Fe/Al混合膜的PLD法制备及表面分析

 采用脉冲激光气相沉积（PLD）技术制备了Fe/Al混合膜，测量了该混合膜的光电子能谱（XPS），并采用原子力显微镜（AFM）、扫描电子显微镜（SEM）对Fe/Al混合膜作了表面分析。结果表明：Fe/Al混合膜的表面粗糙度对衬底温度有明显的依赖性， 随着衬底温度的升高，薄膜的表面逐渐变得平滑，膜层变得致密，在200 ℃衬底温度下制得了均方根（rms）粗糙度为0.154 nm、具有原子尺度光滑性的Fe/Al混合膜， 膜中Fe和Al分布比较均匀，其成分比约为1∶3，同时XPS分析也表明Fe/Al混合膜暴露在空气中后表面形成了Al₂O₃和FeO氧化层。     

PLD方法制备的纳米Fe/Al薄膜的结构及应力分析

 采用PLD方法制备了Fe/Al合金薄膜，研究了Fe/Al合金薄膜的物相、结构、应力等。研究表明薄膜的沉积速率随着衬底温度的升高而降低。原子力显微镜（AFM）图像显示，薄膜表面平整、致密且光滑，均方根粗糙度小于1 nm。等离子体发射谱（ICP）表明Fe/Al原子比为1∶1。X射线小角衍射（XRD）分析表明薄膜中的物相是Al_0.5Fe_0.5，Al_0.5Fe_0.5晶体具有简单立方结构(SC)，晶格常数为0.297 nm，平均晶粒尺寸为81.74 nm，平均微畸变为0.007 6。     

纳米隧道结的制备和特性研究

结合对向靶直流磁控溅射技术、微电子光刻方法和原子力显微镜阳极氧化加工方法制备了实用的纳米钛-钛氧化线-钛隧道结，钛膜的厚度为3.02nm.钛氧化线的宽度为60.5nm，在室温下此隧道结的I-V曲线表现出明显的库仑阻塞效应. 关键词： 原子力显微镜阳极氧化 钛氧化线 隧道结 库仑阻塞效应     

Al/GaAs表面量子阱界面层的原位光调制反射光谱研究

用分子束外延（MBE）方法在GaAs表面量子阱上外延生长不同厚度的Al层，以超高真空下的原位光调制光谱（PR）作为测量手段，研究Al扩散形成的表面势垒层对于GaAs表面量子阱中带间跃迁峰位和峰形的影响.根据跃迁峰的变化，采用有效质量近似理论计算出了Al和GaAs 的互扩散长度为0.5nm，这是半导体工艺中的一个重要常数. 关键词： Al GaAs 原位光调制反射光谱（PR） 分子束外延（MBE）     

用PAA模板法实现硅基纳米孔阵列结构

用二次阳极氧化方法制备出分立、双向贯通并且超薄（500—1000 nm）的多孔阳极氧化铝膜,贴合到硅片上进行干法刻蚀,实现图形转移,得到了硅基纳米孔阵列结构,并对工艺中影响图形转移质量的因素进行了探索.扫描电镜（SEM）测试结果表明该途径得到的纳米结构孔形态均匀且大面积有序,孔深度可达到125 nm.对该样品进行热氧化处理后进行光致发光（PL）测试,结果表明其光致发光机理是基于通常较微弱的TO声子辅助的硅带边发光,并实现了显著发光增强,对这种增强效果的物理机理进行了理论分析.该结构具有的独特光学特性为利用 关键词： 多孔阳极氧化铝模板 硅基纳米孔阵列结构 图形转移     

