Two localized CO₂ laser treatment methods for mitigation of UV damage growth in fused silica

Two methods:high-power,short-time,single-shot irradiation(Method A) and low-power,long-time,multi-shot irradiation(Method B) are investigated to mitigate the UV damage growth in fused silica by using a 10.6-μm CO2 laser.To verify the mitigation effect of the two methods,the laser induced damage thresholds(LIDTs) of the mitigated sites are tested with a 355-nm,6.4-ns Nd:YAG laser,and the light modulation of the mitigation sites are tested with a 351-nm continuous Nd:YLF laser.The mitigated damaged sites treated with the two methods have almost the same LIDTs,which can recover to the level of pristine material.Compared with Method A,Method B produces mitigated sites with low crater depth and weak light modulation.In addition,there is no raised rim or re-deposited debris formed around the crater edge for Method B.Theoretical calculation is utilized to evaluate the central temperature of the CO2 laser beam irradiated zone and the radius of the crater.It is indicated that the calculated results are consistent with the experimental results.     

Mitigation of laser damage growth in fused silica by using a non-evaporative technique

A non-evaporative technique is used to mitigate damage sites with lateral sizes in a range from 50 μm to 400 μm and depths smaller than 100 μm.The influence of the pulse frequency of a CO 2 laser on the mitigation effect is studied.It is found that a more symmetrical and smooth mitigation crater can be obtained by increasing the laser pulse frequency form 0.1 to 20 kHz.Furthermore,the sizes of laser-affected and distorted zones decrease with the increase of the laser pulse frequency,leading to less degradation of the wave-front quality of the conditioned sample.The energy density of the CO 2 laser beam is introduced for selecting the mitigation parameters.The damage sites can be successfully mitigated by increasing the energy density in a ramped way.Finally,the laser-induced damage threshold(LIDT) of the mitigated site is tested using 355 nm laser beam with a small spot(0.23 mm 2) and a large spot(3.14 mm 2),separately.It is shown that the non-evaporative mitigation technique is a successful method to stop damage re-initiation since the average LIDTs of mitigated sites tested with small or large laser spots are higher than that of pristine material.     

Incident laser modulation of a repaired damage site with a rim in fused silica rear subsurface

Local CO2 laser treatment has proved to be an effective method to prevent the 351-nm laser-induced damage sites in a fused silica surface from exponentially growing, which is responsible for limiting the lifetime of optics in high fluence laser systems. However, the CO2 laser induced ablation crater is often surrounded by a raised rim at the edge, which can also result in the intensification of transmitted ultraviolet light that may damage the downstream optics. In this work, the three-dimensional finite-difference time-domain method is developed to simulate the distribution of electrical field intensity in the vicinity of the CO2 laser mitigated damage site located in the exit subsurface of fused silica. The simulated results show that the repaired damage sites with raised rims cause more notable modulation to the incident laser than those without rims. Specifically, we present a theoretical model of using dimpled patterning to control the rim structure around the edge of repaired damage sites to avoid damage to downstream optics. The calculated results accord well with previous experimental results and the underlying physical mechanism is analysed in detail.     

Influence of secondary treatment with CO_2 laser irradiation for mitigation site on fused silica surface

The ablation debris and raised rim, as well as residual stress and deep crater will be formed during the mitigation of damage site with a CO2 laser irradiation on fused silica surface, which greatly affects the laser damage resistance of optics. In this study, the experimental study combined with numerical simulation is utilized to investigate the effect of the secondary treatment on a mitigated site by CO_2 laser irradiation. The results indicate that the ablation debris and the raised rim can be completely eliminated and the depth of crater can be reduced. Notable results show that the residual stress of the mitigation site after treatment will reduce two-thirds of the original stress. Finally, the elimination and the controlling mechanism of secondary treatment on the debris and raised rim, as well as the reasons for changing the profile and stress are analyzed. The results can provide a reference for the optimization treatment of mitigation sites by CO_2 laser secondary treatment.     

激光诱导熔石英表面损伤修复中的气泡形成和控制研究

基于熔石英材料在CO_2激光作用下的温度分布和结构参数变化的计算结果,对熔石英损伤修复中的气泡形成和控制进行了研究.针对损伤尺寸介于150—250μm之间的损伤点,提出了一种能够有效控制气泡形成的长时间低温预热修复方法.基于低温下熔石英材料结构弛豫时间常数较长的特点,该方法在不引起熔石英材料结构发生显著变化的同时,能够解吸附表面和裂纹处所附着的气体和杂质,可有效降低裂纹闭合过程中气泡形成的概率.实验结果表明,长时间低温预热修复方法的成功修复概率可达到98%.     

