真空退火对Ni80Fe20/Cu多层膜微结构的影响

用直流磁控溅射法在Si(001)衬底上制备了以Ta为缓冲层、含有15周期的Ni₈₀Fe₂₀（4nm)/Cu(6nm)多层膜.样品分别在150,250,350℃进行了真空退火处理.用低角和高角X射线衍射法研究了多层膜的微结构.结果表明,所有样品均有较好的[111] 取向,而且随退火温度或时间的增加,[111]取向程度变得更高.超晶格周期、平均面间距在退火后略有减小,表明多层膜结构在退火后变得更为致密.多层膜界面粗糙度随退火温度或时间的增加而增大,平均相关长度随退火温度或时间的增加而减小,分析认为这是由于Ni₈₀Fe₂₀/Cu界面存在严重的互扩散所导致的.模拟Ni₈₀Fe₂₀/Cu多层膜高角X射线衍射谱,发现在Ni₈₀Fe₂₀/Cu蜀面有非常厚的混合层存在,而且混合层厚度随退火温度或时间的增加而增大.模拟结果还表明,随退火温度或时间的增加,Ni₈₀Fe₂₀层面间距几乎保持不变,Cu层面间距则随退火温度的增加而略有减小. 关键词：     

高磁电阻磁性隧道结的几种微制备方法研究

利用金属掩模法优化了制备磁性隧道结的实验和工艺条件，金属掩模的狭缝宽度为100 μm. 采用4 nm厚的Co₇₅Fe₂₅为铁磁电极和10或08 nm厚的铝氧化物 为势垒膜， 直接制备出了室温隧穿磁电阻（TMR）为30%—48％的磁性隧道结，其结构为Ta(5 nm)/Cu(25 nm)/Ni₇₉Fe₂₁(5 nm)/Ir₂₂Mn₇₈(10 nm)/ Co₇₅Fe₂₅ (4 nm)/Al(08 nm)-O/Co₇₅Fe₂₅(4 nm)/Ni₇₉Fe ₂₁(20 nm)/Ta(5 nm).同时，利用刻槽打孔法和去胶掀离法两种光刻技术并结合Ar离子束刻蚀及化学反应刻 蚀，制备出面积在4 μm×8 μm—20 μm×40 μm、具有室温高TMR和低电阻的高质量磁性 隧道结.300 ℃ 退火前后其室温TMR可分别达到22% 和50%.研究结果表明，采用光刻中的刻 槽打孔或去胶掀离工艺方法制备的小尺寸磁性隧道结，可用于研制磁动态随机存储器和磁读 出头及其他传感器件的磁敏单元. 关键词： 磁性隧道结 隧穿磁电阻 金属掩模法 光刻法     

(Ni0.81Fe0.19)1－xCrx作为种子层对NiFe/PtMn双层膜交换偏置的影响

将NiFe/PtMn双层膜生长在(Ni_0.81Fe_0.19)_1-xCr_x种子层材料上，通过改变种子层中Cr的原子含量，系统的研究了NiFe/PtMn双层膜中PtMn晶粒尺寸和织构对交换偏置的影响.对退火270℃，5h后的NiFe/PtMn双层膜磁性的研究表明,PtMn织构强弱对交换偏置场的影响不明显，而PtMn的晶粒尺寸是影响交换偏置场的主要因素，PtMn颗粒的相干长度在11.3nm左右时得到了较大的交换偏置场. 关键词： NiFe/PtMn双层膜 交换偏置场     

Ni81Fe19/Cr82Al18双层膜中的交换偏置

研究了直流磁控溅射法制备的Ni₈₁Fe₁₉/Cr₈₂Al₁₈双层膜中的交换耦合.样品的室温矫顽力与1/t^{3/2_FM(t_FM为铁磁层厚度）近似成正比例关系,从而表明在Ni₈₁Fe₁₉/Cr₈₂Al₁₈中交换耦合为铁磁/反铁磁界面的随机相互作用.另外还讨论了反铁磁层厚度对交换偏置的影响. 关键词：}     

NiFe/Mo多层膜界面的电子显微学研究

用高分辨电子显微学方法研究了Ni₈₀Fe₂₀/Mo磁性多层膜，结果表明：(1)多层膜的结晶状态，随Mo非磁性层厚度而变化.当Mo层厚度为0.7nm时，多层膜基本为非晶；当Mo层厚度大于1.6nm时，Mo层和NiFe层内分别结晶为体心立方和面心立方多晶，层内晶粒尺寸为2—6nm.(2)在Mo层厚度为1.6和2.1nm的多层膜中，NiFe层和Mo层之间存在两种取向关系：(110)_Mo∥(111)_NiFe,［111］_关键词：     

