气体传感器阵列信号的盲分离研究

本文在使用一个四单元微热板式集成气体传感器阵列测试煤矿中的两种主要易燃易爆气体一氧化碳和甲烷的基础上, 将气体传感器阵列与盲信号分离技术相结合, 讨论了混合气体分析的盲可辨识性, 并使用盲信号分离中的一种主要方法独立分量分析法(ICA)进行了分析和验证.     

Thermal Conductivity Measurement of Submicron-Thick Aluminium Oxide Thin Films by a Transient Thermo-Reflectance Technique

Thermal conductivity of submicron-thick aluminium oxide thin films prepared by middle frequency magnetron sputtering is measured using a transient thermo-reflectance technique. A three-layer model based on transmission line theory and the genetic algorithm optimization method are employed to obtain the thermal conductivity of thin films and the interracial thermal resistance. The results show that the average thermal conductivity of 330- 1000nm aluminium oxide thin films is 3.3 Wm^-1K^-1 at room temperature. No significant thickness dependence is found. The uncertainty of the measurement is less than 10%.     

Preparation and Thermal Characterization of Diamond-Like Carbon Films

Diamond-like carbon （DLC） films are prepared on silicon substrates by microwave electron cyclotron resonance plasma enhanced chemical vapor deposition. Raman spectroscopy indicates that the films have an amorphous structure and typical characteristics. The topographies of the films are presented by AFM images. Effective thermal conductivities of the films are measured using a nanosecond pulsed photothermal reflectance method. The results show that thermal conductivity is dominated by the microstructure of the films.     

Investigation of a Microcalorimeter for Thin-Film Heat Capacity Measurement

A microcalorimeter is studied for testing heat capacity of thin films. The microcalorimeter is a suspended membrane supported by six microbridges, which is fabricated by the front-side surface micromachining. Compared to the bulk micro-machined one, the microcalorimeter has excellent mechanical strength and precisely controlled pattern size as well as good thermal characteristics that are essential to a microcalorimeter. The heating rate of the microcalorimeter is up to 2 × 10^5Kis with 4.5mW heating power in vacuum, and the heat capacity of the corresponding empty microcalorimeter is about 23.4nJ/K at 30OK. By a pulse calorimetry, the heat capacity of A1 thin films with thickness of 40-1150nm are measured in the temperature range from 300K to 420K in vacuum. The mass of each sample is evaluated and the specific heat capacity is calculated. The results show that specific heat capacity of the 1150-nm A1 film agrees well with the data of bulk A1 reported in the literature. For the thinner films, enhanced heat capacity is observed.