共查询到19条相似文献,搜索用时 187 毫秒
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为了制备大面积周期性微纳米结构以提高LED的发光效率,建立了劳厄德(Lloyd)干涉光刻系统。简单分析了该干涉光刻系统的工作原理,并介绍了利用干涉曝光工艺制备一维光栅、二维点阵、孔阵列等纳米结构图形的具体实验过程。最后对纳米图形进行结构转移,制备出了金属纳米结构。实验结果表明:利用劳厄德干涉光刻系统,可以在20 mm×20 mm大小的ITO衬底上稳定制备出周期为450 nm的均匀光栅或二维点阵列图形结构,它们的占空比也是可以调节变化的。 相似文献
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《光子学报》2015,(10)
建立了多光束干涉光刻干涉场内光强分布的数学模型,仿真计算了双光束、三光束、四光束干涉曝光情况下,入射光束存在角度偏差以及各入射光强不同时的干涉图样,并与理想状态的模拟结果进行对比.结果表明:光束入射角度偏差主要影响干涉图样的形状和周期;入射光的光强不同是降低图形对比度的主要因素.利用402nm波长激光光源进行多光束干涉光刻实验.设定激光器输出功率32mW,每两束光夹角为16°,通过控制曝光、显影工艺,双光束干涉光刻产生周期为1.4μm的光栅、点阵和孔阵结构,三光束干涉光刻产生周期为1.7μm的六边形图形阵列.该模型可为利用干涉光刻技术制备微细周期结构,提高光刻图形质量,提供一定的理论参考. 相似文献
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纳米压印模板通常采用极紫外光刻、聚焦离子束光刻和电子束光刻等传统光刻技术制备,成本较高.寻找一种简单、低成本的纳米压印模板制备方法以提升纳米压印光刻技术的应用成为研究的重点与难点.本文以多孔氧化铝为母模板,采用纳米压印光刻技术对纳米多孔硅模板的制备进行了研究.在硅基表面成功制备出纳米多孔阵列结构,孔间距为350—560 nm,孔径在170—480 nm,孔深为200 nm.在激发波长为514 nm时,拉曼光谱的测试结果表明,相对于单面抛光的硅片,纳米多孔结构的硅模板拉曼光强有了约12倍左右的提升,对提升硅基光电器件的应用具有重要的意义.最后,利用多孔硅模板作为纳米压印母模板,通过热压印技术,成功制备出了聚合物纳米柱软模板. 相似文献
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用二次阳极氧化方法制备出分立、双向贯通并且超薄(500—1000 nm)的多孔阳极氧化铝膜,贴合到硅片上进行干法刻蚀,实现图形转移,得到了硅基纳米孔阵列结构,并对工艺中影响图形转移质量的因素进行了探索.扫描电镜(SEM)测试结果表明该途径得到的纳米结构孔形态均匀且大面积有序,孔深度可达到125 nm.对该样品进行热氧化处理后进行光致发光(PL)测试,结果表明其光致发光机理是基于通常较微弱的TO声子辅助的硅带边发光,并实现了显著发光增强,对这种增强效果的物理机理进行了理论分析.该结构具有的独特光学特性为利用
关键词:
多孔阳极氧化铝模板
硅基纳米孔阵列结构
图形转移 相似文献
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利用表面等离激元短波长和近场增强效应的特性,用多束P偏振态相干光激发表面等离激元(SPPs),并优化干涉光刻的曝光参数,可获得高分辨率、高对比度周期性纳米结构.阐述了多束SPPs干涉法制备纳米光子晶体的原理,并得到了干涉场强度分布随光束增加的关系.随着干涉SPPs数目的增加,干涉场会复杂变化,对此进行了计算机模拟.模拟了三束SPPs和六束SPPs干涉的强度分布,并分析了调制技术干涉曝光结果,该方法适合光电子器件中大范围亚波长的周期性孔阵或点阵结构的制作以及纳米量级光子晶体的的制作,并可以有效降低制作成本. 相似文献
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S. Domínguez I. Cornago O. García M. Ezquer M.J. Rodríguez A.R. Lagunas J. Pérez-Conde J. Bravo 《Photonics and Nanostructures》2013,11(1):29-36
This paper presents the optimization of 2D photonic crystals (PCs) onto Si wafers to improve the performance of c-Si PV cells. The objective is to find a structure capable of minimizing the reflectance of the Si wafer in the spectral range between 400 nm and 1000 nm. The study has been limited to PCs that can be fabricated and characterized with the tools and technology available and to dimensions in the same order as the visible light wavelength. PCs with different shapes and dimensions have been simulated and finally the optimum structure has been fabricated by a process based on laser interference lithography (LIL) and reactive ion etching (RIE). This optimized PC presents an average reflectance of 3.6% in the selected wavelength range, without any other material used as antireflective coating. This result means a drastic reduction in comparison with reflectance obtained out of the standard wet etch texturization used in current solar cell manufacturing lines. 相似文献
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M. Ellman A. Rodríguez M. Echeverria C.S. Peng Z. Wang I. Ayerdi 《Applied Surface Science》2009,255(10):5537-5541
High throughput and low cost fabrication techniques in the sub-micrometer scale are attractive for the industry. Laser interference lithography (LIL) is a promising technique that can produce one, two and three-dimensional periodical patterns over large areas. In this work, two- and four-beam laser interference lithography systems are implemented to produce respectively one- and two-dimensional periodical patterns. A high-power single pulse of ∼8 ns is used as exposure process. The optimum exposure dose for a good feature patterning in a 600 nm layer of AZ-1505 photoresist deposited on silicon wafers is studied. The best aspect ratio is found for a laser fluence of 20 mJ/cm2. A method to control the width of the sub-micrometer structures based on controlling the resist thickness and the laser fluence is proposed. 相似文献
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S. Domínguez O. García M. Ezquer M.J. Rodríguez A.R. Lagunas J. Pérez-Conde J. Bravo 《Photonics and Nanostructures》2012,10(1):46-53
This paper presents a process to easily fabricate photonic crystals (PCs) on silicon to increase the efficiency of solar cells by reducing the sunlight reflection in the front surface of the cell. The process, based on laser interference lithography (LIL) and reactive ion etching (RIE), allows creating nanostructures over large areas with different shapes and dimensions. The reflectance of the resulting surface depends on the height, pitch, width and shape of the created PC. In this work, these parameters have been optimized by computer simulation and the best PC so far found has been fabricated on silicon. We obtain a normal reflectance under 10% in the spectral region between 500 and 900 nm without any other material employed as antireflecting coating. 相似文献
