Analysis of mesoporous thin films by X-ray reflectivity, optical reflectivity and grazing incidence small angle X-ray scattering

It is well-established that X-ray reflectivity (XR) is an invaluable tool to investigate the structure of thin films. Indeed, this technique provides under correct analysis, the electron density profile of thin films in the direction perpendicular to the substrate. For thin films that exhibit lateral ordering at the nanometer scale, grazing incidence small angle X-ray scattering (GISAXS) ideally complements the XR technique to measure the scattering in off-specular directions. As typical examples, XR and GISAXS data of mesoporous silica thin films and porous materials are presented. The analysis of the XR curve allows to determine the porosity of the film. We also show that the combination of X-ray and visible optical reflection provides information about the index of refraction of thin films. Finally we report how capillary condensation of water can be monitored by XR and GISAXS.     

Performance on absolute scattering intensity calibration and protein molecular weight determination at BL16B1, a dedicated SAXS beamline at SSRF

The optical system and end‐station of bending‐magnet beamline BL16B1, dedicated to small‐angle X‐ray scattering (SAXS) at the Shanghai Synchrotron Radiation Facility, is described. Constructed in 2009 and upgraded in 2013, this beamline has been open to users since May 2009 and supports methodologies including SAXS, wide‐angle X‐ray scattering (WAXS), simultaneous SAXS/WAXS, grazing‐incidence small‐angle X‐ray scattering (GISAXS) and anomalous small‐angle X‐ray scattering (ASAXS). Considering that an increasing necessity for absolute calibration of SAXS intensity has been recognized in in‐depth investigations, SAXS intensity is re‐stated according to the extent of data processing, and the absolute intensity is suggested to be a unified presentation of SAXS data in this article. Theory with a practical procedure for absolute intensity calibration is established based on BL16B1, using glass carbon and water as primary and secondary standards, respectively. The calibration procedure can be completed in minutes and shows good reliability under different conditions. An empirical line of scale factor estimation is also established for any specific SAXS setup at the beamline. Beamline performance on molecular weight (MW) determination is provided as a straightforward application and verification of the absolute intensity calibration. Results show good accuracy with a deviation of less than 10% compared with the known value, which is also the best attainable accuracy in recent studies using SAXS to measure protein MW. Fast MW measurement following the demonstrated method also enables an instant check or pre‐diagnosis of the SAXS performance to improve the data acquisition.     

Small Angle X-Ray Scattering of Hematite Aggregates

Small angle X-ray scattering has been utilised to study the structure of hematite aggregates. The small angle X-ray scattering (SAXS) spectra obtained provided insight into structure of the hematite aggregates and the size of the primary particles. The structural analysis results obtained by SAXS are consistent with previous results obtained from static light scattering studies. Both techniques indicate that the mass fractal dimensions of hematite aggregates are markedly higher than those obtained for other particle systems.     

Small angle neutron scattering and small angle X-ray scattering studies of platinum-loaded carbon foams

The morphology of carbon nanofoam samples comprising platinum nanoparticles dispersed in the matrix was characterized by small angle neutron scattering (SANS) and small angle X-ray scattering (SAXS) techniques. Results show that the structure of pores of carbon matrix exhibits a mass (pore) fractal nature and the average radius of the platinum particles is about 2.5 nm. The fractal dimension as well as the size distribution parameters of platinum particles varies markedly with the platinum content and annealing temperature. Transmission electron micrographs of the samples corroborate the SANS and SAXS results.      

利用小角X射线散射技术研究组分对聚酰亚胺/Al2O3杂化薄膜界面特性与分形特征的影响

采用溶胶-凝胶方法制备无机纳米杂化聚酰亚胺(PI),应用同步辐射小角X射线散射(SAXS)方法研究不同组分杂化PI薄膜的界面特性与分形特征.研究结果表明:散射曲线不遵守Porod定理,形成负偏离,说明薄膜中有机相与Al₂O₃纳米颗粒间存在界面层,界面层厚度在0.54 nm到1.48 nm范围内;随无机纳米组分增加,界面层厚度增加,有机相与无机相作用变强;无机纳米颗粒同时具有质量分形和表面分形特征,其分布、集结是一种非线性动力学过程;随组分增加,其质量分形维数降低 关键词： 小角X射线散射 纳米杂化 聚酰亚胺 界面     

