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1.
p型ZnO薄膜的制备及特性   总被引:1,自引:0,他引:1       下载免费PDF全文
采用射频磁控溅射在Si片上制备ZnO薄膜,通过离子注入对样品进行N掺杂,在不同温度下进行退火并实现了p型转变.用扫描电子显微镜、X射线衍射和Hall测量对薄膜进行了表征,结果表明薄膜具有良好的表面形貌和高度c轴择优取向,退火后p型ZnO薄膜的最高载流子浓度和最低电阻率分别为1.68×1016cm-3和41.5Ω·cm.讨论并分析了退火温度和时间对ZnO薄膜p型转变的影响.  相似文献   

2.
分别在n型半绝缘Si、弱n (n )以及强n (n+ )型Si片 (1 0 0 )面上用射频磁控反应溅射法和直流磁控反应溅射法制备了p型ZnO薄膜以及ZnO同质p n结。其中在生长p型ZnO时 ,反应室中通以过量的氧。对上述p型和n型ZnO薄膜进行了X射线衍射测量 ,在 34.1°附近得到了 0 .3°左右半峰全宽的ZnO(0 0 2 )衍射峰。ZnO薄膜的原子力显微镜图像上可见六角型的自组装结构。阴极射线荧光的测量显示了位于 390nm的紫外特征峰。用I V特性仪测量了上述ZnOp n结原型器件的I V电学输运曲线 ,其正向显示了约为 1 .1V的阈值 ,与日美科研人员用直流溅射和扩散法制备的ZnOp n结相似 ,但反向特性明显优于他们的  相似文献   

3.
原位氧化Zn3N2制备P型ZnO薄膜的性能研究   总被引:2,自引:0,他引:2       下载免费PDF全文
采用射频反应溅射法在玻璃衬底上制备Zn3N2薄膜,然后向真空室中通入纯氧气进行热氧化制备ZnO薄膜.利用X射线衍射、扫描电子显微镜、霍尔效应测量、透射光谱和光致发光光谱等表征技术,研究了氧化温度和氧化时间对ZnO薄膜的结晶质量、电学性质和光学性能的影响.研究结果显示,450℃下氧化2h后的样品中除含有ZnO外,还有Zn3N2成分,500℃下氧化2h可以制备出电阻率为0.7Ωcm,空穴载流子浓度为1017cm-3,空穴迁移率为0.9cm2/Vs的具有c轴择优取向的p型ZnO薄膜.此时的ZnO薄膜具有良好的光学特性,紫外可见光范围内透过率为85%,处于紫外区域的激子复合产生的发光峰很强,且半高宽较窄,而处于可见光部分来自于深能级发射的绿色发光峰很弱.这种工艺制备的ZnO薄膜质量较好,有利于实现在短波长光电器件方面的应用.  相似文献   

4.
王德义  高书霞  李刚  赵鸣 《物理学报》2010,59(5):3473-3480
采用溶胶-凝胶法在n型Si(100)衬底上沉积Li-N双掺杂ZnO薄膜,经X射线衍射和扫描电镜图片分析,所制备薄膜具有多晶纤锌矿结构和高的c轴择优取向.室温下霍尔效应测试结果显示Li-N双掺杂ZnO薄膜具有p型导电特性.在Li掺杂量为15.0at%,Li/N(摩尔比)为1∶1,700℃退火等优化条件下得到的最佳电学性能结果是:电阻率为0.34 Ω·cm,霍尔迁移率为16.43 cm2/V·s,载流子浓度为2.79×1019 cm-3关键词: Li-N双掺 p型ZnO薄膜 溶胶-凝胶 性能  相似文献   

5.
采用直流反应磁控溅射方法,通过改变衬底温度并优化生长参数,在玻璃衬底上生长了In-N共掺p型ZnO薄膜。X射线衍射(XRD)测试表明,所得薄膜结晶性能良好,且具有很好的c轴择优取向。Hall测试的结果所得p型ZnO薄膜最低电阻率为35.6Ω·cm,霍尔迁移率为0.111cm2·V-1·s-1,空穴浓度为1.57×1018cm-3。X光电子能谱(XPS)测试表明,铟元素已有效地掺入了ZnO薄膜中,且铟元素有效地促进了氮元素的掺入。紫外可见(UV)透射谱测试表明,在可见光范围内所有薄膜透光率均可达90%。  相似文献   