低能Kr+离子束诱导蓝宝石晶体实验研究

使用微波回旋共振离子源制备蓝宝石(A向)自组织纳米结构,研究不同入射角度下Kr+离子束刻蚀蓝宝石表面形成的自组织纳米结构及其形成过程.采用等离子体与离子束刻蚀设备在不同入射角度下对蓝宝石样品表面进行刻蚀并通过Taylor Surf CCI2000非接触式表面测量仪和原子力显微镜分别对刻蚀后的蓝宝石样品的刻蚀速率及表面形貌进行分析.研究表明:当离子束能量为400eV,加速电压为200V,离子束流密度为310μA/cm2时,小角度入射下,蓝宝石样品表面出现纵向尺度较小的有序点状纳米结构;随着入射角度的增加,样品表面形成条纹状纳米结构,30°时形成短程有序且纵横比为0.87的条纹状结构;入射角度继续增加,纵向高度减小直至纳米结构消失;当角度达到60°附近,蓝宝石表面又出现条纹状结构,70°时形成了短程有序且纵横比为1.07的条纹状结构.自组织纳米结构的形成先以"岛状"形式出现,随后岛上生长出条纹状纳米结构,随着刻蚀时间的增加,岛状条纹结构纵向尺度增大且有序性增强,纳米结构的横向周期不变.     

扫描探针显微学中的云纹方法

在扫描探针显微镜（SPM）的扫描过程中，由SPM的扫描线与物质表面周期性晶格结构进行干 涉可以形成纳米云纹图像.采用高取向热解石墨（HOPG）和云母作为试件，分别对扫描隧道 显微镜（STM）和原子力显微镜（AFM）云纹进行了研究，实验结果与理论分析完全一致.SPM 纳米云纹法在纳米测量和表征方面具有较大的应用前景. 关键词： 云纹 SPM 晶格栅线 纳米测量     

一种可控纳米柱阵列的研制

在一次阳极氧化法制备多孔氧化铝(anodized aluminum oxide,AAO)的基础上,进行了二次、三次、四次氧化制备AAO,并对多次氧化制备多孔AAO的电流变化曲线和模板表面的形貌特点等进行了比较分析.二次、三次、四次氧化制备的AAO纳米孔孔径依次增大、孔间距减小,而模板表面的纳米孔有序性分布没有明显变化.控制一次氧化AAO模板的除膜时间,～10 min即可得到孔径规则、高度有序的AAO膜.最后,利用所制备的不同孔深和孔径的AAO为模板,通过热纳米压印复制技术制备了长度和直径等性质可控的PMMA纳米柱阵列. 关键词： 纳米柱阵列 聚甲基丙烯酸甲酯 多孔氧化铝模板 多次氧化法     

高聚物薄膜表面堆起结构的变温原子力显微术研究

利用原子力显微镜研究了不同温度（室温至58℃）及扫描速率（1—20μm/s）对高聚物PtBuA薄膜（厚度为133nm）表面上形成的突起结构和周期状堆起结构的影响.发现较快的扫描速率或较低的温度易产生随机的团状突起，较慢的扫描速率或较高的温度则易形成周期状突起结构（周期宽度约为100nm），且温度和扫描速率对周期状堆起结构的影响定性满足高聚物的时温等效关系.此外,当温度低于高聚物的玻璃化转变温度Tg时，表面粗糙度随扫描次数的增加而增加；高于Tg时，表面粗糙度基本不变.实验表明堆起结构的形成需要高聚物有较大的 关键词： 高聚物 原子力显微术 纳米技术     

W(110)面二维氧化的低能电子显微镜研究

应用低能电子显微术对W（110）面二维氧化结构进行了初步研究．随着氧暴露量的增加，低能电子衍射图样由清洁表面（1×1）结构转变成p（2×1），再变为带有复杂衍射卫星点的p（2×2）结构．利用低能电子显微术的暗场像模式，对（00）束附近的分数衍射斑点进行了放大成像，发现表面由两种对比度相差很大的区域组成，它们就是具有不同方位取向的氧超结构畴区．两种畴区的分布与衬底表面缺陷特别是表面台阶有一定的关系，而且温度对这种钨表面的二维氧化起着重要作用 关键词：     

Local band gap modulation of AlGaAs grown on patterned GaAs substrates

The growth of AlGaAs layers on patterned GaAs substrates by molecular-beam epitaxy is strongly determined by the interfacet surface migration of Ga adatoms, leading to a pronounced variation of the local Al concentration. Taking advantage of this migration process, we have overgrown mesa structures, that consist of intersecting stripes or partially overlapping squares, to obtain a local maximum or minimum, respectively, of the AlGaAs band gap on top of the mesas.     