Surface evolution and laser damage resistance of CO2 laser irradiated area of fused silica

A 10.6 μm CO₂ laser has been reported to effectively mitigate the laser damage growth of fused silica. Two zones of the laser irradiated area are defined in this work: the distorted zone and the laser affected zone. The parameters of the two zones are studied at different CO₂ laser beam sizes, irradiation times, and powers by microscopy, profilometry, and photoelastic method. The results show that the diameter of laser affected zone is almost completely determined by the laser beam size and the distorted zone is associated with the mitigation range of CO₂ laser beam. The diameter and depth of the distorted zone increase as the laser power and irradiation time increase. The depth grows exponentially depending on the irradiation time. The maximum residual stress discrepancy is located near the boundary of the laser affected zone. The laser damage resistance test results show that the distorted zone and the laser affected zone have a better damage resistance than the original substrate.     

预处理对355nm激光作用下熔石英损伤增长的影响

测试了经化学蚀刻、紫外激光预处理及其共同处理后的熔石英355 nm激光损伤阈值;研究了处理前后其损伤斑面积随激光辐照脉冲数的增长情况。结果表明,处理后熔石英355 nm激光损伤阈值得到了提高,且损伤斑面积增长变慢。利用CO2激光对熔石英表面损伤点进行了修复处理,修复后的损伤点R-on-1抗损伤阈值和基底阈值相当,损伤增长得到有效抑制。     

The thermal effect in diode-end-pumped continuous-wave 914-nm Nd:YVO4 laser

The thermal effect and the heat generation in diode-end-pumped continuous-wave 914-nm Nd:YVO₄ lasers are investigated in detail. A theoretical model of a diode end-pumped solid-state laser is constructed to analyse the influence of fractional thermal loading on the thermal effect in the Nd:YVO₄ laser based on finite element analysis. The thermal focal lengths and the end-surface deformations of laser rods in Nd:YVO₄ quasi-three-level and four-level lasers are measured and compared with the results obtained by ordinary interferometry for the demonstration of higher thermal loading in 914-nm laser. Finally the fractional thermal loading in the Nd:YVO₄ quasi-three-level laser is calculated by matching the experimental and the simulated end deformations.     

Irradiation effects of CO2 laser parameters on surface morphology of fused silica

To understand the surface morphology evolution of fused silica induced by 10.6-μm CO2 laser irradiation at different parameters,this paper reports that optical microscopy,profilometry,and hydrophilicity tests are utilized to characterize the surface structure and roughness of the laser irradiated area. The results show that three typical surface morphologies and two typical hydrophilicity test images are observed at different laser powers and pulse durations. The correlations between surface temperature and surface morphology as well as hydrophilicity behaviours are presented. The different hydrophilicity behaviours are related to surface structures of the laser-induced crater and thermal diffusion area. The thermal diffusion length monotonously increases with increasing laser power and pulse duration. The crater width is almost determined by the laser beam size. The crater depth is more sensitive to the laser power and pulse duration than the crater width.     

Lasers for materials processing: specifications and trends

An overview is given of the types of lasers dominating the field of laser materials processing. The most prominent lasers in this field are the CO₂ and the Nd: YAG laser. The domain of CO₂ lasers is applications which demand high laser powers (up to 30 kW are available at present), whereas the domain of Nd:YAG lasers is micro-machining applications. In the kilowatt range of laser output power, the two types of lasers are in competition. New diffusion-cooled CO₂ laser systems are capable of output laser powers of several kilowatts, with good beam qualities, while still being quite compact. The output power and beam quality of Nd:YAG lasers has been improved in recent years, so that Nd:YAG lasers are now an alternative to CO₂ lasers even in the kilowatt range. This is especially true for applications that demand optical fibre transmission of the laser beam, which is possible with Nd:YAG laser light but not with the longerwavelength light emitted by CO₂ lasers. The main problem in solid-state lasers such as Nd:YAG is the thermal lensing effect and damage due to thermal stresses. In order to reduce thermal loading, cooling has to be enhanced. Several alternative geometries have been proposed to reduce thermal loading and, by this, thermal lensing effects. There are now slab and tube geometries which allow much higher output powers than the conventionally used laser rods. A very new scheme proposes a thin slab whose cooled side is also used as one of the laser mirrors, so that thermal gradients occur mainly in the direction of the beam propagation and not perpendicular to it, as is the case in the other geometries. As well as CO₂ and Nd:YAG lasers, semiconductor laser diodes are very promising for direct use of the emitted light or as pump sources for Nd:YAG and other solid-state lasers. When packaging together thousands of single laser diodes, output powers of several kilowatts can be realized. Major problems are collimation of the highly divergent laser beams and cooling of the laser diode bars.     

