小尺寸低折射率差硅基二氧化硅阵列波导光栅

随着阵列波导光栅(Arrayed Waveguide Grating,AWG)型器件在光通信系统中的大规模应用,对低成本AWG芯片的需求越来越多.在各种降成本方案中,减小AWG芯片的尺寸是最有效的方法之一.本文介绍了一种新型小尺寸低折射率差硅基二氧化硅AWG的设计.在该AWG中,输入波导/输出波导与平板波导连接的部分制...     

O波段8通道硅基二氧化硅平坦化阵列波导光栅的设计及制备

设计并制作了一款应用于IEEE 200/400GbE标准802.3bs的阵列波导光栅.该阵列波导光栅使用2.0%的超高折射率差硅基二氧化硅材料,使得芯片尺寸及损耗较小.为了获得平坦化的接收光谱,将输出波导进行展宽,采用多模波导结构,激发若干个高阶模,数个模式叠加使得原本高斯状的光谱顶部产生平坦化,形成箱形接收光谱.设计的阵列波导光栅的中心波长为1 291.10nm,通道间隔为800GHz,芯片尺寸为11mm×4mm.经过等离子增强化学气相沉积和感应耦合等离子刻蚀工艺制备了芯片,测试结果表明最小的插入损耗为-3.3dB,相邻通道间串扰小于-20dB,单通道1dB带宽在2.12~3.06nm范围,实现了良好的解复用和平坦化效果,在实际光通信系统中有一定的实用价值.     

单侧耦合16通道100GHz硅基二氧化硅阵列波导光栅的研制

介绍了一种新型单侧耦合16通道、100GHz通道间隔的硅基二氧化硅阵列波导光栅(AWG)。通过增加一个Y分支波导结构,将AWG的输入、输出波导等间距整齐排列,仅用一个光纤阵列(FA)就可以对AWG器件进行耦合封装。这种AWG的结构设计可有效地减小器件尺寸和增加波导结构的弯曲半径,可减少器件的抛光和耦合时间,可降低器件的成本。     

聚合物/二氧化硅混合型无热化阵列波导光栅参量的优化

研究一种新型无热化聚合物/二氧化硅混合波导组成的硅基二氧化硅阵列波导光栅.阵列波导光栅对温度的依赖性受波导物质的折射率和波导芯的尺寸影响.通过调节这些参量就可以减小温度对阵列波导光栅的影响.优化得到混合型阵列波导光栅在温度20~70℃范围内波谱漂移小于常规型 AWG结构的5%.     

硅基二氧化硅波导阵列相位控制芯片

设计并制作了硅基二氧化硅波导阵列相控芯片,该芯片由分束单元、相位调制单元、输出波导阵列三部分构成,分束单元采用三级1×2的光分束器级联而成,相位调制单元采用热光调制方式,输出部分包含8根密集阵列波导.8根波导输出的光在远场发生干涉,形成扫描光束,加电后通过二氧化硅热光效应,折射率变化0.027%(0.000 4)时,扫描光束偏转5.5°.该波导相控阵列采用2.0%超高折射率差的硅基二氧化硅波导为材料,经等离子体增强化学气相沉积法进行材料生长及退火,再经电感耦合等离子体干法刻蚀技术进行刻蚀,最后切割抛光制作而成.测试结果表明,静态下该芯片8条输出阵列波导形成清晰干涉光斑,在电压达到130V时,热调制相位后,光斑移动5.5°.     

阵列波导光栅解调系统光电集成中Si纳米线AWG的设计

设计了一种阵列波导光栅解调集成系统中的8通道Si纳米线阵列波导光栅波分复用器。根据材料的折射率设计了单模波导截面尺寸,利用光束传播法对所设计阵列波导光栅进行了模拟。结果表明,器件尺寸为200μm×219μm,远小于目前技术较成熟的硅基SiO2的尺寸,光功率分布符合高斯分布,信道间隔为1.8nm,串扰小于-21dB。对小尺寸AWG的设计具有参考意义。     

16×0.8nm硅基二氧化硅阵列波导光栅设计

给出了更为合理的阵列波导光栅(AWG)的设计原则。在设计时兼顾了输出谱的非均匀性Lu和输出通道数N的要求,克服了设计中可能引起通道数N丢失和不考虑输出谱非均匀性Lu的缺点。用该方法设计了折射率差为0 75%和16×0 8nm的硅基二氧化硅AWG。采用广角有限差分束传播方法(FD BPM)对所设计的AWG进行了输出谱的模拟,得到了插损为 1.5dB、串扰为 48dB、通道非均匀性约为1dB的AWG,设计指标达到了商用要求。     

