Incident laser modulation of a repaired damage site with a rim in fused silica rear subsurface

Local CO2 laser treatment has proved to be an effective method to prevent the 351-nm laser-induced damage sites in a fused silica surface from exponentially growing, which is responsible for limiting the lifetime of optics in high fluence laser systems. However, the CO2 laser induced ablation crater is often surrounded by a raised rim at the edge, which can also result in the intensification of transmitted ultraviolet light that may damage the downstream optics. In this work, the three-dimensional finite-difference time-domain method is developed to simulate the distribution of electrical field intensity in the vicinity of the CO2 laser mitigated damage site located in the exit subsurface of fused silica. The simulated results show that the repaired damage sites with raised rims cause more notable modulation to the incident laser than those without rims. Specifically, we present a theoretical model of using dimpled patterning to control the rim structure around the edge of repaired damage sites to avoid damage to downstream optics. The calculated results accord well with previous experimental results and the underlying physical mechanism is analysed in detail.     

熔石英亚表面横向划痕调制作用的3维模拟

建立了熔石英后表面3维横向划痕模型,并采用3维时域有限差分方法对熔石英亚表面划痕周围的电场强度进行了数值模拟,分析了划痕宽度、深度、长度以及划痕倾斜角度对入射光场的调制作用,结果表明:随划痕深度和划痕长度的增加,熔石英内的最大电场强度增大,且当划痕长度达到1μm以上时,最大电场强度趋于稳定;划痕结构因子在1~2之间的划痕较容易引起熔石英损伤;而入射激光在划痕界面和后表面之间发生内全反射时,后表面上的光强增强效果更加明显,因此减少角度范围在20.9°~45°之内的划痕能大幅提高熔石英的损伤阈值。     

The electric field modulation by three-dimensional crack on fused silica subsurface

The main factor of laser-induced damage is the modulation to electromagnetic field of laser by the crack on the subsurface. In this paper, a three-dimensional crack model on the exit surface is presented. Three-dimensional finite-difference time-domain (FDTD) method is employed to simulate the electric field intensity distribution in the vicinity of crack on fused silica subsurface. The roles of the crack width, depth, length and the gradient angle in the modulation to the incident light field are analyzed in detail. Results show that the crack size plays an important role in the electric modulation. With the increasing depth and width, the peak value of maximal electric field intensity appears in fused silica. However, the maximal electric field intensity tends to be a constant when the crack length reaches 1 μm. Besides, the enhancement of light intensity becomes obvious when total internal reflection occurs in fused silica. Our calculated results provide an advisable theoretical criterion to the corresponding experiment.     

The electric field modulation by lateral crack coated with HfO2/SiO2 high reflector

High-dielectric constant multilayer coatings are commonly used on optics to increase the laser damage resistance of optics. In this work, the three-dimensional finite-difference time-domain is improved to simulate the electric field intensity distribution in the silica–hafnia multilayer coatings on fused silica subsurface with lateral crack. Results reveal that as the substrate is defect-free, the largest intensification is at the surface layer, especially in the hafnia layer. As the lateral crack appears on the subsurface of fused silica, the intensified sites are mainly located at distorted coatings layers. Dependences of peak LIEF on crack's parameters are detailed investigated. Results show that laser intensification is more sensitive to its width, and the modulation of lateral defect with silica–hafnia multilayer is greater than nodular defect as its width larger than 5λ.     

Numerical simulation of modulation to incident laser by submicron to micron surface contaminants on fused silica

Modulation caused by surface/subsurface contaminants is one of the important factors for laser-induced damage of fused silica. In this work, a three-dimensional finite-difference time-domain(3D-FDTD) method is employed to simulate the electric field intensity distribution in the vicinity of particulate contaminants on fused silica surface. The simulated results reveal that the contaminant on both the input and output surfaces plays an important role in the electric field modulation of the incident laser. The influences of the shape, size, embedded depth, dielectric constant(εr), and the number of contaminant particles on the electric field distribution are discussed in detail. Meanwhile, the corresponding physical mechanism is analyzed theoretically.     

