硅基二氧化硅阵列波导光栅制作工艺的研究

硅基二氧化硅阵列波导光栅是集成化波分复用光网络中的核心器件之一.对其制作工艺的研究对提高器件的性能具有重大意义.提出一种在波导上包层使用硼锗共掺高温退火的工艺方法,成功实现阵列波导间空隙的填充,并将阵列波导光栅的插入损耗成功降低约2 dB.相对于传统的硼磷硅玻璃工艺,此方法避免了剧毒气体磷烷的使用,工艺简便安全,同时降...     

阵列波导光栅线性系统理论分析及优化设计

运用线性系统理论分析了阵列波导光栅的模场特性 ,导出器件传输的数学模型即光栅方程。提出了设计阵列波导光栅阵列波导数M的新方法 ,该方法综合考虑了降低器件串扰以及收集发散光场的能力 ,与文献 [1 ]的方法相比简单且准确。分析了造成器件衍射损耗的原因 ,提出了降低器件衍射损耗的方法。给出了 8× 0 .8nm ,中心波长为 1 550nm的阵列波导光栅波分复用器的设计实例 ,并进行了数值模拟计算验证了文中所提方法的准确性。     

阵列波导光栅的简便模拟方法及应用

结合等效折射率方法并利用高斯光束近似给出了一种简便的模拟计算阵列波导光栅方法,可实现AWG锔模拟模拟计算结果与理论公式计算结果吻合利用这种模拟方法,模拟了一个阵列波导光栅(AWG)实例,并考察了阵列波导条数对器件性能的影响,最后分析了制造工艺误差对器件性能的影响     

低插入损耗阵列波导光栅的设计

研究了阵列波导光栅的插入损耗.针对损耗来源,讨论了各项损耗的研究方法.分析了结构参量对损耗的影响,讨论了降低损耗的设计思路.对结构参量进行优化,设计了8通道200 GHz间隔的阵列波导光栅,中心通道插入损耗为1.37 dB,低于目前商用器件的1/2.对阵列波导光栅的设计具有一定的指导意义.     

减少聚合物阵列波导光栅损耗的蒸气回溶技术

阵列波导光栅(AWG)器件是波分复用(WDM)系统的一种关键器件,其中,聚合物阵列波导光栅由于其制备工艺、器件集成等方面的优势而受到人们的日益关注。侧壁散射损耗是聚合物阵列波导光栅损耗的一个主要因素,减少阵列波导光栅波导的侧壁损耗对制备低损耗阵列波导光栅具有重要意义。一种蒸气回溶技术被用来有效地减少硅基聚合物阵列波导光栅的散射损耗,该技术的机理是饱和溶剂分子融入并软化波导侧壁,增加其流动性,从而降低波导侧壁粗糙度。用扫描电镜方法验证了用该技术能获得更光滑的波导侧壁。对直波导和阵列波导光栅样品进行回溶处理,测试后得到直波导的侧壁散射损耗减少2.1 dB/cm,阵列波导光栅中心信道和周边信道的插入损耗分别减少5.5 dB和6.7 dB,串扰减少2.5 dB。     

基于阵列波导光栅的光纤布拉格光栅解调技术综述

基于阵列波导光栅的光子集成解调技术是硅光领域的研究热点和难点.相比传统解调方法,基于阵列波导光栅的光子集成解调技术因其解调精度高、解调速度快、封装体积小等优势,在光纤布拉格光栅的高速、高精度解调上具有明显优势.近年来,随着光子集成技术的发展,各科研院所和相关机构对阵列波导光栅的光子集成解调法进行了广泛深入的研究与优化.本文通过介绍阵列波导光栅工作原理及基于阵列波导光栅的光纤布拉格光栅波长解调原理,结合基于阵列波导光栅的光纤布拉格光栅解调仪在材料体系和系统性能两个方面的重要进展,归纳了基于阵列波导光栅的解调仪的典型应用场景,从新材料、系统集成和规模化三方面对光纤布拉格光栅解调系统的未来发展提出针对性建议,为基于阵列波导光栅的光子集成解调技术的研究发展提供参考.     