BiFeO3/Ni81Fe19磁性双层膜中的交换偏置及其热稳定性研究

研究了磁场诱导生长的BiFeO₃/Ni₁₈Fe₁₉磁性双层膜中 的交换偏置及其热稳定性. 结果表明: BiFeO₃/Ni₁₈Fe₁₉双层膜中的交换偏置场H_ex未表现出明显的磁练习效应. 在负饱和磁场等待过程中, BiFeO₃/Ni₁₈Fe₁₉双层膜磁滞回线的前支和后支曲 线都随着在负饱和磁场中等待时间t_sat的增加向正场方向偏移. 交换偏置场H_ex的大小随着等待时间t_sat的增加而减小, 矫顽力H_c基本不变. 交换偏置场H_ex的大小随测量温度T_m的升高变化不明显, 表现出良好的热稳定性; 但矫顽力H_c随T_m的升高而显著减小. 良好的热稳定性应该来源于铁电性和反铁磁性间的共同耦合作用. 关键词： 多铁性 磁性薄膜 交换偏置 热稳定性     

衬底层对Fe65Co35合金薄膜结构与磁性的影响

采用磁控溅射法制备了具有不同衬底层(Cu, Co和Ni₈₀Fe₂₀)的FeFe₆₅Co₃₅双层合金薄膜.研究了不同衬底材料以及NiFe衬底层厚度对FeCo合金薄膜结构与磁性的影响.研究结果表明:衬底层的引入可以增加薄膜的面内单轴各向异性,且薄膜的软磁性能显著提升,获得良好软磁性的原因归结为晶粒的细化、层间的偶极相互作用以及表面粗糙度的降低,并且对于相同厚度的不同衬底层, NiFe衬底层对FeCo薄膜软磁性能的提升最为明显;通过改变NiFe衬底层厚度,实现了对薄膜各向异性的调控, NiFe/FeCo表现出良好的高频响应和低的阻尼系数,同时较小的薄膜厚度能够减小涡流损耗,因此,促进了其在高频微波磁性器件方面的应用.     

Nd-Fe-B/FeCo多层纳米复合膜的结构和磁性

制备了Nd₂₈Fe₆₆B₆/Fe₅₀Co₅₀多层纳米复合磁性薄膜，对溅射态和650℃退火处理15 min试样的相成分分析和微结构的观察显示，溅射态薄膜呈非晶态，经650℃退火处理15 min后，薄膜主要相成分为硬磁性Nd₂Fe₁₄B相和软磁性相FeCo(110)相.Nd₂Fe₁₄B相呈柱状，其易磁化c轴垂直于膜面，尺寸约10 nm.在硬磁性相和软磁性相之间存在少量富Nd相和非晶态，富Nd相大小约7 nm.磁性测量和分析表明，1)该系列薄膜退火态具有垂直于膜面的磁晶各向异性.2)对于固定厚度(10 nm)层Nd-Fe-B和不同厚度(t_FeCo=1—100 nm)层FeCo多层纳米复合膜,剩磁随软磁相FeCo 厚度的增加快速增加，而矫顽力则减小.当t_FeCo=5 nm时，最大磁能积达到200 kJ/m³. 3)硬磁相Nd-Fe-B层和软磁相FeCo层之间交换耦合导致剩磁和磁能积增强. 关键词： Nd-Fe-B/FeCo多层纳米复合膜 交换耦合 磁各向异性     

真空退火对周期性界面掺杂Ni80Co20薄膜磁性的影响

用磁控溅射方法制备了两个具有不同Fe层厚度的［Ni₈₀Co₂₀(L)/Fe(t_Fe)］_N多层膜系列样品,其中t_Fe=0.1和2nm.研究了两个系列样品的磁及输运性质随Ni₈₀Co₂₀层厚度L的变化关系.在退火态［Ni₈₀Co₂₀(L)/Fe(0.1nm)］_N系列样品中,发现各向异性磁电阻( 关键词： 多层膜 各向异性磁电阻 界面效应 退火     

Ni-Zr非晶合金晶化的透射电子显微镜研究(Ⅰ) ——Ni67Zr33晶化过程中的亚稳相

利用透射电子显微镜对Ni₆₇Zr₃₃非晶合金晶化的研究发现了两个新的亚稳相T₀与T₁0。其中T₁相为体心正交(准四方〕晶体,点阵常数a≌b=0.89nm,c=3.14nm,空间群为Iba2或Ibam。温度升高,T₁相转变为含有大量错排的A心正交Ni₁₀Zr₂相,用1/2(a+b)位移错排模型可以圆满地解释其电子衍射图中仅h+k为奇数的衍射斑沿c^*方向拉长的现象,晶化稳定相为Ni₁₀Zr,与Ni₂₁Zr₈(Ni₅Zr₂)相。 关键词：     

Structure and magnetoresistive properties of three-layer thin films of spin-valve type

Three-layer thin films of spin-valve type Co/Сu/Ni_xFe_100-x at x = 20–80 at.% were prepared by electron-beam sputter deposition. The investigated phase state and magnetoresistive properties were done for as-deposited and annealed to 400, 550, and 700 K films. The measurements of field dependences of magnetoresistance were held at different temperatures. It was demonstrated that phase state, crystal structure, and magnetoresistive properties of Co/Сu/Ni_xFe_100-x systems strongly dependent on both Ni_xFe_100-x composition Ni_xFe_100-x and heat treatment conditions.     