Compact, efficient diode-end-pumped Nd:GdVO4 slab continuous-wave 912-nm laser

A fiber-coupled laser-diode (LD) end-pumped Nd:GdVO₄ slab continuous-wave (CW) 912-nm laser and an LD bar end-pumped Nd:GdVO₄ slab CW 912-nm laser are both demonstrated in this paper. Using the fiber-coupled LD of end-pumped type, a highest CW 912-nm laser output power of 10.17 W is obtained with a high optical-to-optical conversion efficiency of 24.6% and a slope efficiency of 34.5%. The measured M² factors of beam quality in x and y directions are 5.3 and 5.1, respectively. Besides, an LD bar of end-pumped type is used to realize CW 912-nm laser output, which has the advantages of compactness and low cost. When the pump power is 38.8 W, the output power is 8.87 W and the measured M² factors of beam quality in x and y directions are 16 and 1.31, respectively. In order to improve the beam quality of the 912-nm laser at x direction, a new quasi-concentric laser resonator will be designed, and an LD bar end-pumped Nd:GdVO₄ slab high-power CW 912-nm TEM₀₀ laser will be realized in the future.     

熔石英损伤修复坑下游光场调制的数值模拟与实验研究

系统研究了熔石英激光损伤修复后的形貌特征,根据测量数据建立了典型的损伤修复坑三维模型,利用标量衍射理论并结合快速傅里叶变换算法研究了修复坑在351 nm激光辐照下游光场调制的分布规律.研究表明,修复坑引起的光场调制会使得下游不同距离位置处出现环形光场增强区和轴上位置光场增强点;环形光场增强区位置距离修复元件较近,其环形调制极大值主要受修复坑深度的影响,且随修复坑深度的增大而逐渐增加;轴上位置光场增强点位置距离修复元件较远,其轴上调制极大值主要受修复坑边缘凸起高度的影响,且随凸起高度的增大而快速增加;环形调制极大值或轴上调制极大值增大的同时,其分布位置与修复元件之间的距离均会逐渐减小.实验验证表明,利用三维修复坑模型得到的下游光场调制数值模拟结果与实验测量结果具有较好的一致性.本研究结果对控制熔石英元件损伤修复形貌特征以抑制调制增强效应给出了具体的控制方向,对修复工艺的改进与完善提供了非常有意义的参考.     

熔石英表面损伤修复点的损伤概率

针对3个光斑尺寸的CO2激光辐照尺寸小于400 m损伤点后得到的修复点,从4个方面对损伤修复点经355 nm激光辐照后的损伤概率分别进行研究。结果表明,根据修复光斑尺寸或损伤点尺寸分别讨论修复点的损伤概率,更能反映修复点的抗激光损伤能力。通过分别讨论可以看出,采用小光斑CO2激光辐照损伤点或者修复尺寸小于200 m的损伤点,修复成功率超过90%。同时,可以通过损伤修复点的激光损伤阈值都服从正态分布的规律来预测修复点的损伤概率。     

半导体的CO2激光退火和合金化

本文主要研究连续CO₂激光对半导体的照射效应。实验结果与理论分析说明,用连续CO₂激光照射可将半导体样片加热到所需的温度。与其它短波长的激光不同,波长为10.6μm的连续CO₂激光照射半导体有如下特点:CO₂激光是借助于自由载流子吸收与半导体耦合;样片在深度方向被均匀加热;激光背面照射可以增强退火效果。连续CO₂激光照射可以固相外延再生长的方式使As离子注入Si的损伤层退火恢复。在再生长的过程中注入的As离子进入替位,电激活率很高,而且不发生杂质再分布。将连续CO₂激光背面照射成功地应用于GaAsFET制备欧姆接触,既可避免激光正面照射对器件结构的破坏,又能得到比热退火为好的电学性能。 关键词：     

Validity of reciprocity rule on mouse skin thermal damage due to CO2 laser irradiation

CO₂ laser (10.6 μm) is a well-known infrared coherent light source as a tool in surgery. At this wavelength there is a high absorbance coefficient (860 cm^?1), because of vibration mode resonance of H₂O molecules. Therefore, the majority of the irradiation energy is absorbed in the tissue and the temperature of the tissue rises as a function of power density and laser exposure duration. In this work, the tissue damage caused by CO₂ laser (1–10 W, ～40–400 W cm^?2, 0.1–6 s) was measured using 30 mouse skin samples. Skin damage assessment was based on measurements of the depth of cut, mean diameter of the crater and the carbonized layer. The results show that tissue damage as assessed above parameters increased with laser fluence and saturated at 1000 J cm^?2. Moreover, the damage effect due to high power density at short duration was not equivalent to that with low power density at longer irradiation time even though the energy delivered was identical. These results indicate the lack of validity of reciprocity (Bunsen-Roscoe) rule for the thermal damage.     

