Au(111)/咪唑基离子液体界面结构研究：阳离子侧链长度的影响

本文结合电化学方法与原子力显微镜力曲线技术,研究了两种烷基侧链长度不同的离子液体BMITFSA和OMITFSA在Au(111)电极表面附近的层状结构的数目和耐受力对电位的依赖性,探究了烷基侧链长度变化对界面层状结构的影响. 研究表明,不同烷基侧链长度的离子液体体系力-电位曲线形状基本相似. 在零电荷电位（the potential of zero charge,PZC）附近时,力值最小,因为此时电极表面荷电量较小,层状结构不稳定;电位偏离PZC的过程中,第一层层状结构力值呈现先增大后减小的趋势. 受到烷基侧链所处的不同位置影响,在PZC电位以负,短侧链离子液体的层状结构稳定性较好,而PZC电位以正,长侧链离子液体的稳定性较好.     

探针诱导表面等离子体共振纳米光刻系统

提出了一种在原子力显微镜(AFM)基础上设计的探针诱导表面等离子体共振纳米光刻(PSPRN)系统.此系统不但实现了探针的精确控制,而且由于系统本身具有AFM的全部功能,因此可以实时检测样品表面的形貌以及光刻效果.系统采用改进的Kretschmann型共振耦合器件,在棱镜和样品基板之间注入匹配折射率油,使样品更方便更换;利用声光调制器与AFM配合实现了等离子体激发光照射时间的精确控制.通过初步实验,在银(Ag)膜表面获得了直径100 nm左右的光刻点,验证了PSPRN的可行性.研究了光照时间、激光功率、激光入射角、材料厚度等因素对光刻点大小、深度的影响,为实现更小的光刻点提供了参考.     

角分辩的光散射轮廓及自仿射分形表面的粗糙指数的实验研究

建立了反射式随机表面的光散射特件实验测量系统,利用多幅平均及叠加连接的方法,得出入射角在45°～85°之间不同值时的光散射轮廓.结果表明,随着表面入射角的增加,光散射轮廓的半峰全宽逐渐减小.并且当入射角的增加到一定值时,光散射轮廓出现中央亮斑.由数学上的对称F降函数,推导出光散射轮廓的半峰全宽随散射光波矢的变化关系,从实验测得角分辩的的光散射轮廓中提取了自仿射分形随机表面的粗糙指数.与原子力显微镜测量得到的粗糙指数进行比较,两者符合得很好.     

微米颗粒与固体表面相互作用的AFM测量

基于原子力显微镜(AFM)测量了单个典型电站微米飞灰颗粒(粒径6μm)与石墨表面间的粘附力和静电力相互作用,获得了颗粒的表面能并考查了相对湿度对静电力的影响.在环境气氛下基本检测不到静电作用,而在真空下静电吸引作用显著.静电力主要来自颗粒一表面间的接触荷电,作用特性可以用一个简化的点电荷模型很好地定量描述.     

Reversible Resistance Switching Effect in Amorphous Ge1Sb4Te7 Thin Films without Phase Transformation

We demonstrate a reversible resistance switching effect that does not rely on amorphous-crystalline phase transformation in a nanoscale capacitor-like cell using Ge1Sb4Te7 films as the working material. The polarity and amplitude of the applied electric voltage switches the cell resistance between low- and high-resistance states, as revealed in the current-voltage characteristics of the film by conductive atomic force microscopy （CAFM）. This reversible SET/RESET switching effect is induced by voltage pulses and their polarity. The change of electrical resistance due to the switching effect is approximately two orders of magnitude.     

Cation Effect on Copper Chemical Mechanical Polishing

We examine the effect of cations in solutions containing benzotriazole （BTA） and H202 on copper chemical mechanical polishing （CMP）. On the base of atomic force microscopy （AFM） and material removal rate （MRR） results, it is found that ammonia shows the highest MRR as well as good surface after CMP, while KOH demonstrates the worst performance. These results reveal a mechanism that small molecules with lone-pairs rather than molecules with steric effect and common inorganic cations are better for copper CMP process, which is indirectly confirmed by open circuit potential （OCP）.     

Preparation and Thermal Characterization of Diamond-Like Carbon Films

Diamond-like carbon （DLC） films are prepared on silicon substrates by microwave electron cyclotron resonance plasma enhanced chemical vapor deposition. Raman spectroscopy indicates that the films have an amorphous structure and typical characteristics. The topographies of the films are presented by AFM images. Effective thermal conductivities of the films are measured using a nanosecond pulsed photothermal reflectance method. The results show that thermal conductivity is dominated by the microstructure of the films.     

Fabrication and Frequency Response Characteristics of A1N-Based Solidly Mounted Resonator

Film bulk acoustic resonator （FBAR） with solidly mounted resonator （SMR）-type is carried out by rf magnetic sputtering. To fabricate SMR-type FBAR, alternative high and low acoustic impedance layers, Mo/Ti multilayer, are adopted as Bragg reflector deposited by dc magnetron sputtering. The influences of sputtering pressure, substrate temperature and sputtering power on the surface roughness of Bragg reflector layer are discussed. From the atom force microscopy （AFM） analysis, the surface roughness of the Bragg reflector is improved remarkably by controlling deposition conditions. Under the appropriate sputtering condition, AlN thin films with highly c-axis-preferred orientation are deposited by rf magnetron sputtering. The performance of fabricated Mo/Ti SMR shows that the electromechanical coupling coefficient is 3.89%, the series and parallel resonant frequencies appear at 2.49 and 2.53 GHz, with their quality factors 134.2 and 97.6, respectively.     

纳米级钡铁氧体的原子力显微镜分析及微波性能的研究

采用溶胶-凝胶法制备掺杂钡离子的纳米六角晶型铁氧体.采用X衍射仪对其物相进行鉴定,利用原子力显微镜对不同方法制得的试样粒径进行了分析研究,最后用网络分析仪对铁氧体在1～6 GHz范围内的微波性能进行分析,结果表明:实验制得粉体为M型钡铁氧体,利用乙醇分散的稀浓度的试样能在原子力显微镜下很好地观察到颗粒的粒径,其平均粒径为52.68 nm左右,并且实验制得的纳米M型钡铁氧体具有较大的介电损耗和磁损耗,具有良好的吸波性能.     

MOCVD侧向外延GaN的结构特性

侧向外延（EL0）GaN的原子力显微镜（AFM）表面形貌图像表明,ELO—GaN相当平整,而掩膜区中央有线状分布的小丘群,这是由ELO—GaN在掩膜区中央接合时晶向不一致而产生的缺陷造成的。观察ELO—GaN扫描电子显微镜（SEM）截面图,侧向接合处存在着三角空洞,并且侧向接合导致上述小丘群。X射线衍射（XRD）曲线表明,掩膜边界处的GaN晶面有倾斜。拉曼散射谱表明,掩膜区GaN质量相对于窗口区大为提高。ELO—GaN和普通外延GaN的拉曼散射谱比较表明,ELO—GaN中的应力较小,晶体质量较高。