我国低温等离子体研究进展(Ⅰ)

低温等离子体物理与技术的研究在国内受到了越来越多的重视．在等离子体中发现的一些有趣的物理现象，如磁场重联、尘埃等离子体等，使人们对等离子体物理的研究掀起了新的热潮．在应用方面，几乎所有理工类实验室都有涉及低温等离子体技术的实验装置，这使得在我国低温等离子体应用方面的研究非常普及，包括微电子工业中的等离子体工艺，各种坚硬、耐腐蚀、耐摩擦材料的制备，纳米材料的制备，聚合物以及生物材料的表面改性，等等．随着低温等离子体技术的发展，低温等离子体的诊断技术也随之发展起来．文章简要地介绍了近几年来低温等离子体研究在我国的发展，介绍了一些有关低温等离子体的热点研究课题．     

Thomson散射诊断技术的新进展

Thomson散射是一种主动而无干扰地对等离子体进行诊断的方法．它能够以较高的时空分辨率测量等离子体的参数，如电子与离子温度、密度以及等离子体的膨胀速度、电离程度、热流等参数．文章从Thomson散射基本概念出发，介绍了Thomson散射诊断方法在研究激光与等离子体相互作用中的重要意义，并分别介绍了近年来Thomson散射诊断技术的新进展，如对高Z等离子体、两种离子种类的等离子体、多种形态等离子体以及高密度等离子体的研究．文章最后对国内Thomson散射诊断技术的发展状况进行了简述．     

微等离子体及其应用

微等离子体已成为近年来国际上低温等离子体研究的热点课题之一。微等离子体是被限制在一个有限的空间范围内(尺度为毫米量级甚至更低)的等离子体,它通常能够运行在大气压条件下,它的低功耗、高密度、高稳定等特性以及其小巧、经济、便携等优势,为其在紫外光源的获得、微化学分析系统、生物医学、材料表面改性和加工、环境污染物的处理等领域提供了广泛的应用空间。文章对微等离子体及其应用进行了综述,介绍了各种微等离子体源的产生方法,以及它们在不同领域的研究和应用情况。     

低温等离子体在材料表面处理方面的应用和发展

本文简要地介绍了同创材料表面新技术工程中心低温等离子体相关技术在材料表面处理的应用与发展以等离子体产生、离子源技术为基石，大力发展复合离子注入、复合离子沉积及镀膜设备和相关工艺。以离子源、多弧、磁控溅射等核心技术，多元化发展等离子体表面处理设备、产品和工艺。以国家自然科学基金等科研项目为依托，大力推进科研成果向工业和民用产品转化紧跟等高子体技术的国际发展，积极开拓国际市场，推进离子源、等离子体源等技术的标准化和国际化。     

电子回旋共振等离子体技术

微波电子回旋共振是一种先进的低温等离子体技术，它具有优良的综合指标，提高了微电子，光电子集成电路制造工艺等应用领域中的低温等离子体加工水平，文章介绍了电子回旋共振等离子体产生原理，特点及重要的实验研究结果。     

极端远紫外光刻的等离子体光源及其光学性质研究进展

现代技术的飞速发展需要集成电路不断小型化，因而开发下一代光刻光源以满足小型化的要求成为当前的一项紧迫任务。目前工业界确定的下一代光刻光源是波长为13．5nm的极端远紫外（EUV）光源，它能够把光刻技术扩展到32nm以下的特征尺寸，氙和锑材料的等离子体光源被认为是这种光源的最佳候选者。文章在介绍EUV光刻原理和EUV光源基本概念的基础上，讨论了目前研究得最多、技术最成熟的激光产生的和气体放电产生的等离子体EUV光源，对EUV光源的初步应用进行了简单介绍，并着重对氙和锑材料产生的等离子体发射性质和吸收性质的实验与理论研究进展进行了详细介绍与讨论。目前的理论研究进展表明，统计物理模型还不能很好地预测氙和锑等离子体的发射与吸收光谱，因此迫切需要发展细致能级物理模型，以得到更为精确的等离子体光学性质参数，并用于指导实验设计。提高EUV转换效率。     

尘埃等离子体

尘埃等离子体物理是近十年里等离子体学科中一个活跃的分支领域之一，带电尘埃广泛存在于空间等离子体、实验室聚变装置、低温等离子体工业应用等众多小同的环境中，并且呈现出相同或相似的性质．这是一种部分或完全电离的等离子体，其基本成分除了电子和离子外，还有（通常）带负电的、且电荷不是常数的微粒．带电颗粒有着与电予和离子完全不同的动力学行为，其与等离子体的相互作用呈现出许多新的物理现象．文章介绍了尘埃等离子体物理的简要发展历史、基本性质和主要研究方向以及最近一些热点问题．     