熔石英亚表面修复形貌对光场的调制

基于标量衍射理论, 计算了熔石英亚表面高斯型修复形貌对于光场的调制，用Matlab对结果进行了仿真并与实验结果进行了比较。所得结果表明，二者有较好的一致性, 一定尺度的高斯面型修复形貌会对光场产生调制，且调制度随光场传输位置变化，通过适当选择后续光学元件位置，可降低光场调制造成光学元件损伤的风险。     

Effect of fused silica subsurface defect site density on light intensification

The effect of defect density on the modulation of incident laser waves is investigated. First, based on the actual defect distribution in the subsurface of fused silica, a three-dimensional (3D) grid model of defect sites is constructed. The 3D finite-difference time-domain method is developed to solve the Maxwell equations. Then the electrical field intensity in the vicinity of the defect sites in the subsurface of fused silica is numerically calculated. The relationships between the maximal electrical field intensity in fused silica and the geometry of the defect sites are given. The simulated results reveal that the modulation becomes more remarkable with an increase of the defect density. In addition, the effect of the distribution mode of defects on modulation is discussed. Meanwhile, the underlying physical mechanism is analyzed in detail.     

熔石英亚表面三维Hertz锥形划痕附近光强分布的数值模拟

熔石英亚表面划痕对入射激光的调制是导致光学材料损伤的主要因素.本文建立了熔石英后表面上三维Hertz锥形划痕模型,采用三维时域有限差分方法对划痕周围的电场强度进行了计算模拟,并分别讨论了划痕的深度、半径以及倾斜角度对入射光场调制作用的影响.结果表明：Hertz锥形划痕中心区域的电场增强效果最明显,最容易被辐照损伤;划痕的深度从λ变化到9.5λ的过程中,熔石英内的最大电场强度逐渐增大;半径小于15λ的Hertz锥形划痕较容易引起熔石英的损伤,当半径大于175λ时,熔石英内的最大电场强度都维持在2.5 V/m,不再受半径大小影响;当入射激光在划痕的内侧界面和熔石英后表面之间发生内全反射时,光场增强效果愈加明显. 关键词： 三维时域有限差分 Hertz锥形划痕 电场分布 数值模拟     

激光诱导光学材料后表面损伤的数值模拟

 采用3维时域有限差分方法和完全匹配吸收层,模拟了长方体缺陷在熔石英前后表面时对入射激光为TM波的调制作用,绘出了截面上的电场强度分布及最大电场强度随熔石英深度变化的曲线,并进行了比较和分析。结果表明：缺陷在前表面上时,后表面附近的最大电场强度2.522 41 V/m大于缺陷附近的1958 83 V/m;缺陷在后表面上时,材料中的最大电场强度为2.799 38 V/m,且出现在后表面附近。无论该缺陷在前表面还是在后表面,最大电场强度都是出现在后表面附近,表明光学材料的后表面在一定程度上更容易被损伤。     

裂纹或气泡对熔石英损伤修复坑场调制的近场模拟

建立了含有裂纹或气泡的高斯型修复坑的3维模型, 用3维时域有限差分方法研究了熔石英后表面该类缺陷对355 nm入射激光的近场调制. 研究表明, 裂纹的调制明显大于气泡或者高斯坑本身, 因此为了抑制修复元件的初始损伤, 应尽量避免任何未修复的裂纹存在, 尤其是与入射光呈夹角约25°的裂纹, 同时应避免尺寸大于5 λ 的气泡存在. 当裂纹或气泡位于近表面层3 λ 以内且靠近修复坑环边缘时, 对场的调制最明显. 随着侧移的增加, 近表面区缺陷诱导场叠加, 强点总数涨落较大且易形成极大峰值, 特别是含有裂纹的情形; 远表面区强点总数逐渐增大并趋于稳定. 随着嵌深的增加, 强点的数目大体呈减弱趋势, 当嵌深大于3 λ 时, 逐渐趋于平缓振荡. 如果裂纹或气泡位于坑点正下方几个波长内, 激光辐照下其效果相当于延长了高斯坑的深度.     

