14.5GHz紧凑型、低成本、全永磁ECR离子源

A compact 14.5GHz electron cyclotron resonance (ECR) ion source for the production of slow, multiply charged ions has been constructed,with the plasma-confining magnetic field produced exclusively by permanent magnets.Microwave power of up to 175W in the frequency range from 12.75 to 14.SGHz is transmitted from ground potential via a PTFE window into the water-cooled plasma chamber which can be equipped with an aluminum liner.The waveguide coupling system serves also as biased electrode,and two remotely-controlled gas inlet valves connected via an insulating break permit plasma operation in the gas- mixing mode.A triode extraction system sustains ion acceleration voltages between 1kV and 10kV.The ECR ion source is fully computer-controlled and can be remotely operated from any desired location via Ethernet.     

Feasibility study on high current ion beam extraction from anode spot plasma for large area ion implantation

In this paper, we have investigated the feasibility of the high current beam extraction from anode spot plasma as an ion source for large area ion implantation. Experiments have been carried out with the ambient plasma produced by inductive coupling with radio-frequency (RF) power of 200 W at the frequency of 13.56 MHz. Anode spot plasmas are generated near the extraction hole of 2 mm in diameter at the center of a bias electrode whose area exposed to the ambient plasma can be changed. It is found that the maximum ion beam current is extracted at the optimum operating pressure at which the area of bias electrode exposed to ambient plasma is fully covered with the anode spot plasma whose size is dominantly determined by the operating pressure for given gas species. It is also observed that the extracted ion beam current increases nonlinearly with the bias power due to the changes in size and shape of the anode spot plasma. With the well-established anode spot plasma operating at the optimum gas pressure, we have successfully extracted high current ion beam of 6.4 mA (204 mA/cm²) at the bias power of 22 W (∼10% of RF power), which is 43 times larger than that extracted from the plasma without anode spot. Based on the experimental results, criteria for electrode design and operating pressure for ion beam extraction from larger extraction aperture are suggested. In addition, the stability of anode spot plasma in the presence of ion beam extraction through an extraction hole is discussed in terms of the particle balance model.     

HL-2M装置中性束离子源束光学红外成像实验研究

为了研究HL-2M装置中性束注入(NBI)加热用的80kV/45A/5s热阴极离子源束光学特性，采用红外电荷耦合元件(CCD)成像技术，测量离子源引出粒子束轰击量热靶板产生的温度分布，得到束功率密度空间分布区间特征参数1/e半宽度。在NBI热阴极离子源调试平台上，扫描离子源的放电和引出参数，利用CCD红外热像仪获得了对应参数下量热靶上的束功率密度分布。实验结果表明，HL-2M装置NBI加热系统80kV/45A离子源可用的导流系数范围为0.7~1.5μP。同样导流系数下，梯度电极与等离子体电极的分压比较高时，引出束流的半宽度较小。     

Characteristics of a high frequency ion source used in a low-energy accelerator

This work presents the characteristics of a high frequency ion source operating on a low energy, 150 keV accelerator. The latter is to be used as a neutron generator and its design is based on a theoretical analysis which shows that if the axial potential in an electrostatic electrode system is made to increase with four thirds the power of axial distance, inward electric forces will compensate space charge forces tending to blow up the beam. This results in a simplified acceleration tube much shorter and of higher gradient than the conventional acceleration columns. The ion source itself is an ordinary type using axial extraction of the beam, and its main properties investigated are the beam current and beam quality (or emittance). Dependence of the two on different parameters is investigated in a series of tests.     

Optimization and numerical simulation for the extraction system of the H~- multicusp ion source

A new ion source has been designed and manufactured for the CYCLONE30 accelerator, which has a much advanced performance compared with the original. It is expected that the newly designed ion source extraction system will transport a very large percentage of the beam without deteriorating the beam optics, which is designed to deliver an H^- beam at 30 keV. The accelerator assembly consists of three circular aperture electrodes made of copper. The simulation study was focused on finding parameter sets that raise the beam perveance as large as possible and which reduce the beam divergence as low as possible. Ion beams of the highest quality are extracted whenever the half-angular divergence is minimum, for which the perveance current intensity and the extraction gap have optimum values. The triode extraction system is designed and optimized by using CST software (for Particle Beam Simulations). The physical design of the extraction system is given in this paper. From the simulation results, it is concluded that it is possible to achieve this goal by decreasing the thickness of the plasma electrode, shortening the first gap, and adjusting the acceleration electrode voltage.     