应用低温等离子体改善材料的粘结性能

本文介绍了应用低温等离子体改善高分子材料的粘结性能．经低温等离子体表面改性后，聚丙烯薄膜的粘结强度可以提高１０倍，改性效果取决于低温等离子体参数的选择．     

微流控等离子体:新型过程强化技术

作为一种新型高效的过程强化技术,微流控等离子体具备微流控及等离子体技术优势,能够提高反应过程的均一性及稳定性,控制反应接触界面,在增加活性物质的密度的同时避免物种的快速猝灭。介绍了微流控等离子体中的活性组分及相应的表征手段,归纳了几种反应器结构并对比了优缺点。系统阐述了微流控等离子体过程强化技术在化学合成、表面改性、材料制备、污染物检测和生物医学领域中的应用,并立足于当前研究现状对该技术的发展趋势进行讨论与展望。     

表面等离子体亚波长光学原理和新颖效应

表面等离子体是沿着导体表面传播的波，当改变金属表面结构时，表面等离子体激元（surface plasmon polaritons，SPPs）的性质、色散关系、激发模式、耦合效应等都将产生重大的变化．通过SPPs与光场之间相互作用，能够实现对光传播的主动操控．表面等离子体光子学（plasmonics）已成为一门新兴的学科，它的原理、新颖效应以及机制的探究，都极大地吸引研究者们的兴趣．SPPs具有广阔的应用前景，例如，应用于制作各种SPPs元器件和回路，制作纳米波导、表面等离子体光子芯片、耦合器、调制器和开关，应用于亚波长光学数据存储、新型光源、突破衍射极限的超分辨成像、SPPs纳米光刻蚀术、以及生物光学（作为传感器和探测器）．文章介绍了表面等离子体光子学原理、新颖效应和物理机制，并简述若干应用。     

The Development and Application of Low Temperature Plasma Technology

The development and applications of low temperature plasma technology used in surface modification of materials are presented in this paper. Based on plasma sources and ion sources technology, multi-functions ion implantation and deposition technologies were developed and the related processes are also used to treat different products. The related technologies were translated into industrial productions supported by national research projects. Following the last development of international plasma researches, the standardization and internationalization processes of plasma technologies are executed in our center.     

Plasma Applications: A Dermatological View

The ability to produce cold plasma at atmospheric pressure conditions was the basis for the rapid growth of plasma related application areas in biomedicine. Plasma comprises a multitude of active components such as charged particles, electric current, UV radiation, and reactive species which can act synergistically. The antiitch, antimicrobial, and anti‐inflammatory effect was already demonstrated in in vivo and in vitro experiments and until now no resistance of pathogens against plasma treatment was observed. The combination of the different active agents and their broad range of positive effects on various diseases, especially easily accessible skin diseases, render plasma quite attractive for applications in medicine. Hence, plasma medicine as an independent and promising medical field has been emerged recently. For medical applications two different types of cold plasma are suitable; indirect (plasma jet, plasma torch) and direct plasma sources (dielectric barrier discharge ‐ DBD). So far, no standards and norms are defined for any of these plasma sources. Also, no convenient criteria for standardization of the quality rating of plasma in the view of dermatological applications exist. Although various cold plasma studies have been performed the results are hardly comparable, as physical parameters of the plasma devices, experimental conditions, and organisms used vary greatly. Therefore, standardized risk analyses are necessary for the assessment of different plasma sources. In this review two plasma sources are described and possible risk factors are discussed to estimate the safety of plasma used as a therapeutic tool in dermatology. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

面向单晶SiC原子级表面制造的等离子体辅助抛光技术

目前Si基半导体由于其自身材料特性的限制,已经越来越难以满足高速发展的现代电力电子技术对半导体器件的性能要求.SiC作为新一代半导体材料具有显著的性能优势,但由于其属于典型的难加工材料,实现SiC晶圆的高质量与高效率加工成为了推动其产业化应用进程的关键.本综述在回顾近年来SiC超精密加工技术研究进展的基础上,重点介绍了一种基于等离子体氧化改性的SiC高效超精密抛光技术,分析了该技术的材料去除机理、典型装置、改性过程及抛光效果.分析结果表明,该技术具有较高的去除效率,能够获得原子级平坦表面,并且不会产生亚表面损伤.同时针对表面改性辅助抛光技术加工SiC表面过程中出现的台阶现象,探讨了该台阶结构的产生机理及调控策略.最后对等离子体辅助抛光技术的发展与挑战进行了展望.     

Microwave Plasmas at Atmospheric Pressure

Microwave plasmas at atmospheric pressure are used for surface treatments like for example cleaning, sterilization or decontamination purposes, for a pre‐treatment to increase the adhesion of lacquer, paint, or glue, and for the deposition of different kind of layers and coatings. Micro plasma jets can also be applied for biomedical applications and for treatment of small and complex geometries like for example the inside of capillaries. Larger plasma torches which exhibit higher gas temperatures can also be used for chemical syntheses like waste gas decomposition, methane pyrolysis, or carbon dioxide dissociation and for plasma spraying purposes. In the present publication an overview on the development and the investigation of the operating principle of two atmospheric pressure microwave plasma torches at frequencies of 2.45 GHz and 915 MHz will be presented. The plasma sources are based on a cylindrical resonator combined with coaxial structures. To explain how these plasma sources work, simulations of the electric field distribution will be discussed. Furthermore, some physical characteristics of an air and an Ar/H2 atmospheric plasma like gas temperatures, excitation temperatures and densities as well as the heating of the plasma by the microwave will be investigated. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Nanomagnetism:Principles,nanostructures,and biomedical applications

Nanomagnetism is the origin of many unique properties in magnetic nanomaterials that can be used as building blocks in information technology, spintronics, and biomedicine. Progresses in nanomagnetic principles, distinct magnetic nanostructures, and the biomedical applications of nanomagnetism are summarized.     