InP阵列波导光栅的误差分析

在InP阵列波导光栅的制作过程中会引入不同的误差,从而影响器件的性能.为了最大限度地控制误差,提高半导体器件性能,本文采用传输函数法对InP基阵列波导光栅的系统误差和随机误差分别进行了分析.从系统误差的模拟结果中可以得到如下结论:深脊型波导的有效折射率n_c平均每偏移+0.000 1,中心波长偏移+0.05nm.相邻阵列波导长度差ΔL每偏移+0.01 μm,中心波长将偏移+0.44 nm.n_c和ΔL仅仅会影响到传输谱中心通道及其他各通道对应的波长,使得传输谱发生整体漂移,而信道间隔及串扰不会改变.罗兰圆半径R偏移不会影响器件的中心通道对应的波长,但会使其它通道对应的波长发生变化,最终使得信道间隔改变,R增加50 μm,信道间隔减小0.03 nm.从随机误差模拟结果中,得出:波导芯区折射率、上包层折射率、衬底折射率、波导宽度和波导芯层厚度的随机波动会对阵列波导光栅的串扰产生较大的影响.根据以上分析,可以通过控制不同参量来调节器件的中心波长以及信道间隔等来优化阵列波导光栅的光学性能.     

阵列波导光栅解调系统光电集成中Si纳米线AWG的设计

设计了一种阵列波导光栅解调集成系统中的8通道Si纳米线阵列波导光栅波分复用器。根据材料的折射率设计了单模波导截面尺寸,利用光束传播法对所设计阵列波导光栅进行了模拟。结果表明,器件尺寸为200μm×219μm,远小于目前技术较成熟的硅基SiO2的尺寸,光功率分布符合高斯分布,信道间隔为1.8nm,串扰小于-21dB。对小尺寸AWG的设计具有参考意义。     

阵列波导光栅平坦化的研究

阵列波导光栅的平坦化在实际应用中有很重要的意义.本文系统地研究了阵列波导光栅的平坦化.在输入波导、输出波导、阵列波导输入端与输出端上分别引入了指数型锥形波导.通过改变锥形波导的形状和尺寸来实现平坦化的优化.本文首先从理论上论述了引入指数型锥形波导的输出光谱特性,给出了结构参量的关系表达式,阐明了输入波导处的锥形波导是影响输出光谱平坦化的主要因素,阵列波导和输出波导处的锥形波导对输出光谱的平坦化有一定的影响.其次采用数值模拟的方法模拟了输出光谱,优化了结构参量,总结出了指数型锥形波导对平坦化影响的趋势和规律.模拟结果显示,输出光谱1 dB带宽大于通道间隔的50％,插入损耗从5.2 dB减小到了4.0 dB,串扰小于-30 dB.最后,本文给出了实验结果,插入损耗减小了0.87 dB,串扰减小了3.67 dB,1 dB带宽增加0.1 nm,增加了54.7％.实验结果表明引入指数型锥形波导提高了阵列波导光栅器件的光谱性能.     

阵列波导光栅平坦化的研究

阵列波导光栅的平坦化在实际应用中有很重要的意义.本文系统地研究了阵列波导光栅的平坦化.在输入波导、输出波导、阵列波导输入端与输出端上分别引入了指数型锥形波导.通过改变锥形波导的形状和尺寸来实现平坦化的优化.本文首先从理论上论述了引入指数型锥形波导的输出光谱特性,给出了结构参量的关系表达式,阐明了输入波导处的锥形波导是影响输出光谱平坦化的主要因素,阵列波导和输出波导处的锥形波导对输出光谱的平坦化有一定的影响.其次采用数值模拟的方法模拟了输出光谱,优化了结构参量,总结出了指数型锥形波导对平坦化影响的趋势和规律.模拟结果显示,输出光谱1 dB带宽大于通道间隔的50%,插入损耗从5.2 dB减小到了4.0 dB,串扰小于-30 dB.最后,本文给出了实验结果,插入损耗减小了0.87 dB,串扰减小了3.67 dB,1 dB带宽增加0.1 nm,增加了54.7%.实验结果表明引入指数型锥形波导提高了阵列波导光栅器件的光谱性能.     

Design of flat-field arrayed waveguide grating with three stigmatic points

A new-type flat-field arrayed waveguide grating (AWG), with the focal signals of all wavelengths of operation focusing along a straight line, has been designed. The work bases on the aberration theory of AWG, in which the restraints imposed on the conventional Rowland-type AWG have been released. In the design of flat-field AWG, three stigmatic points restrain three dominant geometry parameters: geometry of star couplers, ports distribution of phased-array, and length increment between adjacent paths. An eight-channel 200-GHz spacing flat-field AWG has been designed and simulated. As stigmatic points introduced, the aberration of this device is much lower than that of the Rowland-type AWG.     