Analytical and simulation studies for diode and triode ion beam extraction systems

This work is concerned with ion beam dynamics and compares the emittance to aberration ratios of two-and three-electrode extraction systems. The study is conducted with the aid of Version 7 of SIMION 3D ray-tracing software. The beam dependence on various parameters of the extraction systems is studied and the numerical results lead to qualitative conclusions.     

RF离子源引出特性的研究

 为了使RF离子源具有良好的引出特性，测试了吸极几何参数、振荡器板压和引出电压对离子源聚焦度的影响，对实验结果进行了分析。在其它参数不变的情况下，吸极的外径D与内径d之比存在最佳值，增加D/d，有利于过聚焦的离子束恢复聚焦状态。吸极的长度为L，石英套管比吸极长l。当l/D增大时，聚焦度上升，引出束流下降。L/d之比减小时，聚焦度增大。当L/d小于4时，聚焦度增加趋势变缓。综合考虑聚焦度、引出束流和气压，D/d，l/D，L/d适宜的选择范围分别为1.6～2.1，0.7～1.1,4～7。增加振荡器功率会使离子束呈弱聚焦，而增加引出电压会使离子束呈过聚焦。振荡器功率和引出电压都存在最佳值。     

强流ECR离子源引出系统研究

为了提高强流ECR 离子源的引出束流品质,分别设计了1# 和2# 引出系统,利用束流引出模拟软件PBGUNS 对1# 和2# 引出系统进行了质子束流引出与传输的模拟计算,结合实际测得的发射度数据分析引出系统,发现2# 引出系统比1# 引出系统引出束流品质高。对ECR 离子源引出系统的电势等位线分布等参数引起的球差进行了简单数学推导及MATLAB 绘图,并结合1# 和2# 引出系统束流相图模拟结果证明了球差会使引出束流品质有效发射度增长,通过适当加大电极孔径可改善束流聚焦情况,得到了束流光学聚焦较好的束流引出系统设计。To improve the quality of extracted ion beam from a high current ECR ion source, 1# and 2# extraction systems were designed and tested. The PBGUNS code was used to simulate the 1# and 2# extraction systems of proton ion beam. The emittance measurement results with the two different extraction systems were compared and analyzed with the simulation, the conclusion that more high quality beam extracted from 2# system than 1# system was got. The formula derivation of ECR ion source extraction system spherical aberration and MATLAB drawing was done by the analyzing on the distribution of extraction field equipotentials, effective emittance increasing caused by spherical berration was proved by 1# and 2# extraction systems beam phase space simulation result, beam focusing would be improved if electrode hole size increasing appropriately and a general concept on good optics focusing of ion beam extraction system was proposed finally.     

受空间电荷效应影响的离子束流从等离子体边界的最佳引出的一阶理论

The problem of extracting space-charge-limited ion beams from spherical emission boundaries is analyzed for simple,two electrode,parallel-plate and spherical sector electrode systems by application of Langmuir-Blodgett theory with account taken for the divergent lens effect caused by the aperture in the extraction electrode.Results derived from simulation studies for the three electrode system,designed for use with the Oak Ridge National Laboratory ECR ion source,complement predictions made from elementary analytical theory with or without magnetic field in the extraction region of the source.Under minimum half- angular divergence(minimum emittance)conditions,the plasma emission boundary has an optimum curvature and the perveance,P,(i.e,current density,j and extraction gap,d),has an optimum value for a given charge- state.From these studies,we find that the optimum perveance for any electrode system can be determined from the Child-Langmuir relation for the parallel-plate electrode system multiplied by a factor,F with value 0.49≤F≤1.     

基于气体放电等离子体射流源的模拟离子引出实验平台物理特性

离子引出过程是原子蒸气激光同位素分离中非常重要的物理过程之一,而其中关键的等离子体参数(等离子体初始密度和电子温度等)均会对离子引出特性产生影响.基于千赫兹电源驱动的氩气高压交流放电等离子体射流源,建立了离子引出模拟实验平台-2015 (IEX-2015),开发了用于诊断氩等离子体参数的"碰撞-辐射"模型,对等离子体射流区的电子温度和电子数密度等关键参数进行了测量.结果表明,电源输入功率和驱动频率以及工作气体流量均会对等离子体射流区的电子温度和数密度产生影响;在真空腔压强为10~(-2)Pa量级下,射流区电子数密度和电子温度的可调参数范围分别为10~9—10~(11)cm~(-3)和1.7—2.8 e V,这与实际离子引出过程中的等离子体参数范围相近.在此基础上,开展了不同引出电压、极板间距和电子数密度条件下初步的离子引出实验,所得到的离子引出电流变化规律亦与实际原子蒸气激光同位素分离中的离子引出特性定性一致.上述研究结果验证了在IEX-2015上开展离子引出模拟实验的可行性,为后续深入开展离子引出特性的实验研究准备了良好的条件.     

