来越高,其中光学薄膜是最薄弱的环节之一。实验研究了激光的聚焦位置对石英基片上HfO2/SiO2减反射薄膜损伤形貌的影响,研究发现:激光等离子体的高压冲击波对薄膜产生强烈的冲击剥离效应,其压强随膨胀半径的增加而迅速减小。激光等离子体光谱的辐射波长小于入射激光波长,这会增强薄膜对辐射光能量的吸收;位于深紫外波段、能量大于HfO2薄膜带隙的光子能量,将被薄膜直接吸收,从而加剧薄膜的电离破坏。激光等离子体的辐射效应和冲击波效应的共同作用决定了薄膜的损伤形貌。当激光聚焦到薄膜表面时,冲击波压强极大会使薄膜发生大面积的电离去除,同时基底发生击穿;当两者距离大到一定距离时,冲击波只会使得中心处小面积薄膜发生剥离,基底未出现断裂。     

HfO_2单层膜的吸收和激光损伤阈值测试

薄膜吸收是降低膜层激光损伤阈值的重要原因,为了研究薄膜吸收对激光损伤阈值的影响,对HfO2单层膜在1 064 nm处的吸收及其在不同波长激光辐照下的损伤阈值进行了测试和分析。研究结果表明:薄膜的激光损伤阈值由薄膜吸收平均值(决定于薄膜中缺陷的种类和数量)和吸收均匀性(决定于薄膜中缺陷的分布)共同决定;根据HfO2单层膜在1064 nm波长处的吸收值,不但可以定性判断薄膜在1 064 nm波长,而且还可以判断在其它波长激光辐照下的抗激光损伤能力。     

Temperature effects in the photolytic LCVD of platinum

The photolytic laser chemical vapor deposition (LCVD) rate of platinum from its bishexafluoroacetylacetonate precurser has been measured in situ and in real time. Optical transmission of the 350 nm photolysis light through the deposited platinum film and a transparent glass substrate is monitored and analysed in detail. From these measurements, as well as measurements of the reflected light, the fraction of the laser beam power absorbed in the metal film is found. The latter allows a simple estimate of the laser-induced temperature rise at the metal surface. It is shown that even rather small temperature increases of the order of several tens of degrees centigrade can completely change the photolysis mechanism and hence drastically influence the photolytic LCVD rate. A simple modification of Lax's model, in which a temperature dependent thermal conductivity of the substrate is introduced, is used to describe the laser-induced heating of a strongly absorbing thin metal film on a glass substrate.     

Laser-induced plasma-assisted ablation of fused quartz using the fourth harmonic of a Nd+:YAG laser

+ :YAG laser (266 nm) is reported. With the assistance of plasma resulting from laser irradiation on a metal target, the fused-quartz substrate is easily etched by the 266-nm laser beam in spite of the fact that the substrate is transparent to this wavelength. In contrast, no ablation takes place without the metal target, but damage is generated on the substrate surface. The ablated region is observed by optical microscopy and scanning probe microscopy (SPM), which reveal a fine grating structure (line spacing of 20 μm) without any severe damage. A series of experiments on the dependence of the ablation rate and the threshold laser fluence on ablation parameters, such as laser fluence, the number of pulses, and the distance between the fused quartz and the metal target is performed. On the basis of the results, three possible mechanisms of direct plasma interaction, plasma heating, and metal film deposition are discussed. Received: 27 February 1998/Accepted: 5 June 1998     

金刚石薄膜红外椭圆偏振参量的计算与拟合

用红外椭圆偏振仪对热丝化学气相沉积法制备的金刚石薄膜的光学参量进行了测量。由于表面状态和界面特性的差异，分别对镜面抛光硅片和粗糙氧化铝基片上的金刚石薄膜建立了不同的模型，并在此基础上进行了测试结果的计算拟合。为了综合反应诸如表面粗糙度等表面界面因素对测试结果的影响，根据衬底特性将表面层和界面层分离出来，并采用Bruggeman有效介质方法对它们的影响进行了近似处理。结果表明，硅衬底上金刚石薄膜的椭偏数据在模型引入了厚度为879nm的表面粗糙层之后能得到很好的拟合。而对于氧化铝衬底上的金刚石薄膜而言，除了在薄膜表面引入了粗糙层之外，还必须在衬底和金刚石界面处加入一层由体积分数为0．641的氧化铝、体积分数为0．2334的金刚石和体积分数为0．1253的空隙组成的复合过渡层(厚度995nm)，才能使计算值与实验参量很好地吻合。     

