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Preparation and Thermal Characterization of Diamond-Like Carbon Films |
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| Authors: | BAI Su-Yuan TANG Zhen-An HUANG Zheng-Xing Yu Jun WANG Jing LIU Gui-Chang |
| Affiliation: | Department of Electronic Engineering, Dalian University of Technology, Dalian 116024School of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029School of Chemical Engineering, Dalian University of Technology, Dalian 116012 |
| Abstract: | Diamond-like carbon (DLC) films are prepared on silicon substrates by microwave electron cyclotron resonance plasma enhanced chemical vapor deposition. Raman spectroscopy indicates that the films have an amorphous structure and typical characteristics. The topographies of the films are presented by AFM images. Effective thermal conductivities of the films are measured using a nanosecond pulsed photothermal reflectance method. The results show that thermal conductivity is dominated by the microstructure of the films. |
| Keywords: | 66 70 -f 81 15 Gh 81 70 Fy |
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