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In-Plane Thermal Diffusivity Measurement of Thin Films Based on the Alternating-Current Calorimetric Method Using an Optical Reflectivity Technique 下载免费PDF全文
An advanced ac calorimetric method to measure thermal diffusivity of a thin sample is developed by using an optical reflectivity technique. A modulated infrared laser is used to heat the front surface of a foil specimen. The reflectivity of a continuous-wave He-Ne laser at the rear surface of the specimen is detected by a photoreceiver. 相似文献
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Thermal Conductivity Measurement of Submicron-Thick Aluminium Oxide Thin Films by a Transient Thermo-Reflectance Technique 下载免费PDF全文
Thermal conductivity of submicron-thick aluminium oxide thin films prepared by middle frequency magnetron sputtering is measured using a transient thermo-reflectance technique. A three-layer model based on transmission line theory and the genetic algorithm optimization method are employed to obtain the thermal conductivity of thin films and the interracial thermal resistance. The results show that the average thermal conductivity of 330- 1000nm aluminium oxide thin films is 3.3 Wm^-1K^-1 at room temperature. No significant thickness dependence is found. The uncertainty of the measurement is less than 10%. 相似文献
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Diamond-like carbon (DLC) films are prepared on silicon substrates by microwave electron cyclotron resonance plasma enhanced chemical vapor deposition. Raman spectroscopy indicates that the films have an amorphous structure and typical characteristics. The topographies of the films are presented by AFM images. Effective thermal conductivities of the films are measured using a nanosecond pulsed photothermal reflectance method. The results show that thermal conductivity is dominated by the microstructure of the films. 相似文献
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