Walk-off Compensated 266-nm Generation with Two β-BaB2O4 Crystals

A walk-off compensation arrangement of two β-BaB₂O₄ (BBO) crystals is used to generate 266-nm (4ω) light from 532-nm (2ω) light that is produced by an intracavity frequency-doubled Nd:YAG laser. While this arrangement is effective in terms of conversion efficiency, back conversion from 4ω to 2ω can easily occur in the second BBO when the phase difference between the 2ω and 4ω in the air gap between the two crystals shifts to ϖ. Performance characteristics are discussed here with particular reference to the angular bandwidth of the second BBO.     

CO2激光扫描辐照修复熔石英表面损伤

采用振镜系统结合10.6 m的CO2激光,对熔石英表面损伤点进行辐照,成功地修复了直径500 m的大尺寸损伤点,损伤修复后表面无烧蚀残留,损伤内部完全愈合,无气泡和残余裂纹。和定点修复方式相比,这种修复具有修复尺度大、面形影响区域小、应力分布范围小的优势。80%扫描辐照修复的损伤点的初始损伤阈值恢复甚至超过了基底的初始损伤阈值。     

Removal of the indigo color by laser beam–denim interaction

Our experiments show that the laser fading process removes efficiently indigo-dye from denim support. We use the beams from Nd : YAG laser (1064 nm and its second harmonic 532 nm) and CO₂ (10.6 μm) lasers. Different laser pulse parameters were used in order to obtain laser power density and fluency to start the ablation process. The purpose of this work is to determine the change of denim diffuse reflectivity spectra after laser irradiation with different wavelength and different power density. The change of diffuse reflectivity coefficient was up to 17% at 450 nm wavelength (from 8% reflectivity for unirradiated denim).     

Surface damage morphology investigations of silicon under millisecond laser irradiation

The surface damage morphologies of single crystal silicon induced by 1064 nm millisecond Nd:YAG laser are investigated. After irradiation, the damage morphologies of silicon are inspected by optical microscope (OM) and atomic force microscope (AFM). The plasma emission spectra of the damaged region are detected by the spectrometer. It is shown that surface oxidation and nitridation have occurred during the interaction of millisecond laser with silicon. In addition, the damage morphologies induced by 2 ms and 10 ns pulse width laser are compared. The damage morphology obtained by 2 ms laser is an evident crater. Three types of damage morphologies are formed at different laser energy densities. The circular concentric ripples are found surrounding the rim of the crater. The spacing of the ripples is 15 ± 5 μm. Two types of cracks are observed: linear crack and circular crack. The linear crack is observed in the center of the damaged region which propagates to the periphery of the damaged region. The circular crack is located at the rim of the crater. The damage morphology induced by 10 ns laser is surface layer damage. The periodic linear waves are generated due to the interference between the incident beam and the scattered beam. The spacing of the ripples is 1.54 μm which is close to the incident laser wavelength 1.064 μm. The linear crack is located at the center of the damaged region. Furthermore, for the same laser energy density, the dimension of the damaged region and the crater depth induced by 2 ms laser are greater than that of 10 ns laser. It indicates that the damage mechanism under millisecond pulse laser irradiation is strongly different from the case of nanosecond pulse laser.     

Influences of CO2 laser annealing on mechanical and laser-induced damage properties of ZrO2 thin films

Zirconium dioxide (ZrO₂) thin films were deposited on BK7 glass substrates by the electron beam evaporation method. A continuous wave CO₂ laser was used to anneal the ZrO₂ thin films to investigate whether beneficial changes could be produced. After annealing at different laser scanning speeds by CO₂ laser, weak absorption of the coatings was measured by the surface thermal lensing (STL) technique, and then laser-induced damage threshold (LIDT) was also determined. It was found that the weak absorption decreased first, while the laser scanning speed is below some value, then increased. The LIDT of the ZrO₂ coatings decreased greatly when the laser scanning speeds were below some value. A Nomarski microscope was employed to map the damage morphology, and it was found that the damage behavior was defect-initiated both for annealed and as-deposited samples. The influences of post-deposition CO₂ laser annealing on the structural and mechanical properties of the films have also been investigated by X-ray diffraction and ZYGO interferometer. It was found that the microstructure of the ZrO₂ films did not change. The residual stress in ZrO₂ films showed a tendency from tensile to compressive after CO₂ laser annealing, and the variation quantity of the residual stress increased with decreasing laser scanning speed. The residual stress may be mitigated to some extent at proper treatment parameters.