静动结合的化学腐蚀法制备近场光学探针的理论分析

理论上分析了静动结合的化学腐蚀法制备探针的具体机理及过程。在静态腐蚀的过程中, 利用流体力学Young-Laplace方程的一级近似解获得了光纤插入到HF酸中形成的新月形高度。在动态腐蚀过程中, 详细分析了当静态腐蚀时间和动态腐蚀时间分别取不同值时, 光纤移动速度对光纤探针结构的影响。利用此法可制备出尖端锐利、大锥角或多锥体等各种结构的光纤探针。这为实验上制备出性能优良的探针, 为拓宽扫描近场光学显微镜的应用范围奠定基础。将上述理论分析的结果与本文实验中所得初步结果进行了比较, 所得结果一致。     

High-Density Read-Only Memory Disc with Ag11In12Sb51Te26 Super-Resolution Mask Layer

A novel read-only memory (ROM) disc with an Ag11ln12Sb51Te26 super-resolution mask layer is proposed and investigated for the first time to our knowledge. The carrier-to-noise ratio of more than 40 dB could be obtained from small pits (380nm), which are below the readout resolution limit (400nm), in our dynamic setup with a wavelength of 632.8 nm and numerical aperture of 0.40. Dependences of carrier-to-noise ratio on readout power,readout velocity and film thickness are studied. The results show that the optimum film thickness is 20-50nm and the corresponding carrier-to-noise ratio is more than 40dB at readout power of 4mW and readout velocity of 2m/s in our experiment. The super-resolution readout mechanism for this ROM disc is also discussed.     

超分辨近场结构技术及其应用

超分辨近场结构(Super RENS)技术是在传统的超分辨光盘技术和近场光学的基础上发展起来的新技术。介绍了Super RENS技术的基本原理:利用掩膜层的非线性效应或表面等离子体增强效应,在近场区域可以记录、读出超过衍射极限的信号。综述了该技术在纳米光信息存储和光刻方面应用研究的最新进展,提出了存在的问题,展望了它的发展前景。     

波片相位延迟量精密测量新方法

利用旋转波片的偏振干涉技术，结合机械－光学旋光调制器对光相位的调制，通过判断方波信号的有无，可精密地确定被测定片相位延迟的数值，机械－光学旋光调制器的使用，大大简化被测样品和测试装置中四分之一波片光轴方位的调整，也显著地提高了装置测量的灵敏度和波长测量范围，对环境不作特殊控制，依据本方法建立的测试装置的相对测量误差可小于千分之五。     

表面粗糙度测量的磁光位相调制和锁相干涉

提出了一种表面粗糙度测量的新方法，该方法采用了微分偏振干涉的原理，利用由法拉第磁光调制器所组成的调制系统对偏振干涉光路的位相进行调制，利用锁相干涉原理对位相进行探测，该方法可实现无参考面快速非接触测量，在普通实验条件下，也可保持良好的稳定恶性循环 ，实验装置即可给出表面的轮廓又可给出其它统计数据，其横向分辨率为１．２μｍ纵向为２ｎｍ。     

Static recording characteristics of new type super-resolution near-field structure

A novel super-resolution near-field optical structure (super-RENS) with bismuth (Bi) mask layer is proposed in this paper. Static optical recording tests with and without super-RENS are carried out using a 650-nm semiconductor laser at recording powers of 14 and 7 mW with pulse duration of 100 ns. The recording marks are observed by high-resolution optical microscopy with a charge-coupled device (CCD) camera. The results show that the Bi mask layer can also concentrate energy into the center of a laser beam at low laser power similar to the traditional Sb mask layer. The results above are further confirmed by another Ar~+ laser system. The third-order nonlinear response induced by the plasma oscillation at the Bi/SiN interface during laser irradiation can be used to explain the phenomenon. The calculation results are basically consistent with our experimental results.     

Field enhancement effect of metal probe in evanescent field

Field enhancement effect of metal probe in evanescent field, induced by using a multi-layers structure for exciting surface plasmon resonance （SPR）, is analyzed numerically by utilizing two-dimensional （2D） TM- wave finite difference time-domain （FDTD） method. In this letter, we used a flmdamental mode Gaussian beam to induce evanescent field, and calculated the electric intensity. The results show that compared with the nonmetal probe, the metal probe has a larger field enhancement effect, and its scattering wave induced by field enhancement has a bigger decay coefficient. The field enhancement effect should conclude that the metal probe has an important application in nanolithography.     

Scanned-cantilever atomic force microscope with large scanning range

A scanned-cantilever atomic force microscope (AFM) with large scanning range is proposed, which adopts a new design named laser spot tracking. The scanned-cantilever AFM uses the separate flexure x-y scanner and z scanner instead of the conventional piezoelectric tube scanner. The closed-loop control and integrated capacitive sensors of these scanners can insure that the images of samples have excellent linearity and stability. According to the experimental results, the scanned-cantilever AFM can realize maximal 100×100 (μm) scanning range, and 1-nm resolution in z direction, which can meet the requirements of large scale sample testing.     

Readout of super-resolution marks with Ti thin film

Using Ti as the super-resolution reflective film to replace the Al reflective layer in conventional read-only optical disk, the recording marks with a diameter of 380 nm and a depth of 50 nm are read out in a dynamic testing device whose laser wavelength is 632.8 nm and numerical aperture of the lens is 0.40. The optimum Ti thin film thickness is 18 nm and the corresponding signal-noise-ratio is 32 dB.     

Simulation of an apodizer's effect for high-density optical storage

The effect of an apodizer with two parallel taper refractive surfaces is theoretically investigated for highdensity optical storage. The apodizer may modulate an incident Gaussian beam into an annular beam. Simulation shows that with the increasing inner radius of the modulated beam, the focal spot shrinks obviously. The depolarization effect gets strong simultaneously, which induces the circular symmetry loss of the focal spot. In this process, pattern density of the orthogonal and longitudinal diffractive fields increases remarkably.