用SAXS和XRD方法研究TiO2纳米颗粒微观结构

用溶胶-凝胶方法制备了TiO₂纳米样品,并对该样品在300℃到800℃温度区域进行了退火处理.应用同步辐射X射线粉末衍射(XRD)方法研究了经不同热处理温度的TiO₂纳米颗粒的结构相变.应用同步辐射小角X射线散射(SAXS)方法研究了TiO₂纳米颗粒的表面分形与界面特性.得到纳米颗粒粒度与退火温度的变化规律,讨论了表面界面特征与相变的关系. 关键词： X射线小角散射 X射线衍射 2纳米颗粒')" href="#">TiO₂纳米颗粒     

无机纳米氧化铝/聚酰亚胺复合膜的表征

研究无机纳米掺杂有机复合薄膜力学性能、热学性能、电学性能变化规律的关键在于快速、准确地掌握复合膜中纳米无机物的掺入量及其颗粒大小和分布状态。文章通过X射线荧光光谱、红外光谱、扫描电子显微镜、原子力显微镜等测试方法对无机纳米氧化铝/聚酰亚胺复合薄膜的三氧化二铝掺入量、化学结构及表面形貌进行了表征分析(该材料为本研究室制备的)。结果表明:聚酰亚胺有机相与三氧化二铝无机相之间形成了键联型复合杂化体系;三氧化二铝粒子呈纳米级均匀地分散在聚酰亚胺基体中,颗粒直径均在50nm以下;利用X射线荧光光谱法测定出三氧化二铝的质量含量为7·9%,利用该方法定性、定量分析无机纳米掺杂有机复合薄膜材料中的无机组分具有样品不需要预处理、不需要加载电荷(可用于分析绝缘材料)、非接触性、非破坏性、速度快、准确度高等优点。     

Al2O3薄膜/纳米Ag颗粒复合结构的光吸收谱及增强Raman散射光谱研究

Al₂O₃介质薄膜与纳米Ag颗粒构成的复合结构,被应用于表面增强Raman散射探测实验中,其中Al₂O₃介质薄膜对纳米Ag颗粒的吸收谱及增强Raman散射光谱的影响被特别关注.该复合结构的光学特性表征出纳米Ag颗粒的偶极振荡特性.从光吸收谱中可以看到,其共振吸收谱随Al₂O₃介质薄膜厚度增加而在整个谱域上发生红移,表明纳米Ag颗粒的周围介电常数随Al₂O₃介质薄膜厚度的增加而增大.采用罗丹明6G作为探针原子,6个Raman特征峰的平均增益值作为表征表面增强Raman散射衬底增益程度的量度.实验结果表明,Al₂O₃介质薄膜层的引入提高了纳米Ag颗粒的衬底介电常数,并引起了散射共振的增强,从而使表面增强Raman散射强度提高. 关键词： 纳米Ag薄膜 共振吸收 表面增强Raman散射 介电常数     

快速响应恢复的PI-SiO2/NiI2比色湿度传感器

有机-无机杂化型比色湿度传感器可通过电学信号和颜色变化获取环境湿度,并因其特征颜色区分度高、稳定性好、制备工艺简单等优点,在湿度监测领域具有广阔的应用前景,但其通常响应恢复时间长,从而不利于湿度实时监测.本文在聚酰亚胺(PI)-碘化镍(NiI₂)有机无机杂化材料中掺杂纳米SiO₂微球制备得到PI-SiO₂/NiI₂复合薄膜及比色湿度传感器,对其表面形貌和湿敏特性进行了研究.结果显示, PI-SiO₂/NiI₂薄膜具有蜂巢状的表面形貌,传感器的特征颜色显著,湿度响应时间小于1.5 s,恢复时间小于18 s.研究表明,纳米SiO₂微球掺杂能够较为显著地改善有机-无机杂化型比色湿度传感器的响应恢复特性,这对于传感器性能的提升具有一定参考意义.     