Au标蛋白自组装表面增强拉曼光谱的研究

采用免疫Au标技术,用尺寸大约在13 nm的Au胶体颗粒标记了人血清蛋白(Human IgG),然后将Au标蛋白复合体固定在通过三氨基三乙氧基硅烷和戊二醛自组装单膜的Si片上。这种方法在基底表面上不仅牢固地固定了单层Au纳米颗粒标记的蛋白分子复合体而且提高了复合体的表面覆盖度,保持了生物分子的结构。利用原子力显微镜(AFM)观察了Au标蛋白的自组装表面。实验结果表明Au标蛋白在Si片表面聚积形成一定的Au标蛋白分子的复合体“岛状”单层,并且在这些岛状单层上获得了很明显的标记蛋白的表面增强拉曼散射(SERS)信号。文章在Si表面自组装了Au标蛋白分子,获得了较好的蛋白分子的SERS信号,提供了一种研究蛋白分子的SERS活性基底。     

The formation of sub-10 nm nanohole array on block copolymer thin films on gold surface using surface neutralization based on O2 plasma treatment and self-assembled monolayer

Blockcopolymer (BCP) lithography is an emerging nanolithography technique for fabrications of various nanoscale devices and materials. In this study, self-assembled BCP thin films having cylindrical nanoholes were prepared on gold by surface neutralization using self-assembled monolayer (SAM). Oxygen plasma treatment was investigated as a way to enhance the functionality of Au surface toward SAM formation. After surface neutralization, well-ordered nanoholes with 9 to 20 nm diameters were formed inside BCP thin films on Au surfaces through microphase separation. The effects of oxygen plasma treatment on the formation of BCP nanopattern were investigated using surface analysis techniques including X-ray photoelectron spectroscopy (XPS) and water contact angle measurement. Au nanodot arrays were fabricated on gold film by utilizing the BCP nanotemplate and investigated by atomic force microscopy (AFM).     

Inhibition effect of self-assembled films formed by gold nanoparticles on iron surface

The self-assembled (SA) films formed by gold nanoparticles on iron surface had been proved to have inhibition effect for the substrate in 0.5 M H₂SO₄ solutions. The inhibition action was investigated using electrochemical impedance spectroscopy (EIS). The SA films formed by gold nanoparticles protected with sodium oleate had better corrosion protection to the iron substrate than only by sodium oleate. Scanning electron microscopy (SEM) was used to observe the imagines of the SA films. In addition, it was found that the gold nanoparticles could influence the nickel electroless plating films on the iron substrate. The structure and composition of the plating films were test by electron probe microanalyzer (EPMA). The mechanisms of the formation of the SA films and the nickel electroless plating reaction were also discussed.     

Alloy formation at the Ni–Al interface for nickel films deposited on Al(110) surfaces

Alloy formation at the Ni–Al interface for thin nickel films deposited on Al(110) surfaces has been studied using high-energy ion scattering/channeling (HEIS) and X-ray photoelectron spectroscopy (XPS). For nickel atoms deposited at room temperature on Al(110), a large amount of nickel–aluminum intermixing occurs at the interface. For the first two monolayers (ML) of deposited nickel, an NiAl-like compound is formed. The intermixing continues with a different rate, forming an Ni₃Al-like compound for nickel coverages from 2 to 8 ML, at which point a nickel metal film begins to grow on the surface. Nickel atoms deposited at 250°C on the Al(110) surface exhibit no surface compound formation, but diffuse up to 400 Å into the aluminum substrate. Interatomic potentials based on the embedded-atom method (EAM) are used in a Monte Carlo approach to simulate the evolution of the Ni–Al(110) interface as a function of the nickel coverage. The calculated ion-scattering yields and X-ray photoelectron intensities from nickel and aluminum atoms in these simulated interfaces are in good quantitative agreement with the experimental results. The simulations show a high-density Ni–Al alloy forming at the Al(110) surface which apparently inhibits outward diffusion of aluminum, leading to the more nickel-rich alloy and finally nickel film growth. The ion-scattering simulations show an unusually large amount of backscattering occurring below the Ni–Al(110) interface, apparently associated with defocusing of the incident ion beam.     