Argon and krypton ion-induced changes in permalloy thin films

The effects of 75-keV Ar and 100-keV Kr ion irradiations of 72-nm thin DC-sputtered permalloy (Ni₈₁Fe₁₉) films on Si(100) wafers were studied at fluences of up to 10¹⁶ ions/cm². The changes of the structural and magnetic properties were measured via X-ray diffraction, Rutherford backscattering spectroscopy, and magneto-optical Kerr effect. The irradiations increase the lattice constant and improve the crystallinity of the samples. They induce also strong changes of the magnetic polarisation and the coercive field for increasing ion fluence. The hysteresis loops suggest that, with increasing ion fluence, the reversal of the magnetisation changes gradually from rotation-dominated in the as-deposited films to domain-wall-motion dominated at the highest ion fluences. The results are compared with those obtained for Ni-, Cr-and Xe-ion irradiated permalloy films.     

Magnetic properties of permalloy multilayers with alternating perpendicular anisotropies

This work reports the magnetic properties of sputtered permalloy (Ni₈₀Fe₂₀) multilayers grown changing the anisotropy direction 90° in successive layers. Magnetic measurements show how the saturating field can be controlled by the thickness ratio between different anisotropy layers and how the coercive field is reduced increasing the number of layers. The linearity of the hysteresis loop is also improved when increasing the number of layers. Magnetic measurements are compared to simulations based on a Stoner-Wolfarth magnetization rotation mechanism.     

High sensitivity GMR with small hysteresis in Ni–Fe/Cu multilayers

Giant magnetoresistance (GMR) effect and magnetisation reversal processes have been investigated in Py/Cu(Py=Ni₈₃Fe₁₇,permalloy) multilayers (Mls) obtained by face-to-face sputtering method. The investigated films had constant sublayer thicknesses both for Py and Cu (d_Cu=2nm,d_Py=2nm) and various numbers of ferromagnetic sublayers. It has been shown that for such Mls a high field sensitivity of GMR effect (S≈0.4%/Oe) and negligible hysteresis can be obtained for a low number of Py layers.     

Evidence of bcc Mn epitaxial growth in Mn/M<Subscript>x</Subscript>V<Subscript>1–x</Subscript>(001) (M = Fe,Nb) superlattices

This study is dedicated to the growth of bcc Mn by molecular beam epitaxy, in order to look at the magnetic properties of bcc Mn near room temperature. For this purpose, Mn is deposited on bcc M_xV_1-x(001) alloy lattices (M = Fe or Nb) for which the lattice spacing is tunable by varying the concentration x. We first show that the parameter of the M_xV_1-x alloy's buffer layers can be adjusted from 2.95 ? to 3.3 ? depending on x and M. Three different structures in Mn films grown on these buffer layers are observed depending on the in-plane spacing of the initial M_xV_1-x lattice. Thick Mn films are always found to grow epitaxially in the Mnstructure. For moderate thicknesses larger than 4 atomic planes, Mn grows in an unidentified structure. Finally, up to four deposited atomic planes, Mn is found to grow in a tetragonal structure close to a bcc one on Fe(001), Fe_xV_1-x(001) and Nb_xV_1-x(001) for . This tetragonal structure is shown to be a distorsion of a Mn bcc structure with . Except for ultra-thin Mn films deposited on Fe(001), no macroscopic magnetization is detected in our strained bcc Mn samples. These results are compared to theoretical predictions. Received 21 June 1999     

Pulsed laser deposition of magnetic films by ablation of Co- and Fe-based amorphous alloys

Magnetic films were prepared by pulsed laser ablation of amorphous magnetic ribbons (composition Co₆₇Cr₇Fe₄Si₈B₁₄, Fe_73.5Nb₃Cu₁Si_13.5B₉, and Fe₄₀Ni₄₀B₂₀) and permalloy foils (composition Fe_xNi_1-x with x=22,50). Depositions were performed in a vacuum of (2–4)×10^-5 Pa by KrF excimer laser pulses at fluences of between 2 and 7 Jcm². Films were deposited on oxidized silicon wafers, placed 60–80 mm apart from the target. Films were analyzed by SEM, XRD, RBS, and EDS. Ferromagnetic resonance (FMR) spectra were studied at GHz frequencies. From RBS and EDS measurements it follows that the stoichiometry of the targets is preserved in the films to a large extent. The films deposited from amorphous targets remain amorphous. From FMR studies it follows that Fe and Fe-Ni rich films exhibit properties close to those of bulk alloys, having very low magnetization motion damping parameter () of 7.0–7.8×10⁷ rad/s, which are appropriate for fast magnetic sensors. PACS 79.20.Ds; 75.50.Kj; 75.70.-i     