平行板静电场法离子引出的对称收集

离子引出的研究在AVLIS工程中有重要的意义，离子引出量和引出时间直接关系到整个系统 的离子收集效率. 在静电场中，由于等离子体屏蔽效应的存在，等离子体电位要高于正、负 极板的电位，而且在靠近正、负极板的两侧均存在鞘层. 理论模拟表明在正极板一边也可以 引出离子. 选取铯（Cs）作为实验对象，研究静电场对Cs等离子体的离子引出，使用安装在 两个极板上的法拉第筒收集离子引出信号. 实验结果表明，正极板确实可以引出离子，随着 外加电压的升高，从正极板一边引出离子的比率降低. 关键词： AVLIS 离子引出 等离子体     

Optimization of a quadrupole ion storage trap as a source for time-of-flight mass spectrometry

Designs of a quadrupole ion trap (QIT) as a source for time-of-flight (TOF) mass spectrometry are evaluated for mass resolution, ion trapping, and laser activation of trapped ions. Comparisons are made with the standard hyperbolic electrode ion trap geometry for TOF mass analysis in both linear and reflectron modes. A parallel-plate design for the QIT is found to give significantly improved TOF mass spectrometer performance. Effects of ion temperature, trapped ion cloud size, mass, and extraction field on mass resolution are investigated in detail by simulation of the TOF peak profiles. Mass resolution (m/Δm) values of several thousand are predicted even at room temperature with moderate extraction fields for the optimized design. The optimized design also allows larger radial ion collection size compared with the hyperbolic ion trap, without compromising the mass resolution. The proposed design of the QIT also improves the ion-laser interaction volume and photon collection efficiency for fluorescence measurements on trapped ions.     

Model of magnetically enhanced, capacitive RF discharges

Magnetically enhanced, capacitive RF discharges (called RF magnetrons or MERIE discharges) are playing an increasing role in thin film etching for integrated circuit processing. In these discharges, a weak DC magnetic field is imposed, lying parallel to the powered electrode surface. The authors determine the RF power transferred to the discharge electrons by the oscillating electron sheath in the presence of the magnetic field. Using this, along with particle and energy conservation, they obtain discharge parameters such as the ion flux and ion bombarding energy at the powered electrode as functions of pressure, RF power, and the magnetic field. Some results of the model show good agreement with experiments done on a commercial MERIE system     

New Applications of Langmuir Probes

In this work, two new possibilities for standard probe diagnostics are described. The first one can be used to study isotropic, collisionless low-pressure plasma in which the electron energy distribution function is close to a Maxwellian one. In such plasmas, the Boltzmann law, Bohm effect, and 3/2 power law are valid. Use of corresponding system of equations for cylindrical Langmuir probes allowed for measurements of probe sheath thicknesses and the mean ion mass. The solution of this task was provided by accurate probe diagnostics of inductive xenon plasma at pressure p = 2 mTorr that resulted in the determination of the Bohm coefficient C_BCyl = 1.22. The second possibility of probe diagnostics includes a method and device for evaluation of ion current density to a wall under a floating potential using a radially movable plane wall Langmuir probe simulator. This measurement in the same xenon plasma served as the basis for development of an ion source in which the given wall was represented by an ion extracting electrode of the ion extraction grid system.     

Positive ion extraction from plasma source and its application in fusion research

Neutral Beam Injection (NBI) is well established technique for heating tokamak plasma and is used in all fusion research programs [1–2]. In our Steady state Superconducting Tokamak (SST) machine [3], neutral hydrogen beam power of 0.5 MW at 30 kV is required to raise plasma ion temperature of ∼1 keV. Future upgrade of the SST will require 1.7 MW of H^o at 55 kV. To fulfill this requirement, an ion extractor system (heart of any NBI system) has been designed to extract 35A H⁺ beam current at 30 kV and of 90 A at 55 kV respectively [4]. In this paper, we have described the physics and ion beam optics study for an ion extraction system suitable for above mentioned long dynamic range of acceleration voltage. The ion beam optics simulation result is used as an input to the engineering design. After fabrication, its performance test has been done. The experimental results are in very good agreement with beam optics simulation.     