Plasma-assisted surface treatment for low-temperature annealed ohmic contact on AlGaN/GaN heterostructure field-effect transistors

In this study, a low-temperature annealed ohmic contact process was proposed on Al Ga N/Ga N heterostructure field effect transistors(HFETs) with the assistance of inductively coupled plasma(ICP) surface treatment. The effect of ICP treatment process on the 2DEG channel as well as the formation mechanism of the low annealing temperature ohmic contact was investigated. An appropriate residual Al Ga N thickness and a plasma-induced damage are considered to contribute to the low-temperature annealed ohmic contact. By using a single Al layer to replace the conventional Ti/Al stacks, ohmic contact with a contact resistance of 0.35 ?·mm was obtained when annealed at 575?C for 3 min. Good ohmic contact was also obtained by annealing at 500?C for 20 min.     

Protection of iron against corrosion by coverage with Au nanoparticles and n-hexylthiol mixed films

Through a one-step thermal reaction, Au nanoparticles were synthesized and self-assembled mixed films of Au nanoparticles and n-hexylthiol were prepared on iron surface. The size distribution and shape of Au nanoparticles were examined using transmission electron microscopy (TEM). Results of two electrochemical methods - electrochemical impedance spectroscopy (EIS) and polarization curves indicate that self-assembled mixed films can form on the iron surface and prevent it from corrosion effectively. Energy-dispersive X-ray spectroscopy (EDS) and scanning electron microscopy (SEM) measurements were applied to identify the formation of the mixed films on iron surface.     

Growth of ultrathin Pd films on Al(001) surfaces

High-energy ion backscattering spectroscopy (HEIS) and X-ray photoelectron spectroscopy (XPS) were used to determine the growth mode and the interface structure of ultrathin Pd films deposited on Al(001) surfaces at room temperature. Measured Al and Pd surface peak areas for MeV He⁺ ions incident normal to the surface show that Pd atoms intermix with and displace Al substrate atoms. The mixing continues for Pd coverages from 0–5 monolayers, at which point a Pd metal film begins to grow on the alloy surface. XPS measurements of the Pd 3d photopeaks show a chemical shift that is consistent with the formation of an AlPd-like compound during the mixing phase, and Pd metal thereafter. HEIS results further reveal that the alloyed overlayer as well as the Pd metal film have some degree of axial alignment with respect to the Al substrate. The XPS intensity measurements are consistent with this two-stage growth model.     

Self-assembled pattern formation of block copolymers on the surface of the sphere using self-consistent field theory

The spherical surface is spatially discretized with triangular lattices to numerically calculate the Laplace-Beltrami operator contained in the self-consistent field theory (SCFT) equations using a finite volume method. Based on this method we have developed a spherical alternating-direction implicit (ADI) scheme for the first time to help extend real-space implementation of SCFT in 2D flat space to the surface of the sphere. By using this method, we simulate the equilibrium microphase separation morphology of block copolymers including AB diblocks, ABC linear triblocks and ABC star triblock copolymers occurred on the spherical surface. In general, two classes of microphase separation morphologies such as striped patterns for compositionally symmetric block copolymers and spotted patterns for asymmetric compositions have been found. In contrast to microphase separation morphology in 2D flat space, the geometrical characteristics of a sphere has a large influence on the self-assembled morphology. For striped patterns, several of spiral-form and ring-form patterns are found by changing the ratio of the radius of a sphere to the averaging width of the stripes. The specific pattern such as the striped and spotted pattern with intrinsic dislocations or defects stems from formed periodic patterns due to microphase separation of block copolymers arranged on the curved surface.