Spectroscopic and antimicrobial studies of polystyrene films under air plasma and He-Ne laser treatment

Polystyrene (PS) films are used in packaging and biomedical applications because of their transparency and good environmental properties. The present investigation is centered on the antifungal and antibacterial activities involved in the film surface. Subsequently, microbial formations were immobilized on the modified PS films. Living microorganisms such as bacteria and yeast were used. Untreated PS films show very fast rate of growth of bacteria within few hours. The study involves developments of polymer surfaces with bacterial growth and further studies after giving antibacterial treatment such as plasma treatment. Major emphasis has been given to study the effect of various parameters which can affect the performance of the improved material. Films were prepared by two methods: plasma treatment under vacuum and under ongoing He-Ne laser source. The parameters such as (1) surface area by contact angle measurements, (2) quality of material before and after treatment by SEM and FTIR spectra and (3) material characterization by UV-vis spectra were studied. It was observed that plasma treatment of the PS material for different processing time improved the surface properties of PS films.      

多功能微波等离子体教学研究装置的研制

针对目前国内等离子体技术的教学和研究远远落后于工程应用的实际情况,开发了多功能微波等离子体教学研究装置.该装置利用频率2.45 GHz的微波激励稀薄气体放电,形成轴对称的等离子体球,产生的等离子体无内部电极,可避免放电污染.同时通过微波技术、真空技术、冷却技术的集成,使该装置结构紧凑、性能稳定、性价比较高.利用该装置进行了金刚石薄膜沉积与离子体诊断实验,效果良好.     

Pulsed microwave-driven argon plasma jet with distinctive plume patterns resonantly excited by surface plasmon polaritons

Atmospheric lower-power pulsed microwave argon cold plasma jets are obtained by using coaxial transmission line resonators in ambient air.The plasma jet plumes are generated at the end of a metal wire placed in the middle of the dielectric tubes.The electromagnetic model analyses and simulation results suggest that the discharges are excited resonantly by the enhanced electric field of surface plasmon polaritons.Moreover,for conquering the defect of atmospheric argon filamentation discharges excited by 2.45-GHz of continued microwave,the distinctive patterns of the plasma jet plumes can be maintained by applying different gas flow rates of argon gas,frequencies of pulsed modulator,duty cycles of pulsed microwave,peak values of input microwave power,and even by using different materials of dielectric tubes.In addition,the emission spectrum,the plume temperature,and other plasma parameters are measured,which shows that the proposed pulsed microwave plasma jets can be adjusted for plasma biomedical applications.     

Atmospheric Pressure Plasma Application for Pollution Control in Industrial Processes

Economic application of atmospheric pressure plasma technology for industrial pollution control requires fulfilling two propositions: First application of pollution control technologies needs to result in clear environmental, health, or safety benefits motivating political measures. Second plasma technology needs to be competitive as compared to other available pollution control technologies. Thus in this article methods for the evaluation of atmospheric plasma application for industrial pollution control are reviewed: Examples of emission regulations and emission control technologies are given. Requirements of industrial scale emission control and of thermal and non‐thermal exhaust gas treatment technologies are described. The potential of various non‐thermal plasma reactor concepts for cost effective treatment of industrial scale gas flows is analyzed, and methods for the evaluation of plasma energy balance and plasma chemical kinetics are given for them. How to deal with shortcomings of atmospheric pressure plasmas such as lack of plasma‐chemical selectivity is addressed in a section about plasma‐catalytic hybrid processes. Further the progress made recently in electrostatic precipitation is reviewed, and the importance of electro‐hydrodynamic effects for the reactor design both for electrostatic precipitation and for plasma chemical pollution control is considered. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

激光光镊拉曼光谱技术在生物医学上的应用及进展

激光光镊拉曼光谱技术(LTRS)是一种将激光光镊与共聚焦拉曼光谱技术相结合的产物。该技术能够保证在生理条件下捕获、操控、测量在悬浮状态下单个活性细胞并对其进行生物学分析研究。这种在单细胞研究上的独特优势使其越来越受到人们的关注。本文以激光光镊拉曼光谱技术在生物医学上的应用及其技术发展历程为主线,围绕拉曼光谱技术在细胞分选及细胞的特性研究,多光镊拉曼光谱系统,微流控传输系统,多模式分析系统四个方面综述了近些年来光镊拉曼光谱技术如何通过其他技术联用及其技术的改进实现在多数据采集与整合,高效率,高通量和自动化的传输方面的发展,并概述了LTRS技术生物医学上的应用。最后,对其未来的发展前景进行展望。