6.
李宏光 《光子学报》2012,41(6):695-699
Zn3N2是一种宽带隙半导体材料,在温度高于400°C氧化可生成p型ZnO:N,p型ZnO:N在电子学和光电子学领域有广泛的应用.在NH3-Ar气氛下,用RF磁控溅射金属Zn靶在玻璃衬底上室温制备了Zn3N2薄膜.用紫外-可见分光光度计、X射线衍射仪、X射线光电子谱分析仪、荧光分光光度计对Zn3N2薄膜的光学透过、光学吸收、结构、化学键态和光致发光进行了测量,研究了NH3分压对Zn3N2薄膜的结构和光学特性的影响.XRD分析表明Zn3N2薄膜呈现多晶结构,具有(321)择优取向,Zn3N2(321)衍射峰强度随NH3分压增加而增强.在NH3分压5%~10%制备的Zn3N2薄膜有较低透过率,透过率随NH3分压增加而提高.Zn3N2薄膜是间接带隙半导体,当NH3分压从5%变化到25%时,光学带隙从2.33eV升高到2.70eV.XPS分析表明Zn3N2薄膜在潮湿空气中容易水解.室温下Zn3N2薄膜在437nm和459nm波长出现了发光峰.  相似文献   

7.
常压MOCVD生长ZnO薄膜及其性质   总被引:1,自引:1,他引:0  
王立  莫春兰  熊传兵  蒲勇  陈玉凤  彭绍琴  江风益 《发光学报》2004,25(4):393-395,i001
用常压MOCVD在蓝宝石 (0 0 0 1)面上生长了氧化锌 (ZnO)薄膜。用AFM、室温PL谱、Hall测量、X射线双晶衍射、卢瑟福背散射 /沟道技术等分析方法研究了样品的表面形貌、结构性能、发光性能和电学性能。AFM分析结果显示 ,薄膜呈六角柱状结晶 ,表面平整 ,粗糙度 (RMS)为 6 .2 5 7nm ,平均晶粒直径达 1.895 μm。室温PL测量该样品在 380nm处有很强的近带边发射 ,半峰全宽为 15nm。使用Hall测量检查了薄膜的电学性质。室温下该样品的载流子浓度为 2× 10 17cm-3 ,迁移率为 75cm2 ·V-1·s-1。用X射线双晶衍射和卢瑟福背散射 /沟道效应研究了薄膜的结晶质量 ,样品的双晶衍射ω扫描半峰全宽为 0 .0 4° ,沟道效应的最小产额比χmin为 3.1%。  相似文献   

8.
分子束外延方法生长p型氧化锌薄膜   总被引:4,自引:4,他引:0  
用等离子辅助分子束外延 (P MBE)的方法 ,在蓝宝石c 平面上外延生长了p型氧化锌薄膜。在实验中采用高纯金属锌作为Zn源、NO作为O源和掺杂源 ,通过射频等离子体激活进行生长。在生长温度 30 0℃ ,NO气体流量为 1.0sccm ,射频功率为 30 0W的条件下 ,获得了重复性很好的p型ZnO ,且载流子浓度最大可达 1.2× 10 19cm-3 ,迁移率为 0 .0 5 35cm2 ·V-1·s-1,电阻率为 9.5Ω·cm。  相似文献   

9.
秦杰明  田立飞  蒋大勇  高尚  赵建勋  梁建成 《物理学报》2012,61(7):70702-070702
报道了利用ZnO和Li2O混合物在5GPa, 1200 ℃—1500 ℃条件下, 制备Li掺杂p型ZnO(记作ZnO: Li)固溶体的过程. 研究发现, 高压下温度对于ZnO: Li固溶体的导电类型以及结构具有较大的影响. 其中在1500 ℃条件下烧结的ZnO: Li(Li的掺杂量4.5%)表现出良好的p型电学性能, 其电阻率为3.1× 10-1Ω·cm, 载流子浓度为3.3× 1019cm-3, 迁移率为27.7cm2·V-1·s-1. 通过实验及理论计算确定了其受主能级为110meV, 讨论了压力对p型ZnO的形成和电学性能的影响.  相似文献   

10.
以金属锌(Zn)和金属铟(In)为靶材采用射频反应共溅射技术在硅(100)衬底上沉积了In掺杂ZnO薄膜。用X射线衍射仪、扫描电子显微镜(SEM)、热探针、四探针和荧光分光光度计分别对样品的结构、表面形貌、导电类型、电阻率和发光特性进行了分析表征。测试结果表明,实验中制备出的ZnO薄膜具有高度的c轴择优取向和小压应力(0.74GPa),薄膜表面平整。样品为n型导电,电阻率为1.6Ω·cm。在室温光致发光谱测量中,首次观察到位于415~433nm的强的蓝紫光双峰发射,发光双峰的半峰全宽约为400meV。讨论了In掺杂对薄膜发光特性的影响。  相似文献   

11.
Cyclic competition game models, particularly the “rock–paper–scissors” model, play important roles in exploring the problem of multi-species coexistence in spatially ecological systems. We propose an extended “rock–paper–scissors” game to model cyclic interactions among five species, and find that two of the five can coexistent when biodiversity disappears, which is different from the “rock–paper–scissors” game. As the number of fingers is five, we named the new model the “fingers” game, where the thumb, forefinger, middle finger, ring finger, and little finger cyclically dominate their subsequent species and are dominated by their former species. We investigate the “fingers” model in two ways: direct simulations and nonlinear partial differential equations. An important finding is that the number of species in a cyclic competition game has an influence on the emergence of biodiversity. To be specific, the “rock–paper–scissors” model is in favor of maintaining biodiversity in comparison with the “fingers” model when the variables (population size, reproduction rate, selection rate, and migration rate) are the same. It is also shown that the mobility and reproduction rate can promote or jeopardize biodiversity.  相似文献   