Cu60Zr30Ti10非晶合金弛豫和晶化过程的小角X射线散射研究

应用小角X射线散射技术研究了Cu₆₀Zr₃₀Ti₁₀非晶合金从300到813 K之间微结构的演化情况.发现在淬火状态下Cu₆₀Zr₃₀Ti₁₀非晶合金中存在直径30 nm左右的富Cu区.非晶的结构弛豫包括573 K之前的低温结构弛豫和573 K到玻璃转变温度的高温结构弛豫，弛豫的结果是产生含有有序原子团簇的富Cu区，这些有序原子团簇的富Cu区是随后晶化过程中晶核产生的基础.Porod曲线分析表明，晶化生成的纳米体心立方CuZr相和基体之间有明锐的界面. 关键词： 小角X射线散射 非晶合金 结构弛豫 晶化     

单晶Si表面离子束溅射沉积Co纳米薄膜的研究

采用离子束溅射沉积法，在单晶Si基片上制备了不同厚度(1—100nm)的Co纳米薄膜.利用原子力显微镜、X射线光电子能谱(XPS)仪和X射线衍射仪对不同厚度的Co纳米薄膜进行了分析和研究.结果表明：当薄膜厚度为1—10nm时，沉积颗粒形态随薄膜厚度增加将由二维生长的细长胞状过渡到多个颗粒聚集成的球状.当膜厚大于10nm时，小颗粒球聚集成大颗粒球，颗粒球呈现三维生长状态.表面粗糙度随膜厚的增加呈现先增加后减小的趋势，在膜厚为3nm时出现极值.XPS全程宽扫描和窄扫描显示：薄膜表面的元素成分为Co，化学态分别 关键词： 离子束沉积 纳米薄膜 X射线光电子能谱 X射线衍射     

Au/SiO2纳米多层薄膜的制备及其性质表征

利用多靶磁控溅射技术制备了Au/SiO₂纳米颗粒分散氧化物多层复合薄膜.研究了在保持Au单层颗粒膜沉积时间一定时薄膜厚度一定、变化SiO₂的沉积时间及SiO₂的沉积时间一定而改变薄膜厚度时，多层薄膜在薄膜厚度方向的微观结构对吸收光谱的影响.研究结果表明：具有纳米层状结构的Au/SiO₂多层薄膜在560 nm波长附近有明显的表面等离子共振吸收峰，吸收峰的强度随Au颗粒的浓度增加而增强，在Au颗粒浓度相同的情况下，复合薄膜 关键词： 2纳米复合薄膜')" href="#">Au/SiO₂纳米复合薄膜 多靶磁控溅射 吸收光谱 有效介质理论     

高氢稀释制备微晶硅薄膜微结构的研究

采用高氢稀硅烷热丝化学气相沉积方法制备氢化微晶硅薄膜.其结构特征用Raman谱，红外透射谱，小角X射线散射等来表征.结果表明微晶硅的大小及在薄膜中的晶态比χ_c随氢稀释度的提高而增加.而从红外谱计算得到氢含量则随氢稀释度的增加而减少.小角X射线散射结果表明薄膜致密度随氢稀释度的增加而增加.结合红外谱和小角X射线散射的结果讨论与比较了不同相结构下硅网络中H的键合状态.认为随着晶化的发生和晶化程度的提高H逐渐移向晶粒表面，在硅薄膜中H的存在形式从以SiH为主向SiH₂ 关键词：     

PCL/SiO2杂化纳米相微结构与晶态成核生长特性

应用扫描电子显微镜、广角X射线衍射和差示扫描量热手段研究了有机高分子/无机组分间以物理次价力(氢键)键合的高分子量PCL/SiO2杂化材料纳米相微结构和PCL高分子链在该微结构环境中的结晶成核生长特性及其影响因素.研究结果表明:杂化体系中高分子/无机组分间的微相分离尺度在纳米数量级,高分子微区的平均相畴尺寸在70nm左右,无机相形态呈现不规则的颗粒状.两相均匀分布程度与体系中组分间的氢键键合强度有关.PCL杂化后结晶度减小,对应的微晶尺寸明显改变,平衡熔点随无机组成含量的增加而下降.高分子链在晶核表面折叠形成结晶结构所需的能量增加.这一结果归因于无机非晶SiO2和键合强度的影响.     