SECRAL在18GHz频率下产生强流高电荷态离子束的初步结果

A Superconducting ECR ion source with Advanced design in Lanzhou (SECRAL) was successfully built to produce intense beams of highly charged ions for Heavy Ion Research Facility in Lanzhou (HIRFL).The ion source has been optimized to be operated at 28GHz for its maximum performance.The superconducting magnet confinement configuration of the ion source consists of three axial solenoid coils and six sextupole coils with a cold iron structure as field booster and clamping.For 28GHz operation,the magnet assembly can produce peak mirror fields on axis 3.6T at injection,2.2T at extraction and a radial sextupole field of 2.0T at plasma chamber wall.A unique feature of SECRAL is that the three axial solenoid coils are located inside of the sextupole bore in order to reduce the interaction forces between the sextupole coils and the solenoid coils. During the ongoing commissioning phase at 18GHz with a stainless steel chamber,tests with various gases and some metals have been conducted with microwave power less than 3.2kW and it turned out the performance is very promising.Some record ion beam intensities have been produced,for instance,810eμA of O~(7 ),505eμA of Xe~(20 ),306eμA of Xe~(27 ),21eμA of Xe~(34 ),2.4eμA of Xe~(38 ) and so on.To reach better results for highly charged ion beams,further modifications such as an aluminium chamber with better cooling,higher microwave power and a movable extraction system will be done,and also emittance measurements are being prepared.     

Generation of an extraction electric field in an electromembrane ion source

A mechanism of generating an extraction field in an ion source in which a polymer track membrane with nanodimensional channels is used as an environment-vacuum interface is considered. A high electric field necessary for the effective extraction of ions from a liquid on the membrane surface into the gas phase is maintained by charging the vacuum surface of the membrane. Charging is provided by oppositely charged secondary ions resulting from the disintegration of primary cluster ions on the extraction electrode. A decrease in the source current observed when the vacuum surface discharges counts in favor of this mechanism. The extracted ion energy distribution in the neighborhood of the extraction zone is obtained by the retarding potential method. Various aspects of ion beam formation in the membrane ion source are discussed.     

Generation of a homogeneous plasma and wide ion beams in a penning system with a nonequipotential cathode

A study is made of the possibility of controlling the spatial distribution of the degree of ionization in a modified Penning cell with a cathode divided into several sections that are at different potentials. It is shown that an almost uniform plasma can be produced when applying an optimal potential of the control electrode. This enables the generation of wide ion beams in this system. An ion extraction efficiency of several tens of percent is achieved, which is substantially higher than in conventional ion sources.     

离子源引出系统研究

扩展Pierce理论的应用范围, 通过解析求解泊松方程和拉氏方程, 在固定发射面的情况下, 得到了在给定束流强度密度下带状平行束外空间电位分布的一般方法, 可为引出系统的设计提供一定的参考.     

Numerical simulation and design of a thermionic electron gun

This paper reports the simulation of an electron gun. The effects on the beam quality of some parameters on the beam quality were studied and optimal choices were identified. It gives numerical beam qualities for a common electrostatic triode gun, and the dependencies on design parameters such as electrode geometries and bias voltages to these electrodes are shown. An electron beam of diameter 5 mm with energy of 5 ke V was assumed for the simulation process. Some design parameters were identified as variable parameters in the presence of space charge.These parameters are the inclination angle of emission electrode, the applied voltage to the focusing electrode, the gap width between the emission electrode and the focusing electrode and the diameter of the focusing electrode. The triode extraction system is designed and optimized by using CST software(for Particle Beam Simulations). The physical design of the extraction system is given in this paper. From the simulation results, it is concluded that the inclination angle of the emission electrode is optimized at 22.5?, the applied voltage to the focusing electrode was optimized and found to be Vfoc =-600 V, the optimal separation distance(gap between emission electrode and focusing electrode) is 4 mm, and the optimal diameter of the emission electrode is 14 mm. Initial results for these efforts aimed at emittance improvement are also given.