A dedicated small‐angle X‐ray scattering beamline with a superconducting wiggler source at the NSRRC

At the National Synchrotron Radiation Research Center (NSRRC), which operates a 1.5 GeV storage ring, a dedicated small‐angle X‐ray scattering (SAXS) beamline has been installed with an in‐achromat superconducting wiggler insertion device of peak magnetic field 3.1 T. The vertical beam divergence from the X‐ray source is reduced significantly by a collimating mirror. Subsequently the beam is selectively monochromated by a double Si(111) crystal monochromator with high energy resolution (ΔE/E? 2 × 10^?4) in the energy range 5–23 keV, or by a double Mo/B₄C multilayer monochromator for 10–30 times higher flux (～10¹¹ photons s^?1) in the 6–15 keV range. These two monochromators are incorporated into one rotating cradle for fast exchange. The monochromated beam is focused by a toroidal mirror with 1:1 focusing for a small beam divergence and a beam size of ～0.9 mm × 0.3 mm (horizontal × vertical) at the focus point located 26.5 m from the radiation source. A plane mirror installed after the toroidal mirror is selectively used to deflect the beam downwards for grazing‐incidence SAXS (GISAXS) from liquid surfaces. Two online beam‐position monitors separated by 8 m provide an efficient feedback control for an overall beam‐position stability in the 10 µm range. The beam features measured, including the flux density, energy resolution, size and divergence, are consistent with those calculated using the ray‐tracing program SHADOW. With the deflectable beam of relatively high energy resolution and high flux, the new beamline meets the requirements for a wide range of SAXS applications, including anomalous SAXS for multiphase nanoparticles (e.g. semiconductor core‐shell quantum dots) and GISAXS from liquid surfaces.     

X-ray metrology for advanced silicon processes

X-ray reflectivity (XRR), X-ray fluorescence (XRF) and small angle X-ray scattering (SAXS) techniques are used to the monitoring of Cu/porous low κ processes, which are developed for the next generation (≤65 nm) integrated circuits. Sensitivity of XRR and XRF is sufficient to detect drifts of the copper barrier layer, copper seed layer and Cu CMP (chemical-mechanical polishing) processes. Their metrology key parameters comply with production requirements. SAXS allows determining the pore structure of low κ films: average pore size and pore size distribution.     

Structural characterization of casein micelles: shape changes during film formation

The objective of this study was to determine the effect of size-fractionation by centrifugation on the film structure of casein micelles. Fractionated casein micelles in solution were asymmetrically distributed with a small distribution width as measured by dynamic light scattering. Films prepared from the size-fractionated samples showed a smooth surface in optical microscopy images and a homogeneous microstructure in atomic force micrographs. The nano- and microstructure of casein films was probed by micro-beam grazing incidence small angle x-ray scattering (μGISAXS). Compared to the solution measurements, the sizes determined in the film were larger and broadly distributed. The measured GISAXS patterns clearly deviate from those simulated for a sphere and suggest a deformation of the casein micelles in the film.     

Model building of a molluscan hemocyanin from X-ray solution scattering

Molluscan hemocyanins are proteins of a truly enormous size. Because of this, determination of their quaternary structure at high resolution cannot easily be obtained by standard methods such as X-ray crystallography and NMR. Therefore, different approaches, using several low-resolution techniques are currently necessary to understand hemocyanin structure. In this work a model of the Rapana venosa hemocyanin has been obtained from a template model and small angle X-ray scattering (SAXS) data. The template model was built from the electron density of the closely related Haliotis tuberculata hemocyanin and a computer program was written to fit this model to the SAXS data using the simulated annealing algorithm.     

Biomolecular solution X-ray scattering at the National Synchrotron Light Source

In recent years there has been a growing interest in the application of X-ray scattering techniques to biomolecules in solution. At NSLS, a new undulator-based beamline, X9, has been constructed to address the oversubscribed user demand for X-ray scattering. Beamline X9 has the capability to perform small/wide-angle X-ray scattering (SAXS/WAXS) all in one single instrument. This is accomplished by utilizing a vacuum sample/detector chamber that is an integral part of the SAXS scattering flight path. This vacuum chamber allows a WAXS detector to be positioned at a close distance from the sample, while not interfering with scattered X-rays at small angles from reaching the SAXS detector. A regular training program, the X9 workbench, has also been established to allow users to become familiar with beamline X9 for solution X-ray scattering.     