AlN/Si3N4纳米多层膜的外延生长与力学性能

采用射频磁控溅射方法制备单层AlN, Si₃N₄薄膜和不同调制周期的AlN/Si₃N₄纳米多层膜.采用X射线衍射仪、高分辨透射电子显微镜和纳米压痕仪对薄膜进行表征.结果发现,多层膜中Si₃N₄层的晶体结构和多层膜的硬度依赖于Si₃N₄层的厚度.当AlN层厚度为4.0nm、 Si₃N₄层厚度 关键词： 3N₄纳米多层膜')" href="#">AlN/Si₃N₄纳米多层膜 外延生长 应力场 超硬效应     

Analysis of mesoporous thin films by X-ray reflectivity, optical reflectivity and grazing incidence small angle X-ray scattering

It is well-established that X-ray reflectivity (XR) is an invaluable tool to investigate the structure of thin films. Indeed, this technique provides under correct analysis, the electron density profile of thin films in the direction perpendicular to the substrate. For thin films that exhibit lateral ordering at the nanometer scale, grazing incidence small angle X-ray scattering (GISAXS) ideally complements the XR technique to measure the scattering in off-specular directions. As typical examples, XR and GISAXS data of mesoporous silica thin films and porous materials are presented. The analysis of the XR curve allows to determine the porosity of the film. We also show that the combination of X-ray and visible optical reflection provides information about the index of refraction of thin films. Finally we report how capillary condensation of water can be monitored by XR and GISAXS.     

X-ray metrology for advanced silicon processes

X-ray reflectivity (XRR), X-ray fluorescence (XRF) and small angle X-ray scattering (SAXS) techniques are used to the monitoring of Cu/porous low κ processes, which are developed for the next generation (≤65 nm) integrated circuits. Sensitivity of XRR and XRF is sufficient to detect drifts of the copper barrier layer, copper seed layer and Cu CMP (chemical-mechanical polishing) processes. Their metrology key parameters comply with production requirements. SAXS allows determining the pore structure of low κ films: average pore size and pore size distribution.     

GISAXS and SAXS studies on the spatial structures of Co nanowire arrays

The spatial structures of magnetic Co nanowire array embedded in anodic aluminium membranes were investigated by grazing incidence small angle X-ray scattering (GISAXS) and conventional small angle X-ray scattering (SAXS) techniques. Compared with SEM observation, the GISAXS and SAXS measurements can get more overall structural information in a large-area scale. In this study, the two-dimensional GISAXS pattern was well reconstructed by using the IsGISAXS program. The results demonstrate that the hexagonal lattice formed by the Co nanowires is distorted (a ≈ 105 nm, b ≈ 95 nm). These Co nanowires are isolated into many structure domains with different orientations with a size of about 2 μm. The SAXS results have also confirmed that the nanopore structures in the AAM can be retained after depositing Co nanowires although the Co nanowires can not completely but only just fill up the nanopores. These results are helpful for understanding the global structure of the Co nanowire array.     

Investigation of surface heterogeneity in thermally treated controlled porous glasses and systems silica gels/borate crystals by means of the SAXS method

Heating of controlled porous glass (CPG) in the temperature range 400–700°C leads not only to a dehydroxylation process of the surface but also brings about a diffusion of the boron atoms remaining in the silica network of CPG towards the glass surface. Some authors assume that a along thermal exposure can cause the formation of B₂O₃ crystals in the pores. In this paper the CPGs possessing different mean pore diameters before and after their thermal treatment were investigated by the SAXS (small angle X-ray scattering) method. The SAXS method is very useful in such cases because there are two sources of X-ray scattering: pores in glass and crystallites of the borate phase. The presence of these two sources is responsible for the change of the intensity of small angle X-ray scattering in comparison to X-ray scattering of the initial porous glass (without borate crystallites). In consequence, the pore size distribution function, calculated from the SAXS data, does not agree with the analogous one calculated from mercury porosimetric data. For the confirmation of the above artificial systems composed of silica gle with either deposited H₃BO₃ or Na₂B₄O₇ were investigated. It appears from the presented data that there is a possibility to investigate the kinetics of the crystallization process of borate crystallites by means of the SAXS method. SAXS also allows one to control the process of the removal of the borate phase from the pores of CPG. It can be concluded from the obtained results that long time thermal heating causes the formation of borate crystallites in pores of CPG and that these crystallites are xNa₂O·yB₂O₃ (where y ? x) rather than B₂O₃.     