Two localized CO2 laser treatment methods for mitigation of UV damage growth in fused silica

Two methods：high-power,short-time,single-shot irradiation（Method A） and low-power,long-time,multi-shot irradiation（Method B） are investigated to mitigate the UV damage growth in fused silica by using a 10.6-μm CO2 laser.To verify the mitigation effect of the two methods,the laser induced damage thresholds（LIDTs） of the mitigated sites are tested with a 355-nm,6.4-ns Nd：YAG laser,and the light modulation of the mitigation sites are tested with a 351-nm continuous Nd：YLF laser.The mitigated damaged sites treated with the two methods have almost the same LIDTs,which can recover to the level of pristine material.Compared with Method A,Method B produces mitigated sites with low crater depth and weak light modulation.In addition,there is no raised rim or re-deposited debris formed around the crater edge for Method B.Theoretical calculation is utilized to evaluate the central temperature of the CO2 laser beam irradiated zone and the radius of the crater.It is indicated that the calculated results are consistent with the experimental results.     

光学窗口材料激光辐照热-力效应的解析计算研究

建立了高功率连续激光辐照透明光学材料的热力学模型,通过积分变换方法求解三维热传导方程,得出了激光辐照引起的瞬态温度场分布的精确解析解,并在此基础上进一步求得热应力场的瞬态分布。以1.315μm的高能氧碘激光辐照熔石英玻璃为例,计算了熔石英在激光辐照下的温度场与热应力场分布,分析了其激光损伤机理。研究结果表明由于熔石英具有优良的热稳定性,温度不均匀分布所产生的热应力相对较小,激光损伤主要是受辐照区域温度值超过材料熔点发生熔融破坏。理论分析结果与相关的实验结论一致,说明所建立激光辐照效应模型的合理性。     

CO2激光扫描辐照修复熔石英表面损伤

采用振镜系统结合10.6 m的CO2激光,对熔石英表面损伤点进行辐照,成功地修复了直径500 m的大尺寸损伤点,损伤修复后表面无烧蚀残留,损伤内部完全愈合,无气泡和残余裂纹。和定点修复方式相比,这种修复具有修复尺度大、面形影响区域小、应力分布范围小的优势。80%扫描辐照修复的损伤点的初始损伤阈值恢复甚至超过了基底的初始损伤阈值。     

熔石英表面热致应力对激光损伤行为影响的研究

为了研究热致应力对光学元件损伤特性的影响,通过实验测试退火处理消除热应力和未消热应力石英基片的激光损伤特性,研究了热致应力对石英元件初始损伤阈值、损伤增长阈值以及损伤增长规律的影响.结果表明,热致应力对熔石英光学元件的初始损伤阈值有影响,初始损伤阈值随着热致应力增大而降低;热致应力会加剧激光引发的损伤增长,相同的激光通量下,表面应力越大的区域拥有越高的损伤增长因子,但损伤增长仍遵从指数增长规律.热致应力对损伤增长阈值没有明显的影响.本文的研究将为CO2激光预处理工艺能否被应用于大口径光学元件提供一个必要的技术参考.     

激光诱导熔石英表面损伤修复中的气泡形成和控制研究

基于熔石英材料在CO_2激光作用下的温度分布和结构参数变化的计算结果,对熔石英损伤修复中的气泡形成和控制进行了研究.针对损伤尺寸介于150—250μm之间的损伤点,提出了一种能够有效控制气泡形成的长时间低温预热修复方法.基于低温下熔石英材料结构弛豫时间常数较长的特点,该方法在不引起熔石英材料结构发生显著变化的同时,能够解吸附表面和裂纹处所附着的气体和杂质,可有效降低裂纹闭合过程中气泡形成的概率.实验结果表明,长时间低温预热修复方法的成功修复概率可达到98%.     

横向划痕对光场调制的近场模拟

熔石英亚表面划痕对入射激光的近场调制是导致光学元件低阈值损伤的主要因素之一. 用三维时域有限差分方法研究了连续横向划痕的近场分布, 对比了尖锐截面与光滑截面场调制的差异, 着重探讨了光场调制与划痕宽深比R的关系. 研究表明: 酸蚀后的光滑截面有助于减弱近场调制, 这类划痕的R>10.0时调制较弱且相互接近, R<5.0时调制显著增强. 当R取1---3时, 亚表面的调制达最大值, 最大电场幅值为入射波幅值的4.3倍. 当R取1.0---3.5时, 缺陷附近有80%以上取样点的最大电场幅值超过入射波幅值的2倍. 随着深度的增大, 强场区具有明显的"趋肤效应": 位于划痕正下方的强场区首先往左右两侧移动, 然后移向抛物口界面以及水平界面, 同时衍生出的多条增强线诱导整个亚表面层的光场增强.     