一款小角X射线散射原位测量专用简易样品加热装置

原位加热实验是同步辐射小角X射线散射领域的新热点。本文针对同步辐射小角X射线散射中需要加热并原位实时检测的实验而设计的一款样品简易原位加热专用装置,该装置主要由温控器、样品池、固定架组成,它具有结构简单、操作容易的特点。本文介绍该装置的基本结构、特点并采用该装置进行原位加热干燥褐煤实验,通过分析实验结果验证装置的可行性。     

Beamline setup for in situ measurements of particles in turbulent spray flames using small angle X-ray scattering

The particle formation in spray flame synthesis (SFS) is a fast and complex process involving many sub-steps that may happen simultaneously. To investigate the mechanisms that typically lead to small aggregated primary particles, a sophisticated technique for in situ measurements in the flame is necessary to provide information about primary particles and the aggregates as well. This work describes the development of an in situ measurement setup using small angle X-ray scattering (SAXS) to investigate the entire particle formation mechanism of zirconia nanoparticles in and above a turbulent spray flame. In preparation for the in situ measurements, a beamline for single crystal diffractometry at Karlsruhe Research Accelerator (KARA) was adapted for low scattering SAXS experiments including optimizations of the optics and measurement protocol. As a result, a significant dependence of scattering intensity was detected as a function of the height above the burner. A detailed analysis of the SAXS data and comparison with TEM images allow insights into the primary particle growth, the development of fractal properties and the aggregation process.     

Investigation of surface heterogeneity in thermally treated controlled porous glasses and systems silica gels/borate crystals by means of the SAXS method

Heating of controlled porous glass (CPG) in the temperature range 400–700°C leads not only to a dehydroxylation process of the surface but also brings about a diffusion of the boron atoms remaining in the silica network of CPG towards the glass surface. Some authors assume that a along thermal exposure can cause the formation of B₂O₃ crystals in the pores. In this paper the CPGs possessing different mean pore diameters before and after their thermal treatment were investigated by the SAXS (small angle X-ray scattering) method. The SAXS method is very useful in such cases because there are two sources of X-ray scattering: pores in glass and crystallites of the borate phase. The presence of these two sources is responsible for the change of the intensity of small angle X-ray scattering in comparison to X-ray scattering of the initial porous glass (without borate crystallites). In consequence, the pore size distribution function, calculated from the SAXS data, does not agree with the analogous one calculated from mercury porosimetric data. For the confirmation of the above artificial systems composed of silica gle with either deposited H₃BO₃ or Na₂B₄O₇ were investigated. It appears from the presented data that there is a possibility to investigate the kinetics of the crystallization process of borate crystallites by means of the SAXS method. SAXS also allows one to control the process of the removal of the borate phase from the pores of CPG. It can be concluded from the obtained results that long time thermal heating causes the formation of borate crystallites in pores of CPG and that these crystallites are xNa₂O·yB₂O₃ (where y ? x) rather than B₂O₃.     

高氢稀释制备微晶硅薄膜微结构的研究

采用高氢稀硅烷热丝化学气相沉积方法制备氢化微晶硅薄膜.其结构特征用Raman谱，红外透射谱，小角X射线散射等来表征.结果表明微晶硅的大小及在薄膜中的晶态比χ_c随氢稀释度的提高而增加.而从红外谱计算得到氢含量则随氢稀释度的增加而减少.小角X射线散射结果表明薄膜致密度随氢稀释度的增加而增加.结合红外谱和小角X射线散射的结果讨论与比较了不同相结构下硅网络中H的键合状态.认为随着晶化的发生和晶化程度的提高H逐渐移向晶粒表面，在硅薄膜中H的存在形式从以SiH为主向SiH₂ 关键词：     

Formation of fractal aggregates during green synthesis of silver nanoparticles

The aggregation behavior of silver nanoparticles (AgNPs) prepared by a green synthesis procedure using starch as the stabilizer was studied by the small angle X-ray scattering (SAXS) technique. The protecting ability of starch was affected by the presence of NaOH leading to different aggregation behaviors. In all the samples, mass as well as surface fractal regimes were observed. Assuming spherical form, the radii of nanoparticles were in the range of 11–17 nm.     