二维消像差平面场型凹面光栅的设计与成像分析

给出了二维消像差平面场型凹面光栅的一般设计方法，推导了三点消像差光栅的成像条件，分析了平面场型光栅的成像质量与色散、分辨率及光栅宽度的关系。     

16×0.8nm硅基二氧化硅阵列波导光栅设计

给出了更为合理的阵列波导光栅(AWG)的设计原则。在设计时兼顾了输出谱的非均匀性Lu和输出通道数N的要求,克服了设计中可能引起通道数N丢失和不考虑输出谱非均匀性Lu的缺点。用该方法设计了折射率差为0 75%和16×0 8nm的硅基二氧化硅AWG。采用广角有限差分束传播方法(FD BPM)对所设计的AWG进行了输出谱的模拟,得到了插损为 1.5dB、串扰为 48dB、通道非均匀性约为1dB的AWG,设计指标达到了商用要求。     

A novel asymmetric arrayed waveguide grating with different lengths of input/output slabs

A novel arrayed waveguide grating (AWG) with asymmetric configuration is proposed. In this configuration, the length of the output slab region, the width and the spacing of the output waveguides are unequal to the corresponding parts of the input ones. Compared to a conventional symmetric AWG, the asymmetric AWG proposed in this paper has a smaller size without degrading its performance The analytic method used in a conventional symmetric AWG is extended to the asymmetric AWG. A design example of an asymmetric AWG with low insertion loss, low channel crosstalk and wide bandwidth is presented.     

两点法设计平场型EDG波分复用器件

利用两点法(two stigmatic points method)对平场型蚀刻衍射光栅(EDG)波分复用器件进行了优化设计.与传统EDG相比,该方法以较小的性能损失为代价,极大简化了制作工艺.通过标量波动衍射理论对16通道的该型器件进行了数值模拟,结果表明:在用光探测器陈列接收的情况下,额外的功率损耗约为1dB,信道间的不均匀性小于0.3dB,串绕小于-30dB.     

Modeling of arrayed waveguide grating for wavelength interrogation application

We have proposed and discussed a design of arrayed waveguide grating (AWG) for the application of wavelength interrogation. The spectral responses of a silica-based 16 channel AWG with channel spacing 1.6 nm have been simulated when different receiver waveguide spacing are used. It was found that the 3-dB bandwidth is reduced about 50% as the receiver waveguide spacing increasing from 20 μm to 30 μm. The effect of bandwidth of the spectral response on wavelength resolution of AWG based interrogator has been estimated and discussed.     

Calculation of the spectral response of an arrayed-waveguide gating demultiplexer with a wide-angle beam propagation method in a cylindrical coordinate system

The spectral response of an arrayed-waveguide grating (AWG) demultiplexer is calculated by simulating the field propagation in the output section of an AWG with a wide-angle beam propagation method (BPM) in a cylindrical coordinate system. As in a practical design of an AWG demultiplexer, each output waveguide consists of two straight sections connected by a bending section. The spectral response obtained by the present algorithm is more accurate than those obtained with two popular approximate methods, namely, the conventional overlapped integral method and the standard BPM for radially straight and infinitely long output waveguides. With the present algorithm, the dependence of the spectral response on the parameters of the output section is analyzed. The channel crosstalk and the 3 dB passband width of the spectral response depend mainly on the length of the first straight section, the end separation and the angular separation of the output waveguides. The bending section results in an asymmetrical spectral response with remarkable sidelobes which can be reduced by increasing the bending radius.     

Optimization of Optical Add-Drop Multiplexers Based on Arrayed Waveguide Gratings with Fabrication Errors for Transparent Optical Networks

A transparent optical network (TON) composed by optical add-drop multiplexers based on arrayed waveguide grating (AWG) with fabrication errors is optimized for 10 Gbit/s per channel and channel spacing of 25 GHz. The optimization takes into account the effect of inter-symbol interference, amplified spontaneous emission noise accumulation, and coherent and incoherent homodyne crosstalk. Numerical results reveal that AWG fabrication errors can have a high influence on the TON performance; however, in all investigated situations, they do not affect the AWG parameters values corresponding to the optimum AWG frequency response. This surprising behavior is due to the fabrication errors affect mainly the AWG response outside the passband for the required AWG crosstalk level. It is shown that the optimum AWG frequency response is a flat-top response with a mean amplitude response outside the passband lower than -30 dB and the switch isolation should exceed 30 dB.     

基于阵列波导光栅的快速波长检测方法

针对现有波长检测技术的不足,提出一种采用阵列波导光栅（AWG）进行波长快速检测的方法,该方法利用AWG对波长信号进行空间分离,将波长信号转化为光场强度信号,利用传统的光场强度检测手段实现波长检测。给出了分析这种检测方法光学特性的数学模型,应用此模型,分析了AWG性能参数对波长检测性能的影响。分析表明：待检测的波长信号可以通过AWG相邻通道的功率比的对数值进行线性表达;减小AWG通道波长间隔或其半波全宽（3dB带宽）可以提高波长检测灵敏度;此方法对AWG的通道不平坦度不敏感;通过对AWG进行±0．1℃的温度控制,此方法可以达到±0．005nm的波长检测精度。