阵列波导光栅中心波长温度稳定性的研究

阵列波导光栅中心波长的温度不稳定性成为限制其应用的主要原因。为了设计温度不敏感阵列波导光栅,结合弹性多层板热应力理论和应力集中效应给出掩埋波导芯层应力的解析解,利用等效折射率法计算阵列波导的有效折射率及其温度系数,考虑波导材料折射率和波导长度随温度的变化得到了硅基二氧化硅阵列波导光栅中心波长的温度系数。并研究了贴有应力板的阵列波导光栅中心波长的温度特性,结果表明在芯片底部贴有0.37 mm厚的铝板时,TE模和TM模中心波长的温度系数分别是5.9 pm/℃和8.0 pm/℃,下降到传统阵列波导光栅中心波长温度系数的一半。     

基于多模干涉耦合器的阵列波导光栅设计研究

研究了基于多模干涉(MMI)耦合器的阵列波导光栅(AWG).通过模式传输分析方法,分析了多模干涉耦合器及阵列波导;并给出在硅基底上的二氧化硅波导上四通道100 GHz-AWG普通结构和紧凑结构的设计结果.     

消除嵌入半波片的阵列波导光栅残留偏振敏感性的研究

提出在阵列波导光栅(AWG)中采用光学非对称平板波导,以消除嵌入半波片的阵列波导光栅中残留偏振敏感性的解决方案。利用传输函数分析在阵列波导中间插入半波片的偏振模式转换过程;以工艺误差使半波片位置不能居中的情形为实例,利用材料的热光效应,调节输入、输出平板波导的双折射率,形成光学非对称平板波导,从而消除了残留的偏振敏感性。针对聚合物材料AWG的模拟结果显示,当输入、输出平板波导的温度差为24°C时,已可消除32.43 pm的残留偏振敏感性。进一步研究发现,当输入与输出平板波导温度改变量相等但符号相反时,能够很好地避免因温度改变而引起的中心波长漂移。该方法具有结构简单、温控可调等优点,而且还可弥补其他因素造成的因嵌入半波片产生的残留偏振敏感性。     

Parameter optimization and structural design of polymer arrayed waveguide grating multiplexer

First some important parameters are optimized for the structural design of a polymer arrayed waveguide grating (AWG) multiplexer around the central wavelength of 1.55 μm with the wavelength spacing of 1.6 nm. These parameters include the thickness and width of the guide core, mode effective refractive indices and group refractive index, diffraction order, pitch of adjacent waveguides, length difference of adjacent arrayed waveguides, focal length of slab waveguides, free spectral range (FSR), the number of input/output (I/O) channels, and that of arrayed waveguides. Then the bent angles, radii and lengths of all the input/output channels and arrayed waveguides are determined. Finally, a schematic waveguide layout of this device is presented, which contains 2 slabs, 11 input channels, 11 output channels, and 91 arrayed waveguides.     

A novel asymmetric arrayed waveguide grating with different lengths of input/output slabs

A novel arrayed waveguide grating (AWG) with asymmetric configuration is proposed. In this configuration, the length of the output slab region, the width and the spacing of the output waveguides are unequal to the corresponding parts of the input ones. Compared to a conventional symmetric AWG, the asymmetric AWG proposed in this paper has a smaller size without degrading its performance The analytic method used in a conventional symmetric AWG is extended to the asymmetric AWG. A design example of an asymmetric AWG with low insertion loss, low channel crosstalk and wide bandwidth is presented.     

A concise design of 16 × 16 polymer AWG with low insertion loss and crosstalk

In this paper, a 16-channel arrayed waveguide grating multiplexer (AWG) has been designed using polymer materials with 1.5% refractive index difference. Certain important parameters are optimized using the coupling mode theory and Beam Propagation Method. The factors that affect the insertion loss and the crosstalk are analyzed in this paper. In our design we introduced the parabolic taper structure and evaluated the suitable number of the arrayed waveguide, obtaining a total insertion loss of 2.19 dB. For obtaining a low crosstalk we evaluate the pitches of adjacent input/output waveguides ΔX and arrayed waveguides d as different values. We chose the value of ΔX about 2.5 times of d by enlarging the pitches of adjacent input/output waveguides. The crosstalk of the designed AWG is lower than −40 dB.     

Beam Steering Type of 1 : 4 Optical Switch Using Thermo-Optic Effect

We propose a beam steering type optical switch employing a phase shifter. It consists of collimating waveguide mirrors, an arrayed-waveguide which has deep trenches incorporating polymer materials, and input/output waveguides. The incident light is guided to the front mirror, where it is then collimated, and input to the arrayed waveguide. The number of trenches filled with polymer linearly increases in order. The refractive index of the polymer can be controlled with temperature, and the propagation direction of the output light from the arrayed waveguide can also be controlled. A switch with 15 waveguides in the array has been fabricated. The chip size is about 2:5 × 9:0 mm², the insertion loss is 10 dB, and the extinction ratio is about 10–13 dB.     