The use of small angle X-ray scattering (SAXS) for the characterisation of lustre surfaces in Renaissance majolica

In this work some Renaissance lustre decorated ceramics have been examined. Our attention was directed to lustre which is a thin decorative metallic film applied on the surfaces of previously glazed ancient pottery.Some 16th century lustre ceramics shards from Deruta, Umbria (Italy) have been analysed by small angle X-ray scattering (SAXS) in order to characterise the dimension of the metal nanocrystals forming the thin lustre layer. This technique appeared to be a powerful tool to characterise lustre films nanostructure and may be successfully used for this purpose together with transmission electron microscopy (TEM). Furthermore, SAXS measurements are extremely suitable for the determination of polydispersity and average interparticle distance.The lustre surfaces have been also analysed by scanning electron microscopy plus X-ray energy dispersive spectrometry (SEM–EDX) in order to identify the metals present (silver, copper or both of them) and to establish copper/silver ratios. From the comparison between SAXS results and compositional data, it was possible to conclude that copper particles are smaller than the silver ones. We have evidenced how the microtexture as well as the chemical composition of the lustre layers are responsible for the gold or red colour typical of the lustre films.     

Biomolecular solution X-ray scattering at the National Synchrotron Light Source

In recent years there has been a growing interest in the application of X-ray scattering techniques to biomolecules in solution. At NSLS, a new undulator-based beamline, X9, has been constructed to address the oversubscribed user demand for X-ray scattering. Beamline X9 has the capability to perform small/wide-angle X-ray scattering (SAXS/WAXS) all in one single instrument. This is accomplished by utilizing a vacuum sample/detector chamber that is an integral part of the SAXS scattering flight path. This vacuum chamber allows a WAXS detector to be positioned at a close distance from the sample, while not interfering with scattered X-rays at small angles from reaching the SAXS detector. A regular training program, the X9 workbench, has also been established to allow users to become familiar with beamline X9 for solution X-ray scattering.     

Microstructure and Mechanical Properties of Isotactic Polypropylene Films Fabricated via Melt-Extrusion and Uniaxial-Stretching

In this work, isotactic polypropylene (iPP) melt was slowly extruded through a slit die of a single-screw extruder. Once the iPP melt left the die, it was uniaxially stretched at different stretching rates (SRs). Via this process its microstructure can be manipulated, it was subsequently investigated by wide-angle X-ray diffraction (WAXD), small-angle X-ray scattering (SAXS), differential scanning calorimetry (DSC), polarized optical microscopy (POM), and Fourier transform infrared spectroscopy (FTIR). Furthermore, the mechanical properties (including tensile strength, modulus, toughness, and strain-hardening) were investigated. The results showed that the tensile strength and modulus of the melt-stretched iPP films gradually increased with increasing SRs. In addition, the toughness and elongation at break showed maximum values for iPP films melt-stretched at 30 cm/min. Moreover, compared with other melt-stretched films, the iPP films melt-stretched at 90 cm/min exhibited an obvious strain-hardening behavior at lower strain.     

Phase transitions in 8CB liquid crystal confined to a controlled-pore glass: Deuteron NMR and small angle X-ray scattering studies

We present results of the deuteron nuclear magnetic resonance (NMR) and small-angle X-ray scattering (SAXS) study of ordering and phase transition behavior of octylcyanobiphenyl (8CB) liquid crystal confined to a controlled-pore glass (CPG) with nontreated and silanes-treated pore surfaces. The deuteron NMR spectra allowed to determine the degree of nematic liquid crystal ordering and also provided an indirect information on the confined 8CB smectic ordering via its influence on the nematic ordering. For the smectic phase these data are supplemented with measurements of the temperature dependence of the first-order SAXS diffraction pattern. The NMR results indicate that the average nematic and smectic order parameters of 8CB in the nontreated CPG are only weakly perturbed by the confinement. The SAXS data further suggest that in confined 8CB for both nontreated and silane-treated CPG a domainlike pattern appears in accordance with the Imry-Ma theorem.     

Phase separation and nanocrystallization in Al92Sm8 metallic glass

Crystallization of Al₉₂Sm₈ metallic glass was investigated in situ using combined small-angle and wide-angle X-ray scattering (SAXS/WAXS) techniques during isothermal annealing at temperatures close to crystallization point. A continuously growing interference maximum shifting progressively towards lower angles was found to develop in SAXS regime. Simultaneously taken WAXS spectra reveal formation of fcc-Al nanocrystalline phase. The analysis of the SAXS/WAXS data indicate that amorphous phase separation is responsible for the nanocrystalline microstructure formation. The primary fcc-Al crystals nucleate inside the Al-rich amorphous regions formed during alloy decomposition and their growth is constrained by the region size.