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We report on the fabrication of two-dimensional polymeric photonic crystal membranes on the surface of silicon using visible-light multibeam interference lithography. The structures are created by the interference of three beams of a green laser. A polymer buffer layer doped with a Rhodamine B laser dye, interlaid between the lithography layer and the silicon substrate, suppresses the effects of strong reflection and nonradiative absorption of silicon on the interference pattern. Large-area defect-free photonic crystal membranes are experimentally realized on silicon surface. 相似文献
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《Physica E: Low-dimensional Systems and Nanostructures》2003,16(3-4):568
An inexpensive method to produce a pyramidal-type 2D photonic structures in the silicon substrate was proposed. The method is based on the combination of imprint lithography and wet Si1 0 0 etching in water solution of hydrazine, which etches 1 1 1 faces much more slowly than others. Thermally grown SiO2 mask for the hydrazine etching was used, because single Al mask cannot be well bonded to the substrate and tends to peel during the etching. It was revealed that transmittance in the infrared spectrum region of the patterned silicon decreases by about five times compared with that of flat silicon substrate and this decrease is almost independent of the angle of the incident beam. In the infrared region, decrease of transmittance of the patterned samples is directly proportional to the wave number. The shape of formed pyramids has strong influence on the transmittance. Decrease of the transmittance is much more rapid and larger in the case of sharpless pillars. 相似文献
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S. Watanabe E. Pelucchi B. Dwir M. Baier K. Leifer E. Kapon 《Physica E: Low-dimensional Systems and Nanostructures》2004,21(2-4):193
We report on the growth and optical properties of dense arrays of single GaAs/AlGaAs quantum dot (QD) heterostructures with pitches as small as 300 nm. The samples were grown by organometallic chemical vapor deposition in dense inverted pyramids on {1 1 1}B GaAs substrate pre-patterned using electron beam lithography and wet chemical etching. The growth conditions such as deoxidation and growth temperatures, growth rates, and V/III ratio, had to be chosen quite differently from those employed with micron-size pyramids. Low-temperature micro-photoluminescence and cathodoluminescence spectra of the samples show distinct luminescence from the QDs with a linewidth of less than 1 meV and uniform emission energy for an ensemble of 900 QDs. The possibility of incorporating such QD arrays inside optical microcavity structures is also discussed. 相似文献
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This study presents the wetting properties, including hydrophilicity, hydrophobicity and anisotropic behavior, of water droplets on the silicon wafer surface with periodical nanopatterns and hierarchical structures. This study fabricates one- and two-dimensional periodical nanopatterns using laser interference lithography (LIL). The fabrication of hierarchical structures was effectively achieved by combining photolithography and LIL techniques. Unlike conventional fabrication methods, the LIL technique is mainly used to control the large-area design of periodical nanopatterns in this study. The minimum feature size for each nanopattern is 100 nm. This study shows that the wetting behavior of one-dimensional, two-dimensional, and hierarchical patterns can be obtained, benefiting the development of surface engineering for microfluidic systems. 相似文献
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Rung-Ywan Tsai Chung-Ta Cheng Chin-Tien Yang Shuen-Chen Chen Chun-Chieh Huang Shih-Wei Chen Wen-Haw Lu 《Optical Review》2013,20(2):185-188
The application of blue laser lithography for creating antireflective submicron structures on a crystalline silicon substrate was evaluated. The assembled blue laser lithography system was obtained by modifying a commercial blue laser optical pickup head and consisting of a 405-nm-wavelength blue laser and a 0.85-numerical-aperture objective lens. Si substrates were patterned with submicron column patterns of various periods and aspect ratios by blue laser lithography using a sputtered Ge-Sb-Sn-O layer as a resist. The reflectance of the patterned Si substrate decreased to 3% on average in the 300–1000 nm wavelength range, with a low sensitivity to the angle of incident light. Such patterned substrates showed potential for application in crystalline Si solar cells. 相似文献