Grazing‐incidence small‐angle X‐ray scattering from Ge nanodots self‐organized on Si(001) examined with soft X‐rays

Grazing‐incidence small‐angle X‐ray scattering (GISAXS) measurements with soft X‐rays have been applied to Ge nanodots capped with a Si layer. Spatially anisotropic distribution of nanodots resulted in strongly asymmetric GISAXS patterns in the q_y direction in the soft X‐ray region, which have not been observed with conventional hard X‐rays. However, such apparent differences were explained by performing a GISAXS intensity calculation on the Ewald sphere, i.e. taking the curvature of Ewald sphere into account.     

Simulations of Co‐GISAXS during kinetic roughening of growth surfaces

The recent development of surface growth studies using X‐ray photon correlation spectroscopy in a grazing‐incidence small‐angle X‐ray scattering (Co‐GISAXS) geometry enables the investigation of dynamical processes during kinetic roughening in greater detail than was previously possible. In order to investigate the Co‐GISAXS behavior expected from existing growth models, calculations and (2+1)‐dimension simulations of linear Kuramoto–Sivashinsky and non‐linear Kardar–Parisi–Zhang surface growth equations are presented which analyze the temporal correlation functions of the height–height structure factor. Calculations of the GISAXS intensity auto‐correlation functions are also performed within the Born/distorted‐wave Born approximation for comparison with the scaling behavior of the height–height structure factor and its correlation functions.     

Densification study of ITO films during high temperature annealing by GISAXS

Three thermal routes were treated on the sol-gel ITO films, i.e. conventional thermal annealing (CTA), rapid thermal annealing (RTA) and thermal cycle annealing (TCA). The near surface and internal structures of films were characterized by grazing incidence small angle X-ray scattering (GISAXS) technique. It is found that slit-like pores show fractal structures laterally and the near surface is sparser with bigger pores. Ordered pore structure normal to the film appears when films are annealed at high heating rate. The shrinkage of pores is mainly owing to structural relaxation and diffusion during the superheating process. However, the supercooling process has no significant effect on the structures. Furthermore, CTA samples have the greatest porosity and surface roughness due to the prevailing crystallization as well as the coarsening procedure. However small pores inside the films are eliminated at low temperature.     

利用小角X射线散射技术研究煤干馏过程中的孔隙结构变化

煤干馏是煤炭高效利用的重要途径之一。同步辐射小角X射线散射(Small Angle X-Ray Scattering,SAXS)技术是研究煤干馏过程中内部孔隙结构变化的常用手段。本文利用SAXS对山西余吾烟煤干馏过程(100~1200℃,温度梯度100℃)进行了表征,并对分形维数和粒径分布的变化进行了分析。结果发现煤干馏过程中,散射图像类似,具有各向同性特征,始终保持表面分形结构,且分形维数总体上呈现增大的趋势;随着煤干馏温度的升高,粒度分布发生了显著变化,充分反映了煤在不同干馏阶段的结构特征,对后续的煤炭研究具有一定的指导意义。     

Reply to a comment by S.N. Semenov and M.E. Schimpf on ‘Role of the velocity frame of reference in thermodiffusion in liquid mixtures’, Philosophical Magazine vol. 92, 705 (2012), by M. Eslamian,C.G. Jian and M.Z. Saghir.

A small angle X-ray scattering (SAXS) study of nanovoids in 99.988 and 99.995?at.% aluminium is presented. Absolute intensity calibration using a glassy carbon standard is used to extract the weak SAXS signature from nanovoids introduced by thermal quenching. SAXS analysis methods, including Guinier, Porod and Indirect Transform, are used to obtain values for the void–size, number distribution and volume fraction, as well as measures of the void-metal matrix interface structure in quenched aluminium samples. The SAXS analysis has identified a residual impurity effect on void formation and has been used to characterize trends in nanovoid size, number distribution and interface structure as a function of ageing time at elevated temperatures (artificial ageing). The work presented here, including identification of experimental tools that can be readily improved, demonstrates that SAXS studies are capable of providing precise characterization of nanovoid structure in aluminium. This level of information will be useful in developing phenomenological models of void nucleation and growth capable of linking atomic scale phenomena to macroscopic material properties.