12.
The differences of the pitch and duration of Chinese syllables between Putonghua (PTH) and Taiwan Mandarin (TM) were studied. The speech materials to be used are not only isolated syllables, but also sentences. The results reveal that: For the isolated syllables, T1 and T2 in TM are influenced by Minnan dialect, therefore their pitch are lower than those in PTH. T3 is fall-rise in PTH, while it is fall in TM. Moreover, the syllable duration sequence for different tone is T3〉T2〉T1〉T4 in PTH, while it is T1〉T2〉T3〉T4 in TM. For the syllables in sentences, T2 is mid-rise in PTH, while it is mid-level in TM. And the T3 is longer than T4 but shorter than T1 or T2 in PTH, while it is the shortest in TM. Furthermore the effects of prosodic phrase boundary on duration for different tones are almost the same in PTH, but the lengthening part of T1 or T2 is longer than that of T3 or T4 in TM.  相似文献   

13.
Downstep in pitch contour of Chinese Putonghua is examined using subtly designed sentences by controlling tone combinations. The results show both automatic and nonautomatic downstep phenomena exist in Chinese. In non-automatic downstep, low tones compress downwards the pitch range of the following syllables. and the main influence of downstep is on topline. Low tone not only lower the topline behind it, but also raise the high tones before it, the effects are compatible with each other. In automatic downstep, the topline of pitch contour in intonational phrase is presented as a linear downtrend, but it differs among speakers due to the effect of personal stress practice. In comparison with downstep phenomenon in other tone or non-tone languages, the downstep ratio in Chinese is not constant, and the domain of downstep is not limited within the adjacent tones.  相似文献   

14.
It is shown that SU(2) QCD admits an dual Abelian-Higgs phase, with a Higgs vacuum of a type-Ⅱ superconductor. This is done by using a connection decomposition for the gluon field and the random-direction approximation. Using a bag picture with soft wall, we presented a calculational procedure for the glueball energy based on the recent proof for wall-vortices [Nucl. Phys. B 741(2006)1].  相似文献   

15.
A multi-conjugate adaptive optics (MCAO) can offer a possibility of widening field of view (FOV) characterized by the isoplanatic angle, and the choose of conjugate height becomes a basic problem for MCAO, which influences the size of iosplanatic angle. Considering the application of lidar, the isoplanatic angle's expressions of two deformable mirrors (DMs) MCAO for uplink and downlink are deduced. The effects of conjugate heights for dual-conjugate AO are thoughtfully discussed, and the isoplanatic angles are further analyzed. The results show that the isopanatic angle varies with the conjugate height and reaches the maximum as the conjugate height is at the optimal altitude. Moreover, the optimal conjugate height changes with the propagation distance.  相似文献   

16.
Due to the limit of response speed of the present single-photon detector, the code rate is still too low to come into practical use for the present quantum key distribution (QKD) system.A new idea is put up to design a quick single-photon detector.This quick single-photon detector is composed of a multi-port optic-fiber splitter and many avalanche photo diodes (APDs).Au of the ports with APDs work on the time division and cooperate with a logic discriminating and deciding unit driven by the clock signal.The operation frequency lies on the number N of ports, and can reach N times of the conventional single-photon detector.The single-photon prompt detection can come true for high repetition-rate pulses.The applying of this detector will largely raise the code rate of the QKD, and boost the commercial use.  相似文献   

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19.
Based on the research in Ref. [5][Materials Science and Engineering, 1989; A122: 57 63], an improved model of heat source is set up, the different modes of Lamb wave in an isotropic sample generated by a chopped electron beam at frequency f are obtained with integral transform and normal function expansion method, and the output signal of PZT coupled at the back surface of the sample is found out. The generation mechanism of SEAM (Scanning Electron Acoustic Microscopy) signal is discussed. It shows that the SEAM is a near field imaging technique with high spatial resolution and its best lateral spatial resolution is about 2√2α (α is the radius of the focused electron beam). Some of experimental results of SEAM images are presented in the paper and it shows that the spatial resolution of SEAM is better than 0.5 μm and smaller than the thermal diffusion length of the sample. Therefore the character of near field imaging in SEAM is also proved experimentally.  相似文献   

20.
Transmission spectra of coupled cavity structures (CCSs) in two-dimensional (2D) photonic crystals (PCs) are investigated using a coupled mode theory, and an optical filter based on CCS is proposed. The performance of the filter is investigated using finite-difference time-domain (FDTD) method, and the results show that within a very short coupling distance of about 3λ, where λ is the wavelength of signal in vacuum, the incident signals with different frequencies are separated into different channels with a contrast ratio of 20 dB. The advantages of this kind of filter are small size and easily tunable operation frequencies.  相似文献   

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