Xenon-ion Induced Magnetic and Structural Modifications of Ferromagnetic Alloys

Thin polycrystalline films of permalloy (Ni₇₉Fe₂₁) and permendur (Co₅₀Fe₅₀) have been irradiated with Xe-ions to fluences of 10¹⁴–10¹⁶ ions/cm². Ion-induced structural and magnetic modifications have been measured by grazing angle X-ray diffraction, Rutherford backscattering and magneto-optical Kerr effect. In the case of permendur, the Xe-ion implantation first reduced the coercivity, because of stress relaxation, while higher ion fluences increased the coercivity due to pinning centers generated in the film. The ion irradiation aligned the in-plane easy axis of the magnetization along the direction of the external magnetic field during implantation. Phase shifts obtained from magnetic force microscopy confirmed these modifications. The effects of Xe-ion irradiation in permalloy films are much weaker and underline the importance of magnetostriction in the variation of the coercivity and anisotropy.     

The effect of Nb addition on the thermal stability and magnetic properties of Fe-based amorphous alloys with a wide supercooled liquid region

We have examined the effect of Nb addition on the thermal stability of the supercooled liquid before crystallization, the glass-forming ability and magnetic properties for the amorphous alloy series Fe₇₃Nb_xAl_5-xGe₂P₁₀C₆B₄ and Fe₆₃Co₇Nb_xZr_10-xB₂₀. The supercooled liquid regions (ΔT_x=T_x-T_g) have maximum values of 66 and 79K, respectively, for Fe₇₃Nb₁Al₄Ge₂P₁₀C₆B₄ and Fe₆₃Co₇Nb₄Zr₆B₂₀ alloys. The saturation magnetization σ_s of the Fe₇₃Nb_xAl_5-xGe₂P₁₀C₆B₄ alloy system is much higher than that of the Fe₆₃Co₇Nb_xZr_10-xB₂₀ alloy system, and is almost unchanged with an increasing Nb content from 0 to 3 at%. But the σ_s of the Fe₆₃Co₇Nb_xZr_10-xB₂₀ alloys decreases linearly with increasing Nb content. The coercive force H_c of the two alloy series can have a minimum value of 31A/m for Fe₇₃Nb₁Al₄Ge₂P₁₀C₆B₄ and 37A/m for Fe₆₃Co₇Nb₄Zr₆B₂₀. All these values are for the ribbons annealed at 773 and 873K for 15min in vacuum.     

Magnetic exchange bias enhancement through seed layer variation in FeMn/NiFe layered structures

The exchange bias and crystalline texture of the multilayer structure (Ta/Al/seed/Fe₅₀Mn₅₀/Ni₈₁Fe₁₉/Al₂O₃/Ni₈₁Fe₁₉/Al/Ta with seed=Ni₈₁Fe₁₉ or Ni₈₁Fe₁₉/Cu) has been characterized. Measurements indicate an abrupt decrease in exchange bias of the Ni₈₁Fe₁₉ pinned layer for samples with very thin seed layers, and exchange bias as high as 325 Oe for thicker seed layers. Fluctuation of exchange bias with thickness was greatly reduced for the Ni₈₁Fe₁₉/Cu seed configuration. X-ray diffraction measurements demonstrate a correlation between exchange bias and strong (1 1 1) texture of FeMn. The results suggest a high sensitivity of Ni₈₁Fe₁₉ roughness and texture on deposition conditions, and corroborate previous observations of roughness in ultrathin NiFe films.     

Superconducting and magnetic properties of Nb/Pd 1-xFex/Nb triple layers

The superconducting and magnetic properties of Nb/Pd_1-xFe_x/Nb triple layers with constant Nb layer thickness d_Nb=200 ? and different interlayer thicknesses 3 ?≤ d_PdFe ≤ ? are investigated. The thickness dependence of the magnetization and of the superconducting transition temperature shows that for small iron concentration x the Pd_1-xFe_x layer is likely to be in the paramagnetic state for very thin films whereas ferromagnetic order is established for x ≥ 0.13. The parallel critical field B_c2||(T){B_{c2||}}(T) exhibits a transition from two-dimensional (2D) behavior where the Nb films are coupled across the interlayer, towards a 2D behavior of decoupled Nb films with increasing d_PdFeand/or x. This transition allows a determination of the penetration depth x_F{\xi _F} of Cooper pairs into the Pd_1-xFe_x layer as a function of x. For samples with a ferromagnetic interlayer x_F{\xi _F} is found to be independent of x.