Three-dimensional hybrid modeling based on a beam propagation method and a diffraction formula for an AWG demultiplexer

An efficient and accurate three-dimensional (3D) hybrid modeling, which combines a 3D beam propagation method (BPM) and the two-dimensional (2D) Kirchhoff–Huygens diffraction formula, is developed to simulate the field propagation in an arrayed waveguide grating (AWG) demultiplexer. The 2D Kirchhoff–Huygens diffraction formula is used for the simulation of the light propagation in the free propagation regions (FPRs). A 3D BPM in a polar coordinate system is used to simulate the light propagation in the transition region between the input FPR and the arrayed waveguides so that the coupling coefficients for the arrayed waveguides are calculated conveniently and accurately. For the simulation in the transition region between the arrayed waveguides and the output FPR, only the central arrayed waveguide and several adjacent ones are needed in the computational window of a standard BPM and thus the computation efficiency is improved. Finally, a flat-top AWG is designed and fabricated to verify the reliability of the present simulation method. The calculated and measured spectral responses are in a good agreement.     

A novel wavelength dispersive device with a dispersive element based on staircase-like straight and parallel arrayed waveguides

We propose a new type of arrayed waveguide grating (AWG) multiplexer/demultiplexer based on modified group refractive index. This device is composed by an array of straight and parallel waveguides of equal length and each waveguide consist of two sections with different width. The length of the two sections are changed from a waveguide to the adjacent one following a linear dependence resulting in a wavelength dispersive waveguide array. An example of the device design for silicon-on-insulator (SOI) platform is provided and numerical simulations have been carried out for various arrayed waveguide parameters. We demonstrate that the group index modification can be used for tailoring device dispersion properties, and that it can also result in new dispersion characteristics predicted numerically not observed in conventional AWGs. Additional advantages are that the demultiplexer does not necessarily require bending waveguide sections as in a conventional AWG (de)multiplexers, and thus yields highly compact devices with potentially very low insertion loss. Channel spacing of 1 nm have been predicted for sub-micron waveguides sizes. In this paper it is also proposed a novel wavefront converter based on waveguide array lens-like element with waveguides broadened sections. Numerical results for different input/output geometries are analized.     

Analytical modeling of loss characteristics of a polymer arrayed waveguide grating multiplexer

Theoretical analysis is performed for the loss characteristics of a polymer arrayed waveguide grating (AWG) multiplexer around the central wavelength of 1.55 μm with the wavelength spacing of 1.6 nm. The total loss of the device includes the diffraction loss in the input and output (I/O) slab waveguides, bent loss caused by the AWG and I/O channels, leakage loss resulted from the high refractive index substrate, and propagation loss due to the absorption and scattering of the materials of the device. The effects of some structural parameters on the loss characteristics are investigated and discussed. The computed results show that when we select the core thickness as 4 μm, core width as 6 μm, pitch of adjacent waveguides as 15.5 μm, diffraction order as 50, the number of the arrayed waveguides as 91, that of the I/O channels as 17, confined layer thickness between the core and the substrate as 10 μm, distance between the focal point and the origin as 5500 μm, and central angle between the central waveguide and the x-axis (i.e. the vertical of the symmetrical line of the device) as 60°, the total loss of the device can be dropped to the range 3.79–7.93 dB.     

An Analytical Model for the Coupling Between the Array Waveguides in AWGs and Star Couplers

The purpose of this paper is to present an accurate analytical solution for the coupling between the array waveguides in arrayed waveguide grating (AWG) devices and star couplers. The results of this analysis will be useful for developing numerical models of AWGs and star couplers, as well as other optical waveguide components containing arrays of coupled waveguides.     

High-resolution liquid refractive-index sensor using reflective arrayed-waveguide grating

A high-resolution sensor for measuring the refractive index of liquids using a reflective arrayed-waveguide grating (AWG) is proposed. The refractive index of a liquid placed in the groove of the arrayed region is measured via the shift of the maximum intensity in the imaging plane of the AWG owing to the phase change in the region. The refractive index can be monitored in real time by measuring the power ratio between two output waveguides of the AWG with a narrow-band source. A mathematical model based on Fourier optics and wave optics is established. A fitting formula for the relationship between the power ratio and the refractive index of liquid is derived. The results of the study show that the proposed method can eliminate the effects of instability of the light source and the inner loss of the system and provide a refractive index resolution of 10⁻⁷.