Irradiation effects of CO2 laser parameters on surface morphology of fused silica

To understand the surface morphology evolution of fused silica induced by 10.6-μm CO2 laser irradiation at different parameters,this paper reports that optical microscopy,profilometry,and hydrophilicity tests are utilized to characterize the surface structure and roughness of the laser irradiated area. The results show that three typical surface morphologies and two typical hydrophilicity test images are observed at different laser powers and pulse durations. The correlations between surface temperature and surface morphology as well as hydrophilicity behaviours are presented. The different hydrophilicity behaviours are related to surface structures of the laser-induced crater and thermal diffusion area. The thermal diffusion length monotonously increases with increasing laser power and pulse duration. The crater width is almost determined by the laser beam size. The crater depth is more sensitive to the laser power and pulse duration than the crater width.     

熔石英亚表面缺陷附近光强分布的数值模拟

 熔石英亚表面缺陷对光场的调制是导致激光辐照场破坏的主要因素。采用有限元方法对熔石英亚表面缺陷（平面和锥形划痕）周围的光强分布进行了数值模拟。结果表明：划痕形状、几何尺寸、方位角、光的入射角等是影响划痕周围光强分布的主要因素;前表面划痕对光强的增强效果比后表面弱;在理想形状的划痕截面和表面同时发生内全反射时,平面划痕周围的光强增强效果明显。锥形划痕周围的光强分布为正确解释交叉划痕的夹角平分线附近的损伤提供了理论依据。     

高功率脉冲电子束辐照SiO$lt;sub$gt;2$lt;/sub$gt;的光学和激光损伤性能

研究了不同剂量的60 kW高功率脉冲电子束辐照对高纯熔石英玻璃的微观结构、光学性能和激光损伤特性的影响规律. 光学显微图像表明, 辐照后熔石英样品由于热效应导致表面破裂, 裂纹密度和尺寸随辐照剂量增加而增大, 采用原子力显微镜分析表面裂纹的微观形貌, 裂纹宽度约1 um, 同时样品表面分布着大量尺寸约0.1–1μm的碎片颗粒. 吸收光谱测试表明, 所有样品均在394 nm处出现微弱的吸收峰, 吸收强度随着电子束辐照剂量增大呈现先增加后减小的趋势. 荧光光谱测试发现辐照前后样品均有3个荧光带, 分别位于460, 494和520 nm, 荧光强度随辐照剂量的变化趋势与吸收光谱一致. 利用355 nm激光研究了不同剂量电子束辐照对熔石英激光损伤阈值的影响, 结果表明熔石英的损伤阈值随着辐照剂量的增加而降低. 在剂量较低时, 导致熔石英激光损伤阈值下降的原因主要是色心缺陷; 剂量较高时, 导致损伤阈值降低的原因主要是样品表面产生的大量微裂纹和碎片颗粒对激光的调制和吸收. 关键词： 熔石英 电子束辐照 色心 激光损伤阈值     

Study on incident laser modulation using surface micro-defects on KH₂PO₄ crystal

KH2PO4 crystal is a crucial optical component of inertial confinement fusion.Modulation of an incident laser by surface micro-defects will induce the growth of surface damage,which largely restricts the enhancement of the laser induced damage threshold.The modulation of an incident laser by using different kinds of surface defects are simulated by employing the three-dimensional finite-difference time-domain method.The results indicate that after the modulation of surface defects,the light intensity distribution inside the crystal is badly distorted,with the light intensity enhanced symmetrically.The relations between modulation properties and defect geometries(e.g.,width,morphology,and depth of defects) are quite different for different defects.The modulation action is most obvious when the width of surface defects reaches 1.064 μm.For defects with smooth morphology,such as spherical pits,the degree of modulation is the smallest and the light intensity distribution seems relatively uniform.The degree of modulation increases rapidly with the increase of the depth of surface defects and becomes stable when the depth reaches a critical value.The critical depth is 1.064 μm for cuboid pits and radial cracks,while for ellipsoidal pits the value depends on both the width and the length of the defects.