裂纹或气泡对熔石英损伤修复坑场调制的近场模拟

建立了含有裂纹或气泡的高斯型修复坑的3维模型, 用3维时域有限差分方法研究了熔石英后表面该类缺陷对355 nm入射激光的近场调制. 研究表明, 裂纹的调制明显大于气泡或者高斯坑本身, 因此为了抑制修复元件的初始损伤, 应尽量避免任何未修复的裂纹存在, 尤其是与入射光呈夹角约25°的裂纹, 同时应避免尺寸大于5 λ 的气泡存在. 当裂纹或气泡位于近表面层3 λ 以内且靠近修复坑环边缘时, 对场的调制最明显. 随着侧移的增加, 近表面区缺陷诱导场叠加, 强点总数涨落较大且易形成极大峰值, 特别是含有裂纹的情形; 远表面区强点总数逐渐增大并趋于稳定. 随着嵌深的增加, 强点的数目大体呈减弱趋势, 当嵌深大于3 λ 时, 逐渐趋于平缓振荡. 如果裂纹或气泡位于坑点正下方几个波长内, 激光辐照下其效果相当于延长了高斯坑的深度.     

Numerical simulation of the modulation to incident laser by the repaired damage site in a fused silica subsurface

One of the main factors of laser induced damage is the modulation to incident laser which is caused by the defect in the subsurface of the fused silica.In this work,the repaired damage site irradiated by CO 2 laser is simplified to a Gaussian rotation according to the corresponding experimental results.Then,the three-dimensional finite-difference time-domain method is employed to simulate the electric field intensity distribution in the vicinity of this kind of defect in fused silica front subsurface.The simulated results show that the modulation is notable,the E max is about 2.6 times the irradiated electric field intensity in the fused silica with the damage site (the width is 1.5 μm and depth is 2.3 μm) though the damage site is repaired by CO 2 laser.The phenomenon and the theoretical result of the annular laser enhancement existed on the rear surface are first verified effectively,which agrees well with the corresponding experimental results.The relations between the maximal electric field intensity in fused silica with defect depth and width are given respectively.Meanwhile,the corresponding physical mechanism is analysed theoretically in detail.     

退火参数对熔石英透射波前和损伤阈值的影响

 采用高温退火技术去除熔石英元件表面由于CO2激光修复带来的残余应力,研究了退火环境对元件的表面污染,分析了不同退火温度（600～900 ℃）和保温时间（3～10 h）对于元件残余应力、透射波前、表面粗糙度和激光损伤阈值的影响。结果表明:在800 ℃以下,高温退火10 h可有效去除CO₂激光修复带来的残余应力,对元件的透射波前和表面粗糙度无明显影响;石英保护盒能有效减少退火环境对元件表面产生的污染,但仍有X射线光电子能谱检测不到的表面污染物存在;在退火后采用质量分数为1%的HF刻蚀15 min,激光损伤阈值可恢复,同时元件透射波前和表面粗糙度并无明显的增加。     

Irradiation effects of CO2 laser parameters on surface morphology of fused silica

To understand the surface morphology evolution of fused silica induced by 10.6-μm CO2 laser irradiation at different parameters,this paper reports that optical microscopy,profilometry,and hydrophilicity tests are utilized to characterize the surface structure and roughness of the laser irradiated area. The results show that three typical surface morphologies and two typical hydrophilicity test images are observed at different laser powers and pulse durations. The correlations between surface temperature and surface morphology as well as hydrophilicity behaviours are presented. The different hydrophilicity behaviours are related to surface structures of the laser-induced crater and thermal diffusion area. The thermal diffusion length monotonously increases with increasing laser power and pulse duration. The crater width is almost determined by the laser beam size. The crater depth is more sensitive to the laser power and pulse duration than the crater width.