A facile high‐performance SERS substrate based on broadband near‐perfect optical absorption

Plasmonic systems based on metal nanoparticles on a metal film with high optical absorption have generated great interests for surface‐enhanced Raman scattering (SERS). In this study, we prepare a broadband‐visible light absorber consisting Au nanotriangles on the surface of a continuous optically opaque gold film separated with a dielectric SiO₂ layer, which is a typical metal‐insulator‐metal (MIM) system, and demonstrate it as an efficient SERS substrate. The MIM nanostructure, prepared using nanosphere lithography with a very large area, shows a broadband with absorption exceeding 90% in the wavelength regime of 630–920 nm. We observe an average SERS enhancement factor (EF) as large as 4.9 × 10⁶ with a 22‐fold increase compared to a single layer of Au nanotriangles directly on a quartz substrate. A maximum SERS EF can be achieved by optimizing the thicknesses of the dielectric layer to control the optical absorption. Owing to the simple, productive, and inexpensive fabrication technique, our MIM nanostructure could be a potential candidate for SERS applications. Copyright © 2015 John Wiley & Sons, Ltd.     

Self-organization of thin metal films by irradiation with nanosecond laser pulses

Modifications in thin metal films under intensive laser irradiation were studied. Gold, silver, copper, chromium and aluminum films with the thickness of 100 nm were deposited on the glass substrate. Back-side irradiation through the substrate with a burst of nanosecond pulses tightly focused to a line was applied. The film removal threshold with a single pulse F_th was estimated for every material and laser fluence was kept above it in the range of 1.5-3 F_th during experiments. Diverse behavior of the films depending on the metal, the shift between pulses and laser fluence was observed. In chromium, the regular structures were developed in a quite wide range of processing parameters. In gold, three kinds of ripples were observed: transverse (similar to ripples in chromium), longitudinal and a structure of ripples oriented at 60° to each other. The combination of physical properties facilitated the regular assembly of the molten metal in chromium and to some extent in gold.     

光学膜层激光损伤阈值均匀性的实验研究

 镀制了多种氧化物介质薄膜。用R-on-1方法测定了膜层的激光损伤阈值。引入数据处理方法，对测试数据进行分析。结果表明，基片清洗后，若放置一段时间再镀膜，则会影响到镀膜后膜层损伤阈值的均匀性，但对损伤阈值自身大小没有影响。测试激光参数对阈值均匀性也有一定影响。     

Patterning thin metallic film via laser structured weakly bound template

A weakly bound buffer material is structured on a surface by interfering low power laser beams, as a template for patterning metallic thin films deposited on top. The excess buffer material and metal layer are subsequently removed by a second uniform laser pulse. This laser pre-structured buffer layer assisted patterning procedure is demonstrated for gold layer forming a grating on a single crystal Ru(1 0 0) under UHV conditions, using Xe as the buffer material. Millimeters long, submicron (0.65 μm) wide wires can be obtained using laser wavelength of 1.064 μm with sharp edges of less than 30 nm, as determined by AFM. This method provides an all-in-vacuum metallic film patterning procedure at the submicron range, with the potential to be developed down to the nanometer scale upon decreasing the patterning laser wavelength down to the UV range.     

悬空石墨烯对其表面金纳米膜形貌的影响

石墨烯与金属间的相互作用是石墨烯器件研究中的关键问题之一,其涉及石墨烯器件的电学接触、锂离子电池石墨烯电极、石墨烯金属光学等方面.本文重点研究了不同层数的悬空石墨烯表面金纳米膜退火前后的形貌演化过程,观测到两个重要的现象:1)排除基底影响后的悬空石墨烯层数可以通过金纳米膜的形貌特征进行确认,但其随层数的变化趋势与有基底支撑的石墨烯正好相反;2)退火处理后的悬空石墨烯上的金纳米膜形貌演化过程具有类似水滴在荷叶上的行为.对悬空石墨烯表面金属纳米膜在退火前后的形貌变化规律及其现象背后的物理机理进行了详细的讨论和理论解释.